Surface acoustic wave characterization of optical sol-gel thin layers

Vapor Phase Ammonia Curing to Improve the Mechanical Properties of Antireflection Optical Coatings Designed for Power Laser Optics

Projects of inertial confinement fusion using lasers need numerous optical components whose coatings allow the increase in their transmission and their resistance to high laser fluence. A coating process based on the self-assembly of sol-gel silica nanoparticles and a post-treatment with ammonia vapor over the surfaces of the optical components ("ammonia curing process") was developed and successfully optimized for industrial production. Manufacturing such antireflective coatings has clear advantages: (i) it is much cheaper than conventional top-down processes; (ii) it is well adapted to large-sized optical components and large-scale production; and (iii) it gives low optical losses in transmission and high resistances to laser fluence. The post-treatment was achieved by a simple exposition of optical components to room-temperature ammonia vapors. The resulting curing process induced strong optical and mechanical changes at the interface and was revealed to be of paramount importance since it reinforced the adhesion and abrasion resistance of the components so that the optical components could be handled easily. Here, we discuss how such coatings were characterized and how the initial thin nanoparticle film was transformed from a brittle film to a resistant coating from the ammonia curing process.

Development of a Broadband (100-240 MHz) Surface Acoustic Wave Emitter Devoted to the Non-Destructive Characterization of Sub-Micrometric Thin Films

In the ultrasonic non-destructive evaluation of thin films, it is essential to have ultrasonic transducers that are able to generate surface acoustic waves (SAW) of suitably high frequencies in a wide frequency range of between ten and several hundred megahertz. If the characterization is carried out with the transducer in contact with the sample, it is also necessary that the transducers provide a high level of mechanical displacement (>100 s pm). This level allows the wave to cross the transducer−sample interface and propagate over the distance of a few millimeters on the sample and be properly detected. In this paper, an emitter transducer formed of interdigitated chirp electrodes deposited on 128° Y-cut LiNbO3 is proposed. It is shown that this solution efficiently enables the generation of SAW (displacement level up to 1 nm) in a frequency range of between 100 and 240 MHz. The electrical characterization and a displacement field analysis of SAW by laser Doppler vibrometry are presented. The transducer’s significant unidirectionality is demonstrated. Finally, the characterization of two titanium thin films deposited on silicon is presented as an example. A meaningful SAW velocity dispersion (~10 m/s) is obtained, which allows for the precise estimation (5% of relative error) of the submicrometer thickness of the layers (20 and 50 nm).

Dispersion of surface acoustic waves in thin films at extreme wavelength-to-thickness ratios

Surface acoustic waves (SAWs) are sensitive to the presence of a layer on the surface of a material, even if this layer is extremely thin compared to their wavelengths. Given the very slow propagation velocities of SAWs compared to electromagnetic waves, their wavelengths are on the order of 40 μm for acoustic frequencies on the order of 100 MHz. However, it has been shown that these waves are dispersive for coatings whose thicknesses are more than 1000 times smaller than their wavelength. This sensitivity is verified by studying the dispersion of SAWs for a frequency range between 90 and 260 MHz.

Non-destructive characterization of surfaces and thin coatings using a large-bandwidth interdigital transducer

This paper deals with non-destructive testing of thin layer structures using Rayleigh-type waves over a broad frequency range (25-125 MHz). The dispersion phenomenon was used to characterize a layer-on-substrate-type sample comprising a thin layer of platinum 100 nm thick on a silicon substrate. The originality of this paper lies in the investigation of different ways of generating surface acoustic waves (SAWs) with large bandwidth interdigital transducers (IDTs) as well as the development of a measuring device to accurately estimate the SAW phase velocity. In particular, this study focuses on comparing the performance (in terms of SAW amplitude and bandwidth) of different excitations imposed on IDTs. The three types of excitations are burst, impulse, and chirp. The interest of chirp excitation compared to the other two types was clearly demonstrated in terms of the SAW bandwidth and amplitude of displacement. With these IDT transducers, measurements could be performed over a wide frequency band (20-125 MHz), and consequently, dispersion curves could be obtained over a wide frequency band with a range of velocity variations in the order of 100 m/s. Under these conditions, an extremely accurate estimate of the phase velocity as a function of the frequency could be obtained using a Slant Stack transformation. Finally, from these experimental dispersion curves and theoretical dispersion curves, an accurate estimate of the thickness of the layer could be obtained by inversion. This estimated thickness was then confirmed using profilometer measurements.

Effective and rapid technique for temporal response modeling of surface acoustic wave interdigital transducers

Surface Acoustic Wave Interdigital Transducers (SAW-IDT) has a considerable application potential for characterization of properties of thin layers, coatings and functional surfaces. For optimization of these SAW-IDTs, it is necessary to study various SAW-IDT configurations by varying the number of electrodes, dimensions of the electrodes, their shapes and spacings. The finite element method (FEM) is generally used to model such transducers but results are obtained in several hours (or days). Thus it is necessary to implement effective and rapid technique for SAW-IDT modeling. In this study, we develop simulation tool based on Spatial Impulse Response model. Therefore, we reduce considerably computing time and results are obtained in a few seconds. In order to validate this method, theoretical and experimental results are compared with finite element method. The results obtained show a good concordance and confirm effectiveness of suggested method. In additional, this method requires less computer memory.

Generation of broadband surface acoustic waves using a dual temporal-spatial chirp method

Wideband surface acoustic wave (SAW) generation with a spatial chirp-based interdigital transducer was optimized for non-destructive characterization and testing of coatings and thin layers. The use of impulse temporal excitation (Dirac-type negative pulse) leads to a wide band emitter excitation but with significantly limited SAW output amplitudes due to the piezoelectric crystal breakdown voltage. This limitation can be circumvented by applying a temporal chirp excitation corresponding in terms of frequency band and duration to the spatial chirp transducer configuration. This dual temporal-spatial chirp method was studied in the 20 to 125 MHz frequency range and allowed to obtain higher SAW displacement amplitudes with an excitation voltage lower than that of the impulse excitation.