An insight into cathodic reactions during wire electrochemical micromachining in aqueous hydrochloric acid solution

Micro-Shaping of Pure Aluminum in Long-Duration Wire Electrochemical Micromachining Using Bipolar Nanosecond Pulses

With the increasing application of three-dimensional pure aluminum microstructures in micro-electromechanical systems (MEMS) and for fabricating terahertz components, high-quality micro-shaping of pure aluminum has gradually attracted attention. Recently, high-quality three-dimensional microstructures of pure aluminum with a short machining path have been obtained through wire electrochemical micromachining (WECMM), owing to its sub-micrometer-scale machining precision. However, machining accuracy and stability decrease owing to the adhesion of insoluble products on the surface of the wire electrode in long-duration WECMM, which limits the application of pure aluminum microstructures with a long machining path. In this study, the bipolar nanosecond pulses are used to improve the machining accuracy and stability in long-duration WECMM of pure aluminum. A negative voltage of -0.5 V was considered appropriate based on experimental results. Compared with the traditional WECMM using unipolar pulses, the machining accuracy of the machined micro-slit and the duration of stable machining were significantly improved in long-duration WECMM using bipolar nanosecond pulses.

Dynamic Liquid Membrane Electrochemical Modification of Carbon Nanotube Fiber for Electrochemical Microfabrication

Carbon nanotube fibers (CNFs) are a promising material for use as lightweight, high-strength, electrically conducting tool cathodes in wire electrochemical micromachining (WECMM) in which a high-performance tool cathode is crucial for optimal processing performance. However, the outstanding advantages of pristine CNFs, such as fiber strength, electrical conductivity, and hydrophilic surface, have so far remained underutilized as tool cathodes in WECMM. Herein, electrochemical modification using a dynamic liquid membrane is proposed as an effective online method for functionalizing CNFs prior to WECMM. The proposed method not only improves the assembly accuracy and efficiency but also avoids unnecessary damage to the modified CNF during installation. The introduced functional groups (-OH and -COOH) effectively improved the electrical conductivity and hydrophilicity of CNFs. The influences of H₂O₂ concentration, applied voltage, and anodization time on the surface modification process were examined experimentally. The use of a pulsed voltage was further proposed to prevent the loss of fiber strength due to over-anodization. Finally, the use of modified CNF electrodes with good surface morphology, strength, and conductivity in WECMM was demonstrated to afford superior machining stability, efficiency, and accuracy as well as improved surface quality compared with the conventional tool cathodes.