Large-Scale Silicon Nanophotonic Metasurfaces with Polarization Independent Near-Perfect Absorption

Silicon eccentric shell nanoparticles fabricated by template-assisted deposition for Mie magnetic resonances enhanced light confinement

We report a structure of silicon eccentric shell particles array, fabricated by the SiO2particles monolayer array assisted deposition of amorphous Si, for high-efficiency light confinement. The SiO2particles monolayer array is tailored to regulate its interparticle distance, followed by silicon film deposition to obtain silicon eccentric shell arrays with positive and negative off-center distancee. We studied the Mie resonances of silicon solid sphere, concentric shell, eccentric shell and observed that the eccentric shell with positive off-centeresupports superior light confinement because of the enhanced Mie magnetic resonances. Spectroscopic measurements and finite difference time domain simulations were conducted to examine the optical performance of the eccentric shell particles array. Results show that the Mie magnetic resonance wavelength can be easily regulated by the size of the inner void of the silicon shell to realize tunable enhanced light confinement. It was found silicon shell withD= 460/520 nm offered high enhanced light absorption efficiency at wavelength ofλ= 830 nm, almost beyond the bandgap of the amorphous silicon.

Designing Metasurfaces for Efficient Solar Energy Conversion

Metasurfaces have recently emerged as a promising technological platform, offering unprecedented control over light by structuring materials at the nanoscale using two-dimensional arrays of subwavelength nanoresonators. These metasurfaces possess exceptional optical properties, enabling a wide variety of applications in imaging, sensing, telecommunication, and energy-related fields. One significant advantage of metasurfaces lies in their ability to manipulate the optical spectrum by precisely engineering the geometry and material composition of the nanoresonators' array. Consequently, they hold tremendous potential for efficient solar light harvesting and conversion. In this Review, we delve into the current state-of-the-art in solar energy conversion devices based on metasurfaces. First, we provide an overview of the fundamental processes involved in solar energy conversion, alongside an introduction to the primary classes of metasurfaces, namely, plasmonic and dielectric metasurfaces. Subsequently, we explore the numerical tools used that guide the design of metasurfaces, focusing particularly on inverse design methods that facilitate an optimized optical response. To showcase the practical applications of metasurfaces, we present selected examples across various domains such as photovoltaics, photoelectrochemistry, photocatalysis, solar-thermal and photothermal routes, and radiative cooling. These examples highlight the ways in which metasurfaces can be leveraged to harness solar energy effectively. By tailoring the optical properties of metasurfaces, significant advancements can be expected in solar energy harvesting technologies, offering new practical solutions to support an emerging sustainable society.

Strong Plasmon-Mie Resonance in Si@Pd Core-Ω Shell Nanocavity

The surface plasmon resonance (SPR) and localized surface plasmon resonance (LSPR) can be used to enhance the generation of the hot electrons in plasmon metal nanocavity. In this paper, Pd nanomembrane (NMB) is sputtered on the surface of Si nanosphere (NS) on glass substrate to form the Si@Pd core-Ω shell nanocavity. A plasmon-Mie resonance is induced in the nanocavity by coupling the plasmon resonance with the Mie resonance to control the optical property of Si NS. When this nanocavity is excited by near-infrared-1 (NIR-1, 650 nm-900 nm) femtosecond (fs) laser, the luminescence intensity of Si NS is dramatically enhanced due to the synergistic interaction of plasmon and Mie resonance. The generation of resonance coupling regulates resonant mode of the nanocavity to realize multi-dimensional nonlinear optical response, which can be utilized in the fields of biological imaging and nanoscale light source.

Phase-to-pattern inverse design for a fast realization of a functional metasurface by combining a deep neural network and a genetic algorithm

Metasurface provides an unprecedented means to manipulate electromagnetic waves within a two-dimensional planar structure. Traditionally, the design of meta-atom follows the pattern-to-phase paradigm, which requires a time-consuming brute-forcing process. In this work, we present a fast inverse meta-atom design method for the phase-to-pattern mapping by combining the deep neural network (DNN) and genetic algorithm (GA). The trained classification DNN with an accuracy of 92% controls the population generated by the GA within an arbitrary preset small phase range, which could greatly enhance the optimization efficiency with less iterations and a higher accuracy. As proof-of-concept demonstrations, two reflective functional metasurfaces including an orbital angular momentum generator and a metalens have been numerically investigated. The simulated results agree very well with the design goals. In addition, the metalens is also experimentally validated. The proposed method could pave a new avenue for the fast design of the meta-atoms and functional meta-devices.

Immersion-Triggered Active Switch for Spin-Decoupled Meta-Optics Multi-Display

Meta-optics exhibits many promising applications in various fields of optical displays, imaging, and information encryption. However, heading towards next-generation intelligent displays, its broad implementation is critically restricted by the lack of practical active tuning capability. Beyond the conventional electrical/optical/mechanical/thermal tuning methods, liquid immersion has recently emerged as a facile mechanism for active spectral tuning. To further conquer the challenge in achieving active complicated optical-field manipulation, here, an environment-compliant switch for meta-optics multi-display is originally proposed and experimentally realized via the liquid immersion tuning scheme. By designing the spin-decoupled phase array for left-/right-handed circular polarizations, it flexibly presents quad-fold independent-encoded phase distributions for different medium-relevant and polarization-controlled channels, thus enabling four switchable holographic images through immersion tuning. Such a proposed immersion tuning design is quite a straightforward approach for meta-optics holographic displays, enjoying full-spatial usage, design flexibility, and large-scale facile implementation. Overall, the proposed liquid immersion tuning strategy for a meta-optics multi-display would strongly benefit the practical applications in biochemical sensing, environment-adaptive displays, and information encryption.

Optical Metasurfaces for Energy Conversion

Nanostructured surfaces with designed optical functionalities, such as metasurfaces, allow efficient harvesting of light at the nanoscale, enhancing light-matter interactions for a wide variety of material combinations. Exploiting light-driven matter excitations in these artificial materials opens up a new dimension in the conversion and management of energy at the nanoscale. In this review, we outline the impact, opportunities, applications, and challenges of optical metasurfaces in converting the energy of incoming photons into frequency-shifted photons, phonons, and energetic charge carriers. A myriad of opportunities await for the utilization of the converted energy. Here we cover the most pertinent aspects from a fundamental nanoscopic viewpoint all the way to applications.

Bidirectional Electromagnetically Induced Transparency Based on Coupling of Magnetic Dipole Modes in Amorphous Silicon Metasurface

A bidirectional electromagnetically induced transparency (EIT) arising from coupling of magnetic dipole modes is demonstrated numerically and experimentally based on nanoscale a-Si cuboid-bar metasurface. Analyzed by the finite-difference time-domain (FDTD) Solutions, both the bright and dark magnetic dipole mode is excited in the cuboid, while only the dark magnetic dipole mode is excited in the bar. By breaking the symmetry of the cuboid-bar structure, the destructive interference between bright and dark magnetic dipole modes is induced, resulting in the bidirectional EIT phenomenon. The position and amplitude of simulated EIT peak is adjusted by the vertical spacing and horizontal spacing. The EIT metasurface was fabricated by Electron-Beam Lithography and deep silicon etching technique on the a-Si film deposited by Plasma-Enhanced Chemical Vapor Deposition. Measured by a convergent spectrometer, the fabricated sample achieved a bidirectional EIT peak with transmission up to 65% and 63% under forward and backward incidence, respectively. Due to the enhanced magnetic field induced by the magnetic dipole resonance, the fabricated bidirectional EIT metasurface provides a potential way for magnetic sensing and magnetic nonlinearity.

Infrared all-dielectric Kerker metasurfaces

The unidirectional scattering of electromagnetic waves in the backward and forward direction, termed Kerkers' first and second conditions, respectively, is a prominent feature of sub-wavelength particles, which also has been found recently in all-dielectric metasurfaces. Here we formulate the exact polarizability requirements necessary to achieve both Kerker conditions simultaneously with dipole terms only and demonstrate its equivalence to so-called "invisible metasurfaces". We further describe the perfect absorption mechanism in all-dielectric metasurfaces through development of an extended Kerker formalism. The phenomena of both invisibility and perfect absorption is shown in a 2D hexagonal array of cylindrical resonators, where only the resonator height is modified to switch between the two states. The developed framework provides critical insight into the range of scattering response possible with all-dielectric metasurfaces, providing a methodology for studying exotic electromagnetic phenomena.

Plasmonic wavy surface for ultrathin semiconductor black absorbers

In this work, we propose and demonstrate a near-unity light absorber in the ultra-violet to near-infrared range (300-1100 nm) with the average efficiency up to 97.7%, suggesting the achievement of black absorber. The absorber consists of a wavy surface geometry, which is formed by the triple-layer of ITO (indium tin oxide)-Ge (germanium)-Cu (copper) films. Moreover, the minimal absorption is even above 90% in the wide wavelength range from 300 nm to 1015 nm, suggesting an ultra-broadband near-perfect absorption window covering the main operation range for the conventional semiconductors. Strong plasmonic resonances and the near-field coupling effects located in the spatially geometrical structure are the key contributions for the broadband absorption. The absorption properties can be well maintained during the tuning of the polarization and incident angles, indicating the high tolerance in complex electromagnetic surroundings. These findings pave new ways for achieving high-performance optoelectronic devices based on the light absorption over the full-spectrum energy gap range.

Broadened Angle-Insensitive Near-Perfect Absorber Based on Mie Resonances in Amorphous Silicon Metasurface

A broadband near-perfect absorber is analyzed by an amorphous silicon (a-Si) hook shaped nanostructure metasurface. The transmission and reflection coefficients of the metasurface are investigated in the point electric and magnetic dipole approximation. By combining square and semicircle nanostructures, the effective polarizabilities of the a-Si metasurface calculated based on discrete dipole approximation (DDA) exhibit broadened peaks of electric dipole (ED) and magnetic dipole (MD) Mie resonances. The optical spectra of the metasurface are simulated with different periods, in which suppressed transmission are shifted spectrally to overlap with each other, leading to broadened enhanced absorption induced by interference of ED and MD Mie resonances. The angle insensitive absorption of the metasurface arrives 95% in simulation and 85% in experiment in spectral range from 564 nm to 584 nm, which provides potential applicability in nano-photonic fields of energy harvesting and energy collection.

Coscinodiscus diatom inspired bi-layered photonic structures with near-perfect absorptance accompanied by tunable absorption characteristics

Inspired by the morphology of Coscinodiscus species diatom, bi-layered photonic structures comprised of dielectric-filled nano-holes of varying diameters have been designed and analyzed to enhance and tune absorption characteristics of GaAs-based thin-film photonic devices. Finite difference time domain-based numerical analysis and effective medium approximation based theoretical calculations show that by adjusting diameter and areal density of the nano-holes of the two layers, the peak absorption wavelength can be tuned over a wide spectral range, while attaining a maximum peak-absorptance value of about 97% and a maximum absorption bandwidth of ∼ 190 nm. The maximum enhancement factor of the bi-layered structure is about 11% higher than the value obtained for its equivalent single-layered counterpart over the near-ultraviolet to visible regime of the spectra. High absorptance over a wide-angle for TM polarization and tunable angle-dependent absorption characteristics for TE polarization are also obtained for the proposed ultra-thin absorbers. It has been shown that instead of having misaligned pore-centers as in Coscinodiscus species diatoms, a bi-layered structure designed with layers of identical lattice constant offers significant flexibility in terms of design and practical realization of thin-film photonic devices.

Switchable bifunctional metasurfaces: nearly perfect retroreflection and absorption at the terahertz regime

Here we make use of vanadium dioxide (VO₂) to design a bifunctional metasurface working at the same targeted frequency. With the increase of temperature, the functionality of the designed metasurface can switch from a multichannel retroreflector to a perfect absorber, caused by the phase transition of VO₂ from insulator to conductor. Different from traditional bifunctional metasurfaces designed by simple composition of two functionalities, our proposed bifunctional metasurface is based on the interaction between two functionalities. The device shows good potential for the combination of wavefront manipulation and optical absorption, therefore providing a promising approach for switchable detection and antidetection devices.

Broadened band near-perfect absorber based on amorphous silicon metasurface

A dielectric broadened band near-perfect absorber based on an amorphous silicon(a-Si) T-shaped nanostructure metasurface is investigated numerically and experimentally. The simultaneous suppressed transmission and reflection of the a-Si nanostructure metasurface are achieved by investigating the interference of the periodically adjustable electric dipole(ED) and magnetic dipole(MD) Mie resonances. The absorption of the a-Si nanostructure metasurface approaches the maximum of 95% in simulation and 80% in experiment with a top-hat shape in the spectral range from 580 nm to 620 nm by employing the T-shaped nanostructure. The proposed near-perfect absorber provides a new approach for expanding absorption bandwidth by integrating different nanostructures in metasurface, which is potentially applicable in nanophotonic fields of optical isolation, optical trapping and energy harvesting.

Present and Future of Surface-Enhanced Raman Scattering

The discovery of the enhancement of Raman scattering by molecules adsorbed on nanostructured metal surfaces is a landmark in the history of spectroscopic and analytical techniques. Significant experimental and theoretical effort has been directed toward understanding the surface-enhanced Raman scattering (SERS) effect and demonstrating its potential in various types of ultrasensitive sensing applications in a wide variety of fields. In the 45 years since its discovery, SERS has blossomed into a rich area of research and technology, but additional efforts are still needed before it can be routinely used analytically and in commercial products. In this Review, prominent authors from around the world joined together to summarize the state of the art in understanding and using SERS and to predict what can be expected in the near future in terms of research, applications, and technological development. This Review is dedicated to SERS pioneer and our coauthor, the late Prof. Richard Van Duyne, whom we lost during the preparation of this article.

Broadband Near-Infrared Absorber Based on All Metallic Metasurface

Perfect broadband absorbers have increasingly been considered as important components for controllable thermal emission, energy harvesting, modulators, etc. However, perfect absorbers which can operate over a wide optical regime is still a big challenge to achieve. Here, we propose and numerically investigate a perfect broadband near-infrared absorber based on periodic array of four isosceles trapezoid prism (FITP) unit cell made of titanium (Ti) over a continuous silver film. The structure operates with low quality (Q) factor of the localized surface plasmon resonance (LSPR) because of the intrinsic high loss, which is the foundation of the broadband absorption. The high absorption of metal nanostructures mainly comes from the power loss caused by the continuous electron transition excited by the incident light inside the metal, and the resistance loss depends on the enhanced localized electric field caused by the FITP structure. Under normal incidence, the simulated absorption is over 90% in the spectrum ranging from 895 nm to 2269 nm. The absorber is polarization-independent at normal incidence, and has more than 80% high absorption persisting up to the incident angle of ~45° at TM polarization.

Complete multipolar description of reflection and transmission across a metasurface for perfect absorption of light

Relating the electromagnetic scattering and absorption properties of an individual particle to the reflection and transmission coefficients of a two-dimensional material composed of these particles is a crucial concept that has driven both fundamental and applied physics. It is at the heart of both the characterization of material properties as well as the phase and amplitude engineering of a wave. Here we propose a multipolar description of the reflection and transmission coefficients across a monolayer of particles using a vector spherical harmonic decomposition. This enables us to provide a generalized condition for perfect absorption which occurs when both the so-called generalized Kerker condition is reached and when the superposition of odd and even multipoles reaches a critical value. Using these conditions, we are able to propose two very different designs of two-dimensional materials that perfectly absorb a plane electromagnetic wave under normal incidence. One is an infinite array of silica microspheres that operates at mid-infrared frequencies, while the other is an infinite array of germanium nano-clusters that operates at visible frequencies. Both systems operate in a deeply multipolar regime. Our findings are important to the metamaterials and metasurfaces communities who design materials mainly restricted to the dipolar behavior of individual resonators, as well as the self-assembly and nanochemistry communities who separate the individual particle synthesis from the materials assembly.

Solar harvesting based on perfect absorbing all-dielectric nanoresonators on a mirror

The high-index all-dielectric nanoantenna system is a platform recently used for multiple applications, from metalenses to light management. These systems usually exhibit low absorption/scattering ratios and are not efficient photon harvesters. Nevertheless, by exploiting far-field interference, all-dielectric nanostructures can be engineered to achieve near-perfect absorption in specific wavelength ranges. Here, we propose - based on electrodynamics simulations - that a metasurface composed of an array of hydrogenated amorphous silicon nanoparticles on a mirror can achieve nearly complete light absorption close to the bandgap. We apply this concept to a realistic device, predicting a boost of optical performance of thin-film solar cells made of such nanostructures. In the proposed device, high-index dielectric nanoparticles act not only as nanoatennas able to concentrate light but also as the solar cell active medium, contacted at its top and bottom by transparent electrodes. By optimization of the exact geometrical parameters, we predict a system that could achieve initial conversion efficiency values well beyond 9% - using only the equivalent of a 75-nm thick active material. The device absorption enhancement is 50% compared to an unstructured device in the 400 nm - 550 nm range and more than 300% in the 650 nm - 700 nm spectral region. We demonstrate that such large values are related to the metasurface properties and to the perfect absorption mechanism.

Recent Advances in MEMS Metasurfaces and Their Applications on Tunable Lens

The electromagnetic (EM) properties of metasurfaces depend on both structural design and material properties. microelectromechanical systems (MEMS) technology offers an approach for tuning metasurface EM properties by structural reconfiguration. In the past 10 years, vast applications have been demonstrated based on MEMS metasurfaces, which proved to have merits including, large tunability, fast speed, small size, light weight, capability of dense integration, and compatibility of cost-effective fabrication process. Here, recent advances in MEMS metasurface applications are reviewed and categorized based on the tuning mechanisms, operation band and tuning speed. As an example, the pros and cons of MEMS metasurfaces for tunable lens applications are discussed and compared with traditional tunable lens technologies followed by the summary and outlook.

Unravelling the Role of Electric and Magnetic Dipoles in Biosensing with Si Nanoresonators

High refractive index dielectric nanoresonators are attracting much attention due to their ability to control both electric and magnetic components of light. Due to the combination of confined modes with reduced absorption losses, they have recently been proposed as an alternative to nanoplasmonic biosensors. In this context, we study the use of semirandom silicon nanocylinder arrays, fabricated with simple and scalable colloidal lithography for the efficient and reliable detection of biomolecules in biological samples. Interestingly, electric and magnetic dipole resonances are associated with two different transduction mechanisms: extinction decrease and resonance red shift. By contrasting both observables, we identify clear advantages in tracking changes in the extinction magnitude. Our data demonstrate that, despite its simplicity, the proposed platform is able to detect prostate-specific antigen in human serum with limits of detection meeting clinical needs.

Active tuning of the Fano resonance from a Si nanosphere dimer by the substrate effect

All-dielectric materials have aroused great interest for their unique light scattering and lower losses compared with plasmonics. Generally, optical properties made by all-dielectric materials can be passively controlled by varying the geometry, size and refractive index at the design stage. Therefore, the realization of active tuning in the field of nanophotonics is important to improve the practicality and achieve light-on-chip technology in the future. Herein, we combine the high refractive index of Si and the phase transition of VO₂ to form an active tuning hybrid nanostructure with higher quality factor by depositing Si nanospheres on the VO₂ layer with an Al₂O₃ substrate. As the temperature goes up, the refractive index of the VO₂ layer switches from high to low. The scattering intensity of the magnetic dipole resonance of Si nanospheres decreases differently depending on their size, while the intensity of the electric dipole resonance remains almost unchanged. Meanwhile, Fano resonances are observed in the Si nanosphere dimers with a continuous variable Fano lineshape when adjusting the temperature. Mie theory and substrate-induced resonant magneto-electric effects are used to analyze and explain these phenomena. Tuning of the Fano resonance is attributed to the substrate effect from the interaction between Si nanospheres and phase transition of the VO₂ layer with temperature. These light scattering properties of such a hybrid nanostructure make it promising for temperature sensing or as a light source at the nanometer scale.

Three-Dimensional Electrochemical Axial Lithography on Si Micro- and Nanowire Arrays

A templated electrochemical technique for patterning macroscopic arrays of single-crystalline Si micro- and nanowires with feature dimensions down to 5 nm is reported. This technique, termed three-dimensional electrochemical axial lithography (3DEAL), allows the design and parallel fabrication of hybrid silicon nanowire arrays decorated with complex metal nano-ring architectures in a flexible and modular approach. While conventional templated approaches are based on the direct replication of a template, our method can be used to perform high-resolution lithography on pre-existing nanostructures. This is made possible by the synthesis of a porous template with tunable dimensions that guides the deposition of well-defined metallic shells around the Si wires. The synthesis of a variety of ring architectures composed of different metals (Au, Ag, Fe, and Ni) with controlled sequence, height, and position along the wire is demonstrated for both straight and kinked wires. We observe a strong enhancement of the Raman signal for arrays of Si nanowires decorated with multiple gold rings due to the plasmonic hot spots created in these tailored architectures. The uniformity of the fabrication method is evidenced by a homogeneous increase in the Raman signal throughout the macroscopic sample. This demonstrates the reliability of the method for engineering plasmonic fields in three dimensions within Si wire arrays.

Effective Optical Properties of Inhomogeneously Distributed Nanoobjects in Strong Field Gradients of Nanoplasmonic Sensors

Accurate and efficient modeling of discontinuous, randomly distributed entities is a computationally challenging task, especially in the presence of large and inhomogeneous electric near-fields of plasmons. Simultaneously, the anisotropy of sensed entities and their overlap with inhomogeneous fields means that typical effective medium approaches may fail at describing their optical properties. Here, we extend the Maxwell Garnett mixing formula to overcome this limitation by introducing a gradient within the effective medium description of inhomogeneous nanoparticle layers. The effective medium layer is divided into slices with a varying volume fraction of the inclusions and, consequently, a spatially varying effective permittivity. This preserves the interplay between an anisotropic particle distribution and an inhomogeneous electric field and enables more accurate predictions than with a single effective layer. We demonstrate the usefulness of the gradient effective medium in FDTD modeling of indirect plasmonic sensing of nanoparticle sintering. First of all, it yields accurate results significantly faster than with explicitly modeled nanoparticles. Moreover, by employing the gradient effective medium approach, we prove that the detected signal is proportional to not only the nanoparticle size but also its size dispersion and potentially shape. This implies that the simple volume fraction parameter is insufficient to properly homogenize these types of nanoparticle layers and that in order to quantify optically the state of the layer more than one independent measurement should be carried out. These findings extend beyond nanoparticle sintering and could be useful in analysis of average signals in both plasmonic and dielectric systems to unveil dynamic changes in exosomes or polymer brushes, phase changes of nanoparticles, or quantifying light absorption in plasmon assisted catalysis.

Generalized Kerker effects in nanophotonics and meta-optics [Invited]

The original Kerker effect was introduced for a hypothetical magnetic sphere, and initially it did not attract much attention due to a lack of magnetic materials required. Rejuvenated by the recent explosive development of the field of metamaterials and especially its core concept of optically-induced artificial magnetism, the Kerker effect has gained an unprecedented impetus and rapidly pervaded different branches of nanophotonics. At the same time, the concept behind the effect itself has also been significantly expanded and generalized. Here we review the physics and various manifestations of the generalized Kerker effects, including the progress in the emerging field of meta-optics that focuses on interferences of electromagnetic multipoles of different orders and origins. We discuss not only the scattering by individual particles and particle clusters, but also the manipulation of reflection, transmission, diffraction, and absorption for metalattices and metasurfaces, revealing how various optical phenomena observed recently are all ubiquitously related to the Kerker's concept.

Ultrathin Semiconductor Superabsorbers from the Visible to the Near-Infrared

The design of ultrathin semiconducting materials that achieve broadband absorption is a long-sought-after goal of crucial importance for optoelectronic applications. To date, attempts to tackle this problem consisted either of the use of strong-but narrowband-or broader-but moderate-light-trapping mechanisms. Here, a strategy that achieves broadband optimal absorption in arbitrarily thin semiconductor materials for all energies above their bandgap is presented. This stems from the strong interplay between Brewster modes, sustained by judiciously nanostructured thin semiconductors on metal films, and photonic crystal modes. Broadband near-unity absorption in Ge ultrathin films is demonstrated, which extends from the visible to the Ge bandgap in the near-infrared and is robust against angle of incidence variation. The strategy follows an easy and scalable fabrication route enabled by soft nanoimprinting lithography, a technique that allows seamless integration in many optoelectronic fabrication procedures.

Plasma-Assisted Large-Scale Nanoassembly of Metal-Insulator Bioplasmonic Mushrooms

Large-scale plasmonic substrates consisting of metal-insulator nanostructures coated with a biorecognition layer can be exploited for enhanced label-free sensing by utilizing the principle of localized surface plasmon resonance (LSPR). Most often, the uniformity and thickness of the biorecognition layer determine the sensitivity of plasmonic resonances as the inherent LSPR sensitivity of nanomaterials is limited to 10-20 nm from the surface. However, because of time-consuming nanofabrication processes, there is limited work on both the development of large-scale plasmonic materials and the subsequent surface functionalizing with biorecognition layers. In this work, by exploiting properties of reactive ions in an SF₆ plasma environment, we are able to develop a nanoplasmonic substrate containing ∼10⁶/cm² mushroom-like structures on a large-sized silicon dioxide substrate (i.e., 2.5 cm by 7.5 cm). We further investigate the underlying mechanism of the nanoassembly of gold on glass inside the plasma environment, which can be expanded to a variety of metal-insulator systems. By incorporating a novel microcontact printing technique, we deposit a highly uniform biorecognition layer of proteins on the nanoplasmonic substrate. The bioplasmonic assays performed on these substrates achieve a limit of detection of 10^-17 g/mL (∼66 zM) for biomolecules such as antibodies (∼150 kDa). Our simple nanofabrication procedure opens new opportunities in fabricating versatile bioplasmonic materials for a wide range of biomedical and sensing applications.

Metasurfaces and Colloidal Suspensions Composed of 3D Chiral Si Nanoresonators

High-refractive-index silicon nanoresonators are promising low-loss alternatives to plasmonic particles in CMOS-compatible nanophotonics applications. However, complex 3D particle morphologies are challenging to realize in practice, thus limiting the range of achievable optical functionalities. Using 3D film structuring and a novel gradient mask transfer technique, the first intrinsically chiral dielectric metasurface is fabricated in the form of a monolayer of twisted silicon nanocrescents that can be easily detached and dissolved into colloidal suspension. The metasurfaces exhibit selective handedness and a circular dichroism as large as 160° µm^-1 due to pronounced differences in induced current loops for left-handed and right-handed polarization. The detailed morphology of the detached particles is analyzed using high-resolution transmission electron microscopy. Furthermore, it is shown that the particles can be manipulated in solution using optical tweezers. The fabrication and detachment method can be extended to different nanoparticle geometries and paves the way for a wide range of novel nanophotonic experiments and applications of high-index dielectrics.