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For: de Theije FK, Balkenende AR, Verheijen MA, Baklanov MR, Mogilnikov KP, Furukawa Y. Structural Characterization of Mesoporous Organosilica Films for Ultralow-k Dielectrics. J Phys Chem B 2003. [DOI: 10.1021/jp027701y] [Citation(s) in RCA: 103] [Impact Index Per Article: 4.9] [Reference Citation Analysis] [What about the content of this article? (0)] [Track Full Text] [Journal Information] [Subscribe] [Scholar Register] [Indexed: 11/29/2022]
Number Cited by Other Article(s)
1
Laskowski Ł, Laskowska M, Vila N, Schabikowski M, Walcarius A. Mesoporous Silica-Based Materials for Electronics-Oriented Applications. Molecules 2019;24:molecules24132395. [PMID: 31261814 PMCID: PMC6651352 DOI: 10.3390/molecules24132395] [Citation(s) in RCA: 26] [Impact Index Per Article: 5.2] [Reference Citation Analysis] [Abstract] [Key Words] [MESH Headings] [Track Full Text] [Download PDF] [Figures] [Journal Information] [Subscribe] [Scholar Register] [Received: 05/28/2019] [Revised: 06/21/2019] [Accepted: 06/21/2019] [Indexed: 11/29/2022]  Open
2
Hong MH, Han W, Lee KY, Park HH. The thermoelectric properties of Au nanoparticle-incorporated Al-doped mesoporous ZnO thin films. ROYAL SOCIETY OPEN SCIENCE 2019;6:181799. [PMID: 31218027 PMCID: PMC6549978 DOI: 10.1098/rsos.181799] [Citation(s) in RCA: 0] [Impact Index Per Article: 0] [Reference Citation Analysis] [Abstract] [Key Words] [Grants] [Track Full Text] [Figures] [Subscribe] [Scholar Register] [Received: 11/07/2018] [Accepted: 03/26/2019] [Indexed: 06/09/2023]
3
Hong MH, Park CS, Han W, Yoo B, Park HH. Electrical Properties of Mesoporous TiO2 Nanocomposite Thin Films Incorporated with Au Nanoparticles by Simple One-pot Synthesis. CHEM LETT 2015. [DOI: 10.1246/cl.150658] [Citation(s) in RCA: 2] [Impact Index Per Article: 0.2] [Reference Citation Analysis] [Track Full Text] [Journal Information] [Subscribe] [Scholar Register] [Indexed: 11/12/2022]
4
Joseph AM, Nagendra B, Surendran KP, Gowd EB. Syndiotactic Polystyrene/Hybrid Silica Spheres of POSS Siloxane Composites Exhibiting Ultralow Dielectric Constant. ACS APPLIED MATERIALS & INTERFACES 2015;7:19474-83. [PMID: 26287385 DOI: 10.1021/acsami.5b05933] [Citation(s) in RCA: 24] [Impact Index Per Article: 2.7] [Reference Citation Analysis] [Abstract] [Key Words] [Track Full Text] [Subscribe] [Scholar Register] [Indexed: 05/28/2023]
5
Carboni D, Pinna A, Amenitsch H, Casula MF, Loche D, Malfatti L, Innocenzi P. Getting order in mesostructured thin films, from pore organization to crystalline walls, the case of 3-glycidoxypropyltrimethoxysilane. Phys Chem Chem Phys 2015;17:10679-86. [DOI: 10.1039/c5cp00433k] [Citation(s) in RCA: 8] [Impact Index Per Article: 0.9] [Reference Citation Analysis] [Abstract] [Track Full Text] [Journal Information] [Subscribe] [Scholar Register] [Indexed: 11/21/2022]
6
Yuan C, Wang J, Jin K, Diao S, Sun J, Tong J, Fang Q. Postpolymerization of Functional Organosiloxanes: An Efficient Strategy for Preparation of Low-k Material with Enhanced Thermostability and Mechanical Properties. Macromolecules 2014. [DOI: 10.1021/ma501263c] [Citation(s) in RCA: 56] [Impact Index Per Article: 5.6] [Reference Citation Analysis] [Track Full Text] [Journal Information] [Subscribe] [Scholar Register] [Indexed: 01/22/2023]
7
Innocenzi P, Malfatti L. Mesoporous thin films: properties and applications. Chem Soc Rev 2013;42:4198-216. [PMID: 23396534 DOI: 10.1039/c3cs35377j] [Citation(s) in RCA: 239] [Impact Index Per Article: 21.7] [Reference Citation Analysis] [Track Full Text] [Journal Information] [Subscribe] [Scholar Register] [Indexed: 12/29/2022]
8
Suzuki N, Huang YT, Nemoto Y, Nakahira A, Yamauchi Y. Highly Densified Mesoporous Bulk Silica Prepared with Colloidal Mesoporous Silica Nanoparticles toward a New Low-k Material. CHEM LETT 2012. [DOI: 10.1246/cl.2012.1518] [Citation(s) in RCA: 3] [Impact Index Per Article: 0.3] [Reference Citation Analysis] [Track Full Text] [Journal Information] [Subscribe] [Scholar Register] [Indexed: 11/12/2022]
9
Lu HY, Kung CH, Wan BZ. Crystallinity control of zeolite nanoparticles for the preparation of mesoporous low-k films through a fast hydrothermal process. J Taiwan Inst Chem Eng 2012. [DOI: 10.1016/j.jtice.2012.07.006] [Citation(s) in RCA: 5] [Impact Index Per Article: 0.4] [Reference Citation Analysis] [Track Full Text] [Journal Information] [Subscribe] [Scholar Register] [Indexed: 10/27/2022]
10
Sasikala TS, Nair BP, Pavithran C, Sebastian MT. Improved dielectric and mechanical properties of polystyrene-hybrid silica sphere composite induced through bifunctionalization at the interface. LANGMUIR : THE ACS JOURNAL OF SURFACES AND COLLOIDS 2012;28:9742-9747. [PMID: 22616660 DOI: 10.1021/la300743e] [Citation(s) in RCA: 3] [Impact Index Per Article: 0.3] [Reference Citation Analysis] [Abstract] [Track Full Text] [Subscribe] [Scholar Register] [Indexed: 06/01/2023]
11
Ghazzal MN, Joseph M, Kebaili H, De Coninck J, Gaigneaux EM. Tuning the selectivity and sensitivity of mesoporous dielectric multilayers by modifiying the hydrophobic–hydrophilic balance of the silica layer. ACTA ACUST UNITED AC 2012. [DOI: 10.1039/c2jm33692h] [Citation(s) in RCA: 17] [Impact Index Per Article: 1.4] [Reference Citation Analysis] [Track Full Text] [Journal Information] [Subscribe] [Scholar Register] [Indexed: 11/21/2022]
12
El Kadib A, Katir N, Bousmina M, Majoral JP. Dendrimer–silica hybrid mesoporous materials. NEW J CHEM 2012. [DOI: 10.1039/c1nj20443b] [Citation(s) in RCA: 46] [Impact Index Per Article: 3.8] [Reference Citation Analysis] [Track Full Text] [Journal Information] [Subscribe] [Scholar Register] [Indexed: 01/27/2023]
13
Kim DH, Yim JH. A study on the Initial Nanopore Formation in the Calix Arene Based Porogen Templated Porous Thin Film. KOREAN CHEMICAL ENGINEERING RESEARCH 2011. [DOI: 10.9713/kcer.2011.49.5.669] [Citation(s) in RCA: 0] [Impact Index Per Article: 0] [Reference Citation Analysis] [Track Full Text] [Journal Information] [Subscribe] [Scholar Register] [Indexed: 11/23/2022]
14
Lu HY, Teng CL, Kung CH, Wan BZ. Preparing Mesoporous Low-k Films with High Mechanical Strength from Noncrystalline Silica Particles. Ind Eng Chem Res 2011. [DOI: 10.1021/ie1018436] [Citation(s) in RCA: 10] [Impact Index Per Article: 0.8] [Reference Citation Analysis] [Track Full Text] [Journal Information] [Subscribe] [Scholar Register] [Indexed: 11/30/2022]
15
Kanamori K, Nakanishi K. Controlled pore formation in organotrialkoxysilane-derived hybrids: from aerogels to hierarchically porous monoliths. Chem Soc Rev 2011;40:754-70. [DOI: 10.1039/c0cs00068j] [Citation(s) in RCA: 177] [Impact Index Per Article: 13.6] [Reference Citation Analysis] [Track Full Text] [Journal Information] [Subscribe] [Scholar Register] [Indexed: 11/21/2022]
16
Lu HY, Teng CL, Yu CW, Liu YC, Wan BZ. Addition of Surfactant Tween 80 in Coating Solutions for Making Mesoporous Pure Silica Zeolite MFI Low-k Films. Ind Eng Chem Res 2010. [DOI: 10.1021/ie100203e] [Citation(s) in RCA: 18] [Impact Index Per Article: 1.3] [Reference Citation Analysis] [Track Full Text] [Journal Information] [Subscribe] [Scholar Register] [Indexed: 11/28/2022]
17
Volksen W, Miller RD, Dubois G. Low dielectric constant materials. Chem Rev 2010;110:56-110. [PMID: 19961181 DOI: 10.1021/cr9002819] [Citation(s) in RCA: 322] [Impact Index Per Article: 23.0] [Reference Citation Analysis] [Track Full Text] [Journal Information] [Subscribe] [Scholar Register] [Indexed: 11/30/2022]
18
A Technique for Converting Perhydropolysilazane to SiO[sub x] at Low Temperature. ACTA ACUST UNITED AC 2010. [DOI: 10.1149/1.3264092] [Citation(s) in RCA: 13] [Impact Index Per Article: 0.9] [Reference Citation Analysis] [Track Full Text] [Journal Information] [Subscribe] [Scholar Register] [Indexed: 11/16/2022]
19
Kiba S, Okawauchi Y, Yanagihara T, Murakami M, Shimizu T, Yamauchi Y. Mesoporous silica/polymer composites utilizing intelligent caps onto mesopore walls toward practical low-dielectric materials. Chem Asian J 2009;4:1798-1801. [PMID: 19876999 DOI: 10.1002/asia.200900267] [Citation(s) in RCA: 21] [Impact Index Per Article: 1.4] [Reference Citation Analysis] [Track Full Text] [Journal Information] [Subscribe] [Scholar Register] [Indexed: 11/05/2022]
20
Guo X, Zhang F, Xu S, Cui Z, Evans DG, Duan X. Effects of Varying the Preparation Conditions on the Dielectric Constant of Mixed Metal Oxide Films Derived from Layered Double Hydroxide Precursor Films. Ind Eng Chem Res 2009. [DOI: 10.1021/ie900671b] [Citation(s) in RCA: 16] [Impact Index Per Article: 1.1] [Reference Citation Analysis] [Track Full Text] [Journal Information] [Subscribe] [Scholar Register] [Indexed: 11/30/2022]
21
Chen HT, Crosby TA, Park MH, Nagarajan S, Rotello VM, Watkins JJ. Accessibility of cylindrical channels within patterned mesoporous silica films using nanoparticle diffusion. ACTA ACUST UNITED AC 2009. [DOI: 10.1039/b815055a] [Citation(s) in RCA: 13] [Impact Index Per Article: 0.9] [Reference Citation Analysis] [Track Full Text] [Journal Information] [Subscribe] [Scholar Register] [Indexed: 11/21/2022]
22
Kim CS, Jeong HD. What Originates the Dielectric Permittivity of Silicate-Silsesquioxane Hybrid Thin Films? J Phys Chem B 2008;112:16257-60. [DOI: 10.1021/jp808529q] [Citation(s) in RCA: 16] [Impact Index Per Article: 1.0] [Reference Citation Analysis] [Track Full Text] [Journal Information] [Subscribe] [Scholar Register] [Indexed: 11/28/2022]
23
Mesoporous Thin Films: An Example of Pore Engineered Material. ACTA ACUST UNITED AC 2008. [DOI: 10.4028/www.scientific.net/kem.391.109] [Citation(s) in RCA: 3] [Impact Index Per Article: 0.2] [Reference Citation Analysis] [Abstract] [Track Full Text] [Journal Information] [Subscribe] [Scholar Register] [Indexed: 11/21/2022]
24
Bass JD, Grosso D, Boissiere C, Sanchez C. Pyrolysis, Crystallization, and Sintering of Mesostructured Titania Thin Films Assessed by in Situ Thermal Ellipsometry. J Am Chem Soc 2008;130:7882-97. [DOI: 10.1021/ja078140x] [Citation(s) in RCA: 90] [Impact Index Per Article: 5.6] [Reference Citation Analysis] [Track Full Text] [Journal Information] [Subscribe] [Scholar Register] [Indexed: 01/30/2023]
25
Kuge H, Hagiwara Y, Shimojima A, Kuroda K. Oligomeric Alkoxysilanes with Cagelike Hybrids as Cores: Designed Precursors of Nanohybrid Materials. Chem Asian J 2008;3:600-606. [DOI: 10.1002/asia.200700242] [Citation(s) in RCA: 14] [Impact Index Per Article: 0.9] [Reference Citation Analysis] [Track Full Text] [Journal Information] [Subscribe] [Scholar Register] [Indexed: 11/05/2022]
26
Bok S, Lubguban AA, Gao Y, Bhattacharya S, Korampally V, Hossain M, Gillis KD, Gangopadhyay S. Electrochemical Properties of Carbon Nanoparticles Entrapped in Silica Matrix. JOURNAL OF THE ELECTROCHEMICAL SOCIETY 2008;155:K91-K95. [PMID: 18953420 PMCID: PMC2572077 DOI: 10.1149/1.2868772] [Citation(s) in RCA: 9] [Impact Index Per Article: 0.6] [Reference Citation Analysis] [Abstract] [Grants] [Track Full Text] [Subscribe] [Scholar Register] [Indexed: 05/27/2023]
27
Farrell RA, Petkov N, Amenitsch H, Holmes JD, Morris MA. Thin and continuous films with controlled bi- and tri-modal porosities by embedment of zeolite nanoparticles in a mesoporous matrix. ACTA ACUST UNITED AC 2008. [DOI: 10.1039/b800924d] [Citation(s) in RCA: 10] [Impact Index Per Article: 0.6] [Reference Citation Analysis] [Track Full Text] [Journal Information] [Subscribe] [Scholar Register] [Indexed: 11/21/2022]
28
Keagy JA, Li Y, Green PF, Johnston KP, Weber F, Rhoad JT, Busch EL, Wolf PJ. CO2 promotes penetration and removal of aqueous hydrocarbon surfactant cleaning solutions and silylation in low-k dielectrics with 3nm pores. J Supercrit Fluids 2007. [DOI: 10.1016/j.supflu.2007.02.007] [Citation(s) in RCA: 12] [Impact Index Per Article: 0.7] [Reference Citation Analysis] [Track Full Text] [Journal Information] [Subscribe] [Scholar Register] [Indexed: 10/23/2022]
29
Matheron M, Gacoin T, Boilot JP. Stabilization of well-organized transient micellar phases in CTAB-templated silica and organosilica thin films. SOFT MATTER 2007;3:223-229. [PMID: 32680269 DOI: 10.1039/b612408a] [Citation(s) in RCA: 5] [Impact Index Per Article: 0.3] [Reference Citation Analysis] [Abstract] [Track Full Text] [Subscribe] [Scholar Register] [Indexed: 06/11/2023]
30
Kanamori K, Nakanishi K, Hanada T. Thick silica gel coatings on methylsilsesquioxane monoliths using anisotropic phase separation. J Sep Sci 2006;29:2463-70. [PMID: 17154126 DOI: 10.1002/jssc.200600163] [Citation(s) in RCA: 24] [Impact Index Per Article: 1.3] [Reference Citation Analysis] [Abstract] [Track Full Text] [Journal Information] [Subscribe] [Scholar Register] [Indexed: 11/11/2022]
31
Soler-Illia GJAA, Innocenzi P. Mesoporous Hybrid Thin Films: The Physics and Chemistry Beneath. Chemistry 2006;12:4478-94. [PMID: 16429466 DOI: 10.1002/chem.200500801] [Citation(s) in RCA: 199] [Impact Index Per Article: 11.1] [Reference Citation Analysis] [Abstract] [MESH Headings] [Track Full Text] [Journal Information] [Subscribe] [Scholar Register] [Indexed: 11/07/2022]
32
Boissiere C, Grosso D, Lepoutre S, Nicole L, Bruneau AB, Sanchez C. Porosity and mechanical properties of mesoporous thin films assessed by environmental ellipsometric porosimetry. LANGMUIR : THE ACS JOURNAL OF SURFACES AND COLLOIDS 2005;21:12362-71. [PMID: 16343015 DOI: 10.1021/la050981z] [Citation(s) in RCA: 87] [Impact Index Per Article: 4.6] [Reference Citation Analysis] [Abstract] [Track Full Text] [Subscribe] [Scholar Register] [Indexed: 05/05/2023]
33
Falcaro P, Costacurta S, Mattei G, Amenitsch H, Marcelli A, Guidi MC, Piccinini M, Nucara A, Malfatti L, Kidchob T, Innocenzi P. Highly Ordered “Defect-Free” Self-Assembled Hybrid Films with a Tetragonal Mesostructure. J Am Chem Soc 2005;127:3838-46. [PMID: 15771519 DOI: 10.1021/ja0427956] [Citation(s) in RCA: 64] [Impact Index Per Article: 3.4] [Reference Citation Analysis] [Abstract] [Track Full Text] [Journal Information] [Subscribe] [Scholar Register] [Indexed: 11/28/2022]
34
Hsueh HS, Yang CT, Zink JI, Huang MH. Formation of Titanium Nitride Nanoparticles within Mesoporous Silica SBA-15. J Phys Chem B 2005;109:4404-9. [PMID: 16851509 DOI: 10.1021/jp045755x] [Citation(s) in RCA: 48] [Impact Index Per Article: 2.5] [Reference Citation Analysis] [Abstract] [Track Full Text] [Journal Information] [Subscribe] [Scholar Register] [Indexed: 11/28/2022]
35
Nicole L, Boissière C, Grosso D, Quach A, Sanchez C. Mesostructured hybrid organic–inorganic thin films. ACTA ACUST UNITED AC 2005. [DOI: 10.1039/b506072a] [Citation(s) in RCA: 288] [Impact Index Per Article: 15.2] [Reference Citation Analysis] [Track Full Text] [Journal Information] [Subscribe] [Scholar Register] [Indexed: 11/21/2022]
36
Edler KJ. Current Understanding of Formation Mechanisms in Surfactant-Templated Materials. Aust J Chem 2005. [DOI: 10.1071/ch05141] [Citation(s) in RCA: 42] [Impact Index Per Article: 2.2] [Reference Citation Analysis] [Abstract] [Track Full Text] [Journal Information] [Subscribe] [Scholar Register] [Indexed: 11/23/2022]
37
Matheron M, Bourgeois A, Brunet-Bruneau A, Albouy PA, Biteau J, Gacoin T, Boilot JP. Highly ordered CTAB-templated organosilicate films. ACTA ACUST UNITED AC 2005. [DOI: 10.1039/b510554d] [Citation(s) in RCA: 36] [Impact Index Per Article: 1.9] [Reference Citation Analysis] [Track Full Text] [Journal Information] [Subscribe] [Scholar Register] [Indexed: 11/21/2022]
38
Edler KJ. Soap and sand: construction tools for nanotechnology. PHILOSOPHICAL TRANSACTIONS. SERIES A, MATHEMATICAL, PHYSICAL, AND ENGINEERING SCIENCES 2004;362:2635-2651. [PMID: 15539362 DOI: 10.1098/rsta.2004.1456] [Citation(s) in RCA: 9] [Impact Index Per Article: 0.5] [Reference Citation Analysis] [Abstract] [Track Full Text] [Subscribe] [Scholar Register] [Indexed: 05/24/2023]
39
Effect of the linear siloxane chain in cyclic silsesquioxane (CSSQ) on the mechanical/electrical property of the thin films. Eur Polym J 2004. [DOI: 10.1016/j.eurpolymj.2004.06.018] [Citation(s) in RCA: 7] [Impact Index Per Article: 0.4] [Reference Citation Analysis] [Track Full Text] [Journal Information] [Subscribe] [Scholar Register] [Indexed: 11/17/2022]
40
Yim JH, Baklanov MR, Gidley DW, Peng H, Jeong HD, Sun Pu L. Pore Structure of Modified Cyclic Silsesquioxane Thin Films Made Porous Using a Cyclodextrins-Based Porogen. J Phys Chem B 2004. [DOI: 10.1021/jp049738j] [Citation(s) in RCA: 27] [Impact Index Per Article: 1.4] [Reference Citation Analysis] [Track Full Text] [Journal Information] [Subscribe] [Scholar Register] [Indexed: 11/29/2022]
41
Park SS, Ha CS. High-quality free-standing and oriented periodic mesoporous organosilica films grown without a solid substrate at the air–water interface. Chem Commun (Camb) 2004:1986-7. [PMID: 15340634 DOI: 10.1039/b405905k] [Citation(s) in RCA: 30] [Impact Index Per Article: 1.5] [Reference Citation Analysis] [Abstract] [Track Full Text] [Journal Information] [Subscribe] [Scholar Register] [Indexed: 11/21/2022]
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