Micromechanical Bolometers for Subterahertz Detection at Room Temperature

Comparative analysis of nanomechanical resonators: sensitivity, response time, and practical considerations in photothermal sensing

Nanomechanical photothermal sensing has significantly advanced single-molecule/particle microscopy and spectroscopy, and infrared detection. In this approach, the nanomechanical resonator detects shifts in resonant frequency due to photothermal heating. However, the relationship between photothermal sensitivity, response time, and resonator design has not been fully explored. This paper compares three resonator types - strings, drumheads, and trampolines - to explore this relationship. Through theoretical modeling, experimental validation, and finite element method simulations, we find that strings offer the highest sensitivity (with a noise equivalent power of 280 fW/Hz1/2 for strings made of silicon nitride), while drumheads exhibit the fastest thermal response. The study reveals that photothermal sensitivity correlates with the average temperature rise and not the peak temperature. Finally, the impact of photothermal back-action is discussed, which can be a major source of frequency instability. This work clarifies the performance differences and limits among resonator designs and guides the development of advanced nanomechanical photothermal sensors, benefiting a wide range of applications.

Enhanced Terahertz Sensing via On-Chip Integration of Diffractive Optics with InGaAs Bow-Tie Detectors

The practical implementation of terahertz (THz) imaging and spectroscopic systems in real operational conditions requires them to be of a compact size, to have enhanced functionality, and to be user-friendly. This work demonstrates the single-sided integration of Fresnel-zone-plate-based optical elements with InGaAs bow-tie diodes directly on a semiconductor chip. Numerical simulations were conducted to optimize the Fresnel zone plate's focal length and the InP substrate's thickness to achieve constructive interference at 600 GHz, room-temperature operation and achieve a sensitivity more than an order of magnitude higher-up to 24.5 V/W-than that of a standalone bow-tie detector. Investigations revealed the strong angular dependence of the incident radiation on the Fresnel zone plate-integrated bow-tie diode's response. These findings pave a promising avenue for the further development of single-sided integration of flat optics with THz detectors, enabling improved sensitivity, simplified manufacturing processes, and reduced costs for THz detection systems in a more compact design scheme.

Highly dispersive multiplexed micromechanical device array for spatially resolved sensing and actuation

The powerful resource of parallelizing simple devices for realizing and enhancing complex operations comes with the drawback of multiple connections for addressing and controlling the individual elements. Here we report on a technological platform where several mechanical resonators can be individually probed and electrically actuated by using dispersive multiplexing within a single electrical channel. We demonstrate room temperature control of the individual device vibrational motion and spatially-resolved readouts. As the single elements have proven to be excellent bolometers and individual nodes for reservoir computing, our platform can be directly employed for single-channel addressing of multiple devices, with immediate applications for far-infrared cameras, spatial light modulators and recurrent neural networks operating at room temperature.

FPGA Readout for Frequency-Multiplexed Array of Micromechanical Resonators for Sub-Terahertz Imaging

Field programmable gate arrays (FPGAs) have not only enhanced traditional sensing methods, such as pixel detection (CCD and CMOS), but also enabled the development of innovative approaches with significant potential for particle detection. This is particularly relevant in terahertz (THz) ray detection, where microbolometer-based focal plane arrays (FPAs) using microelectromechanical (MEMS) resonators are among the most promising solutions. Designing high-performance, high-pixel-density sensors is challenging without FPGAs, which are crucial for deterministic parallel processing, fast ADC/DAC control, and handling large data throughput. This paper presents a MEMS-resonator detector, fully managed via an FPGA, capable of controlling pixel excitation and tracking resonance-frequency shifts due to radiation using parallel digital lock-in amplifiers. The innovative FPGA architecture, based on a lock-in matrix, enhances the open-loop readout technique by a factor of 32. Measurements were performed on a frequency-multiplexed, 256-pixel sensor designed for imaging applications.

A Review of Thermal Detectors of THz Radiation Operated at Room Temperature

This article concerns optical detection issues in the terahertz (THz) range. This is a kind of guide to various types of uncooled thermal detectors in the most often applications. Particular attention is paid to the principle of their operation, technology, and practical features. In addition, some detection methods were also characterized by comparing their performances. The article ends with a performance summary of the selected THz thermal detectors.

Ultra-broadband absorbance of nanometer-thin pyrolyzed-carbon film on silicon nitride membrane

Fifty percents absorption by thin film, with thickness is much smaller than the skin depth and optical thickness much smaller than the wavelength, is a well-known concept of classical electrodynamics. This is a valuable feature that has been numerously widely explored for metal films, while chemically inert nanomembranes are a real fabrication challenge. Here we report the 20 nm thin pyrolyzed carbon film (PyC) placed on 300 nm thick silicon nitride (Si3N4) membrane demonstrating an efficient broadband absorption in the terahertz and near infrared ranges. While the bare Si3N4membrane is completely transparent in the THz range, the 20 nm thick PyC layer increases the absorption of the PyC coated Si3N4membrane to 40%. The reflection and transmission spectra in the near infrared region reveal that the PyC film absorption persists to a level of at least 10% of the incident power. Such a broadband absorption of the PyC film opens new pathways toward broadband bolometric radiation detectors.

Multilayer Bolometric Structures for Efficient Wideband Communication Signal Reception

It is known that the dielectric layer (resonator) located behind the conducting plate of the bolometer system can significantly increase its sensitivity near the resonance frequencies. In this paper, the possibility of receiving broadband electromagnetic signals in a multilayer bolometric meta-material made of alternating conducting (e.g., silicon semiconductor) and dielectric layers is demonstrated both experimentally and numerically. It is shown that such a multilayer structure acts as a lattice of resonators and can significantly increase the width of the frequency band of efficient electromagnetic energy absorption. The parameters of the dielectric and semiconductor layers determine the frequency bands. Numerical modeling of the effect has been carried out under the conditions of our experiment. The numerical results show acceptable qualitative agreement with the experimental data. This study develops the previously proposed technique of resonant absorption of electromagnetic signals in bolometric structures.

Terahertz Detectors Using Microelectromechanical System Resonators

The doubly clamped microelectromechanical system (MEMS) beam resonators exhibit extremely high sensitivity to tiny changes in the resonance frequency owing to their high quality (Q-) factors, even at room temperature. Such a sensitive frequency-shift scheme is very attractive for fast and highly sensitive terahertz (THz) detection. The MEMS resonator absorbs THz radiation and induces a temperature rise, leading to a shift in its resonance frequency. This frequency shift is proportional to the amount of THz radiation absorbed by the resonator and can be detected and quantified, thereby allowing the THz radiation to be measured. In this review, we present an overview of the THz bolometer based on the doubly clamped MEMS beam resonators in the aspects of working principle, readout, detection speed, sensitivity, and attempts at improving the performance. This allows one to have a comprehensive view of such a novel THz detector.

Peculiarities of Resonant Absorption of Electromagnetic Signals in Multilayer Bolometric Sensors

We examine the effect of resonant absorption of electromagnetic signals in a silicon semiconductor plasma layer when the dielectric plate is placed behind it both experimentally and numerically. It is shown that such plate acts as a dielectric resonator and can significantly increase the electromagnetic energy absorption in the semiconductor for certain frequencies determined by the dielectric plate parameters. Numerical modelling of the effect is performed under the conditions of conducted experiment. The numerical results are found to be in qualitative agreement with experimental ones. This study confirms the proposed earlier method of increasing the efficiency of bolometric-type detectors of electromagnetic radiation.