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Bianki MA, Guertin R, Lemieux-Leduc C, Peter YA. Temperature Sensitivity Control of an Inkjet-Printed Optical Resonator on Pillar. ACS APPLIED MATERIALS & INTERFACES 2024; 16:5067-5074. [PMID: 38231197 DOI: 10.1021/acsami.3c14406] [Citation(s) in RCA: 0] [Impact Index Per Article: 0] [Reference Citation Analysis] [Abstract] [Key Words] [Track Full Text] [Subscribe] [Scholar Register] [Indexed: 01/18/2024]
Abstract
We report a whispering gallery mode resonator on a pillar using inkjet printing combined with traditional microfabrication techniques. This approach enables several different polymers on the same chip for sensing applications. However, polymers inherently exhibit sensitivity to multiple stimuli. To mitigate temperature sensitivity, careful selection of design parameters is crucial. By precisely tuning the undercut-to-radius ratio of the resonator, a linear dependence in temperature sensitivity ranging from -41.5 pm/°C to 23.4 pm/°C, with a zero-crossing point at 47.6% is achieved. Consequently, it is feasible to fabricate sensing devices based on undercut microdroplets with minimal temperature sensitivity. The lowest measured temperature sensitivity obtained was 5.9 pm/°C, for a resonator with an undercut-to-radius ratio of 53%.
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Affiliation(s)
- Marc-Antoine Bianki
- Department of Engineering Physics, Polytechnique Montréal, Montréal, Quebec H3T 1J4, Canada
| | - Régis Guertin
- Department of Engineering Physics, Polytechnique Montréal, Montréal, Quebec H3T 1J4, Canada
| | - Cédric Lemieux-Leduc
- Department of Engineering Physics, Polytechnique Montréal, Montréal, Quebec H3T 1J4, Canada
| | - Yves-Alain Peter
- Department of Engineering Physics, Polytechnique Montréal, Montréal, Quebec H3T 1J4, Canada
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Gu X, Fang C, Zhuang Y, Zhang D. Ultrahigh-sensitivity temperature sensor based on an elastic TPU capillary whispering gallery resonator. OPTICS LETTERS 2024; 49:310-313. [PMID: 38194556 DOI: 10.1364/ol.501540] [Citation(s) in RCA: 0] [Impact Index Per Article: 0] [Reference Citation Analysis] [Abstract] [Track Full Text] [Subscribe] [Scholar Register] [Received: 07/24/2023] [Accepted: 11/21/2023] [Indexed: 01/11/2024]
Abstract
An ultrahigh sensitivity temperature sensor based on an elastic thermoplastic urethane (TPU) capillary whispering-gallery mode (WGM) microcavity is proposed. The temperature sensor comprises a dye-doped TPU capillary and two sealed fused silica capillaries covered at both ends and is fabricated via a thin film assembly and wet etching. The fused silica capillaries limit the thermal volume expansion of the air within it. The volume of the exposed part of the elastic TPU capillary, which has an ultrahigh sensitivity to temperature compared with the thermal volume expansion of material, is increased; the designed elastic TPU capillary WGM microcavity exhibited an ultrahigh sensitivity of 11.28 nm/°C.
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Zhen Y, Tu X, Zhu J, Tong Y, Liu L, Yao N, Wang P, Tong L, Zhang L. Atomically Smooth Gold Microflake-Enabled Fiber-Tip Fabry-Perot Interferometer for Temperature and Pressure Sensing. ACS APPLIED MATERIALS & INTERFACES 2023. [PMID: 37454397 DOI: 10.1021/acsami.3c04809] [Citation(s) in RCA: 0] [Impact Index Per Article: 0] [Reference Citation Analysis] [Abstract] [Key Words] [Track Full Text] [Subscribe] [Scholar Register] [Indexed: 07/18/2023]
Abstract
Fiber-tip sensors based on the Fabry-Perot interferometer (FPI) are one of the most widely used devices for temperature and pressure measurements in space-confined scenarios. However, the deposited metal films with a polycrystalline structure tend to form microcracks under strain, which can undermine the optical quality factor and thus sensing performance of these fiber-tip sensors. Here, we demonstrate an atomically smooth gold microflake (GMF)-enabled fiber-tip FPI sensor with a Q factor as high as 628. Benefiting from the high reflectivity and flexibility of GMFs and the elasticity of the PDMS spacer, the fiber-tip FPI can maintain stable sensing performance under large deformation. For temperature sensing, the fiber-tip sensor exhibits a linear response to the temperature in the range 28-40 °C with a sensitivity as high as 1.74 nm °C-1. To realize linear and sensitive pressure sensing, we design and fabricate a PDMS clamped-beam structure on the fiber tip using a soft lithography technique, achieving a sensitivity of 11.48 nm kPa-1. Moreover, simultaneous measurement of the temperature and pressure is also demonstrated using the wavelength demodulation method. The simple and cost-effective fabrication of the clamped beam and the transferable GMFs allow for the facile integration of high-quality FP cavities on fiber tips, opening new opportunities for developing optical sensors with miniaturized sizes.
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Affiliation(s)
- Yuqi Zhen
- State Key Laboratory of Modern Optical Instrumentation, College of Optical Science and Engineering, Zhejiang University, Hangzhou 310027, China
| | - Xitao Tu
- State Key Laboratory of Modern Optical Instrumentation, College of Optical Science and Engineering, Zhejiang University, Hangzhou 310027, China
| | - Jiajie Zhu
- State Key Laboratory of Modern Optical Instrumentation, College of Optical Science and Engineering, Zhejiang University, Hangzhou 310027, China
| | - Yuanbiao Tong
- State Key Laboratory of Modern Optical Instrumentation, College of Optical Science and Engineering, Zhejiang University, Hangzhou 310027, China
| | - Lufang Liu
- State Key Laboratory of Modern Optical Instrumentation, College of Optical Science and Engineering, Zhejiang University, Hangzhou 310027, China
| | - Ni Yao
- Research Center for Humanoid Sensing, Zhejiang Lab, Hangzhou 311121, China
| | - Pan Wang
- State Key Laboratory of Modern Optical Instrumentation, College of Optical Science and Engineering, Zhejiang University, Hangzhou 310027, China
| | - Limin Tong
- State Key Laboratory of Modern Optical Instrumentation, College of Optical Science and Engineering, Zhejiang University, Hangzhou 310027, China
| | - Lei Zhang
- State Key Laboratory of Modern Optical Instrumentation, College of Optical Science and Engineering, Zhejiang University, Hangzhou 310027, China
- Research Center for Humanoid Sensing, Zhejiang Lab, Hangzhou 311121, China
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Liu D, Cai Z, Li B, Zou M, Zhang L, Hua Y, Mai J, Zhao C, Liao C, He J, Weng X, Liu L, Qu J, Wang Y. Simultaneous measurement of humidity and temperature based on fiber-tip microcantilever cascaded with fiber Bragg grating. OPTICS EXPRESS 2023; 31:8738-8747. [PMID: 36859983 DOI: 10.1364/oe.479340] [Citation(s) in RCA: 2] [Impact Index Per Article: 2.0] [Reference Citation Analysis] [Abstract] [Track Full Text] [Subscribe] [Scholar Register] [Received: 10/27/2022] [Accepted: 02/09/2023] [Indexed: 06/18/2023]
Abstract
We demonstrated a hybrid sensor of fiber Bragg grating (FBG) and Fabry-Perot interferometer (FPI) based on fiber-tip microcantilever for simultaneous measurement of temperature and humidity. The FPI was developed using femtosecond (fs) laser-induced two-photon polymerization to print the polymer microcantilever at the end of a single-mode fiber, achieving a humidity sensitivity of 0.348 nm/%RH (40% to 90%, when temperature = 25 °C ± 0.1 °C), and a temperature sensitivity of -0.356 nm/°C (25 to 70 °C, when RH% = 40% ± 1%). The FBG was line-by-line inscribed in the fiber core by fs laser micromachining, with a temperature sensitivity of 0.012 nm/ °C (25 to 70 °C, when RH% = 40% ± 1%). As the shift of FBG-peak on the reflection spectra is only sensitive to temperature rather than humidity, the ambient temperature can be directly measured by the FBG. The output of FBG can also be utilized as temperature compensation for FPI-based humidity measurement. Thus, the measured result of relative humidity can be decoupled from the total shift of FPI-dip, achieving the simultaneous measurement of humidity and temperature. Gaining the advantages of high sensitivity, compact size, easy packaging, and dual parameter measurement, this all-fiber sensing probe is anticipated to be applied as the key component for various applications involving the simultaneous measurement of temperature and humidity.
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Li B, Liao C, Cai Z, Zhou J, Zhao C, Jing L, Wang J, Xiong C, Xu L, Wang Y, Wang Y. Femtosecond laser 3D printed micro objective lens for ultrathin fiber endoscope. FUNDAMENTAL RESEARCH 2022. [DOI: 10.1016/j.fmre.2022.05.026] [Citation(s) in RCA: 0] [Impact Index Per Article: 0] [Reference Citation Analysis] [Track Full Text] [Journal Information] [Subscribe] [Scholar Register] [Indexed: 10/17/2022] Open
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