Confined Growth of DNA-Assembled Superlattice Films

Nanofabrication for Nanophotonics

Nanofabrication, a pivotal technology at the intersection of nanoscale engineering and high-resolution patterning, has substantially advanced over recent decades. This technology enables the creation of nanopatterns on substrates crucial for developing nanophotonic devices and other applications in diverse fields including electronics and biosciences. Here, this mega-review comprehensively explores various facets of nanofabrication focusing on its application in nanophotonics. It delves into high-resolution techniques like focused ion beam and electron beam lithography, methods for 3D complex structure fabrication, scalable manufacturing approaches, and material compatibility considerations. Special attention is given to emerging trends such as the utilization of two-photon lithography for 3D structures and advanced materials like phase change substances and 2D materials with excitonic properties. By highlighting these advancements, the review aims to provide insights into the ongoing evolution of nanofabrication, encouraging further research and application in creating functional nanostructures. This work encapsulates critical developments and future perspectives, offering a detailed narrative on the state-of-the-art in nanofabrication tailored for both new researchers and seasoned experts in the field.

Macroscale-area patterning of three-dimensional DNA-programmable frameworks

DNA, owing to its adaptable structure and sequence-prescribed interactions, provides a versatile molecular tool to program the assembly of organized three-dimensional (3D) nanostructures with precisely incorporated inorganic and biomolecular nanoscale components. While such programmability allows for self-assembly of lattices with diverse symmetries, there is an increasing need to integrate them onto planar substrates for their translation into applications. In this study, we develop an approach for the growth of 3D DNA-programmable frameworks on arbitrarily patterned silicon wafers and metal oxide surfaces, as well as study the leading effects controlling these processes. We achieve the selective growth of DNA origami superlattices into customized surface patterns with feature sizes in the tens of microns across macroscale areas using polymer templates patterned by electron-beam lithography. We uncover the correlation between assembly conditions and superlattice orientations on surfaces, lattice domain sizes, twining, and surface coverage. The demonstrated approach opens possibilities for bridging self-assembly with traditional top-down nanofabrication for creating engineered 3D nanoscale materials over macroscopic areas with nano- and micro-scale controls.

Scalable fabrication of Chip-integrated 3D-nanostructured electronic devices via DNA-programmable assembly

DNA-based self-assembly methods have demonstrated powerful and unique capabilities to encode nanomaterial structures through the prescribed placement of inorganic and biological nanocomponents. However, the challenge of selectively growing DNA superlattices on specific locations of surfaces and their integration with conventional nanofabrication has hindered the fabrication of three-dimensional (3D) DNA-assembled functional devices. Here, we present a scalable nanofabrication technique that combines bottom-up and top-down approaches for selective growth of 3D DNA superlattices on gold microarrays. This approach allows for the fabrication of self-assembled 3D-nanostructured electronic devices. DNA strands are bound onto the gold arrays, which anchor DNA origami frames and promote ordered framework growth on the specific areas of the surface, enabling control of the lateral placement and orientation of superlattices. DNA frameworks selectively grown on the pads are subsequently templated to nanoscale silica and tin oxide (SnOx) that follow the architecture, as confirmed by structural and chemical characterizations. The fabricated SnOx superlattices are integrated into devices that demonstrate photocurrent response.

Controllable synthesis of star-shaped FeCoMnOx nanocrystals and their self-assembly into superlattices with low-packing densities

We present a novel method for synthesizing monodisperse, star-shaped FeCoMnOx nanocrystals with tunable concavity. Through liquid-air interfacial assembly, these colloidal nanostars can form two-dimensional superlattices, which are characterized by low packing densities. Notably, the ability to adjust the degree of concavity of nanostars allows for the tuning of the packing symmetry of the assembled superlattices.

Controlling Colloidal Crystal Nucleation and Growth with Photolithographically Defined Templates

Colloidal crystallization provides a means to synthesize hierarchical nanostructures by design and to use these complex structures for nanodevice fabrication. In particular, DNA provides a means to program interactions between particles with high specificity, thereby enabling the formation of particle superlattice crystallites with tailored unit cell geometries and surface faceting. However, while DNA provides precise control of particle-particle bonding interactions, it does not inherently present a means of controlling higher-level structural features such as the size, shape, position, or orientation of a colloidal crystallite. While altering assembly parameters such as temperature or concentration can enable limited control of crystallite size and geometry, integrating colloidal assemblies into nanodevices requires better tools to manipulate higher-order structuring and improved understanding of how these tools control the fundamental kinetics and mechanisms of colloidal crystal growth. In this work, photolithography is used to produce patterned substrates that can manipulate the placement, size, dispersity, and orientation of colloidal crystals. By adjusting aspects of the pattern, such as feature size and separation, we reveal a diffusion-limited mechanism governing crystal nucleation and growth. Leveraging this insight, patterns are designed that can produce wafer-scale substrates with arrays of nanoparticle superlattices of uniform size and shape. These design principles therefore bridge a gap between a fundamental understanding of nanoparticle assembly and the fabrication of nanostructures compatible with functional devices.

Self-Assembling Systems for Optical Out-of-Plane Coupling Devices

Micromirrors are used in integrated photonics to couple extraplanar light into the planar structure of a device by redirecting light via specular reflection. Compared with grating or prism-based couplers, micromirrors allow for coupling of light over a broader range of wavelengths, provided that the micromirror is fabricated with a specific 3D shape to ensure proper reflection angles. In principle, self-assembly methods could enable reliable, parallelizable fabrication of such devices with a high degree of precision by designing self-assembling components that produce the desired microscale geometry as their thermodynamic products. In this work, we use DNA-functionalized nanoparticles to assemble faceted crystallites with predetermined crystal shapes, and demonstrate with microscale retroreflectance measurements that these self-assembled nanoparticle arrays do indeed behave like optically flat mirrors. Furthermore, we show that the tilt angle of the micromirrors can be intentionally controlled by altering the crystallographic symmetry and preferred crystal orientations as a function of the self-assembly process, thereby altering the resulting specular angle in a programmable manner. Measurements of optical coupling from normal incidence into the substrate plane via an optical fiber confirm that the faceted structures can function as optical out-of-plane coupling devices, and coating these structures with reflective materials allows for high efficiency of light reflection in addition to the angular control. Together, these experiments demonstrate how self-assembled nanoparticle materials can be used to generate optically relevant architectures, enabling a significant step in the development of self-assembly as a materials fabrication tool for integrated optical devices.

Arrays of Colloidal Single Crystals Engineered with DNA in Lithographically Defined Microwells

Lithographically defined microwell templates are used to study DNA-guided colloidal crystal assembly parameters, including superlattice position, habit orientation, and size, in an effort to increase our understanding of the crystallization process. In addition to enabling the synthesis of arrays of individual superlattices in arbitrary predefined patterns, the technique allows one to study the growth pathways of the crystals via ex situ scanning electron microscopy. Importantly, a Volmer-Weber (VM) (island formation)-like growth mode is identified, which has been reproduced via simulations. Notably, both experiment and simulation reveal that the crystallites merge and reorient within the microwells that defined the crystal growth to form single-crystalline structures, an observation not common for VM pathways. The control afforded by this platform will facilitate efforts in constructing metamaterials from colloidal crystals as well as their integration into optical devices and applications.