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Kamali A, Bilgilisoy E, Wolfram A, Gentner TX, Ballmann G, Harder S, Marbach H, Ingólfsson O. On the Electron-Induced Reactions of (CH 3)AuP(CH 3) 3: A Combined UHV Surface Science and Gas-Phase Study. NANOMATERIALS (BASEL, SWITZERLAND) 2022; 12:2727. [PMID: 35957158 PMCID: PMC9370483 DOI: 10.3390/nano12152727] [Citation(s) in RCA: 0] [Impact Index Per Article: 0] [Reference Citation Analysis] [Abstract] [Key Words] [Track Full Text] [Figures] [Subscribe] [Scholar Register] [Received: 06/29/2022] [Revised: 07/27/2022] [Accepted: 08/03/2022] [Indexed: 06/15/2023]
Abstract
Focused-electron-beam-induced deposition (FEBID) is a powerful nanopatterning technique where electrons trigger the local dissociation of precursor molecules, leaving a deposit of non-volatile dissociation products. The fabrication of high-purity gold deposits via FEBID has significant potential to expand the scope of this method. For this, gold precursors that are stable under ambient conditions but fragment selectively under electron exposure are essential. Here, we investigated the potential gold precursor (CH3)AuP(CH3)3 using FEBID under ultra-high vacuum (UHV) and spectroscopic characterization of the corresponding metal-containing deposits. For a detailed insight into electron-induced fragmentation, the deposit's composition was compared with the fragmentation pathways of this compound through dissociative ionization (DI) under single-collision conditions using quantum chemical calculations to aid the interpretation of these data. Further comparison was made with a previous high-vacuum (HV) FEBID study of this precursor. The average loss of about 2 carbon and 0.8 phosphor per incident was found in DI, which agreed well with the carbon content of the UHV FEBID deposits. However, the UHV deposits were found to be as good as free of phosphor, indicating that the trimethyl phosphate is a good leaving group. Differently, the HV FEBID experiments showed significant phosphor content in the deposits.
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Affiliation(s)
- Ali Kamali
- Department of Chemistry and Science Institute, University of Iceland, Dunhagi 3, 107 Reykjavik, Iceland
| | - Elif Bilgilisoy
- Physikalische Chemie II, Friedrich-Alexander Universität Erlangen-Nürnberg, 91058 Erlangen, Germany
| | - Alexander Wolfram
- Physikalische Chemie II, Friedrich-Alexander Universität Erlangen-Nürnberg, 91058 Erlangen, Germany
| | - Thomas Xaver Gentner
- Inorganic and Organometallic Chemistry, Universität Erlangen-Nürnberg, 91058 Erlangen, Germany
| | - Gerd Ballmann
- Inorganic and Organometallic Chemistry, Universität Erlangen-Nürnberg, 91058 Erlangen, Germany
| | - Sjoerd Harder
- Inorganic and Organometallic Chemistry, Universität Erlangen-Nürnberg, 91058 Erlangen, Germany
| | - Hubertus Marbach
- Physikalische Chemie II, Friedrich-Alexander Universität Erlangen-Nürnberg, 91058 Erlangen, Germany
- Carl Zeiss SMT GmbH, 64380 Roßdorf, Germany
| | - Oddur Ingólfsson
- Department of Chemistry and Science Institute, University of Iceland, Dunhagi 3, 107 Reykjavik, Iceland
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2
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Utke I, Swiderek P, Höflich K, Madajska K, Jurczyk J, Martinović P, Szymańska I. Coordination and organometallic precursors of group 10 and 11: Focused electron beam induced deposition of metals and insight gained from chemical vapour deposition, atomic layer deposition, and fundamental surface and gas phase studies. Coord Chem Rev 2022. [DOI: 10.1016/j.ccr.2021.213851] [Citation(s) in RCA: 6] [Impact Index Per Article: 3.0] [Reference Citation Analysis] [Track Full Text] [Journal Information] [Subscribe] [Scholar Register] [Indexed: 12/11/2022]
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3
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Yu JC, Abdel-Rahman MK, Fairbrother DH, McElwee-White L. Charged Particle-Induced Surface Reactions of Organometallic Complexes as a Guide to Precursor Design for Electron- and Ion-Induced Deposition of Nanostructures. ACS APPLIED MATERIALS & INTERFACES 2021; 13:48333-48348. [PMID: 34633789 DOI: 10.1021/acsami.1c12327] [Citation(s) in RCA: 0] [Impact Index Per Article: 0] [Reference Citation Analysis] [Abstract] [Key Words] [Track Full Text] [Subscribe] [Scholar Register] [Indexed: 06/13/2023]
Abstract
Focused electron beam-induced deposition (FEBID) and focused ion beam-induced deposition (FIBID) are direct-write fabrication techniques that use focused beams of charged particles (electrons or ions) to create 3D metal-containing nanostructures by decomposing organometallic precursors onto substrates in a low-pressure environment. For many applications, it is important to minimize contamination of these nanostructures by impurities from incomplete ligand dissociation and desorption. This spotlight on applications describes the use of ultra high vacuum surface science studies to obtain mechanistic information on electron- and ion-induced processes in organometallic precursor candidates. The results are used for the mechanism-based design of custom precursors for FEBID and FIBID.
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Affiliation(s)
- Jo-Chi Yu
- Department of Chemistry, University of Florida, Gainesville, Florida 32611-7200, United States
| | - Mohammed K Abdel-Rahman
- Department of Chemistry, Johns Hopkins University, Baltimore, Maryland 21218-2685, United States
| | - D Howard Fairbrother
- Department of Chemistry, Johns Hopkins University, Baltimore, Maryland 21218-2685, United States
| | - Lisa McElwee-White
- Department of Chemistry, University of Florida, Gainesville, Florida 32611-7200, United States
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4
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Glessi C, Mahgoub A, Hagen CW, Tilset M. Gold(I) N-heterocyclic carbene precursors for focused electron beam-induced deposition. BEILSTEIN JOURNAL OF NANOTECHNOLOGY 2021; 12:257-269. [PMID: 33824846 PMCID: PMC7991619 DOI: 10.3762/bjnano.12.21] [Citation(s) in RCA: 1] [Impact Index Per Article: 0.3] [Reference Citation Analysis] [Abstract] [Key Words] [Grants] [Track Full Text] [Figures] [Subscribe] [Scholar Register] [Received: 01/02/2021] [Accepted: 03/02/2021] [Indexed: 06/12/2023]
Abstract
Seven gold(I) N-heterocyclic carbene (NHC) complexes were synthesized, characterized, and identified as suitable precursors for focused electron beam-induced deposition (FEBID). Several variations on the core Au(NHC)X moiety were introduced, that is, variations of the NHC ring (imidazole or triazole), of the alkyl N-substituents (Me, Et, or iPr), and of the ancillary ligand X (Cl, Br, I, or CF3). The seven complexes were tested as FEBID precursors in an on-substrate custom setup. The effect of the substitutions on deposit composition and growth rate indicates that the most suitable organic ligand for the gold precursor is triazole-based, with the best deposit composition of 15 atom % gold, while the most suitable anionic ligand is the trifluoromethyl group, leading to a growth rate of 1 × 10-2 nm3/e-.
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Affiliation(s)
- Cristiano Glessi
- Department of Chemistry and Centre for Materials Science and Nanotechnology (SMN), Faculty of Mathematics and Natural Sciences, University of Oslo, P.O. Box 1126 Blindern, NO-0318 Oslo, Norway
| | - Aya Mahgoub
- Delft University of Technology, Fac. Applied Sciences, Dept. Imaging Physics, Lorentzweg 1, 2628CJ Delft, Netherlands
| | - Cornelis W Hagen
- Delft University of Technology, Fac. Applied Sciences, Dept. Imaging Physics, Lorentzweg 1, 2628CJ Delft, Netherlands
| | - Mats Tilset
- Department of Chemistry and Centre for Materials Science and Nanotechnology (SMN), Faculty of Mathematics and Natural Sciences, University of Oslo, P.O. Box 1126 Blindern, NO-0318 Oslo, Norway
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5
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Kopyra J, Rabilloud F, Wierzbicka P, Abdoul-Carime H. Energy-Selective Decomposition of Organometallic Compounds by Slow Electrons: The Case of Chloro(dimethyl sulfide)gold(I). J Phys Chem A 2021; 125:966-972. [PMID: 33492965 DOI: 10.1021/acs.jpca.0c09988] [Citation(s) in RCA: 2] [Impact Index Per Article: 0.7] [Reference Citation Analysis] [Abstract] [Track Full Text] [Journal Information] [Subscribe] [Scholar Register] [Indexed: 12/19/2022]
Abstract
Gold-containing compounds offer many applications in nanoscale materials science, and electron-beam methods are versatile for shaping nanostructures. In this study, we report the energy-selective fragmentation of chloro(dimethyl sulfide)gold(I) (ClAuS(CH3)2) induced by slow electrons. We observe the resonant formation of four fragment anions, namely [Cl]-, [S]-, [CH2S]-, and [ClAuH···SH]-, which are generated in the energy range of 0-9 eV. The predominant fragment anion is formed below 1 eV from the cleavage of a single Au-Cl bond to produce the [Cl]- anion. The resonant states and the energetics of the fragmentation are investigated by DFT methods. These findings may contribute to future strategies in the elaboration of specific nanomaterials or for selective chemistry using electron-beam techniques.
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Affiliation(s)
- Janina Kopyra
- Faculty of Exact and Natural Sciences, Siedlce University of Natural Sciences and Humanities, 3 Maja 54, 08-110 Siedlce, Poland
| | - Franck Rabilloud
- Universite de Lyon, Université Claude Bernard Lyon 1, CNRS, Institut Lumière Matière, UMR5306, F-69622 Villeurbanne, France
| | - Paulina Wierzbicka
- Faculty of Exact and Natural Sciences, Siedlce University of Natural Sciences and Humanities, 3 Maja 54, 08-110 Siedlce, Poland
| | - Hassan Abdoul-Carime
- Université de Lyon, Université Lyon 1, CNRS, Institut de Physique des 2 Infinis de Lyon/IN2P3, UMR5822, F-69003 Lyon, France
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6
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Preuß A, Ehnert R, Kretzschmar BSM, Noll J, Heft A, Grünler B, Lang H. Gold(I) carboxylates and [Au(C(NH2)2(=S))2][SO3Me] for the deposition of gold and gold-doped SiOX materials by the atmospheric pressure combustion CVD process. Inorganica Chim Acta 2020. [DOI: 10.1016/j.ica.2019.119355] [Citation(s) in RCA: 2] [Impact Index Per Article: 0.5] [Reference Citation Analysis] [Track Full Text] [Journal Information] [Subscribe] [Scholar Register] [Indexed: 01/11/2023]
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Jurczyk J, Brewer CR, Hawkins OM, Polyakov MN, Kapusta C, McElwee-White L, Utke I. Focused Electron Beam-Induced Deposition and Post-Growth Purification Using the Heteroleptic Ru Complex (η 3-C 3H 5)Ru(CO) 3Br. ACS APPLIED MATERIALS & INTERFACES 2019; 11:28164-28171. [PMID: 31310091 DOI: 10.1021/acsami.9b07634] [Citation(s) in RCA: 4] [Impact Index Per Article: 0.8] [Reference Citation Analysis] [Abstract] [Key Words] [Track Full Text] [Subscribe] [Scholar Register] [Indexed: 05/24/2023]
Abstract
Focused electron beam-induced deposition using the heteroleptic complex (η3-C3H5)Ru(CO)3Br as a precursor resulted in deposition of material with Ru content of 23 at. %. Transmission electron microscopy images indicated a nanogranular structure of pure Ru nanocrystals, embedded into a matrix containing carbon, oxygen, and bromine. The deposits were purified by annealing in a reactive 98% N2/2% H2 atmosphere at 300 °C, resulting in a reduction of contaminants and an increase of the Ru content to 83 at. %. Although a significant volume loss of 79% was found, the shrinkage was observed mostly for vertical thickness (around 75%). The lateral dimensions decreased much less significantly (around 9%). Deposition results, in conjunction with previous gas-phase and condensed-phase surface studies on the electron-induced reactions of (η3-C3H5)Ru(CO)3Br, provide insights into the behavior of allyl, carbonyl, and bromide ligands under identical electron beam irradiation.
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Affiliation(s)
- Jakub Jurczyk
- Laboratory for Mechanics of Materials and Nanostructures , Empa-Swiss Federal Laboratories for Materials Science and Technology , Feuerwerkerstrasse 39 , CH-3602 Thun , Switzerland
- Faculty of Physics and Applied Computer Science , AGH University of Science and Technology Krakow , Al. Mickiewicza 30 , 30-059 Kraków , Poland
| | - Christopher R Brewer
- Department of Chemistry , University of Florida , 32611-7200 Gainesville , Florida , United States
| | - Olivia M Hawkins
- Department of Chemistry , University of Florida , 32611-7200 Gainesville , Florida , United States
| | - Mikhail N Polyakov
- Laboratory for Mechanics of Materials and Nanostructures , Empa-Swiss Federal Laboratories for Materials Science and Technology , Feuerwerkerstrasse 39 , CH-3602 Thun , Switzerland
| | - Czeslaw Kapusta
- Faculty of Physics and Applied Computer Science , AGH University of Science and Technology Krakow , Al. Mickiewicza 30 , 30-059 Kraków , Poland
| | - Lisa McElwee-White
- Department of Chemistry , University of Florida , 32611-7200 Gainesville , Florida , United States
| | - Ivo Utke
- Laboratory for Mechanics of Materials and Nanostructures , Empa-Swiss Federal Laboratories for Materials Science and Technology , Feuerwerkerstrasse 39 , CH-3602 Thun , Switzerland
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8
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Carden WG, Thorman RM, Unlu I, Abboud KA, Fairbrother DH, McElwee-White L. Design, Synthesis, and Evaluation of CF 3AuCNR Precursors for Focused Electron Beam-Induced Deposition of Gold. ACS APPLIED MATERIALS & INTERFACES 2019; 11:11976-11987. [PMID: 30835431 DOI: 10.1021/acsami.8b18368] [Citation(s) in RCA: 3] [Impact Index Per Article: 0.6] [Reference Citation Analysis] [Abstract] [Key Words] [Track Full Text] [Subscribe] [Scholar Register] [Indexed: 06/09/2023]
Abstract
The Au(I) complexes CF3AuCNMe (1a) and CF3AuCN tBu (1b) were investigated as Au(I) precursors for focused electron beam-induced deposition (FEBID) of metallic gold. Both 1a and 1b are sufficiently volatile for sublimation at 125 ± 1 mTorr in the temperature range of roughly 40-50 °C. Electron impact mass spectra of 1a-b show gold-containing ions resulting from fragmenting the CF3 group and the CNR ligand, whereas in negative chemical ionization of 1a-b, the major fragment results from dealkylation of the CNR ligand. Steady-state depositions from 1a in an Auger spectrometer produce deposits with a similar gold content to the commercial precursor Me2Au(acac) (3) deposited under the same conditions, while the gold content from 1b is less. These results enable us to suggest the likely fate of the CF3 and CNR ligands during FEBID.
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Affiliation(s)
- Will G Carden
- Department of Chemistry , University of Florida , Gainesville , Florida 32611-7200 , United States
| | - Rachel M Thorman
- Department of Chemistry , Johns Hopkins University , Baltimore , Maryland 21218-2685 , United States
| | - Ilyas Unlu
- Department of Chemistry , Johns Hopkins University , Baltimore , Maryland 21218-2685 , United States
| | - Khalil A Abboud
- Department of Chemistry , University of Florida , Gainesville , Florida 32611-7200 , United States
| | - D Howard Fairbrother
- Department of Chemistry , Johns Hopkins University , Baltimore , Maryland 21218-2685 , United States
| | - Lisa McElwee-White
- Department of Chemistry , University of Florida , Gainesville , Florida 32611-7200 , United States
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9
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Belić D, Shawrav MM, Bertagnolli E, Wanzenboeck HD. Direct writing of gold nanostructures with an electron beam: On the way to pure nanostructures by combining optimized deposition with oxygen-plasma treatment. BEILSTEIN JOURNAL OF NANOTECHNOLOGY 2017; 8:2530-2543. [PMID: 29259868 PMCID: PMC5727840 DOI: 10.3762/bjnano.8.253] [Citation(s) in RCA: 0] [Impact Index Per Article: 0] [Reference Citation Analysis] [Abstract] [Key Words] [Track Full Text] [Figures] [Subscribe] [Scholar Register] [Received: 06/30/2017] [Accepted: 11/08/2017] [Indexed: 06/07/2023]
Abstract
This work presents a highly effective approach for the chemical purification of directly written 2D and 3D gold nanostructures suitable for plasmonics, biomolecule immobilisation, and nanoelectronics. Gold nano- and microstructures can be fabricated by one-step direct-write lithography process using focused electron beam induced deposition (FEBID). Typically, as-deposited gold nanostructures suffer from a low Au content and unacceptably high carbon contamination. We show that the undesirable carbon contamination can be diminished using a two-step process - a combination of optimized deposition followed by appropriate postdeposition cleaning. Starting from the common metal-organic precursor Me2-Au-tfac, it is demonstrated that the Au content in pristine FEBID nanostructures can be increased from 30 atom % to as much as 72 atom %, depending on the sustained electron beam dose. As a second step, oxygen-plasma treatment is established to further enhance the Au content in the structures, while preserving their morphology to a high degree. This two-step process represents a simple, feasible and high-throughput method for direct writing of purer gold nanostructures that can enable their future use for demanding applications.
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Affiliation(s)
- Domagoj Belić
- Institute of Solid State Electronics, TU Wien, Floragasse 7, 1040 Vienna, Austria
- University of Liverpool, Department of Chemistry, Crown Street, Liverpool L69 7ZD, United Kingdom
| | - Mostafa M Shawrav
- Institute of Solid State Electronics, TU Wien, Floragasse 7, 1040 Vienna, Austria
- Institute of Sensors & Actuator System, TU Wien, Gusshausstrasse 27–29, 1040 Vienna, Austria
| | - Emmerich Bertagnolli
- Institute of Solid State Electronics, TU Wien, Floragasse 7, 1040 Vienna, Austria
| | - Heinz D Wanzenboeck
- Institute of Solid State Electronics, TU Wien, Floragasse 7, 1040 Vienna, Austria
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10
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Carden WG, Pedziwiatr J, Abboud KA, McElwee-White L. Halide Effects on the Sublimation Temperature of X-Au-L Complexes: Implications for Their Use as Precursors in Vapor Phase Deposition Methods. ACS APPLIED MATERIALS & INTERFACES 2017; 9:40998-41005. [PMID: 29096063 DOI: 10.1021/acsami.7b12465] [Citation(s) in RCA: 7] [Impact Index Per Article: 1.0] [Reference Citation Analysis] [Abstract] [Key Words] [Track Full Text] [Subscribe] [Scholar Register] [Indexed: 06/07/2023]
Abstract
Trends in volatility with changes in the halide ligand were established for gold(I) complexes of the type X-Au-L [X = Cl, Br, I; L = CNtBu, CNMe, PMe3, P(NMe2)3, P(OCH2CF3)3] by determining the temperatures for the onset of sublimation (Tsub) at a fixed pressure. Within each series of isocyanide complexes, Tsub decreases with increasing atomic radius of the halide, making the iodide complex the most volatile. For the phosphine and phosphoramidate complexes, the chloride and bromide have similar Tsub values with the bromide slightly higher, but the iodide complex is again the most volatile of the three. The trends in volatility can be correlated to variation in Au-Au bond distances and aggregation patterns in the solid state structures. For the P(OCH2CF3)3 complexes, melting occurred before sublimation, but the iodide complex was still more volatile than the bromide. These trends have implications for the use of these complexes in electron beam induced deposition and chemical vapor deposition, for which precursor volatility is important.
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Affiliation(s)
- Will G Carden
- Department of Chemistry, University of Florida , Gainesville, Florida 32611-7200, United States
| | - Jakub Pedziwiatr
- Department of Chemistry, University of Florida , Gainesville, Florida 32611-7200, United States
| | - Khalil A Abboud
- Department of Chemistry, University of Florida , Gainesville, Florida 32611-7200, United States
| | - Lisa McElwee-White
- Department of Chemistry, University of Florida , Gainesville, Florida 32611-7200, United States
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11
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Spencer JA, Barclay M, Gallagher MJ, Winkler R, Unlu I, Wu YC, Plank H, McElwee-White L, Fairbrother DH. Comparing postdeposition reactions of electrons and radicals with Pt nanostructures created by focused electron beam induced deposition. BEILSTEIN JOURNAL OF NANOTECHNOLOGY 2017; 8:2410-2424. [PMID: 29234576 PMCID: PMC5704761 DOI: 10.3762/bjnano.8.240] [Citation(s) in RCA: 6] [Impact Index Per Article: 0.9] [Reference Citation Analysis] [Abstract] [Key Words] [Track Full Text] [Subscribe] [Scholar Register] [Received: 06/29/2017] [Accepted: 10/18/2017] [Indexed: 05/31/2023]
Abstract
The ability of electrons and atomic hydrogen (AH) to remove residual chlorine from PtCl2 deposits created from cis-Pt(CO)2Cl2 by focused electron beam induced deposition (FEBID) is evaluated. Auger electron spectroscopy (AES) and energy-dispersive X-ray spectroscopy (EDS) measurements as well as thermodynamics calculations support the idea that electrons can remove chlorine from PtCl2 structures via an electron-stimulated desorption (ESD) process. It was found that the effectiveness of electrons to purify deposits greater than a few nanometers in height is compromised by the limited escape depth of the chloride ions generated in the purification step. In contrast, chlorine atoms can be efficiently and completely removed from PtCl2 deposits using AH, regardless of the thickness of the deposit. Although AH was found to be extremely effective at chemically purifying PtCl2 deposits, its viability as a FEBID purification strategy is compromised by the mobility of transient Pt-H species formed during the purification process. Scanning electron microscopy data show that this results in the formation of porous structures and can even cause the deposit to lose structural integrity. However, this phenomenon suggests that the use of AH may be a useful strategy to create high surface area Pt catalysts and may reverse the effects of sintering. In marked contrast to the effect observed with AH, densification of the structure was observed during the postdeposition purification of PtC x deposits created from MeCpPtMe3 using atomic oxygen (AO), although the limited penetration depth of AO restricts its effectiveness as a purification strategy to relatively small nanostructures.
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Affiliation(s)
- Julie A Spencer
- Department of Chemistry, Johns Hopkins University, Baltimore, MD, 21218, USA
| | - Michael Barclay
- Department of Chemistry, Johns Hopkins University, Baltimore, MD, 21218, USA
| | - Miranda J Gallagher
- Department of Chemistry, Johns Hopkins University, Baltimore, MD, 21218, USA
| | - Robert Winkler
- Graz Centre for Electron Microscopy, Steyrergasse 17, 8010 Graz, Austria
| | - Ilyas Unlu
- Department of Chemistry, Johns Hopkins University, Baltimore, MD, 21218, USA
| | - Yung-Chien Wu
- Department of Chemistry, University of Florida, Gainesville, FL, 32611-7200, USA
| | - Harald Plank
- Graz Centre for Electron Microscopy, Steyrergasse 17, 8010 Graz, Austria
- Institute of Electron Microscopy and Nanoanalysis, Graz University of Technology, Steyrergasse 17, 8010 Graz, Austria
| | - Lisa McElwee-White
- Department of Chemistry, University of Florida, Gainesville, FL, 32611-7200, USA
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12
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Kosters D, de Hoogh A, Zeijlemaker H, Acar H, Rotenberg N, Kuipers L. Core-Shell Plasmonic Nanohelices. ACS PHOTONICS 2017; 4:1858-1863. [PMID: 28824931 PMCID: PMC5557610 DOI: 10.1021/acsphotonics.7b00496] [Citation(s) in RCA: 10] [Impact Index Per Article: 1.4] [Reference Citation Analysis] [Abstract] [Key Words] [Track Full Text] [Subscribe] [Scholar Register] [Received: 05/17/2017] [Indexed: 05/14/2023]
Abstract
We introduce core-shell plasmonic nanohelices, highly tunable structures that have a different response in the visible for circularly polarized light of opposite handedness. The glass core of the helices is fabricated using electron beam induced deposition and the pure gold shell is subsequently sputter coated. Optical measurements allow us to explore the chiral nature of the nanohelices, where differences in the response to circularly polarized light of opposite handedness result in a dissymmetry factor of 0.86, more than twice of what has been previously reported. Both experiments and subsequent numerical simulations demonstrate the extreme tunability of the core-shell structures, where nanometer changes to the geometry can lead to drastic changes of the optical responses. This tunability, combined with the large differential transmission, make core-shell plasmonic nanohelices a powerful nanophotonic tool for, for example, (bio)sensing applications.
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Affiliation(s)
- Dolfine Kosters
- Kavli
Institute of Nanoscience, Department for Quantum Nanoscience, Lorentzweg 1, 2628 CJ Delft, The Netherlands
- Center for Nanophotonics,
AMOLF, Science Park 104, 1098 XG Amsterdam, The Netherlands
| | - Anouk de Hoogh
- Center for Nanophotonics,
AMOLF, Science Park 104, 1098 XG Amsterdam, The Netherlands
| | - Hans Zeijlemaker
- Center for Nanophotonics,
AMOLF, Science Park 104, 1098 XG Amsterdam, The Netherlands
| | - Hakkı Acar
- Center for Nanophotonics,
AMOLF, Science Park 104, 1098 XG Amsterdam, The Netherlands
| | - Nir Rotenberg
- Max
Planck Institute for the Science of Light, Staudtstraße 2, D-91058 Erlangen, Germany
| | - L. Kuipers
- Kavli
Institute of Nanoscience, Department for Quantum Nanoscience, Lorentzweg 1, 2628 CJ Delft, The Netherlands
- Center for Nanophotonics,
AMOLF, Science Park 104, 1098 XG Amsterdam, The Netherlands
- E-mail:
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13
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Höflich K, Jurczyk J, Zhang Y, Puydinger Dos Santos MV, Götz M, Guerra-Nuñez C, Best JP, Kapusta C, Utke I. Direct Electron Beam Writing of Silver-Based Nanostructures. ACS APPLIED MATERIALS & INTERFACES 2017. [PMID: 28631921 DOI: 10.1021/acsami.7b04353] [Citation(s) in RCA: 9] [Impact Index Per Article: 1.3] [Reference Citation Analysis] [Abstract] [Key Words] [Track Full Text] [Subscribe] [Scholar Register] [Indexed: 05/15/2023]
Abstract
Direct writing utilizing a focused electron beam constitutes an interesting alternative to resist-based techniques, as it allows for precise and flexible growth onto any conductive substrate in a single-step process. One important challenge, however, is the identification of appropriate precursors which allow for deposition of the material of choice, e.g., for envisaged applications in nano-optics. In this regard the coinage metal silver is of particular interest since it shows a relatively high plasma frequency and, thus, excellent plasmonic properties in the visible range. By utilizing the precursor compound AgO2Me2Bu, direct writing of silver-based nanostructures via local electron beam induced deposition could be realized for the first time. Interestingly, the silver deposition was strongly dependent on electron dose; at low doses of 30 nC/μm2 a dominant formation of pure silver crystals was observed, while at higher electron doses around 104 nC/μm2 large carbon contents were measured. A scheme for the enhanced silver deposition under low electron fluxes by an electronic activation of precursor dissociation below thermal CVD temperature is proposed and validated using material characterization techniques. Finally, the knowledge gained was employed to fabricate well-defined two-dimensional deposits with maximized silver content approaching 75 at. %, which was achieved by proper adjustment of the deposition parameters. The corresponding deposits consist of plasmonically active silver crystallites and demonstrate a pronounced Raman signal enhancement of the carbonaceous matrix.
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Affiliation(s)
- Katja Höflich
- Laboratory for Mechanics of Materials and Nanostructures, Empa-Swiss Federal Laboratories for Materials Science and Technology , Feuerwerkerstrasse 39, CH-3602 Thun, Switzerland
- Nanoscale Structures and Microscopic Analysis, Helmholtz-Zentrum Berlin für Materialien und Energie , Hahn-Meitner-Platz 1, D-14109 Berlin, Germany
| | - Jakub Jurczyk
- Laboratory for Mechanics of Materials and Nanostructures, Empa-Swiss Federal Laboratories for Materials Science and Technology , Feuerwerkerstrasse 39, CH-3602 Thun, Switzerland
- Faculty of Physics and Applied Computer Science, AGH University of Science and Technology Krakow , Al. Mickiewicza 30, 30-059 Kraków, Poland
| | - Yucheng Zhang
- Laboratory for Mechanics of Materials and Nanostructures, Empa-Swiss Federal Laboratories for Materials Science and Technology , Feuerwerkerstrasse 39, CH-3602 Thun, Switzerland
| | - Marcos V Puydinger Dos Santos
- Laboratory for Mechanics of Materials and Nanostructures, Empa-Swiss Federal Laboratories for Materials Science and Technology , Feuerwerkerstrasse 39, CH-3602 Thun, Switzerland
- Institute of Physics Gleb Wataghin, University of Campinas , Rua Sergio Buarque de Holanda 777 Cidade Universitaria, 13083-859 Campinas-SP, Brazil
| | - Maximilian Götz
- Nanoscale Structures and Microscopic Analysis, Helmholtz-Zentrum Berlin für Materialien und Energie , Hahn-Meitner-Platz 1, D-14109 Berlin, Germany
| | - Carlos Guerra-Nuñez
- Laboratory for Mechanics of Materials and Nanostructures, Empa-Swiss Federal Laboratories for Materials Science and Technology , Feuerwerkerstrasse 39, CH-3602 Thun, Switzerland
| | - James P Best
- Laboratory for Mechanics of Materials and Nanostructures, Empa-Swiss Federal Laboratories for Materials Science and Technology , Feuerwerkerstrasse 39, CH-3602 Thun, Switzerland
| | - Czeslaw Kapusta
- Faculty of Physics and Applied Computer Science, AGH University of Science and Technology Krakow , Al. Mickiewicza 30, 30-059 Kraków, Poland
| | - Ivo Utke
- Laboratory for Mechanics of Materials and Nanostructures, Empa-Swiss Federal Laboratories for Materials Science and Technology , Feuerwerkerstrasse 39, CH-3602 Thun, Switzerland
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Marashdeh A, Tiesma T, van Velzen NJC, Harder S, Havenith RWA, De Hosson JTM, van Dorp WF. The rational design of a Au(I) precursor for focused electron beam induced deposition. BEILSTEIN JOURNAL OF NANOTECHNOLOGY 2017; 8:2753-2765. [PMID: 29354346 PMCID: PMC5753056 DOI: 10.3762/bjnano.8.274] [Citation(s) in RCA: 2] [Impact Index Per Article: 0.3] [Reference Citation Analysis] [Abstract] [Key Words] [Track Full Text] [Subscribe] [Scholar Register] [Received: 06/20/2017] [Accepted: 11/29/2017] [Indexed: 05/23/2023]
Abstract
Au(I) complexes are studied as precursors for focused electron beam induced processing (FEBIP). FEBIP is an advanced direct-write technique for nanometer-scale chemical synthesis. The stability and volatility of the complexes are characterized to design an improved precursor for pure Au deposition. Aurophilic interactions are found to play a key role. The short lifetime of ClAuCO in vacuum is explained by strong, destabilizing Au-Au interactions in the solid phase. While aurophilic interactions do not affect the stability of ClAuPMe3, they leave the complex non-volatile. Comparison of crystal structures of ClAuPMe3 and MeAuPMe3 shows that Au-Au interactions are much weaker or partially even absent for the latter structure. This explains its high volatility. However, MeAuPMe3 dissociates unfavorably during FEBIP, making it an unsuitable precursor. The study shows that Me groups reduce aurophilic interactions, compared to Cl groups, which we attribute to electronic rather than steric effects. Therefore we propose MeAuCO as a potential FEBIP precursor. It is expected to have weak Au-Au interactions, making it volatile. It is stable enough to act as a volatile source for Au deposition, being stabilized by 6.5 kcal/mol. Finally, MeAuCO is likely to dissociate in a single step to pure Au.
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Affiliation(s)
- Ali Marashdeh
- Zernike Institute for Advanced Materials, University of Groningen, Nijenborgh 4, 9747 AG Groningen, Netherlands
- Department of Chemistry, Faculty of Science, Al-Balqa’ Applied University, Salt, Jordan
| | - Thiadrik Tiesma
- Zernike Institute for Advanced Materials, University of Groningen, Nijenborgh 4, 9747 AG Groningen, Netherlands
| | - Niels J C van Velzen
- Stratingh Institute for Chemistry, University of Groningen, 9747 AG Groningen, Netherlands
| | - Sjoerd Harder
- Inorganic and Organometallic Chemistry, Friedrich-Alexander Universität Erlangen-Nürnberg, Egerlandstr. 1, 91058 Erlangen, Germany
| | - Remco W A Havenith
- Zernike Institute for Advanced Materials, University of Groningen, Nijenborgh 4, 9747 AG Groningen, Netherlands
- Stratingh Institute for Chemistry, University of Groningen, 9747 AG Groningen, Netherlands
- Department of Inorganic and Physical Chemistry, University of Ghent, B-9000 Ghent, Belgium
| | - Jeff T M De Hosson
- Zernike Institute for Advanced Materials, University of Groningen, Nijenborgh 4, 9747 AG Groningen, Netherlands
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Mansilla C, Mehendale S, Mulders JJL, Trompenaars PHF. Towards a single step process to create high purity gold structures by electron beam induced deposition at room temperature. NANOTECHNOLOGY 2016; 27:415301. [PMID: 27587078 DOI: 10.1088/0957-4484/27/41/415301] [Citation(s) in RCA: 1] [Impact Index Per Article: 0.1] [Reference Citation Analysis] [Abstract] [Track Full Text] [Subscribe] [Scholar Register] [Indexed: 05/14/2023]
Abstract
Highly pure metallic structures can be deposited by electron beam induced deposition and they have many important applications in different fields. The organo-metallic precursor is decomposed and deposited under the electron beam, and typically it is purified with post-irradiation in presence of O2. However, this approach limits the purification to the surface of the deposit. Therefore, 'in situ' purification during deposition using simultaneous flows of both O2 and precursor in parallel with two gas injector needles has been tested and verified. To simplify the practical arrangements, a special concentric nozzle has been designed allowing deposition and purification performed together in a single step. With this new device metallic structures with high purity can be obtained more easily, while there is no limit on the height of the structures within a practical time frame. In this work, we summarize the first results obtained for 'in situ' Au purification using this concentric nozzle, which is described in more detail, including flow simulations. The operational parameter space is explored in order to optimize the shape as well as the purity of the deposits, which are evaluated through scanning electron microscope and energy dispersive x-ray spectroscopy measurements, respectively. The observed variations are interpreted in relation to other variables, such as the deposition yield. The resistivity of purified lines is also measured, and the influence of additional post treatments as a last purification step is studied.
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Spencer JA, Wu YC, McElwee-White L, Fairbrother DH. Electron Induced Surface Reactions of cis-Pt(CO)2Cl2: A Route to Focused Electron Beam Induced Deposition of Pure Pt Nanostructures. J Am Chem Soc 2016; 138:9172-82. [PMID: 27346707 DOI: 10.1021/jacs.6b04156] [Citation(s) in RCA: 33] [Impact Index Per Article: 4.1] [Reference Citation Analysis] [Abstract] [Track Full Text] [Journal Information] [Subscribe] [Scholar Register] [Indexed: 01/06/2023]
Abstract
Using mechanistic data from surface science studies on electron-induced reactions of organometallic precursors, cis-Pt(CO)2Cl2 (1) was designed specifically for use in focused electron beam induced deposition (FEBID) of Pt nanostructures. Electron induced decomposition of adsorbed 1 under ultrahigh vacuum (UHV) conditions proceeds through initial CO loss as determined by in situ X-ray photoelectron spectroscopy and mass spectrometry. Although the Pt-Cl bonds remain intact during the initial decomposition step, larger electron doses induce removal of the residual chloride through an electron-stimulated desorption process. FEBID structures created from cis-Pt(CO)2Cl2 under steady state deposition conditions in an Auger spectrometer were determined to be PtCl2, free of carbon and oxygen. Coupled with the electron stimulated removal of chlorine demonstrated in the UHV experiments, the Auger deposition data establish a route to FEBID of pure Pt. Results from this study demonstrate that structure-activity relationships can be used to design new precursors specifically for FEBID.
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Affiliation(s)
- Julie A Spencer
- Department of Chemistry, Johns Hopkins University , Baltimore, Maryland 21218, United States
| | - Yung-Chien Wu
- Department of Chemistry, University of Florida , Gainesville, Florida 32611-7200, United States
| | - Lisa McElwee-White
- Department of Chemistry, University of Florida , Gainesville, Florida 32611-7200, United States
| | - D Howard Fairbrother
- Department of Chemistry, Johns Hopkins University , Baltimore, Maryland 21218, United States
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Belić D, Shawrav MM, Gavagnin M, Stöger-Pollach M, Wanzenboeck HD, Bertagnolli E. Direct-write deposition and focused-electron-beam-induced purification of gold nanostructures. ACS APPLIED MATERIALS & INTERFACES 2015; 7:2467-79. [PMID: 25545798 DOI: 10.1021/am507327y] [Citation(s) in RCA: 16] [Impact Index Per Article: 1.8] [Reference Citation Analysis] [Abstract] [Key Words] [MESH Headings] [Track Full Text] [Subscribe] [Scholar Register] [Indexed: 05/27/2023]
Abstract
Three-dimensional gold (Au) nanostructures offer promise in nanoplasmonics, biomedical applications, electrochemical sensing and as contacts for carbon-based electronics. Direct-write techniques such as focused-electron-beam-induced deposition (FEBID) can provide such precisely patterned nanostructures. Unfortunately, FEBID Au traditionally suffers from a high nonmetallic content and cannot meet the purity requirements for these applications. Here we report exceptionally pure pristine FEBID Au nanostructures comprising submicrometer-large monocrystalline Au sections. On the basis of high-resolution transmission electron microscopy results and Monte Carlo simulations of electron trajectories in the deposited nanostructures, we propose a curing mechanism that elucidates the observed phenomena. The in situ focused-electron-beam-induced curing mechanism was supported by postdeposition ex situ curing and, in combination with oxygen plasma cleaning, is utilized as a straightforward purification method for planar FEBID structures. This work paves the way for the application of FEBID Au nanostructures in a new generation of biosensors and plasmonic nanodevices.
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Affiliation(s)
- Domagoj Belić
- Institute of Solid State Electronics, Vienna University of Technology , Floragasse 7/1, A-1040 Vienna, Austria
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