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Yousuf SMEH, Shaw SW, Feng PXL. Nonlinear coupling of closely spaced modes in atomically thin MoS 2 nanoelectromechanical resonators. MICROSYSTEMS & NANOENGINEERING 2024; 10:206. [PMID: 39730339 DOI: 10.1038/s41378-024-00844-9] [Citation(s) in RCA: 0] [Impact Index Per Article: 0] [Reference Citation Analysis] [Abstract] [Grants] [Track Full Text] [Subscribe] [Scholar Register] [Received: 06/07/2024] [Revised: 10/07/2024] [Accepted: 10/26/2024] [Indexed: 12/29/2024]
Abstract
Nanoelectromechanical systems (NEMS) incorporating atomic or molecular layer van der Waals materials can support multimode resonances and exotic nonlinear dynamics. Here we investigate nonlinear coupling of closely spaced modes in a bilayer (2L) molybdenum disulfide (MoS2) nanoelectromechanical resonator. We model the response from a drumhead resonator using equations of two resonant modes with a dispersive coupling term to describe the vibration induced frequency shifts that result from the induced change in tension. We employ method of averaging to solve the equations of coupled modes and extract an expression for the nonlinear coupling coefficient (λ) in closed form. Undriven thermomechanical noise spectral measurements are used to calibrate the vibration amplitude of mode 2 (a2) in the displacement domain. We drive mode 2 near its natural frequency and measure the shifted resonance frequency of mode 1 (f1s) resulting from the dispersive coupling. Our model yields λ = 0.027 ± 0.005 pm-2 · μs-2 from thermomechanical noise measurement of mode 1. Our model also captures an anomalous frequency shift of the undriven mode 1 due to nonlinear coupling to the driven mode 2 mediated by large dynamic tension. This study provides a direct means to quantifying λ by measuring the thermomechanical noise in NEMS and will be valuable for understanding nonlinear mode coupling in emerging resonant systems.
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Affiliation(s)
- S M Enamul Hoque Yousuf
- Department of Electrical and Computer Engineering, University of Florida, Gainesville, FL, 32611, USA
| | - Steven W Shaw
- Department of Mechanical and Civil Engineering, Florida Institute of Technology, Melbourne, FL, 32901, USA
- Department of Mechanical Engineering, Department of Physics and Astronomy, Michigan State University, East Lansing, MI, 48423, USA
| | - Philip X-L Feng
- Department of Electrical and Computer Engineering, University of Florida, Gainesville, FL, 32611, USA.
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Zhang P, Jia Y, Liu Z, Zhou X, Xiao D, Chen Y, Jia H, Yang R. Probing Linear to Nonlinear Damping in 2D Semiconductor Nanoelectromechanical Resonators toward a Unified Quality Factor Model. NANO LETTERS 2023; 23:9375-9382. [PMID: 37788247 DOI: 10.1021/acs.nanolett.3c02691] [Citation(s) in RCA: 0] [Impact Index Per Article: 0] [Reference Citation Analysis] [Abstract] [Key Words] [Track Full Text] [Subscribe] [Scholar Register] [Indexed: 10/05/2023]
Abstract
In resonant nanoelectromechanical systems (NEMS), the quality (Q) factor is essential for sensing, communication, and computing applications. While a large vibrational amplitude is useful for increasing the signal-to-noise ratio, the damping in this regime is more complex because both linear and nonlinear damping are important, and an accurate model for Q has not been fully explored. Here, we demonstrate that by combining the time-domain ringdown and frequency-domain resonance measurements, we extract the accurate Q for two-dimensional (2D) MoS2 and MoTe2 NEMS resonators at different vibration amplitudes. In particular, in the transition region between linear and nonlinear damping, Q can be precisely extracted by fitting to the ringdown characteristics. By varying AC driving, we tune the Q by ΔQ/Q = 269% and extract the nonlinear damping coefficient. We develop the dissipation model that well captures the linear to nonlinear damping, providing important insights for accurately modeling and optimizing Q in 2D NEMS resonators.
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Affiliation(s)
- Pengcheng Zhang
- University of Michigan-Shanghai Jiao Tong University Joint Institute, Shanghai Jiao Tong University, Shanghai 200240, China
| | - Yueyang Jia
- University of Michigan-Shanghai Jiao Tong University Joint Institute, Shanghai Jiao Tong University, Shanghai 200240, China
| | - Zuheng Liu
- University of Michigan-Shanghai Jiao Tong University Joint Institute, Shanghai Jiao Tong University, Shanghai 200240, China
| | - Xin Zhou
- College of Intelligence Science, National University of Defense Technology, Changsha, Hunan 410073, China
| | - Dingbang Xiao
- College of Intelligence Science, National University of Defense Technology, Changsha, Hunan 410073, China
| | - Ying Chen
- Shanghai Institute of Microsystem and Information Technology, Chinese Academy of Sciences, Shanghai 200050, China
| | - Hao Jia
- Shanghai Institute of Microsystem and Information Technology, Chinese Academy of Sciences, Shanghai 200050, China
| | - Rui Yang
- University of Michigan-Shanghai Jiao Tong University Joint Institute, Shanghai Jiao Tong University, Shanghai 200240, China
- State Key Laboratory of Radio Frequency Heterogeneous Integration, Shanghai Jiao Tong University, Shanghai 200240, China
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Keşkekler A, Arjmandi-Tash H, Steeneken PG, Alijani F. Symmetry-Breaking-Induced Frequency Combs in Graphene Resonators. NANO LETTERS 2022; 22:6048-6054. [PMID: 35904442 PMCID: PMC9373031 DOI: 10.1021/acs.nanolett.2c00360] [Citation(s) in RCA: 1] [Impact Index Per Article: 0.3] [Reference Citation Analysis] [Abstract] [Key Words] [Grants] [Track Full Text] [Subscribe] [Scholar Register] [Indexed: 05/03/2023]
Abstract
Nonlinearities are inherent to the dynamics of two-dimensional materials. Phenomena-like intermodal coupling already arise at amplitudes of only a few nanometers, and a range of unexplored effects still awaits to be harnessed. Here, we demonstrate a route for generating mechanical frequency combs in graphene resonators undergoing symmetry-breaking forces. We use electrostatic force to break the membrane's out-of-plane symmetry and tune its resonance frequency toward a one-to-two internal resonance, thus achieving strong coupling between two of its mechanical modes. When increasing the drive level, we observe splitting of the fundamental resonance peak, followed by the emergence of a frequency comb regime. We attribute the observed physics to a nonsymmetric restoring potential and show that the frequency comb regime is mediated by Neimark bifurcation of the periodic solution. These results demonstrate that mechanical frequency combs and chaotic dynamics in 2D material resonators can emerge near internal resonances due to symmetry-breaking.
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Affiliation(s)
- Ata Keşkekler
- Department
of Precision and Microsystems Engineering, Delft University of Technology, Mekelweg 2, Delft 2628 CD, The Netherlands
| | - Hadi Arjmandi-Tash
- Department
of Precision and Microsystems Engineering, Delft University of Technology, Mekelweg 2, Delft 2628 CD, The Netherlands
| | - Peter G. Steeneken
- Department
of Precision and Microsystems Engineering, Delft University of Technology, Mekelweg 2, Delft 2628 CD, The Netherlands
- Kavli
Institute of Nanoscience, Delft University
of Technology, Lorentzweg
1, Delft 2628 CJ, The Netherlands
| | - Farbod Alijani
- Department
of Precision and Microsystems Engineering, Delft University of Technology, Mekelweg 2, Delft 2628 CD, The Netherlands
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Luo W, Gao N, Liu D. Multimode Nonlinear Coupling Induced by Internal Resonance in a Microcantilever Resonator. NANO LETTERS 2021; 21:1062-1067. [PMID: 33443433 DOI: 10.1021/acs.nanolett.0c04301] [Citation(s) in RCA: 0] [Impact Index Per Article: 0] [Reference Citation Analysis] [Abstract] [Key Words] [Track Full Text] [Subscribe] [Scholar Register] [Indexed: 06/12/2023]
Abstract
Coupled resonators represent a generic model for many physical systems. In this context, a microcantilever is a multimode resonator clamped at one end, and it finds extensive application in high-precision metrology and is expected to be of great potential use in emerging quantum technologies. Here, we explore the microcantilever as a flexible platform for realizing multimode nonlinear interactions. Multimode nonlinear coupling is achieved by (1:2) internal resonance (IR) and parametric excitation with efficient coherent energy transfer. Specifically, we demonstrate abundant tunable parametric behaviors via frequency and voltage sweeps; these behaviors include mode veering, degenerate four-wave mixing (D4WM) with satellite resonances, partial amplitude suppression, acoustic frequency comb (AFC) generation, mechanically induced transparency (MIT), and normal-mode splitting. The experiments depict a new scheme for manipulating multimode microresonators with IR and parametric excitation.
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Affiliation(s)
- Wenyao Luo
- Institute of Novel Semiconductors, State Key Laboratory of Crystal Materials, Shandong University, 27 South Shanda Road, Jinan, Shandong 250100, People's Republic of China
| | - Naikun Gao
- Institute of Novel Semiconductors, State Key Laboratory of Crystal Materials, Shandong University, 27 South Shanda Road, Jinan, Shandong 250100, People's Republic of China
| | - Duo Liu
- Institute of Novel Semiconductors, State Key Laboratory of Crystal Materials, Shandong University, 27 South Shanda Road, Jinan, Shandong 250100, People's Republic of China
- Jinan Institute of Quantum Technology, Jinan, Shandong 250101, People's Republic of China
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Abstract
Two-dimensional layered crystals, including graphene and transition metal dichalcogenides, represent an interesting avenue for studying light-matter interactions at the nanoscale in confined geometries. They offer several attractive properties, such as large exciton binding energies, strong excitonic resonances, and tunable bandgaps from the visible to the near-IR along with large spin-orbit coupling, direct band gap transitions, and valley-selective responses.
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Affiliation(s)
- U Celano
- imec , Kapeldreef 75 , B-3001 Heverlee (Leuven) , Belgium
| | - N Maccaferri
- Physics and Materials Science Research Unit , University of Luxembourg , 162a avenue de la Faïencerie L-1511 Luxembourg , Luxembourg
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