Deep-Subwavelength 2D Periodic Surface Nanostructures on Diamond by Double-Pulse Femtosecond Laser Irradiation

Laser Nanostructuring of Titanium Surfaces for Enhanced Bioactive Applications

Laser nanostructuring via Laser-Induced Periodic Surface Structures (LIPSS), generated using femtosecond laser pulses, has been investigated as a method for precisely modifying titanium surfaces. By adjusting parameters such as the fluence and pulse number of the laser beam, it is feasible to tailor the surface morphology, roughness, and oxidation states of species that can significantly influence the properties and surface bioactivity of the material. In this study, the LIPSS was applied to commercially pure titanium and evaluated for its ability to support calcium phosphate nucleation and growth in Simulated Body Fluid (SBF). Scanning Electron Microscopy (SEM) and Fast Fourier Transform (FFT) analysis confirmed the formation of well-defined periodic structures. Additional characterizations performed by Atomic Force Microscopy (AFM) and X-ray Photoelectron Spectroscopy (XPS) revealed, after laser treatment of titanium, its increased surface roughness and oxidation levels, respectively. These features, when assessed after immersion in SBF, were associated with an improved potential biological performance of the nanostructured surface of the investigated material. The results demonstrated that LIPSS-treated titanium effectively promoted calcium phosphate growth, indicating its enhanced potential bioactivity. Overall, LIPSS nanostructuring presents a scalable and cost-effective strategy for engineering titanium surfaces with potential bioactive properties, supporting their promising application in advanced biomedical implants.

Laser-Based Two-Step Fabrication Method of Near-Damage-Free Controllably Superhydrophobic Antireflection Micronano Structures of Monocrystalline Silicon

Ordered and hierarchical micronano hybrid structures are crucial for both antireflection and superhydrophobicity. However, during the laser processing of micronano structures, achieving precise size control and minimizing damage remain challenging. This study proposed a novel laser-based two-step method combining laser-assisted waterjet processing of near-damage-free micrometer-scale V-grooves and femtosecond laser-induced nanoscale periodic surface structures. Using models previously developed by the authors to predict V-groove depth and width, the antireflection and hydrophobic properties of the structures can be flexibly controlled. The fabricated micronano structure exhibits significantly lower oxidation compared with traditional laser processing, along with remarkable antireflectivity, achieving a minimum reflectivity of 4.6% in 300-1100 nm. Additionally, the hierarchical structures exhibit superhydrophobicity, with a maximum contact angle of 163.7 ± 0.82° and a minimum sliding angle of 2.62 ± 0.06°. Through comparative analysis on the micrometer structures, it is deeply revealed that the mechanisms of antireflection enhancement and hydrophobicity improvement of the micronano structures are that the ordered, hierarchical design traps light and creates a refractive index gradient, while the three-level micronano structure effectively reduces the contact area of droplets. The new laser-based two-step method proposed in this study offers both theoretical and practical significance for achieving controllable, low-damage processing of micronano structured functional surfaces.

Research and Application Progress of Laser-Processing Technology in Diamond Micro-Fabrication

Laser-processing technology has been widely used in the ultra-precision machining of diamond materials. It has the advantages of high precision and high efficiency, especially in the field of super-hard materials and high-precision parts manufacturing. This paper explains the fundamental principles of diamond laser processing, introduces the interaction mechanisms between various types of lasers and diamond materials, focuses on analyzing the current development status of various modes of laser processing of diamond, briefly discusses the relevant applications in diamond cutting, micro-hole forming, and micro-groove machining, etc., and finally discusses the issues, challenges, and potential future advancements of laser technology in the field of diamond processing at this point.

Sub-diffraction limited nanogroove fabrication of 30 nm features on diamond films using 800 nm femtosecond laser irradiation

By controlling the 800 nm fs laser energy and applying an isopropyl alcohol environment, controlled sub-diffraction limited lithography with a characteristic structure of approximately 30 nm was achieved on the surface of diamond films, and diamond gratings with a period of 200 nm were fabricated. The fabrication of single grooves with a feature size of 30 nm demonstrates the potential for patterning periodic or nonperiodic structures, and the fabrication of 200 nm periodic grating structures demonstrates the ability of the technique to withstand laser proximity effects. This enhances the technology of diamond film nanofabrication and broadens its potential applications in areas such as optoelectronics and biology.

Insulator-to-metal transition in the black diamond from molecular-dynamics-Landauer method

The critical condition and mechanism of the insulator-to-metal transition (IMT) for the black diamond were studied by the molecular-dynamics-Landauer method. The IMT will occur at sufficiently high contents of vacancies in the diamond. The critical concentration of vacancies for the IMT might be between V:C143 (0.69%) and V:C127 (0.78%). At a low concentration of vacancies (below 0.69%), the intermediate band (IB) consists of a filled band and a separate empty band, which makes the material to be an insulator. The IMT of the black diamond is due to the mergence between the two isolated IBs when the concentration of vacancies is high, and the merged IB is partially filled by electrons. The distribution of vacancies also influences the IMT of the black diamond.

Surface-Mediated Charge Transfer of Photogenerated Carriers in Diamond

Solvated electrons are highly reductive chemical species whose chemical properties remain largely unknown. Diamond materials are proposed as a promising emitter of solvated electrons and visible light excitation would enable solar-driven CO2 or N2 reductions reactions in aqueous medium. But sub-bandgap excitation remains challenging. In this work, the role of surface states on diamond materials for charge separation and emission in both gaseous and aqueous environments from deep UV to visible light excitation is elucidated. Four different X-ray and UV-vis spectroscopy methods are applied to diamond materials with different surface termination, doping and crystallinity. Surface states are found to dominate sub-bandgap charge transfer. However, the surface charge separation is drastically reduced for boron-doped diamond due to a very high density of bulk defects. In a gaseous atmosphere, the oxidized diamond surface maintains a negative electron affinity, allowing charge emission, due to remaining hydrogenated and hydroxylated groups. In an aqueous electrolyte, a photocurrent for illumination down to 3.5 eV is observed for boron-doped nanostructured diamond, independent of the surface termination. This study opens new perspectives on photo-induced interfacial charge transfer processes from metal-free semiconductors such as diamonds.

Laser-Induced Periodic Surface Structures on Layered GaSe Crystals: Structural Coloring and Infrared Antireflection

We study structural and morphological transformations caused by multipulse femtosecond-laser exposure of Bridgman-grown ϵ-phase GaSe crystals, a van der Waals semiconductor promising for nonlinear optics and optoelectronics. We unveil, for the first time, the laser-driven self-organization regimes in GaSe allowing the formation of regular laser-induced periodic surface structures (LIPSSs) that originate from interference of the incident radiation and interface surface plasmon waves. LIPSSs formation causes transformation of the near-surface layer to amorphous Ga2Se3 at negligible oxidation levels, evidenced from comprehensive structural characterization. LIPSSs imprinted on both output crystal facets provide a 1.2-fold increase of the near-IR transmittance, while the ability to control local periodicity by processing parameters enables multilevel structural color marking of the crystal surface. Our studies highlight direct fs-laser patterning as a multipurpose application-ready technology for precise nanostructuring of promising van der Waals semiconductors, whose layered structure restricts application of common nanofabrication approaches.

Hierarchical Surface Structures and Large-Area Nanoscale Gratings in As2S3 and As2Se3 Films Irradiated with Femtosecond Laser Pulses

Chalcogenide vitreous semiconductors (ChVSs) find application in rewritable optical memory storage and optically switchable infrared photonic devices due to the possibility of fast and reversible phase transitions, as well as high refractive index and transmission in the near- and mid-infrared spectral range. Formed on such materials, laser-induced periodic surface structures (LIPSSs), open wide prospects for increasing information storage capacity and create polarization-sensitive optical elements of infrared photonics. In the present work, a possibility to produce LIPSSs under femtosecond laser irradiation (pulse duration 300 fs, wavelength 515 nm, repetition rate up to 2 kHz, pulse energy ranged 0.03 to 0.5 μJ) is demonstrated on a large (up to 5 × 5 mm²) area of arsenic sulfide (As₂S₃) and arsenic selenide (As₂Se₃) ChVS films. Scanning electron and atomic force microscopy revealed that LIPSSs with various periods (170-490 nm) and orientations can coexist within the same irradiated region as a hierarchical structure, resulting from the interference of various plasmon polariton modes generated under intense photoexcitation of nonequilibrium carriers within the film. The depth of the structures varied from 30 to 100 nm. The periods and orientations of the formed LIPSSs were numerically simulated using the Sipe-Drude approach. A good agreement of the calculations with the experimental data was achieved.

Computational design of a reliable intermediate-band photovoltaic absorber based on diamond

To reduce the wide bandgap of diamond and expand its applications in the photovoltaic fields, a diamond-based intermediate-band (IB) material C-Ge-V alloy was designed by first-principles calculations. By replacing some C with Ge and V in the diamond, the wide bandgap of the diamond can be reduced sharply and a reliable IB, which is mainly formed by the d states of V, can be formed in the bandgap. With the increase of Ge content, the total bandgap of the C-Ge-V alloy will be reduced and close to the optimal value of an IB material. At a relatively low atomic concentration of Ge (below 6.25%), the IB formed in the bandgap is partially filled and varies little with the concentration of Ge. When further increasing the content of Ge, the IB moves close to the conduction band and the electron filling in the IB increases. The 18.75% content of Ge might be the limitation to form an IB material, and the optimal content of Ge should be between 12.5% and 18.75%. Compared with the content of Ge, the distribution of Ge has a minor effect on the band structure of the material. The C-Ge-V alloy shows strong absorption for the sub-bandgap energy photons, and the absorption band generates a red-shift with the increase of Ge. This work will further expand the applications of diamond and be helpful to develop an appropriate IB material.

Laser-Synthesized 2D-MoS2 Nanostructured Photoconductors

The direct laser synthesis of periodically nanostructured 2D transition metal dichalcogenide (2D-TMD) films, from single source precursors, is presented here. Laser synthesis of MoS₂ and WS₂ tracks is achieved by localized thermal dissociation of Mo and W thiosalts, caused by the strong absorption of continuous wave (c.w.) visible laser radiation by the precursor film. Moreover, within a range of irradiation conditions we have observed occurrence of 1D and 2D spontaneous periodic modulation in the thickness of the laser-synthesized TMD films, which in some cases is so extreme that it results in the formation of isolated nanoribbons with a width of ~200 nm and a length of several micrometers. The formation of these nanostructures is attributed to the effect that is known as laser-induced periodic surface structures (LIPSS), which is caused by self-organized modulation of the incident laser intensity distribution due to optical feedback from surface roughness. We have fabricated two terminal photoconductive detectors based on nanostructured and continuous films and we show that the nanostructured TMD films exhibit enhanced photo-response, with photocurrent yield increased by three orders of magnitude as compared to their continuous counterparts.

Extremely High-Quality Periodic Structures on ITO Film Efficiently Fabricated by Femtosecond Pulse Train Output from a Frequency-Doubled Fabry-Perot Cavity

This study developed a novel frequency-doubled Fabry-Perot cavity method based on a femtosecond laser of 1030 nm, 190 fs, 1 mJ, and 1 kHz. The time interval (60-1000 ps) and attenuation ratio (0.5-0.9) between adjacent sub-pulses of the 515 nm pulse train were able to be easily adjusted, while the efficiency was up to 50% and remained unchanged. Extremely high-quality low-spatial-frequency LIPSS (LSFL) was efficiently fabricated on an indium tin oxide (ITO) film using a pulse train with a time interval of 150 ps and attenuation ratio of 0.9 focused with a cylindrical lens. Compared with the LSFL induced by the primary Gaussian pulse, the uniformity of the LSFL period was enhanced from 481 ± 41 nm to 435 ± 8 nm, the divergence of structural orientation angle was reduced from 15.6° to 3.7°, and the depth was enhanced from 74.21 ± 14.35 nm to 150.6 ± 8.63 nm. The average line edge roughness and line height roughness were only 7.34 nm and 2.06 nm, respectively. The depths and roughness values were close to or exceeded those of resist lines made by the interference lithography. Compared with the common Fabry-Perot cavity, the laser energy efficiency of the pulse trains and manufacturing efficiency were enhanced by factors of 19 and 25. A very colorful "lotus" pattern with a size of 30×28 mm² was demonstrated, which was covered with high-quality LSFLs fabricated by a pulse train with optimized laser parameters. Pulse trains can efficiently enhance and prolong the excitation of surface plasmon polaritons, inhibit deposition particles, depress ablation residual heat and thermal shock waves, and eliminate high-spatial-frequency LIPSS formed on LSFL, therefore, producing extremely high-quality LSFL on ITO films.

Surface Nanotexturing of Boron-Doped Diamond Films by Ultrashort Laser Pulses

Polycrystalline boron-doped diamond (BDD) films were surface nanotextured by femtosecond pulsed laser irradiation (100 fs duration, 800 nm wavelength, 1.44 J cm^-2 single pulse fluence) to analyse the evolution of induced alterations on the surface morphology and structural properties. The aim was to identify the occurrence of laser-induced periodic surface structures (LIPSS) as a function of the number of pulses released on the unit area. Micro-Raman spectroscopy pointed out an increase in the graphite surface content of the films following the laser irradiation due to the formation of ordered carbon sites with respect to the pristine sample. SEM and AFM surface morphology studies allowed the determination of two different types of surface patterning: narrow but highly irregular ripples without a definite spatial periodicity or long-range order for irradiations with relatively low accumulated fluences (<14.4 J cm^-2) and coarse but highly regular LIPSS with a spatial periodicity of approximately 630 nm ± 30 nm for higher fluences up to 230.4 J cm^-2.

Enhanced and Selective Absorption of Molybdenum Nanostructured Surfaces for Concentrated Solar Energy Applications

Surfaces of commercial molybdenum (Mo) plates have been textured by fs-laser treatments with the aim to form low-cost and efficient solar absorbers and substrates for thermionic cathodes in Concentrated Solar Power conversion devices. Morphological (SEM and AFM), optical (spectrophotometry), and structural (Raman spectroscopy) properties of the samples treated at different laser fluences (from 1.8 to 14 J/cm²) have been characterized after the laser treatments and also following long thermal annealing for simulating the operating conditions of thermionic converters. A significant improvement of the solar absorptance and selectivity, with a maximum value of about four times higher than the pristine sample at a temperature of 800 K, has been detected for sample surfaces treated at intermediate fluences. The effects observed have been related to the light trapping capability of the laser-induced nanotexturing, whereas a low selectivity, together with a high absorptance, could be revealed when the highest laser fluence was employed due to a significant presence of oxide species. The ageing process confirms the performance improvement shown when treated samples are used as solar absorbers, even though, due to chemical modification occurring at the surface, a decrease of the solar absorptance takes place. Interestingly, the sample showing the highest quantity of oxides preserves more efficiently the laser texturing. The observation of this behaviour allows to extend the applicability of the laser treatments since, by further nanostructuring of the Mo oxides, it could be beneficial also for sensing applications.

Optical and Thermal Behavior of Germanium Thin Films under Femtosecond Laser Irradiation

In this study, we theoretically investigate the response of a germanium thin film under femtosecond pulsed laser irradiation. Electron and lattice temperatures, as well as material-specific optical properties such as dielectric function and reflectivity, were calculated during the irradiation using an extended two-temperature model coupled with the carrier density rate equation and the Drude model. Melting and ablation fluence thresholds were also predicted, resulting in 0.14 J cm^-2 and 0.35 J cm^-2, respectively. An ultrafast change in both optical and thermal properties was detected upon laser irradiation. Results also indicate that thermal melting occurs after germanium takes on a metallic character during irradiation, and that the impact ionization process may have a critical role in the laser-induced thermal effect. Therefore, we suggest that the origin of the thermal modification of germanium surface under femtosecond laser irradiation is mostly due the impact ionization process and that its effect becomes more important when increasing the laser fluence.

Wafer-scale high aspect-ratio sapphire periodic nanostructures fabricated by self-modulated femtosecond laser hybrid technology

Sapphire nanostructures with a high aspect-ratio have broad applications in photoelectronic devices, which are difficult to be fabricated due to the properties of high transparency and hardness, remarkable thermal and chemical stability. Although the phenomenon of laser-induced periodic surface structures (LIPSS) provides an extraordinary idea for surface nanotexturing, it suffers from the limitation of the small depth of the nanostructures. Here, a high-efficiency self-modulated femtosecond laser hybrid technology was proposed to fabricate nanostructures with high aspect-ratios on the sapphire surface, which was combined backside laser modification and subsequent wet etching. Due to the refractive index mismatch, the focal length of the laser could be elongated when focused inside sapphire. Thus, periodic nanostructures with high-quality aspect ratios of more than 55 were prepared on the sapphire surface by using this hybrid fabrication method. As a proof-of-concept, wafer-scale (∼2 inches) periodic nanostripes with a high aspect-ratio were realized on a sapphire surface, which possesses unique diffractive properties compared to typical shallow gratings. The results indicate that the self-modulated femtosecond laser hybrid technology is an efficient and versatile technique for producing high aspect-ratio nanostructures on hard and transparent materials, which would propel the potential applications in optics and surface engineering, sensing, etc.

Self-Aligned Plasmonic Lithography for Maskless Fabrication of Large-Area Long-Range Ordered 2D Nanostructures

This paper proposes a one-step maskless 2D nanopatterning approach named self-aligned plasmonic lithography (SPL) by line-shaped ultrafast laser ablation under atmospheric conditions for the first time. Through a theoretical calculation of electric field and experimental verification, we proved that homogeneous interference of laser-excited surface plasmon polaritons (SPPs) can be achieved and used to generate long-range ordered 2D nanostructures in a self-aligned way over a wafer-sized area within several minutes. Moreover, the self-aligned nanostructures can be freely transferred between embossed nanopillars and engraved nanoholes by modulating the excitation intensity of SPPs interference through altering the incident laser energy. The SPL technique exhibits further controllability in the shape, orientation, and period of achievable nanopatterns on a wide range of semiconductors and metals by tuning processing parameters. Nanopatterned films can further act as masks to transfer structures into other bulk materials, as demonstrated in silica.

Femtosecond Laser Processing Technology for Anti-Reflection Surfaces of Hard Materials

The anti-reflection properties of hard material surfaces are of great significance in the fields of infrared imaging, optoelectronic devices, and aerospace. Femtosecond laser processing has drawn a lot of attentions in the field of optics as an innovative, efficient, and green micro-nano processing method. The anti-reflection surface prepared on hard materials by femtosecond laser processing technology has good anti-reflection properties under a broad spectrum with all angles, effectively suppresses reflection, and improves light transmittance/absorption. In this review, the recent advances on femtosecond laser processing of anti-reflection surfaces on hard materials are summarized. The principle of anti-reflection structure and the selection of anti-reflection materials in different applications are elaborated upon. Finally, the limitations and challenges of the current anti-reflection surface are discussed, and the future development trend of the anti-reflection surface are prospected.

Charge Transport Mechanisms of Black Diamond at Cryogenic Temperatures

Black diamond is an emerging material for solar applications. The femtosecond laser surface treatment of pristine transparent diamond allows the solar absorptance to be increased to values greater than 90% from semi-transparency conditions. In addition, the defects introduced by fs-laser treatment strongly increase the diamond surface electrical conductivity and a very-low activation energy is observed at room temperature. In this work, the investigation of electronic transport mechanisms of a fs-laser nanotextured diamond surface is reported. The charge transport was studied down to cryogenic temperatures, in the 30−300 K range. The samples show an activation energy of a few tens of meV in the highest temperature interval and for T < 50 K, the activation energy diminishes to a few meV. Moreover, thanks to fast cycles of measurement, we noticed that the black-diamond samples also seem to show a behavior close to ferromagnetic materials, suggesting electron spin influence over the transport properties. The mentioned properties open a new perspective in designing novel diamond-based biosensors and a deep knowledge of the charge-carrier transport in black diamond becomes fundamental.

Electromagnetic origin of femtosecond laser-induced periodic surface structures on GaP crystals

The formations of different types of laser-induced periodic surface structures (LIPSS) on the surface of GaP crystals with different laser fluence are researched in experiments. The transition from the high spatial frequency LIPSS (HSFL) to the low spatial frequency LIPSS (LSFL) occurred as the number of the irradiated laser pulse increased. The finite difference time domain method combined with the holographic ablation model is used to simulate the LIPSS formation under the irradiation of multiple pulses. Different types of ripples are predicted by the electromagnetic approach. Results demonstrate that the electromagnetic origins of HSFL and LSFL are due to the interference of incident field and the scattering field under the multi-pulse irradiation.

Manipulation of Subwavelength Periodic Structures Formation on 4H-SiC Surface with Three Temporally Delayed Femtosecond Laser Irradiations

Controlling laser-induced periodic surface structures on semiconductor materials is of significant importance for micro/nanophotonics. We here demonstrate a new approach to form the unusual structures on 4H-SiC crystal surface under irradiation of three collinear temporally delayed femtosecond laser beams (800 nm wavelength, 50 fs duration, 1 kHz repetition), with orthogonal linear polarizations. Different types of surface structures, two-dimensional arrays of square islands (670 nm periodicity) and one-dimensional ripple structures (678 nm periodicity) are found to uniformly distribute over the laser-exposed areas, both of which are remarkably featured by the low spatial frequency. By altering the time delay among three laser beams, we can flexibly control the transition between the two surface structures. The experimental results are well explained by a physical model of the thermally correlated actions among three laser-material interaction processes. This investigation provides a simple, flexible, and controllable processing approach for the large-scale assembly of complex functional nanostructures on bulk semiconductor materials.

LIPSS Applied to Wide Bandgap Semiconductors and Dielectrics: Assessment and Future Perspectives

With the aim of presenting the processes governing the Laser-Induced Periodic Surface Structures (LIPSS), its main theoretical models have been reported. More emphasis is given to those suitable for clarifying the experimental structures observed on the surface of wide bandgap semiconductors (WBS) and dielectric materials. The role played by radiation surface electromagnetic waves as well as Surface Plasmon Polaritons in determining both Low and High Spatial Frequency LIPSS is briefly discussed, together with some experimental evidence. Non-conventional techniques for LIPSS formation are concisely introduced to point out the high technical possibility of enhancing the homogeneity of surface structures as well as tuning the electronic properties driven by point defects induced in WBS. Among these, double- or multiple-fs-pulse irradiations are shown to be suitable for providing further insight into the LIPSS process together with fine control on the formed surface structures. Modifications occurring by LIPSS on surfaces of WBS and dielectrics display high potentialities for their cross-cutting technological features and wide applications in which the main surface and electronic properties can be engineered. By these assessments, the employment of such nanostructured materials in innovative devices could be envisaged.