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Heo D, Hur J, Cho H, Cha K, Choi J, Choi M, Hong J, Kim S, Lee S. Nano-Oil-Barrier-Based Fluttering Triboelectric Nanogenerator. ADVANCED SCIENCE (WEINHEIM, BADEN-WURTTEMBERG, GERMANY) 2025:e02278. [PMID: 40391798 DOI: 10.1002/advs.202502278] [Citation(s) in RCA: 0] [Impact Index Per Article: 0] [Reference Citation Analysis] [Abstract] [Key Words] [Grants] [Track Full Text] [Subscribe] [Scholar Register] [Received: 02/06/2025] [Revised: 04/28/2025] [Indexed: 05/22/2025]
Abstract
In the field of triboelectric nanogenerators (TENGs), the application of a thin lubricant layer on the contact surface and its maintenance for long-term cycling remain important challenges for improving the mechanical-electrical stability of TENGs. Herein, a simple and innovative approach is proposed to solve this dilemma using commercial oil-absorbing sheets and oil infusion steps. In particular, a wind-driven nano-oil-barrier-based fluttering triboelectric nanogenerator (NF-TENG) is developed. The nano-oil barrier (of nanoscale thickness) of NF-TENG is thoroughly analyzed using atomic force microscopy imaging and electrical-mechanical measurement/calculation results. Compared with other control groups, only NF-TENG maintains 95% output performance from 100% initial output performance, and device damage is minimized even after 970,000 cycles. The mechanism of NF-TENG and its differences from previous studies are established. NF-TENG is optimized and studied for various design variables and wind speeds. NF-TENG generated a peak power of 468 µW with 100 Hz and an average power of 166 µW at optimum load resistance, under a breeze wind speed of 6 m s-1. NF-TENG demonstrates its applications in two real-life scenarios: 1) wind harvesting at a rooftop vent pipe for outdoor temperature-humidity sensing, and 2) wind harvesting during bicycle riding for safety light illumination.
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Affiliation(s)
- Deokjae Heo
- Center for Systems Biology, Massachusetts General Hospital, Harvard Medical School, Boston, MA, 02114, USA
| | - Jiwoong Hur
- School of Mechanical Engineering, Chung-Ang University, 84, Heukseok-ro, Dongjak-gu, Seoul, 06974, Republic of Korea
| | - Hyeonho Cho
- School of Mechanical Engineering, Chung-Ang University, 84, Heukseok-ro, Dongjak-gu, Seoul, 06974, Republic of Korea
| | - Kyunghwan Cha
- School of Mechanical Engineering, Chung-Ang University, 84, Heukseok-ro, Dongjak-gu, Seoul, 06974, Republic of Korea
| | - Jaeung Choi
- School of Mechanical Engineering, Chung-Ang University, 84, Heukseok-ro, Dongjak-gu, Seoul, 06974, Republic of Korea
| | - Moonhyun Choi
- Center for Systems Biology, Massachusetts General Hospital, Harvard Medical School, Boston, MA, 02114, USA
| | - Jinkee Hong
- Department of Chemical & Biomolecular Engineering, College of Engineering, Yonsei University, 50 Yonsei-ro, Seodaemun-gu, Seoul, 03722, South Korea
| | - Sunghan Kim
- School of Mechanical Engineering, Chung-Ang University, 84, Heukseok-ro, Dongjak-gu, Seoul, 06974, Republic of Korea
| | - Sangmin Lee
- School of Mechanical Engineering, Chung-Ang University, 84, Heukseok-ro, Dongjak-gu, Seoul, 06974, Republic of Korea
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2
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Jiao D, Gu S, Cheng L, Li S, Liu C. Flexible, self-healing and portable supramolecular visualization smart sensors for monitoring and quantifying structural damage. MATERIALS HORIZONS 2025; 12:190-204. [PMID: 39431720 DOI: 10.1039/d4mh01233j] [Citation(s) in RCA: 0] [Impact Index Per Article: 0] [Reference Citation Analysis] [Abstract] [Track Full Text] [Subscribe] [Scholar Register] [Indexed: 10/22/2024]
Abstract
Visually monitoring micro-crack initiation and corrosion failure evolution is crucial for early diagnosis of structural health and ensuring safe operation of infrastructures. However, existing damage detecting approaches are subject to the limited-detection of heterogeneous structures, intolerance of harsh environments, and challenge of quantitative analysis, impeding applications in structural health monitoring (SHM). Herein, we present a stretchable, semi-quantitative, instrument-free, supramolecular SHM sensor by integrating a polyurea elastomer with sensitive corrosion-probes, enabling localized corrosion monitoring and quantification of failure dynamics. Initially, a correlation between visual monitoring signals and structural health status is proposed, and sensor-based image processing software that accurately quantifies structural failure indicators (crack scale, corrosion reactivity and deterioration status) is proposed. Moreover, this sensor can be fabricated as multiple derivatives: a coating or patch covered on metallic substrates and an ionic-responsive test strip, ensuring real-time detection of the initiation of pitting, degradation events of metallic components and convenient monitoring of ion concentrations in corrosive media. Furthermore, the inherent geometric plasticity and dynamic hydrogen-bonded network validates the reliability for heterogeneous components and stability under extreme environments of sensors. This portable, smart SHM strategy established the channel-transformation model from corrosion dynamics to visual signals, exhibiting prospects for structural monitoring in offshore energy-harvesting equipment.
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Affiliation(s)
- Dezhi Jiao
- College of Materials Science and Engineering, Shandong University of Science and Technology, Qingdao 266590, China.
| | - Sihan Gu
- College of Materials Science and Engineering, Shandong University of Science and Technology, Qingdao 266590, China.
| | - Li Cheng
- Laboratory of Advanced Rubber Material, Ministry of Education (Type B), Qingdao University of Science and Technology, Qingdao 266042, China
| | - Shuoqi Li
- College of Materials Science and Engineering, Shandong University of Science and Technology, Qingdao 266590, China.
| | - Chengbao Liu
- College of Materials Science and Engineering, Shandong University of Science and Technology, Qingdao 266590, China.
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Li Y, Luo Y, Deng H, Shi S, Tian S, Wu H, Tang J, Zhang C, Zhang X, Zha JW, Xiao S. Advanced Dielectric Materials for Triboelectric Nanogenerators: Principles, Methods, and Applications. ADVANCED MATERIALS (DEERFIELD BEACH, FLA.) 2024; 36:e2314380. [PMID: 38517171 DOI: 10.1002/adma.202314380] [Citation(s) in RCA: 19] [Impact Index Per Article: 19.0] [Reference Citation Analysis] [Abstract] [Key Words] [Grants] [Track Full Text] [Subscribe] [Scholar Register] [Received: 12/31/2023] [Revised: 03/06/2024] [Indexed: 03/23/2024]
Abstract
Triboelectric nanogenerator (TENG) manifests distinct advantages such as multiple structural selectivity, diverse selection of materials, environmental adaptability, low cost, and remarkable conversion efficiency, which becomes a promising technology for micro-nano energy harvesting and self-powered sensing. Tribo-dielectric materials are the fundamental and core components for high-performance TENGs. In particular, the charge generation, dissipation, storage, migration of the dielectrics, and dynamic equilibrium behaviors determine the overall performance. Herein, a comprehensive summary is presented to elucidate the dielectric charge transport mechanism and tribo-dielectric material modification principle toward high-performance TENGs. The contact electrification and charge transport mechanism of dielectric materials is started first, followed by introducing the basic principle and dielectric materials of TENGs. Subsequently, modification mechanisms and strategies for high-performance tribo-dielectric materials are highlighted regarding physical/chemical, surface/bulk, dielectric coupling, and structure optimization. Furthermore, representative applications of dielectric materials based TENGs as power sources, self-powered sensors are demonstrated. The existing challenges and promising potential opportunities for advanced tribo-dielectric materials are outlined, guiding the design, fabrication, and applications of tribo-dielectric materials.
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Affiliation(s)
- Yi Li
- State Key Laboratory of Power Grid Environmental Protection, School of Electrical Engineering and Automation, Wuhan University, Wuhan, Hubei, 430072, China
| | - Yi Luo
- Beijing International S&T Cooperation Base for Plasma Science and Energy Conversion, Institute of Electrical Engineering, Chinese Academy of Sciences, Beijing, 100190, China
| | - Haocheng Deng
- State Key Laboratory of Power Grid Environmental Protection, School of Electrical Engineering and Automation, Wuhan University, Wuhan, Hubei, 430072, China
| | - Shengyao Shi
- State Key Laboratory of Power Grid Environmental Protection, School of Electrical Engineering and Automation, Wuhan University, Wuhan, Hubei, 430072, China
| | - Shuangshuang Tian
- Hubei Engineering Research Center for Safety Monitoring of New Energy and Power Grid Equipment, Hubei University of Technology, Wuhan, Hubei, 430068, China
| | - Haoying Wu
- State Key Laboratory of Power Grid Environmental Protection, School of Electrical Engineering and Automation, Wuhan University, Wuhan, Hubei, 430072, China
| | - Ju Tang
- State Key Laboratory of Power Grid Environmental Protection, School of Electrical Engineering and Automation, Wuhan University, Wuhan, Hubei, 430072, China
| | - Cheng Zhang
- Beijing International S&T Cooperation Base for Plasma Science and Energy Conversion, Institute of Electrical Engineering, Chinese Academy of Sciences, Beijing, 100190, China
| | - Xiaoxing Zhang
- Hubei Engineering Research Center for Safety Monitoring of New Energy and Power Grid Equipment, Hubei University of Technology, Wuhan, Hubei, 430068, China
| | - Jun-Wei Zha
- Beijing Advanced Innovation Center for Materials Genome Engineering, School of Chemistry and Biological Engineering, University of Science and Technology Beijing, Beijing, 100083, China
| | - Song Xiao
- State Key Laboratory of Power Grid Environmental Protection, School of Electrical Engineering and Automation, Wuhan University, Wuhan, Hubei, 430072, China
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Li J, Shi Y, Chen J, Huang Q, Ye M, Guo W. Flexible Self-Powered Low-Decibel Voice Recognition Mask. SENSORS (BASEL, SWITZERLAND) 2024; 24:3007. [PMID: 38793860 PMCID: PMC11124924 DOI: 10.3390/s24103007] [Citation(s) in RCA: 1] [Impact Index Per Article: 1.0] [Reference Citation Analysis] [Abstract] [Key Words] [Track Full Text] [Subscribe] [Scholar Register] [Received: 03/26/2024] [Revised: 04/22/2024] [Accepted: 04/23/2024] [Indexed: 05/26/2024]
Abstract
In environments where silent communication is essential, such as libraries and conference rooms, the need for a discreet means of interaction is paramount. Here, we present a single-electrode, contact-separated triboelectric nanogenerator (CS-TENG) characterized by robust high-frequency sensing capabilities and long-term stability. Integrating this TENG onto the inner surface of a mask allows for the capture of conversational speech signals through airflow vibrations, generating a comprehensive dataset. Employing advanced signal processing techniques, including short-time Fourier transform (STFT), Mel-frequency cepstral coefficients (MFCC), and deep learning neural networks, facilitates the accurate identification of speaker content and verification of their identity. The accuracy rates for each category of vocabulary and identity recognition exceed 92% and 90%, respectively. This system represents a pivotal advancement in facilitating secure and efficient unobtrusive communication in quiet settings, with promising implications for smart home applications, virtual assistant technology, and potential deployment in security and confidentiality-sensitive contexts.
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Affiliation(s)
- Jianing Li
- Department of Physics, College of Physical Science and Technology, Research Institution for Biomimetics and Soft Matter, Xiamen University, Xiamen 361005, China; (J.L.); (Y.S.); (J.C.); (Q.H.); (M.Y.)
| | - Yating Shi
- Department of Physics, College of Physical Science and Technology, Research Institution for Biomimetics and Soft Matter, Xiamen University, Xiamen 361005, China; (J.L.); (Y.S.); (J.C.); (Q.H.); (M.Y.)
| | - Jianfeng Chen
- Department of Physics, College of Physical Science and Technology, Research Institution for Biomimetics and Soft Matter, Xiamen University, Xiamen 361005, China; (J.L.); (Y.S.); (J.C.); (Q.H.); (M.Y.)
| | - Qiaoling Huang
- Department of Physics, College of Physical Science and Technology, Research Institution for Biomimetics and Soft Matter, Xiamen University, Xiamen 361005, China; (J.L.); (Y.S.); (J.C.); (Q.H.); (M.Y.)
- Jiujiang Research Institute, Xiamen University, Jiujiang 332000, China
| | - Meidan Ye
- Department of Physics, College of Physical Science and Technology, Research Institution for Biomimetics and Soft Matter, Xiamen University, Xiamen 361005, China; (J.L.); (Y.S.); (J.C.); (Q.H.); (M.Y.)
| | - Wenxi Guo
- Department of Physics, College of Physical Science and Technology, Research Institution for Biomimetics and Soft Matter, Xiamen University, Xiamen 361005, China; (J.L.); (Y.S.); (J.C.); (Q.H.); (M.Y.)
- Jiujiang Research Institute, Xiamen University, Jiujiang 332000, China
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Xiao S, Wu H, Li N, Tan X, Deng H, Zhang X, Tang J, Li Y. Triboelectric Mechanism of Oil-Solid Interface Adopted for Self-Powered Insulating Oil Condition Monitoring. ADVANCED SCIENCE (WEINHEIM, BADEN-WURTTEMBERG, GERMANY) 2023; 10:e2207230. [PMID: 36825678 PMCID: PMC10161025 DOI: 10.1002/advs.202207230] [Citation(s) in RCA: 7] [Impact Index Per Article: 3.5] [Reference Citation Analysis] [Abstract] [Key Words] [Grants] [Track Full Text] [Subscribe] [Scholar Register] [Received: 12/06/2022] [Revised: 01/29/2023] [Indexed: 05/06/2023]
Abstract
The liquid-solid contact electrification mechanism has been explored in the aqueous solution system, but there are few systematic studies on oil-solid triboelectrification. Herein, an oil droplet triboelectric nanogenerator (Oil-droplet TENG) is designed as the probe to investigate the charge transfer properties at oil-solid interface. The charge transfer kinetics process is disclosed by the electrical signals produced, showing that the electron species initially predominated the oil-solid triboelectrification. The molecular structure and electronic properties of oil also affect triboelectric performance. Further, the charge transfer principle in multi-component liquid mixture during the electric double layer (EDL) development process is proposed to explain the component competition effect. As a proof of concept, a tubular-TENG is designed as a self-powered sensor for transformer oil trace water detection. The device demonstrates high water sensitivity with a detection limit of 10 µL L-1 and a response range of 10-100 µL L-1 . This work not only reveals the oil-solid triboelectric and charge transfer competition mechanism in EDL, but also open up a new channel for real-time online monitoring of trace water in transformer oil, which holds promise for information perception and intelligent operation of transformers in the power industry.
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Affiliation(s)
- Song Xiao
- School of Electrical Engineering and Automation, Wuhan University, Wuhan, Hubei, 430072, China
| | - Haoying Wu
- School of Electrical Engineering and Automation, Wuhan University, Wuhan, Hubei, 430072, China
| | - Nan Li
- State Grid Tianjin Electric Power Research Institute, Tianjin, 300392, China
| | - Xiangyu Tan
- Electric Power Research Institute, Yunnan Power Grid Co., Ltd., Kunming, Yunnan, 650217, China
| | - Haocheng Deng
- School of Electrical Engineering and Automation, Wuhan University, Wuhan, Hubei, 430072, China
| | - Xiaoxing Zhang
- Hubei Engineering Research Center for Safety Monitoring of New Energy and Power Grid Equipment, Hubei University of Technology, Wuhan, Hubei, 430068, China
| | - Ju Tang
- School of Electrical Engineering and Automation, Wuhan University, Wuhan, Hubei, 430072, China
| | - Yi Li
- School of Electrical Engineering and Automation, Wuhan University, Wuhan, Hubei, 430072, China
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Cao X, Xiong Y, Sun J, Xie X, Sun Q, Wang ZL. Multidiscipline Applications of Triboelectric Nanogenerators for the Intelligent Era of Internet of Things. NANO-MICRO LETTERS 2022; 15:14. [PMID: 36538115 PMCID: PMC9768108 DOI: 10.1007/s40820-022-00981-8] [Citation(s) in RCA: 46] [Impact Index Per Article: 15.3] [Reference Citation Analysis] [Abstract] [Key Words] [Track Full Text] [Subscribe] [Scholar Register] [Received: 09/19/2022] [Accepted: 11/04/2022] [Indexed: 06/02/2023]
Abstract
In the era of 5G and the Internet of things (IoTs), various human-computer interaction systems based on the integration of triboelectric nanogenerators (TENGs) and IoTs technologies demonstrate the feasibility of sustainable and self-powered functional systems. The rapid development of intelligent applications of IoTs based on TENGs mainly relies on supplying the harvested mechanical energy from surroundings and implementing active sensing, which have greatly changed the way of human production and daily life. This review mainly introduced the TENG applications in multidiscipline scenarios of IoTs, including smart agriculture, smart industry, smart city, emergency monitoring, and machine learning-assisted artificial intelligence applications. The challenges and future research directions of TENG toward IoTs have also been proposed. The extensive developments and applications of TENG will push forward the IoTs into an energy autonomy fashion.
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Affiliation(s)
- Xiaole Cao
- Beijing Institute of Nanoenergy and Nanosystems, Chinese Academy of Sciences, Beijing, 101400, People's Republic of China
- School of Nanoscience and Technology, University of Chinese Academy of Sciences, Beijing, 100049, People's Republic of China
| | - Yao Xiong
- Beijing Institute of Nanoenergy and Nanosystems, Chinese Academy of Sciences, Beijing, 101400, People's Republic of China
- School of Nanoscience and Technology, University of Chinese Academy of Sciences, Beijing, 100049, People's Republic of China
| | - Jia Sun
- School of Physics and Electronics, Central South University, Changsha, 410083, People's Republic of China
| | - Xiaoyin Xie
- School of Chemistry and Chemical Engineering, Hubei Polytechnic University, Huangshi, 435003, People's Republic of China.
| | - Qijun Sun
- Beijing Institute of Nanoenergy and Nanosystems, Chinese Academy of Sciences, Beijing, 101400, People's Republic of China.
- School of Nanoscience and Technology, University of Chinese Academy of Sciences, Beijing, 100049, People's Republic of China.
- Shandong Zhongke Naneng Energy Technology Co., Ltd., Dongying, 7061, People's Republic of China.
| | - Zhong Lin Wang
- Beijing Institute of Nanoenergy and Nanosystems, Chinese Academy of Sciences, Beijing, 101400, People's Republic of China.
- School of Nanoscience and Technology, University of Chinese Academy of Sciences, Beijing, 100049, People's Republic of China.
- School of Materials Science and Engineering, Georgia Institute of Technology, Atlanta, GA, 30332, USA.
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Huang T, Long Y, Dong Z, Hua Q, Niu J, Dai X, Wang J, Xiao J, Zhai J, Hu W. Ultralight, Elastic, Hybrid Aerogel for Flexible/Wearable Piezoresistive Sensor and Solid-Solid/Gas-Solid Coupled Triboelectric Nanogenerator. ADVANCED SCIENCE (WEINHEIM, BADEN-WURTTEMBERG, GERMANY) 2022; 9:e2204519. [PMID: 36253149 PMCID: PMC9731684 DOI: 10.1002/advs.202204519] [Citation(s) in RCA: 18] [Impact Index Per Article: 6.0] [Reference Citation Analysis] [Abstract] [Key Words] [MESH Headings] [Grants] [Track Full Text] [Download PDF] [Figures] [Subscribe] [Scholar Register] [Received: 08/08/2022] [Revised: 09/20/2022] [Indexed: 05/10/2023]
Abstract
Aerogels have been attracting wide attentions in flexible/wearable electronics because of their light weight, excellent flexibility, and electrical conductivity. However, multifunctional aerogel-based flexible/wearable electronics for human physiological/motion monitoring, and energy harvest/supply for mobile electronics, have been seldom reported yet. In this study, a kind of hybrid aerogel (GO/CNT HA) based on graphene oxide (GO) and carboxylated multiwalled carbon nanotubes (CMWCNTs) is prepared which can not only used as piezoresistive sensors for human motion and physiological signal detections, but also as high performance triboelectric nanogenerator (TENG) coupled with both solid-solid and gas-solid contact electrifications (CE). The repeatedly loading-unloading tests with 20 000 cycles exhibit its high and ultrastable piezoresistive sensor performances. Moreover, when the obtained aerogel is used as the electrode of a TENG, high electric output performance is produced due to the synergistic effect of solid-solid, and gas-solid interface CEs (3D electrification: solid-solid interface CE between the two solid electrification layers; gas-solid interface CE between the inner surface of GO/CNT HA and the air filled in the aerogel pores). This kind of aerogel promises good applications for human physiological/motion monitoring and energy harvest/supply in flexible/wearable electronics such as piezoresistive sensors and flexible TENG.
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Affiliation(s)
- Tianci Huang
- Center on Nanoenergy ResearchSchool of Physical Science and TechnologyGuangxi UniversityNanning530004China
- CAS Center for Excellence in NanoscienceBeijing Key Laboratory of Micro‐nano Energy and SensorBeijing Institute of Nanoenergy and NanosystemsChinese Academy of SciencesBeijing101400China
| | - Yong Long
- CAS Center for Excellence in NanoscienceBeijing Key Laboratory of Micro‐nano Energy and SensorBeijing Institute of Nanoenergy and NanosystemsChinese Academy of SciencesBeijing101400China
- School of Nanoscience and TechnologyUniversity of Chinese Academy of SciencesBeijing100049China
| | - Zilong Dong
- Center on Nanoenergy ResearchSchool of Physical Science and TechnologyGuangxi UniversityNanning530004China
- CAS Center for Excellence in NanoscienceBeijing Key Laboratory of Micro‐nano Energy and SensorBeijing Institute of Nanoenergy and NanosystemsChinese Academy of SciencesBeijing101400China
| | - Qilin Hua
- CAS Center for Excellence in NanoscienceBeijing Key Laboratory of Micro‐nano Energy and SensorBeijing Institute of Nanoenergy and NanosystemsChinese Academy of SciencesBeijing101400China
- School of Nanoscience and TechnologyUniversity of Chinese Academy of SciencesBeijing100049China
| | - Jianan Niu
- CAS Center for Excellence in NanoscienceBeijing Key Laboratory of Micro‐nano Energy and SensorBeijing Institute of Nanoenergy and NanosystemsChinese Academy of SciencesBeijing101400China
- School of Nanoscience and TechnologyUniversity of Chinese Academy of SciencesBeijing100049China
| | - Xinhuan Dai
- CAS Center for Excellence in NanoscienceBeijing Key Laboratory of Micro‐nano Energy and SensorBeijing Institute of Nanoenergy and NanosystemsChinese Academy of SciencesBeijing101400China
- School of Nanoscience and TechnologyUniversity of Chinese Academy of SciencesBeijing100049China
| | - Jiangwen Wang
- CAS Center for Excellence in NanoscienceBeijing Key Laboratory of Micro‐nano Energy and SensorBeijing Institute of Nanoenergy and NanosystemsChinese Academy of SciencesBeijing101400China
- School of Nanoscience and TechnologyUniversity of Chinese Academy of SciencesBeijing100049China
| | - Junfeng Xiao
- School of Electronic Communication TechnologyShenzhen Institute of Information TechnologyShenzhen518172China
| | - Junyi Zhai
- Center on Nanoenergy ResearchSchool of Physical Science and TechnologyGuangxi UniversityNanning530004China
- CAS Center for Excellence in NanoscienceBeijing Key Laboratory of Micro‐nano Energy and SensorBeijing Institute of Nanoenergy and NanosystemsChinese Academy of SciencesBeijing101400China
- School of Nanoscience and TechnologyUniversity of Chinese Academy of SciencesBeijing100049China
| | - Weiguo Hu
- Center on Nanoenergy ResearchSchool of Physical Science and TechnologyGuangxi UniversityNanning530004China
- CAS Center for Excellence in NanoscienceBeijing Key Laboratory of Micro‐nano Energy and SensorBeijing Institute of Nanoenergy and NanosystemsChinese Academy of SciencesBeijing101400China
- School of Nanoscience and TechnologyUniversity of Chinese Academy of SciencesBeijing100049China
- School of Electronic Communication TechnologyShenzhen Institute of Information TechnologyShenzhen518172China
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Matusiak A, Żak AM. Affordable Open-Source Quartz Microbalance Platform for Measuring the Layer Thickness. SENSORS (BASEL, SWITZERLAND) 2022; 22:6422. [PMID: 36080879 PMCID: PMC9460899 DOI: 10.3390/s22176422] [Citation(s) in RCA: 0] [Impact Index Per Article: 0] [Reference Citation Analysis] [Abstract] [Key Words] [Track Full Text] [Figures] [Subscribe] [Scholar Register] [Received: 07/28/2022] [Revised: 08/22/2022] [Accepted: 08/23/2022] [Indexed: 06/15/2023]
Abstract
The layer thickness measurement process is an indispensable companion of vacuum sputtering and evaporation. Thus, quartz crystal microbalance is a well-known and reliable method for monitoring film thickness. However, most commercial devices use very simple signal processing methods, offering only a readout of the frequency change value and an approximate sputtering rate. Here, we show our concept of instrument, to better control the process parameters and for easy replication. The project uses open-source data and its own ideas, fulfilling all the requirements of a measuring system and contributing to the open-source movement due to the added value and the replacement of obsolete technologies with contemporary ones. The device provides an easy way to expand existing sputtering machines with a proper controller based on our work. The device described in the paper can be easily used in need, being a proven project of a fast, inexpensive, and reliable thin-film thickness monitor.
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Affiliation(s)
- Adrian Matusiak
- Faculty of Mechanical Engineering, Wroclaw University of Science and Technology, 50-371 Wroclaw, Poland
- Nanores Sp. z o. o. Sp. k., 51-317 Wroclaw, Poland
| | - Andrzej Marek Żak
- Faculty of Mechanical Engineering, Wroclaw University of Science and Technology, 50-371 Wroclaw, Poland
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Chen F, Wang Y, Tian Y, Zhang D, Song J, Crick CR, Carmalt CJ, Parkin IP, Lu Y. Robust and durable liquid-repellent surfaces. Chem Soc Rev 2022; 51:8476-8583. [DOI: 10.1039/d0cs01033b] [Citation(s) in RCA: 1] [Impact Index Per Article: 0.3] [Reference Citation Analysis] [Abstract] [Track Full Text] [Journal Information] [Subscribe] [Scholar Register] [Indexed: 12/29/2022]
Abstract
This review provides a comprehensive summary of characterization, design, fabrication, and application of robust and durable liquid-repellent surfaces.
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Affiliation(s)
- Faze Chen
- School of Mechanical Engineering, Tianjin University, Tianjin 300350, China
- Key Laboratory of Mechanism Theory and Equipment Design of Ministry of Education, Tianjin University, Tianjin 300350, China
| | - Yaquan Wang
- Department of Chemistry, School of Physical and Chemical Sciences, Queen Mary University of London, London E1 4NS, UK
| | - Yanling Tian
- School of Engineering, University of Warwick, Coventry CV4 7AL, UK
| | - Dawei Zhang
- School of Mechanical Engineering, Tianjin University, Tianjin 300350, China
- Key Laboratory of Mechanism Theory and Equipment Design of Ministry of Education, Tianjin University, Tianjin 300350, China
| | - Jinlong Song
- School of Mechanical Engineering, Dalian University of Technology, Dalian 116024, China
| | - Colin R. Crick
- School of Engineering and Materials Science, Queen Mary University of London, London E1 4NS, UK
| | - Claire J. Carmalt
- Department of Chemistry, University College London, 20 Gordon Street, London WC1H 0AJ, UK
| | - Ivan P. Parkin
- Department of Chemistry, University College London, 20 Gordon Street, London WC1H 0AJ, UK
| | - Yao Lu
- Department of Chemistry, School of Physical and Chemical Sciences, Queen Mary University of London, London E1 4NS, UK
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