Broad-Band Polarization-Insensitive Metasurface Holography with a Single-Phase Map

Nanofabrication for Nanophotonics

Nanofabrication, a pivotal technology at the intersection of nanoscale engineering and high-resolution patterning, has substantially advanced over recent decades. This technology enables the creation of nanopatterns on substrates crucial for developing nanophotonic devices and other applications in diverse fields including electronics and biosciences. Here, this mega-review comprehensively explores various facets of nanofabrication focusing on its application in nanophotonics. It delves into high-resolution techniques like focused ion beam and electron beam lithography, methods for 3D complex structure fabrication, scalable manufacturing approaches, and material compatibility considerations. Special attention is given to emerging trends such as the utilization of two-photon lithography for 3D structures and advanced materials like phase change substances and 2D materials with excitonic properties. By highlighting these advancements, the review aims to provide insights into the ongoing evolution of nanofabrication, encouraging further research and application in creating functional nanostructures. This work encapsulates critical developments and future perspectives, offering a detailed narrative on the state-of-the-art in nanofabrication tailored for both new researchers and seasoned experts in the field.

Three-Photon Direct Laser Writing of the QD-Polymer Metasurface for Large Field-of-View Optical Holography

Conventional metasurface holography based on special structural designs is extremely sensitive to the angle of the incident light. Without complex angle optimization for metasurface units, even a small increase in the angle may lead to a rapid decrease in the diffraction efficiency and loss of imaging information. Moreover, the response spectral range of most metasurface holographies cannot be freely adjusted from ultraviolet to infrared. In this study, we prepare a quantum dot (QD)-polymer material system and introduce 1035 nm three-photon direct laser writing (DLW) technology to fabricate the QD-polymer metasurface for large field-of-view optical holography. Based on the stable light absorption characteristics and insensitivity to the angle of incident light of QDs, we achieve a binary amplitude-only holography with a large field of view of ±70°. Moreover, based on the quantum confinement effect of the QDs, the tunable broadband characteristic of the QD-polymer metasurface holography from the ultraviolet to near-infrared is demonstrated, and the binary amplitude-only holography also shows polarization independence. In addition, based on the QD-polymer material system, we can realize a Pancharatnam-Berry phase holography. DLW-processed QD-polymer metasurfaces have the potential to maintain a long-term stability. This study provides a material system and a versatile and flexible technology for realizing various nanoparticle-polymer metasurface holography with a large field of view and tunable broadband characteristics.

Single-cell bilayer design of a terahertz six-channel metasurface for simultaneous holographic and grayscale images

Metasurfaces have exhibited excellent capabilities in controlling main characteristics of electromagnetic fields. Thus, a lot of significant achievements have been attained in many areas especially in the fields of hologram and near-field imaging. However, some of these designs are implemented in a manner of interleaved subarrays that complicates the design and makes them difficult to achieve integration. Here, an innovative stacking technique of metasurface is combined with vanadium dioxide (VO2) to achieve independent imaging of six channels in terahertz band. Our research combines intensity modulation controlled by the Malus's law and phase modulation of geometry and propagation to merge amplitude, phase, and polarization manipulation of electromagnetic wave. A "six-in-one" meta-device is constructed by combining phase change properties of VO2 to realize simultaneous near-field grayscale imaging and far-field holography. This design has advantages of wide bandwidth and low crosstalk. Based on the advantage of low crosstalk, single-cell bilayer design allows the number of independent channels to be doubled within an acceptable error range. The proposed metasurface introduces a fresh viewpoint for the design of multi-purpose meta-devices, and has broad application prospects in information encryption and multi-channel image display.

Direction-Duplex Janus Metasurface for Full-Space Electromagnetic Wave Manipulation and Holography

Janus metasurfaces, a category of two-faced two-dimensional (2D) materials, are emerging as a promising platform for designing multifunctional metasurfaces by exploring the intrinsic propagation direction (k-direction) of electromagnetic waves. Their out-of-plane asymmetry is utilized for achieving distinct functions selectively excited by choosing the propagation directions, providing an effective strategy to meet the growing demand for the integration of more functionalities into a single optoelectronic device. Here, we propose the concept of direction-duplex Janus metasurface for full-space wave control yielding drastically different transmission and reflection wavefronts for the same polarized incidence with opposite k-directions. A series of Janus metasurface devices that enable asymmetric full-space wave manipulations, such as integrated metalens, beam generators, and fully direction-duplex meta-holography, are experimentally demonstrated. We envision the Janus metasurface platform proposed here to open new possibilities toward a broader exploration of creating sophisticated multifunctional meta-devices ranging from microwaves to optical systems.

Dispersion-engineered metasurfaces reaching broadband 90% relative diffraction efficiency

Dispersion results from the variation of index of refraction as well as electric field confinement in sub-wavelength structures. It usually results in efficiency decrease in metasurface components leading to troublesome scattering into unwanted directions. In this letter, by dispersion engineering, we report a set of eight nanostructures whose dispersion properties are nearly identical to each other while being capable of providing 0 to 2π full-phase coverage. Our nanostructure set enables broadband and polarization-insensitive metasurface components reaching 90% relative diffraction efficiency (normalized to the power of transmitted light) from 450 nm to 700 nm in wavelength. Relative diffraction efficiency is important at a system level - in addition to diffraction efficiency (normalized to the power of incident light) - as it considers only the transmitted optical power that can affect the signal to noise ratio. We first illustrate our design principle by a chromatic dispersion-engineered metasurface grating, then show that other metasurface components such as chromatic metalenses can also be implemented by the same set of nanostructures with significantly improved relative diffraction efficiency.

Spin-isolated ultraviolet-visible dynamic meta-holographic displays with liquid crystal modulators

Wearable displays or head-mounted displays (HMDs) have the ability to create a virtual image in the field of view of one or both eyes. Such displays constitute the main platform for numerous virtual reality (VR)- and augmented reality (AR)-based applications. Meta-holographic displays integrated with AR technology have potential applications in the advertising, media, and healthcare sectors. In the previous decade, dielectric metasurfaces emerged as a suitable choice for designing compact devices for highly efficient displays. However, the small conversion efficiency, narrow bandwidth, and costly fabrication procedures limit the device's functionalities. Here, we proposed a spin-isolated dielectric multi-functional metasurface operating at broadband optical wavelengths with high transmission efficiency in the ultraviolet (UV) and visible (Vis) regimes. The proposed metasurface comprised silicon nitride (Si₃N₄)-based meta-atoms with high bandgap, i.e., ∼ 5.9 eV, and encoded two holographic phase profiles. Previously, the multiple pieces of holographic information incorporated in the metasurfaces using interleaved and layer stacking techniques resulted in noisy and low-efficiency outputs. A single planar metasurface integrated with a liquid crystal was demonstrated numerically and experimentally in the current work to validate the spin-isolated dynamic UV-Vis holographic information at broadband wavelengths. In our opinion, the proposed metasurface can have promising applications in healthcare, optical security encryption, anti-counterfeiting, and UV-Vis nanophotonics.

A highly efficient broadband multi-functional metaplate

Due to the considerable potential of ultra-compact and highly integrated meta-optics, multi-functional metasurfaces have attracted great attention. The mergence of nanoimprinting and holography is one of the fascinating study areas for image display and information masking in meta-devices. However, existing methods rely on layering and enclosing, where many resonators combine various functions effectively at the expense of efficiency, design complication, and complex fabrication. To overcome these limitations, a novel technique for a tri-operational metasurface has been suggested by merging PB phase-based helicity-multiplexing and Malus's law of intensity modulation. To the best of our knowledge, this technique resolves the extreme-mapping issue in a single-sized scheme without increasing the complexity of the nanostructures. For proof of concept, a multi-functional metasurface built of single-sized zinc sulfide (ZnS) nanobricks is developed to demonstrate the viability of simultaneous control of near and far-field operations. The proposed metasurface successfully verifies the implementation of a multi-functional design strategy with conventional single-resonator geometry by reproducing two high-fidelity images in the far field and projecting one nanoimprinting image in the near field. This makes the proposed information multiplexing technique a potential candidate for many high-end and multi-fold optical storage, information-switching, and anti-counterfeiting applications.

Ultraviolet-Visible Multifunctional Vortex Metaplates by Breaking Conventional Rotational Symmetry

Metasurfaces have shown remarkable potential to manipulate many of light's intrinsic properties, such as phase, amplitude, and polarization. Recent advancements in nanofabrication technologies and persistent efforts from the research community result in the realization of highly efficient, broadband, and multifunctional metasurfaces. Simultaneous control of these characteristics in a single-layered metasurface will be an apparent technological extension. Here, we demonstrate a broadband multifunctional metasurface platform with the unprecedented ability to independently control the phase profile for two orthogonal polarization states of incident light over dual-wavelength spectra (ultraviolet to visible). In this work, multiple single-layered metasurfaces composed of bandgap-engineered silicon nitride nanoantennas are designed, fabricated, and optically characterized to demonstrate broadband multifunctional light manipulation ability, including structured beam generation and meta-interferometer implementation. We envision the presented metasurface platform opening new avenues for broadband multifunctional applications including ultraviolet-visible spectroscopy, spatially modulated illumination microscopy, optical data storage, and information encoding.

Single-Cell-Driven Tri-Channel Encryption Meta-Displays

Multi-functional metasurfaces have attracted great attention due to the significant possibilities to realize highly integrated and ultra-compact meta-devices. Merging nano-printing and holographic information multiplexing is one of the effective ways to achieve multi-functionality, and such a merger can increase the information encoding capacity. However, the current approaches rely on stacking layers and interleaving, where multiple resonators effectively combine different functionalities on the cost of efficiency, design complexity, and challenging fabrication. To address such challenges, a single meta-nanoresonator-based tri-functional metasurface is proposed by combining the geometric phase-based spin-decoupling and Malus's law intensity modulation. The proposed strategy effectively improves information capacity owing to the orientation degeneracy of spin-decoupling rather than layer stacking or super-cell designs. To validate the proposed strategy, a metasurface demonstrating two helicity-dependent holographic outputs is presented in far-field, whereas a continuous nano-printing image is in near-field. It is also employed on CMOS-compatible and cost-effective hydrogen amorphous silicon providing transparent responses for the whole visible band. As a result, the proposed metasurface has high transmission efficiency in the visible regime and verifies the design strategy without adding extra complexities to conventional nano-pillar geometry. Therefore, the proposed metasurface opens new avenues in multi-functional meta-devices design and has promising applications in anti-counterfeiting, optical storage and displays.​.

Nickel-Based High-Bandwidth Nanostructured Metamaterial Absorber for Visible and Infrared Spectrum

The efficient control of optical light at the nanoscale level attracts marvelous applications, including thermal imaging, energy harvesting, thermal photovoltaics, etc. These applications demand a high-bandwidth, thermally robust, angularly stable, and miniaturized absorber, which is a key challenge to be addressed. So, in this study, the simple and cost-effective solution to attain a high-bandwidth nanostructured absorber is demonstrated. The designed nanoscale absorber is composed of a simple and plain circular ring of nickel metal, which possesses many interesting features, including a miniaturized geometry, easily fabricable design, large operational bandwidth, and polarization insensitivity, over the previously presented absorbers. The proposed nanoscale absorber manifests an average absorption of 93% over a broad optical window from 400 to 2800 nm. Moreover, the detailed analysis of the absorption characteristics is also performed by exciting the optical light's various incident and polarization angles. From the examined outcome, it is concluded that the nanostructured absorber maintains its average absorption of 80% at oblique incident angles in a broad wavelength range from 400 to 2800 nm. Owing to its appealing functionalities, such as the large bandwidth, simple geometry, low cost, polarization insensitivity, and thermal robustness of the constituting metal, nickel (Ni), this nano-absorber is made as an alternative for the applications of energy harvesting, thermal photovoltaics, and emission.

Highly Efficient Perfect Vortex Beams Generation Based on All-Dielectric Metasurface for Ultraviolet Light

Featuring shorter wavelengths and high photon energy, ultraviolet (UV) light enables many exciting applications including photolithography, sensing, high-resolution imaging, and optical communication. The conventional methods of UV light manipulation through bulky optical components limit their integration in fast-growing on-chip systems. The advent of metasurfaces promised unprecedented control of electromagnetic waves from microwaves to visible spectrums. However, the availability of suitable and lossless dielectric material for the UV domain hindered the realization of highly efficient UV metasurfaces. Here, a bandgap-engineered silicon nitride (Si3N4) material is used as a best-suited candidate for all-dielectric highly efficient UV metasurfaces. To demonstrate the wavefront manipulation capability of the Si3N4 for the UV spectrum, we design and numerically simulate multiple all-dielectric metasurfaces for the perfect vortex beam generation by combing multiple phase profiles into a single device. For different numerical apertures (NA =0.3 and 0.7), it is concluded that the diffracted light from the metasurfaces with different topological charges results in an annular intensity profile with the same ring radius. It is believed that the presented Si3N4 materials and proposed design methodology for PV beam-generating metasurfaces will be applicable in various integrated optical and nanophotonic applications such as information processing, high-resolution spectroscopy, and on-chip optical communication.