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Kim BJ, Jo MS, Yang JS, Chung MK, Kim SH, Yoon JB. Quintic refractive index profile-based funnel-shaped silicon antireflective structures for enhanced photodetector performance. Sci Rep 2024; 14:10410. [PMID: 38710917 DOI: 10.1038/s41598-024-61156-6] [Citation(s) in RCA: 0] [Impact Index Per Article: 0] [Reference Citation Analysis] [Abstract] [Track Full Text] [Journal Information] [Subscribe] [Scholar Register] [Received: 02/09/2024] [Accepted: 05/02/2024] [Indexed: 05/08/2024] Open
Abstract
Antireflection, vital in optoelectronics devices such as solar cells and photodetectors, reduces light reflection and increases absorption. Antireflective structures (ARS), a primary method by which to realize this effect, control the refractive index (RI) profile based on their shape. The antireflection efficiency depends on the refractive index profile, with the quintic RI profile being recognized as ideal for superior antireflection. However, fabricating nano-sized structures with a desired shape, particularly in silicon with a quintic RI profile, has been a challenge. In this study, we introduce a funnel-shaped silicon (Si) ARS with a quintic RI profile. Its antireflective properties are demonstrated through reflectance measurements and by an application to a photodetector surface. Compared to the film Si and cone-shaped ARS types, which are common structures to achieve antireflection, the funnel-shaped ARS showed reflectance of 4.24% at 760 nm, whereas those of the film Si and cone-shaped ARS were 32.8% and 10.6%, respectively. Photodetectors with the funnel-shaped ARS showed responsivity of 0.077 A/W at 950 nm, which is 19.54 times higher than that with the film Si and 2.45 times higher than that with the cone-shaped ARS.
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Affiliation(s)
- Beom-Jun Kim
- School of Electrical Engineering, Korea Advanced Institute of Science and Technology (KAIST), 291 Daehak-ro, Yuseong-gu, Daejeon, 34141, Republic of Korea
| | - Min-Seung Jo
- School of Electrical Engineering, Korea Advanced Institute of Science and Technology (KAIST), 291 Daehak-ro, Yuseong-gu, Daejeon, 34141, Republic of Korea
- Center for Bio-Integrated Electronics, Northwestern University, 633 Clark St, Evanston, IL, 60208, USA
| | - Jae-Soon Yang
- School of Electrical Engineering, Korea Advanced Institute of Science and Technology (KAIST), 291 Daehak-ro, Yuseong-gu, Daejeon, 34141, Republic of Korea
| | - Myung-Kun Chung
- School of Electrical Engineering, Korea Advanced Institute of Science and Technology (KAIST), 291 Daehak-ro, Yuseong-gu, Daejeon, 34141, Republic of Korea
| | - Sung-Ho Kim
- School of Electrical Engineering, Korea Advanced Institute of Science and Technology (KAIST), 291 Daehak-ro, Yuseong-gu, Daejeon, 34141, Republic of Korea
| | - Jun-Bo Yoon
- School of Electrical Engineering, Korea Advanced Institute of Science and Technology (KAIST), 291 Daehak-ro, Yuseong-gu, Daejeon, 34141, Republic of Korea.
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Tai YC, An S, Huang PR, Jheng YT, Lee KC, Cheng HH, Kim M, Chang GE. Transfer-printing-enabled GeSn flexible resonant-cavity-enhanced photodetectors with strain-amplified mid-infrared optical responses. NANOSCALE 2023; 15:7745-7754. [PMID: 37000582 DOI: 10.1039/d2nr07107j] [Citation(s) in RCA: 0] [Impact Index Per Article: 0] [Reference Citation Analysis] [Abstract] [Track Full Text] [Subscribe] [Scholar Register] [Indexed: 05/05/2023]
Abstract
Mid-infrared (MIR) flexible photodetectors (FPDs) constitute an essential element for wearable applications, including health-care monitoring and biomedical detection. Compared with organic materials, inorganic semiconductors are promising candidates for FPDs owing to their superior performance as well as optoelectronic properties. Herein, for the first time, we present the use of transfer-printing techniques to enable a cost-effective, nontoxic GeSn MIR resonant-cavity-enhanced FPDs (RCE-FPDs) with strain-amplified optical responses. A narrow bandgap nontoxic GeSn nanomembrane was employed as the active layer, which was grown on a silicon-on-insulator substrate and then transfer-printed onto a polyethylene terephthalate (PET) substrate, eliminating the unwanted defects and residual compressive strain, to yield the MIR RCE-FPDs. In addition, a vertical cavity was created for the GeSn active layer to enhance the optical responsivity. Under bending conditions, significant tensile strain up to 0.274% was introduced into the GeSn active layer to effectively modulate the band structure, extend the photodetection in the MIR region, and substantially enhance the optical responsivity to 0.292 A W-1 at λ = 1770 nm, corresponding to an enhancement of 323% compared with the device under flat conditions. Moreover, theoretical simulations were performed to confirm the strain effect on the device performance. The results demonstrated high-performance, nontoxic MIR RCE-FPDs for applications in flexible photodetection.
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Affiliation(s)
- Yeh-Chen Tai
- Department of Mechanical Engineering, and Advanced Institute of Manufacturing with High-Tech Innovations (AIM-HI), National Chung Cheng University, Chiayi 62102, Taiwan.
| | - Shu An
- School of Electrical and Electronic Engineering, Nanyang Technological University, 639798 Singapore, Singapore.
| | - Po-Rei Huang
- Department of Mechanical Engineering, and Advanced Institute of Manufacturing with High-Tech Innovations (AIM-HI), National Chung Cheng University, Chiayi 62102, Taiwan.
| | - Yue-Tong Jheng
- Department of Mechanical Engineering, and Advanced Institute of Manufacturing with High-Tech Innovations (AIM-HI), National Chung Cheng University, Chiayi 62102, Taiwan.
| | - Kuo-Chih Lee
- Center for Condensed Matter Sciences, and Graduate Institute of Electronics Engineering, National Taiwan University, Taipei 10617, Taiwan
| | - Hung-Hsiang Cheng
- Center for Condensed Matter Sciences, and Graduate Institute of Electronics Engineering, National Taiwan University, Taipei 10617, Taiwan
| | - Munho Kim
- School of Electrical and Electronic Engineering, Nanyang Technological University, 639798 Singapore, Singapore.
| | - Guo-En Chang
- Department of Mechanical Engineering, and Advanced Institute of Manufacturing with High-Tech Innovations (AIM-HI), National Chung Cheng University, Chiayi 62102, Taiwan.
- Center for Condensed Matter Sciences, and Graduate Institute of Electronics Engineering, National Taiwan University, Taipei 10617, Taiwan
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Li X, Zhang J, Yue C, Tang X, Gao Z, Jiang Y, Du C, Deng Z, Jia H, Wang W, Chen H. High performance visible-SWIR flexible photodetector based on large-area InGaAs/InP PIN structure. Sci Rep 2022; 12:7681. [PMID: 35538226 PMCID: PMC9090829 DOI: 10.1038/s41598-022-11946-7] [Citation(s) in RCA: 1] [Impact Index Per Article: 0.5] [Reference Citation Analysis] [Abstract] [Track Full Text] [Download PDF] [Figures] [Journal Information] [Subscribe] [Scholar Register] [Received: 02/22/2022] [Accepted: 05/03/2022] [Indexed: 11/11/2022] Open
Abstract
Mechanically flexible optoelectronic devices and systems can enable a much broader range of applications than what their rigid counterparts can do, especially for novel bio-integrated optoelectronic systems, flexible consumer electronics and wearable sensors. Inorganic semiconductor could be a good candidate for the flexible PD when it can keep its high performance under the bending condition. Here, we demonstrate a III–V material-based flexible photodetector operating wavelength from 640 to 1700 nm with the high detectivity of 5.18 × 1011 cm‧Hz1/2/W and fast response speed @1550 nm by using a simply top-to-down fabrication process. The optoelectrical performances are stable as the PDs are exposed to bending cycles with a radius of 15 mm up to 1000 times. Furthermore, the mechanical failure mode of the PD is also investigated, which suggests that the cracking and delamination failure mode are dominant in bending up and bending down direction, respectively. Such a flexible III–V material-based PD and design with stable and high performance could be a promising strategy for the application of the flexible broad spectrum detection.
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Affiliation(s)
- Xuanzhang Li
- Key Laboratory for Renewable Energy, Beijing Key Laboratory for New Energy Materials and Devices, Beijing National Laboratory for Condensed Matter Physics, Institute of Physics, Chinese Academy of Sciences, Beijing, 100190, China.,University of Chinese Academy of Sciences, Beijing, 100049, China
| | - Junyang Zhang
- Key Laboratory for Renewable Energy, Beijing Key Laboratory for New Energy Materials and Devices, Beijing National Laboratory for Condensed Matter Physics, Institute of Physics, Chinese Academy of Sciences, Beijing, 100190, China.,University of Chinese Academy of Sciences, Beijing, 100049, China
| | - Chen Yue
- Key Laboratory for Renewable Energy, Beijing Key Laboratory for New Energy Materials and Devices, Beijing National Laboratory for Condensed Matter Physics, Institute of Physics, Chinese Academy of Sciences, Beijing, 100190, China.,University of Chinese Academy of Sciences, Beijing, 100049, China
| | - Xiansheng Tang
- Laser Institute, Qilu University of Technology (Shandong Academy of Sciences), Jinan, 250014, China
| | - Zhendong Gao
- Key Laboratory for Renewable Energy, Beijing Key Laboratory for New Energy Materials and Devices, Beijing National Laboratory for Condensed Matter Physics, Institute of Physics, Chinese Academy of Sciences, Beijing, 100190, China.,University of Chinese Academy of Sciences, Beijing, 100049, China
| | - Yang Jiang
- Key Laboratory for Renewable Energy, Beijing Key Laboratory for New Energy Materials and Devices, Beijing National Laboratory for Condensed Matter Physics, Institute of Physics, Chinese Academy of Sciences, Beijing, 100190, China.,Center of Materials and Optoelectronics Engineering, University of Chinese Academy of Sciences, Beijing, 100049, China
| | - Chunhua Du
- Key Laboratory for Renewable Energy, Beijing Key Laboratory for New Energy Materials and Devices, Beijing National Laboratory for Condensed Matter Physics, Institute of Physics, Chinese Academy of Sciences, Beijing, 100190, China.,Center of Materials and Optoelectronics Engineering, University of Chinese Academy of Sciences, Beijing, 100049, China.,The Yangtze River Delta Physics Research Center, Liyang, 213000, China
| | - Zhen Deng
- Key Laboratory for Renewable Energy, Beijing Key Laboratory for New Energy Materials and Devices, Beijing National Laboratory for Condensed Matter Physics, Institute of Physics, Chinese Academy of Sciences, Beijing, 100190, China. .,Center of Materials and Optoelectronics Engineering, University of Chinese Academy of Sciences, Beijing, 100049, China. .,The Yangtze River Delta Physics Research Center, Liyang, 213000, China.
| | - Haiqiang Jia
- Key Laboratory for Renewable Energy, Beijing Key Laboratory for New Energy Materials and Devices, Beijing National Laboratory for Condensed Matter Physics, Institute of Physics, Chinese Academy of Sciences, Beijing, 100190, China.,Center of Materials and Optoelectronics Engineering, University of Chinese Academy of Sciences, Beijing, 100049, China.,Songshan Lake Materials Laboratory, Dongguan, 523808, China
| | - Wenxin Wang
- Key Laboratory for Renewable Energy, Beijing Key Laboratory for New Energy Materials and Devices, Beijing National Laboratory for Condensed Matter Physics, Institute of Physics, Chinese Academy of Sciences, Beijing, 100190, China.,Center of Materials and Optoelectronics Engineering, University of Chinese Academy of Sciences, Beijing, 100049, China.,Songshan Lake Materials Laboratory, Dongguan, 523808, China
| | - Hong Chen
- Key Laboratory for Renewable Energy, Beijing Key Laboratory for New Energy Materials and Devices, Beijing National Laboratory for Condensed Matter Physics, Institute of Physics, Chinese Academy of Sciences, Beijing, 100190, China.,Center of Materials and Optoelectronics Engineering, University of Chinese Academy of Sciences, Beijing, 100049, China.,The Yangtze River Delta Physics Research Center, Liyang, 213000, China.,Songshan Lake Materials Laboratory, Dongguan, 523808, China
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Liang S, Dai Y, Wang G, Xia H, Zhao J. Room-temperature fabrication of SiC microwire photodetectors on rigid and flexible substrates via femtosecond laser direct writing. NANOSCALE 2020; 12:23200-23205. [PMID: 33201169 DOI: 10.1039/d0nr05299j] [Citation(s) in RCA: 2] [Impact Index Per Article: 0.5] [Reference Citation Analysis] [Abstract] [Track Full Text] [Subscribe] [Scholar Register] [Indexed: 06/11/2023]
Abstract
Flexible ultraviolet (UV) photodetectors (PDs) have gained increasing demand because of their widespread applications in wearable devices. However, difficulties associated with complicated fabrication technologies significantly limit their scope of application. Herein, via the development of a femtosecond laser direct writing (FsLDW) strategy, silicon carbide (SiC) nanoparticles are found to be assembled in a single microwire within 30 s. The surface of the deposited SiC microwire presents a three-dimensional porous structure, which is conducive to improving the responsivity of the device. The responsivity of a SiC-based microwire PD to UV light at 365 nm is found to be 55.89 A W-1 at a 1 V bias. The as-fabricated SiC microwire PDs on a glass substrate exhibit thermal stability at 350 °C, and the response speed of the PDs becomes notably faster at high temperatures, suggesting their promising applications in harsh conditions. Due to the low-temperature processing characteristics of this process, they can be prepared not only on glass substrates, but also on thermosensitive polymer substrates without an extra transfer process. Moreover, the SiC microwires prepared via FsLDW are directly deposited on the flexible substrate, and the prepared flexible SiC-based PDs can still work stably after being bent 2000 times. This research unveils a feasible way to fabricate a PD with excellent thermal stability and mechanical flexibility.
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Affiliation(s)
- Shuyu Liang
- State Key Laboratory of Integrated Optoelectronics, College of Electronic Science and Engineering, Jilin University, 2699 Qianjin Street, Changchun 130012, China.
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