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Tishkevich DI, Vorobjova AI, Outkina EA, Razanau IU, Zubar TI, Rotkovich AA, Bondaruk AA, Sayyed MI, Trukhanov SV, Silibin MV, Gerasimenko AY, Fedosyuk VM, Trukhanov AV. Fabrication of high-density vertical CNT arrays using thin porous alumina template for biosensing applications. RSC Adv 2025; 15:1375-1390. [PMID: 39822570 PMCID: PMC11737374 DOI: 10.1039/d4ra06442a] [Citation(s) in RCA: 0] [Impact Index Per Article: 0] [Reference Citation Analysis] [Abstract] [Grants] [Track Full Text] [Download PDF] [Figures] [Journal Information] [Subscribe] [Scholar Register] [Received: 09/06/2024] [Accepted: 12/29/2024] [Indexed: 01/19/2025] Open
Abstract
This paper explores the process of forming arrays of vertically oriented carbon nanotubes (CNTs) localized on metal electrodes using thin porous anodic alumina (PAA) on a solid substrate. On a silicon substrate, a titanium film served as the electrode layer, and an aluminium film served as the base layer in the initial film structure. A PAA template was formed from the Al film using two-step electrochemical anodizing. Two types of CNT arrays were then synthesized by catalytic chemical vapor deposition. By electrochemically depositing Ni into the PAA pores in two different regimes-constant potential (DC deposition) and alternating current (AC deposition)-catalyst nanoparticles for CNT deposition are formed. It is shown that the size parameters of the CNTs and the proposed CNT growth mechanism depend on the size of the catalyst particles and their localization in the pores of the PAA. Thus, a Ti/PAA/Ni/CNT-based nanocomposite multilayered structure was formed on the Si substrate. Through the use of X-ray diffraction analysis, linear voltammetry, atomic force microscopy, and scanning electron microscopy, the morphological, structural, and electrochemical characteristics of the produced nanocomposite material were investigated. It is shown that the obtained nanostructures can be used for the fabrication of CNT electrodes for biosensing applications.
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Affiliation(s)
- Daria I Tishkevich
- SSPA "Scientific-Practical Materials Research Centre of NAS of Belarus" 220072 Minsk Belarus
| | - Alla I Vorobjova
- Micro- and Nanoelectronics Department, Belarusian State University of Informatics and Radioelectronics 220013 Minsk Belarus
| | - Elena A Outkina
- Micro- and Nanoelectronics Department, Belarusian State University of Informatics and Radioelectronics 220013 Minsk Belarus
| | - Ihar U Razanau
- SSPA "Scientific-Practical Materials Research Centre of NAS of Belarus" 220072 Minsk Belarus
| | - Tatiana I Zubar
- SSPA "Scientific-Practical Materials Research Centre of NAS of Belarus" 220072 Minsk Belarus
| | - Anastasia A Rotkovich
- SSPA "Scientific-Practical Materials Research Centre of NAS of Belarus" 220072 Minsk Belarus
| | - Anastasia A Bondaruk
- SSPA "Scientific-Practical Materials Research Centre of NAS of Belarus" 220072 Minsk Belarus
| | - M I Sayyed
- Renewable Energy and Environmental Technology Center, University of Tabuk Tabuk 47913 Saudi Arabia
- Department of Physics, Faculty of Science, Isra University 1162 Amman Jordan
| | - Sergei V Trukhanov
- SSPA "Scientific-Practical Materials Research Centre of NAS of Belarus" 220072 Minsk Belarus
| | - M V Silibin
- Institute for Advanced Materials and Technologies, National Research University of Electronic Technology "MIET" 124498 Zelenograd Moscow Russia
- I.M. Sechenov First Moscow State Medical University Moscow 119435 Russia
| | - A Yu Gerasimenko
- Institute for Advanced Materials and Technologies, National Research University of Electronic Technology "MIET" 124498 Zelenograd Moscow Russia
| | - Valery M Fedosyuk
- SSPA "Scientific-Practical Materials Research Centre of NAS of Belarus" 220072 Minsk Belarus
| | - Alex V Trukhanov
- SSPA "Scientific-Practical Materials Research Centre of NAS of Belarus" 220072 Minsk Belarus
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Kamnev K, Pytlicek Z, Bendova M, Prasek J, Gispert-Guirado F, Llobet E, Mozalev A. The planar anodic Al 2O 3-ZrO 2 nanocomposite capacitor dielectrics for advanced passive device integration. SCIENCE AND TECHNOLOGY OF ADVANCED MATERIALS 2023; 24:2162324. [PMID: 36818310 PMCID: PMC9930859 DOI: 10.1080/14686996.2022.2162324] [Citation(s) in RCA: 0] [Impact Index Per Article: 0] [Reference Citation Analysis] [Abstract] [Key Words] [Track Full Text] [Download PDF] [Figures] [Subscribe] [Scholar Register] [Received: 10/12/2022] [Revised: 11/29/2022] [Accepted: 12/21/2022] [Indexed: 06/18/2023]
Abstract
The need for integrated passive devices (IPDs) emerges from the increasing consumer demand for electronic product miniaturization. Metal-insulator-metal (MIM) capacitors are vital components of IPD systems. Developing new materials and technologies is essential for advancing capacitor characteristics and co-integrating with other electronic passives. Here we present an innovative electrochemical technology joined with the sputter-deposition of Al and Zr layers to synthesize novel planar nanocomposite metal-oxide dielectrics consisting of ZrO2 nanorods self-embedded into the nanoporous Al2O3 matrix such that its pores are entirely filled with zirconium oxide. The technology is utilized in MIM capacitors characterized by modern surface and interface analysis techniques and electrical measurements. In the 95-480 nm thickness range, the best-achieved MIM device characteristics are the one-layer capacitance density of 112 nF·cm-2, the loss tangent of 4·10-3 at frequencies up to 1 MHz, the leakage current density of 40 pA·cm-2, the breakdown field strength of up to 10 MV·cm-1, the energy density of 100 J·cm-3, the quadratic voltage coefficient of capacitance of 4 ppm·V-2, and the temperature coefficient of capacitance of 480 ppm·K-1 at 293-423 K at 1 MHz. The outstanding performance, stability, and tunable capacitors' characteristics allow for their application in low-pass filters, coupling/decoupling/bypass circuits, RC oscillators, energy-storage devices, ultrafast charge/discharge units, or high-precision analog-to-digital converters. The capacitor technology based on the non-porous planar anodic-oxide dielectrics complements the electrochemical conception of IPDs that combined, until now, the anodized aluminum interconnection, microresistors, and microinductors, all co-related in one system for use in portable electronic devices.
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Affiliation(s)
- Kirill Kamnev
- CEITEC – Central European Institute of Technology, Brno University of Technology, Brno, Czech Republic
| | - Zdenek Pytlicek
- CEITEC – Central European Institute of Technology, Brno University of Technology, Brno, Czech Republic
| | - Maria Bendova
- CEITEC – Central European Institute of Technology, Brno University of Technology, Brno, Czech Republic
| | - Jan Prasek
- CEITEC – Central European Institute of Technology, Brno University of Technology, Brno, Czech Republic
- Department of Microelectronics, Faculty of Electrical Engineering and Communication, Brno University of Technology, Brno, Czech Republic
| | | | - Eduard Llobet
- MINOS-EMaS, University Rovira i Virgili, Tarragona, Spain
| | - Alexander Mozalev
- CEITEC – Central European Institute of Technology, Brno University of Technology, Brno, Czech Republic
- Department of Microelectronics, Faculty of Electrical Engineering and Communication, Brno University of Technology, Brno, Czech Republic
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Pligovka A, Lazavenka A, Turavets U, Hoha A, Salerno M. Two-Level 3D Column-like Nanofilms with Hexagonally-Packed Tantalum Fabricated via Anodizing of Al/Nb and Al/Ta Layers-A Potential Nano-Optical Biosensor. MATERIALS (BASEL, SWITZERLAND) 2023; 16:993. [PMID: 36770000 PMCID: PMC9918218 DOI: 10.3390/ma16030993] [Citation(s) in RCA: 9] [Impact Index Per Article: 4.5] [Reference Citation Analysis] [Abstract] [Key Words] [Track Full Text] [Figures] [Subscribe] [Scholar Register] [Received: 12/18/2022] [Revised: 01/11/2023] [Accepted: 01/12/2023] [Indexed: 06/18/2023]
Abstract
Reanodizing metal underlayers through porous anodic alumina has already been used extensively to fabricate ordered columns of different metal oxides. Here, we present similar 3D multilayered nanostructures with unprecedented complexity. Two-level 3D column-like nanofilms have been synthesized by anodizing an Al/Nb metal layer in aqueous oxalic acid for forming the first level, and an Al/Ta layer in aqueous tartaric acid for forming the second level of the structure. Both levels were then reanodized in aqueous boric acid. The Ta layer deposited on partially dissolved porous anodic alumina of the first level, with protruding tops of niobia columns, acquired a unique hexagonally-packed structure. The morphology of the first and second levels was determined using scanning electron microscopy. Prolonged etching for 24 h in a 50%wt aqueous phosphoric acid was used to remove the porous anodic alumina. The formation mechanism of aluminum phosphates on the second-level columns in the process of long-time cold etching is considered. The model for the growth of columns on a Ta hexagonally-packed structure of the second level is proposed and described. The described approach can be applied to create 3D two- or three-level column-like systems from various valve metals (Ta, Nb, W, Hf, V, Ti), their combinations and alloys, with adjustable column sizes and scaling. The results of optical simulation show a high sensitivity of two-level column-like 3D nanofilms to biomedical objects and liquids. Among potential applications of these two-level column-like 3D nanofilms are photonic crystals for full-color displays, chemical sensors and biosensor, solar cells and thermoresponsive shape memory polymers.
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Affiliation(s)
- Andrei Pligovka
- Research and Development Laboratory 4.10 “Nanotechnologies”, Belarusian State University of Informatics and Radioelectronics, 6 P. Brovki Str., 220013 Minsk, Belarus
- Department of Micro- and Nanoelectronics, Belarusian State University of Informatics and Radioelectronics, 6 P. Brovki Str., 220013 Minsk, Belarus
| | - Andrei Lazavenka
- Research and Development Laboratory 4.10 “Nanotechnologies”, Belarusian State University of Informatics and Radioelectronics, 6 P. Brovki Str., 220013 Minsk, Belarus
- Department of Micro- and Nanoelectronics, Belarusian State University of Informatics and Radioelectronics, 6 P. Brovki Str., 220013 Minsk, Belarus
| | - Ulyana Turavets
- Research and Development Laboratory 4.10 “Nanotechnologies”, Belarusian State University of Informatics and Radioelectronics, 6 P. Brovki Str., 220013 Minsk, Belarus
- Department of Micro- and Nanoelectronics, Belarusian State University of Informatics and Radioelectronics, 6 P. Brovki Str., 220013 Minsk, Belarus
| | - Alexander Hoha
- Research and Development Laboratory 4.10 “Nanotechnologies”, Belarusian State University of Informatics and Radioelectronics, 6 P. Brovki Str., 220013 Minsk, Belarus
- Department of Micro- and Nanoelectronics, Belarusian State University of Informatics and Radioelectronics, 6 P. Brovki Str., 220013 Minsk, Belarus
| | - Marco Salerno
- Institute for Globally Distributed Open Research and Education (IGDORE), Institute for Materials Science, Max Bergmann Center of Biomaterials, Technische Universität Dresden, 27 Budapester Str., 010169 Dresden, Germany
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Bendova M, Pytlicek Z, Prasek J, Mozalev A. The growth and unique electronic properties of the porous-alumina-assisted hafnium-oxide nanostructured films. Electrochim Acta 2019. [DOI: 10.1016/j.electacta.2019.135029] [Citation(s) in RCA: 2] [Impact Index Per Article: 0.3] [Reference Citation Analysis] [Track Full Text] [Journal Information] [Subscribe] [Scholar Register] [Indexed: 10/25/2022]
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Fohlerova Z, Mozalev A. Anodic formation and biomedical properties of hafnium-oxide nanofilms. J Mater Chem B 2019; 7:2300-2310. [PMID: 32254678 DOI: 10.1039/c8tb03180k] [Citation(s) in RCA: 10] [Impact Index Per Article: 1.7] [Reference Citation Analysis] [Abstract] [Track Full Text] [Journal Information] [Subscribe] [Scholar Register] [Indexed: 12/31/2022]
Abstract
Hafnium dioxide (HfO2) is attracting attention for bio-related applications due to its good cytocompatibility, high density, and resistance to corrosion and mechanical damage. Here we synthesize two types of hafnium-oxide thin films on substrates via self-organized electrochemical anodization: (1) an array of hierarchically structured nanorods anchored to a thin oxide layer and (2) a microscopically flat oxide film. The nanostructured film is composed of a unique mixture of HfO2, suboxide Hf2O3, and oxide-hydroxide compound HfO2·nH2O whereas the flat film is mainly HfO2. In vitro interaction of the two films with MG-63 osteoblast-like cells and Gram-negative E. coli bacteria is studied for the first time to assess the potential of the films for biomedical application. Both films reveal good cytocompatibility and affinity for proteins, represented by fibronectin and especially albumin, which is absorbed in a nine times larger amount. The morphology and specific surface chemistry of the nanostructured film cause a two-fold enhanced antibacterial effect, better cell attachment, significantly improved proliferation of cells, five-fold rise in the cellular Young's modulus, slightly stronger production of reactive oxygen species, and formation of cell clusters. Compared with the flat film, the nanostructured one features the weakening of AFM-measured adhesion force at the cell/surface interface, probably caused by partially lifting the nanorods from the substrate due to the strong contact with cells. The present findings deepen the understanding of biological processes at the living cell/metal-oxide interface, underlying the role of surface chemistry and the impact of nanostructuring at the nanoscale.
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Affiliation(s)
- Zdenka Fohlerova
- CEITEC - Central European Institute of Technology, Brno University of Technology, Purkynova 123, 612 00 Brno, Czech Republic.
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On-substrate porous-anodic-alumina-assisted gold nanostructure arrays: Meeting the challenges of various sizes and interfaces. Electrochim Acta 2019. [DOI: 10.1016/j.electacta.2018.11.192] [Citation(s) in RCA: 9] [Impact Index Per Article: 1.5] [Reference Citation Analysis] [Track Full Text] [Journal Information] [Subscribe] [Scholar Register] [Indexed: 11/20/2022]
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Bendova M, Kolar J, Gispert-Guirado F, Mozalev A. Porous-Alumina-Assisted Growth of Nanostructured Anodic Films on Ti−Nb Alloys. ChemElectroChem 2018. [DOI: 10.1002/celc.201800785] [Citation(s) in RCA: 4] [Impact Index Per Article: 0.6] [Reference Citation Analysis] [Track Full Text] [Journal Information] [Subscribe] [Scholar Register] [Indexed: 01/22/2023]
Affiliation(s)
- Maria Bendova
- CEITEC - Central European Institute of Technology; Brno University of Technology; Purkynova 123 61200 Brno Czech Republic
| | - Jakub Kolar
- CEITEC - Central European Institute of Technology; Brno University of Technology; Purkynova 123 61200 Brno Czech Republic
| | - Francesc Gispert-Guirado
- SRCiT - Scientific Resources Service; University Rovira i Virgili; Av. Paisos Catalans 26 43007 Tarragona, Catalonia Spain
| | - Alexander Mozalev
- CEITEC - Central European Institute of Technology; Brno University of Technology; Purkynova 123 61200 Brno Czech Republic
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