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Höflich K, Jurczyk JM, Madajska K, Götz M, Berger L, Guerra-Nuñez C, Haverkamp C, Szymanska I, Utke I. Towards the third dimension in direct electron beam writing of silver. Beilstein J Nanotechnol 2018; 9:842-849. [PMID: 29600145 PMCID: PMC5852464 DOI: 10.3762/bjnano.9.78] [Citation(s) in RCA: 6] [Impact Index Per Article: 1.0] [Reference Citation Analysis] [What about the content of this article? (0)] [Affiliation(s)] [Abstract] [Key Words] [Track Full Text] [Subscribe] [Scholar Register] [Received: 10/09/2017] [Accepted: 02/14/2018] [Indexed: 05/06/2023]
Abstract
Carboxylates constitute an extremely promising class of precursor compounds for the electron beam induced deposition of silver. In this work both silver 2,2-dimethylbutyrate and silver pentafluoropropionate were investigated with respect to their dwell-time-dependent deposition behavior and growth characteristics. While silver 2,2-dimethylbutyrate showed a strong depletion in the center of the impinging electron beam profile hindering any vertical growth, silver pentafluoropropionate indicated a pronounced dependency of the deposit height on the dwell time. Truly three-dimensional silver structures could be realized with silver pentafluoropropionate. The pillars were polycrystalline with silver contents of more than 50 atom % and exhibit strong Raman enhancement. This constitutes a promising route towards the direct electron beam writing of three-dimensional plasmonic device parts from the gas phase.
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Affiliation(s)
- Katja Höflich
- Empa - Swiss Federal Laboratories for Materials Science and Technology, Laboratory for Mechanics of Materials and Nanostructures, Feuerwerkerstrasse 39, 3602 Thun, Switzerland
- Helmholtz-Zentrum Berlin für Materialien und Energie, Nanoscale Structures and Microscopic Analysis, Hahn-Meitner-Platz 1, 14109 Berlin, Germany
| | - Jakub Mateusz Jurczyk
- Empa - Swiss Federal Laboratories for Materials Science and Technology, Laboratory for Mechanics of Materials and Nanostructures, Feuerwerkerstrasse 39, 3602 Thun, Switzerland
- Faculty of Physics and Applied Computer Sciences, AGH University of Science and Technology, 30-059 Kraków, Poland
| | - Katarzyna Madajska
- Faculty of Chemistry, Nicolaus Copernicus University in Toruń, Gagarina 7, 87-100 Toruń, Poland
| | - Maximilian Götz
- Helmholtz-Zentrum Berlin für Materialien und Energie, Nanoscale Structures and Microscopic Analysis, Hahn-Meitner-Platz 1, 14109 Berlin, Germany
| | - Luisa Berger
- Empa - Swiss Federal Laboratories for Materials Science and Technology, Laboratory for Mechanics of Materials and Nanostructures, Feuerwerkerstrasse 39, 3602 Thun, Switzerland
| | - Carlos Guerra-Nuñez
- Empa - Swiss Federal Laboratories for Materials Science and Technology, Laboratory for Mechanics of Materials and Nanostructures, Feuerwerkerstrasse 39, 3602 Thun, Switzerland
| | - Caspar Haverkamp
- Helmholtz-Zentrum Berlin für Materialien und Energie, Nanoscale Structures and Microscopic Analysis, Hahn-Meitner-Platz 1, 14109 Berlin, Germany
| | - Iwona Szymanska
- Faculty of Chemistry, Nicolaus Copernicus University in Toruń, Gagarina 7, 87-100 Toruń, Poland
| | - Ivo Utke
- Empa - Swiss Federal Laboratories for Materials Science and Technology, Laboratory for Mechanics of Materials and Nanostructures, Feuerwerkerstrasse 39, 3602 Thun, Switzerland
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2
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Tu F, Drost M, Szenti I, Kiss J, Kónya Z, Marbach H. Localized growth of carbon nanotubes via lithographic fabrication of metallic deposits. Beilstein J Nanotechnol 2017; 8:2592-2605. [PMID: 29259874 PMCID: PMC5727812 DOI: 10.3762/bjnano.8.260] [Citation(s) in RCA: 3] [Impact Index Per Article: 0.4] [Reference Citation Analysis] [What about the content of this article? (0)] [Affiliation(s)] [Abstract] [Key Words] [Track Full Text] [Download PDF] [Figures] [Subscribe] [Scholar Register] [Received: 08/09/2017] [Accepted: 11/08/2017] [Indexed: 01/18/2023]
Abstract
We report on the fabrication of carbon nanotubes (CNTs) at predefined positions and controlled morphology, for example, as individual nanotubes or as CNT forests. Electron beam induced deposition (EBID) with subsequent autocatalytic growth (AG) was applied to lithographically produce catalytically active seeds for the localized growth of CNTs via chemical vapor deposition (CVD). With the precursor Fe(CO)5 we were able to fabricate clean iron deposits via EBID and AG. After the proof-of-principle that these Fe deposits indeed act as seeds for the growth of CNTs, the influence of significant EBID/AG parameters on the deposit shape and finally the yield and morphology of the grown CNTs was investigated in detail. Based on these results, the parameters could be optimized such that EBID point matrixes (6 × 6) were fabricated on a silica surface whereby at each predefined site only one CNT was produced. Furthermore, the localized fabrication of CNT forests was targeted and successfully achieved on an Al2O3 layer on a silicon sample. A peculiar lift-up of the Fe seed structures as “flakes” was observed and the mechanism was discussed. Finally, a proof-of-principle was presented showing that EBID deposits from the precursor Co(CO)3NO are also very effective catalysts for the CNT growth. Even though the metal content (Co) of the latter is reduced in comparison to the Fe deposits, effective CNT growth was observed for the Co-containing deposits at lower CVD temperatures than for the corresponding Fe deposits.
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Affiliation(s)
- Fan Tu
- Lehrstuhl für Physikalische Chemie II and Interdisciplinary Center for Molecular Materials (ICMM), Friedrich-Alexander-Universität Erlangen-Nürnberg, Egerlandstr. 3, 91058 Erlangen, Germany
| | - Martin Drost
- Lehrstuhl für Physikalische Chemie II and Interdisciplinary Center for Molecular Materials (ICMM), Friedrich-Alexander-Universität Erlangen-Nürnberg, Egerlandstr. 3, 91058 Erlangen, Germany
| | - Imre Szenti
- Department of Applied and Environmental Chemistry, University of Szeged, Szeged, Hungary
| | - Janos Kiss
- MTA-SZTE Reaction Kinetics and Surface Chemistry Research Group, University of Szeged, Rerrich ter 1, 6720 Szeged, Hungary
| | - Zoltan Kónya
- Department of Applied and Environmental Chemistry, University of Szeged, Szeged, Hungary.,MTA-SZTE Reaction Kinetics and Surface Chemistry Research Group, University of Szeged, Rerrich ter 1, 6720 Szeged, Hungary
| | - Hubertus Marbach
- Lehrstuhl für Physikalische Chemie II and Interdisciplinary Center for Molecular Materials (ICMM), Friedrich-Alexander-Universität Erlangen-Nürnberg, Egerlandstr. 3, 91058 Erlangen, Germany
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3
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Carden WG, Pedziwiatr J, Abboud KA, McElwee-White L. Halide Effects on the Sublimation Temperature of X-Au-L Complexes: Implications for Their Use as Precursors in Vapor Phase Deposition Methods. ACS Appl Mater Interfaces 2017; 9:40998-41005. [PMID: 29096063 DOI: 10.1021/acsami.7b12465] [Citation(s) in RCA: 7] [Impact Index Per Article: 1.0] [Reference Citation Analysis] [What about the content of this article? (0)] [Affiliation(s)] [Abstract] [Key Words] [Track Full Text] [Subscribe] [Scholar Register] [Indexed: 06/07/2023]
Abstract
Trends in volatility with changes in the halide ligand were established for gold(I) complexes of the type X-Au-L [X = Cl, Br, I; L = CNtBu, CNMe, PMe3, P(NMe2)3, P(OCH2CF3)3] by determining the temperatures for the onset of sublimation (Tsub) at a fixed pressure. Within each series of isocyanide complexes, Tsub decreases with increasing atomic radius of the halide, making the iodide complex the most volatile. For the phosphine and phosphoramidate complexes, the chloride and bromide have similar Tsub values with the bromide slightly higher, but the iodide complex is again the most volatile of the three. The trends in volatility can be correlated to variation in Au-Au bond distances and aggregation patterns in the solid state structures. For the P(OCH2CF3)3 complexes, melting occurred before sublimation, but the iodide complex was still more volatile than the bromide. These trends have implications for the use of these complexes in electron beam induced deposition and chemical vapor deposition, for which precursor volatility is important.
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Affiliation(s)
- Will G Carden
- Department of Chemistry, University of Florida , Gainesville, Florida 32611-7200, United States
| | - Jakub Pedziwiatr
- Department of Chemistry, University of Florida , Gainesville, Florida 32611-7200, United States
| | - Khalil A Abboud
- Department of Chemistry, University of Florida , Gainesville, Florida 32611-7200, United States
| | - Lisa McElwee-White
- Department of Chemistry, University of Florida , Gainesville, Florida 32611-7200, United States
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4
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P RKT, Hari S, Damodaran KK, Ingólfsson O, Hagen CW. Electron beam induced deposition of silacyclohexane and dichlorosilacyclohexane: the role of dissociative ionization and dissociative electron attachment in the deposition process. Beilstein J Nanotechnol 2017; 8:2376-2388. [PMID: 29181294 PMCID: PMC5687010 DOI: 10.3762/bjnano.8.237] [Citation(s) in RCA: 1] [Impact Index Per Article: 0.1] [Reference Citation Analysis] [What about the content of this article? (0)] [Affiliation(s)] [Abstract] [Key Words] [Track Full Text] [Figures] [Subscribe] [Scholar Register] [Received: 07/12/2017] [Accepted: 10/09/2017] [Indexed: 06/07/2023]
Abstract
We present first experiments on electron beam induced deposition of silacyclohexane (SCH) and dichlorosilacyclohexane (DCSCH) under a focused high-energy electron beam (FEBID). We compare the deposition dynamics observed when growing pillars of high aspect ratio from these compounds and we compare the proximity effect observed for these compounds. The two precursors show similar behaviour with regards to fragmentation through dissociative ionization in the gas phase under single-collision conditions. However, while DCSCH shows appreciable cross sections with regards to dissociative electron attachment, SCH is inert with respect to this process. We discuss our deposition experiments in context of the efficiency of these different electron-induced fragmentation processes. With regards to the deposition dynamics, we observe a substantially faster growth from DCSCH and a higher saturation diameter when growing pillars with high aspect ratio. However, both compounds show similar behaviour with regards to the proximity effect. With regards to the composition of the deposits, we observe that the C/Si ratio is similar for both compounds and in both cases close to the initial molecular stoichiometry. The oxygen content in the DCSCH deposits is about double that of the SCH deposits. Only marginal chlorine is observed in the deposits of from DCSCH. We discuss these observations in context of potential approaches for Si deposition.
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Affiliation(s)
- Ragesh Kumar T P
- Department of Chemistry and Science Institute, University of Iceland, Dunhagi 3, 107 Reykjavik, Iceland
| | - Sangeetha Hari
- Department of ImPhys, Delft University of Technology, Lorentzweg 1, 2628CJ Delft, Netherlands
| | - Krishna K Damodaran
- Department of Chemistry and Science Institute, University of Iceland, Dunhagi 3, 107 Reykjavik, Iceland
| | - Oddur Ingólfsson
- Department of Chemistry and Science Institute, University of Iceland, Dunhagi 3, 107 Reykjavik, Iceland
| | - Cornelis W Hagen
- Department of ImPhys, Delft University of Technology, Lorentzweg 1, 2628CJ Delft, Netherlands
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5
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Abstract
We introduce core-shell plasmonic nanohelices, highly tunable structures that have a different response in the visible for circularly polarized light of opposite handedness. The glass core of the helices is fabricated using electron beam induced deposition and the pure gold shell is subsequently sputter coated. Optical measurements allow us to explore the chiral nature of the nanohelices, where differences in the response to circularly polarized light of opposite handedness result in a dissymmetry factor of 0.86, more than twice of what has been previously reported. Both experiments and subsequent numerical simulations demonstrate the extreme tunability of the core-shell structures, where nanometer changes to the geometry can lead to drastic changes of the optical responses. This tunability, combined with the large differential transmission, make core-shell plasmonic nanohelices a powerful nanophotonic tool for, for example, (bio)sensing applications.
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Affiliation(s)
- Dolfine Kosters
- Kavli
Institute of Nanoscience, Department for Quantum Nanoscience, Lorentzweg 1, 2628 CJ Delft, The Netherlands
- Center for Nanophotonics,
AMOLF, Science Park 104, 1098 XG Amsterdam, The Netherlands
| | - Anouk de Hoogh
- Center for Nanophotonics,
AMOLF, Science Park 104, 1098 XG Amsterdam, The Netherlands
| | - Hans Zeijlemaker
- Center for Nanophotonics,
AMOLF, Science Park 104, 1098 XG Amsterdam, The Netherlands
| | - Hakkı Acar
- Center for Nanophotonics,
AMOLF, Science Park 104, 1098 XG Amsterdam, The Netherlands
| | - Nir Rotenberg
- Max
Planck Institute for the Science of Light, Staudtstraße 2, D-91058 Erlangen, Germany
| | - L. Kuipers
- Kavli
Institute of Nanoscience, Department for Quantum Nanoscience, Lorentzweg 1, 2628 CJ Delft, The Netherlands
- Center for Nanophotonics,
AMOLF, Science Park 104, 1098 XG Amsterdam, The Netherlands
- E-mail:
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6
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Höflich K, Jurczyk J, Zhang Y, Puydinger Dos Santos MV, Götz M, Guerra-Nuñez C, Best JP, Kapusta C, Utke I. Direct Electron Beam Writing of Silver-Based Nanostructures. ACS Appl Mater Interfaces 2017. [PMID: 28631921 DOI: 10.1021/acsami.7b04353] [Citation(s) in RCA: 9] [Impact Index Per Article: 1.3] [Reference Citation Analysis] [What about the content of this article? (0)] [Affiliation(s)] [Abstract] [Key Words] [Track Full Text] [Subscribe] [Scholar Register] [Indexed: 05/15/2023]
Abstract
Direct writing utilizing a focused electron beam constitutes an interesting alternative to resist-based techniques, as it allows for precise and flexible growth onto any conductive substrate in a single-step process. One important challenge, however, is the identification of appropriate precursors which allow for deposition of the material of choice, e.g., for envisaged applications in nano-optics. In this regard the coinage metal silver is of particular interest since it shows a relatively high plasma frequency and, thus, excellent plasmonic properties in the visible range. By utilizing the precursor compound AgO2Me2Bu, direct writing of silver-based nanostructures via local electron beam induced deposition could be realized for the first time. Interestingly, the silver deposition was strongly dependent on electron dose; at low doses of 30 nC/μm2 a dominant formation of pure silver crystals was observed, while at higher electron doses around 104 nC/μm2 large carbon contents were measured. A scheme for the enhanced silver deposition under low electron fluxes by an electronic activation of precursor dissociation below thermal CVD temperature is proposed and validated using material characterization techniques. Finally, the knowledge gained was employed to fabricate well-defined two-dimensional deposits with maximized silver content approaching 75 at. %, which was achieved by proper adjustment of the deposition parameters. The corresponding deposits consist of plasmonically active silver crystallites and demonstrate a pronounced Raman signal enhancement of the carbonaceous matrix.
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Affiliation(s)
- Katja Höflich
- Laboratory for Mechanics of Materials and Nanostructures, Empa-Swiss Federal Laboratories for Materials Science and Technology , Feuerwerkerstrasse 39, CH-3602 Thun, Switzerland
- Nanoscale Structures and Microscopic Analysis, Helmholtz-Zentrum Berlin für Materialien und Energie , Hahn-Meitner-Platz 1, D-14109 Berlin, Germany
| | - Jakub Jurczyk
- Laboratory for Mechanics of Materials and Nanostructures, Empa-Swiss Federal Laboratories for Materials Science and Technology , Feuerwerkerstrasse 39, CH-3602 Thun, Switzerland
- Faculty of Physics and Applied Computer Science, AGH University of Science and Technology Krakow , Al. Mickiewicza 30, 30-059 Kraków, Poland
| | - Yucheng Zhang
- Laboratory for Mechanics of Materials and Nanostructures, Empa-Swiss Federal Laboratories for Materials Science and Technology , Feuerwerkerstrasse 39, CH-3602 Thun, Switzerland
| | - Marcos V Puydinger Dos Santos
- Laboratory for Mechanics of Materials and Nanostructures, Empa-Swiss Federal Laboratories for Materials Science and Technology , Feuerwerkerstrasse 39, CH-3602 Thun, Switzerland
- Institute of Physics Gleb Wataghin, University of Campinas , Rua Sergio Buarque de Holanda 777 Cidade Universitaria, 13083-859 Campinas-SP, Brazil
| | - Maximilian Götz
- Nanoscale Structures and Microscopic Analysis, Helmholtz-Zentrum Berlin für Materialien und Energie , Hahn-Meitner-Platz 1, D-14109 Berlin, Germany
| | - Carlos Guerra-Nuñez
- Laboratory for Mechanics of Materials and Nanostructures, Empa-Swiss Federal Laboratories for Materials Science and Technology , Feuerwerkerstrasse 39, CH-3602 Thun, Switzerland
| | - James P Best
- Laboratory for Mechanics of Materials and Nanostructures, Empa-Swiss Federal Laboratories for Materials Science and Technology , Feuerwerkerstrasse 39, CH-3602 Thun, Switzerland
| | - Czeslaw Kapusta
- Faculty of Physics and Applied Computer Science, AGH University of Science and Technology Krakow , Al. Mickiewicza 30, 30-059 Kraków, Poland
| | - Ivo Utke
- Laboratory for Mechanics of Materials and Nanostructures, Empa-Swiss Federal Laboratories for Materials Science and Technology , Feuerwerkerstrasse 39, CH-3602 Thun, Switzerland
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7
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Lewis BB, Winkler R, Sang X, Pudasaini PR, Stanford MG, Plank H, Unocic RR, Fowlkes JD, Rack PD. 3D Nanoprinting via laser-assisted electron beam induced deposition: growth kinetics, enhanced purity, and electrical resistivity. Beilstein J Nanotechnol 2017; 8:801-812. [PMID: 28487823 PMCID: PMC5389181 DOI: 10.3762/bjnano.8.83] [Citation(s) in RCA: 15] [Impact Index Per Article: 2.1] [Reference Citation Analysis] [What about the content of this article? (0)] [Affiliation(s)] [Abstract] [Key Words] [Track Full Text] [Subscribe] [Scholar Register] [Received: 11/29/2016] [Accepted: 03/20/2017] [Indexed: 05/23/2023]
Abstract
We investigate the growth, purity, grain structure/morphology, and electrical resistivity of 3D platinum nanowires synthesized via electron beam induced deposition with and without an in situ pulsed laser assist process which photothermally couples to the growing Pt-C deposits. Notably, we demonstrate: 1) higher platinum concentration and a coalescence of the otherwise Pt-C nanogranular material, 2) a slight enhancement in the deposit resolution and 3) a 100-fold improvement in the conductivity of suspended nanowires grown with the in situ photothermal assist process, while retaining a high degree of shape fidelity.
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Affiliation(s)
- Brett B Lewis
- Materials Science and Engineering Department, University of Tennessee, Knoxville, TN 37996, USA
| | - Robert Winkler
- Graz Centre for Electron Microscopy, Steyrergasse 17, 8010 Graz, Austria
| | - Xiahan Sang
- Center for Nanophase Materials Sciences, Oak Ridge National Laboratory, Oak Ridge, TN 37381, USA
| | - Pushpa R Pudasaini
- Materials Science and Engineering Department, University of Tennessee, Knoxville, TN 37996, USA
| | - Michael G Stanford
- Materials Science and Engineering Department, University of Tennessee, Knoxville, TN 37996, USA
| | - Harald Plank
- Graz Centre for Electron Microscopy, Steyrergasse 17, 8010 Graz, Austria
- Institute of Electron Microscopy and Nanoanalysis, Graz University of Technology, Steyrergasse 17, 8010 Graz, Austria
| | - Raymond R Unocic
- Center for Nanophase Materials Sciences, Oak Ridge National Laboratory, Oak Ridge, TN 37381, USA
| | - Jason D Fowlkes
- Materials Science and Engineering Department, University of Tennessee, Knoxville, TN 37996, USA
- Center for Nanophase Materials Sciences, Oak Ridge National Laboratory, Oak Ridge, TN 37381, USA
| | - Philip D Rack
- Materials Science and Engineering Department, University of Tennessee, Knoxville, TN 37996, USA
- Center for Nanophase Materials Sciences, Oak Ridge National Laboratory, Oak Ridge, TN 37381, USA
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8
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Lewis BB, Stanford MG, Fowlkes JD, Lester K, Plank H, Rack PD. Electron-stimulated purification of platinum nanostructures grown via focused electron beam induced deposition. Beilstein J Nanotechnol 2015; 6:907-18. [PMID: 25977862 PMCID: PMC4419598 DOI: 10.3762/bjnano.6.94] [Citation(s) in RCA: 7] [Impact Index Per Article: 0.8] [Reference Citation Analysis] [What about the content of this article? (0)] [Affiliation(s)] [Abstract] [Key Words] [Track Full Text] [Subscribe] [Scholar Register] [Received: 12/23/2014] [Accepted: 03/09/2015] [Indexed: 05/23/2023]
Abstract
Platinum-carbon nanostructures deposited via electron beam induced deposition from MeCpPt(IV)Me3 are purified during a post-deposition electron exposure treatment in a localized oxygen ambient at room temperature. Time-dependent studies demonstrate that the process occurs from the top-down. Electron beam energy and current studies demonstrate that the process is controlled by a confluence of the electron energy loss and oxygen concentration. Furthermore, the experimental results are modeled as a 2nd order reaction which is dependent on both the electron energy loss density and the oxygen concentration. In addition to purification, the post-deposition electron stimulated oxygen purification process enhances the resolution of the EBID process due to the isotropic carbon removal from the as-deposited materials which produces high-fidelity shape retention.
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Affiliation(s)
- Brett B Lewis
- Materials Science and Engineering Department, University of Tennessee, Knoxville, TN 37996, USA
| | - Michael G Stanford
- Materials Science and Engineering Department, University of Tennessee, Knoxville, TN 37996, USA
| | - Jason D Fowlkes
- Materials Science and Engineering Department, University of Tennessee, Knoxville, TN 37996, USA
- Nanofabrication Research Laboratory, Center for Nanophase Materials Sciences, Oak Ridge National Laboratory, Oak Ridge, TN 37381, USA
| | - Kevin Lester
- Nanofabrication Research Laboratory, Center for Nanophase Materials Sciences, Oak Ridge National Laboratory, Oak Ridge, TN 37381, USA
| | - Harald Plank
- Institute for Electron Microscopy and Nanoanalysis, Graz University of Technology, Steyrergasse 17, 8010 Graz, Austria
| | - Philip D Rack
- Materials Science and Engineering Department, University of Tennessee, Knoxville, TN 37996, USA
- Nanofabrication Research Laboratory, Center for Nanophase Materials Sciences, Oak Ridge National Laboratory, Oak Ridge, TN 37381, USA
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9
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Gavagnin M, Wanzenboeck HD, Wachter S, Shawrav M, Persson A, Gunnarsson K, Svedlindh P, Stöger-Pollach M, Bertagnolli E. Free-standing magnetic nanopillars for 3D nanomagnet logic. ACS Appl Mater Interfaces 2014; 6:20254-60. [PMID: 25296008 PMCID: PMC4251043 DOI: 10.1021/am505785t] [Citation(s) in RCA: 15] [Impact Index Per Article: 1.5] [Reference Citation Analysis] [What about the content of this article? (0)] [Affiliation(s)] [Abstract] [Key Words] [Track Full Text] [Subscribe] [Scholar Register] [Received: 08/27/2014] [Accepted: 10/08/2014] [Indexed: 05/22/2023]
Abstract
Nanomagnet logic (NML) is a relatively new computation technology that uses arrays of shape-controlled nanomagnets to enable digital processing. Currently, conventional resist-based lithographic processes limit the design of NML circuitry to planar nanostructures with homogeneous thicknesses. Here, we demonstrate the focused electron beam induced deposition of Fe-based nanomaterial for magnetic in-plane nanowires and out-of-plane nanopillars. Three-dimensional (3D) NML was achieved based on the magnetic coupling between nanowires and nanopillars in a 3D array. Additionally, the same Fe-based nanomaterial was used to produce tilt-corrected high-aspect-ratio probes for the accurate magnetic force microscopy (MFM) analysis of the fabricated 3D NML gate arrays. The interpretation of the MFM measurements was supported by magnetic simulations using the Object Oriented MicroMagnetic Framework. Introducing vertical out-of-plane nanopillars not only increases the packing density of 3D NML but also introduces an extra magnetic degree of freedom, offering a new approach to input/output and processing functionalities in nanomagnetic computing.
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Affiliation(s)
- Marco Gavagnin
- Institute
of Solid State Electronics, Vienna University
of Technology, Floragasse
7/1, A-1040 Vienna, Austria
| | - Heinz D. Wanzenboeck
- Institute
of Solid State Electronics, Vienna University
of Technology, Floragasse
7/1, A-1040 Vienna, Austria
- E-mail:
| | - Stefan Wachter
- Institute
of Solid State Electronics, Vienna University
of Technology, Floragasse
7/1, A-1040 Vienna, Austria
| | - Mostafa
M. Shawrav
- Institute
of Solid State Electronics, Vienna University
of Technology, Floragasse
7/1, A-1040 Vienna, Austria
| | - Anders Persson
- Department
of Physics and Astronomy, Uppsala University, Box 516, 751 20 Uppsala, Sweden
| | - Klas Gunnarsson
- Department
of Engineering Sciences, Uppsala University, Box 534, 751 21 Uppsala, Sweden
| | - Peter Svedlindh
- Department
of Engineering Sciences, Uppsala University, Box 534, 751 21 Uppsala, Sweden
| | - Michael Stöger-Pollach
- University
Service Centre for Transmission Electron Microscopy, Vienna University of Technology, Wiedner Hauptstrasse 8-10/052, A-1040 Vienna, Austria
| | - Emmerich Bertagnolli
- Institute
of Solid State Electronics, Vienna University
of Technology, Floragasse
7/1, A-1040 Vienna, Austria
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10
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Xu T, Xie X, Yin K, Sun J, He L, Sun L. Controllable atomic-scale sculpting and deposition of carbon nanostructures on graphene. Small 2014; 10:1724-8. [PMID: 24616431 DOI: 10.1002/smll.201303377] [Citation(s) in RCA: 2] [Impact Index Per Article: 0.2] [Reference Citation Analysis] [What about the content of this article? (0)] [Affiliation(s)] [Key Words] [Track Full Text] [Subscribe] [Scholar Register] [Received: 10/29/2013] [Revised: 12/05/2013] [Indexed: 05/16/2023]
Affiliation(s)
- Tao Xu
- SEU-FEI Nano-Pico Center, Key Lab of MEMS of Ministry of Education, Southeast University, Nanjing, 210096, P. R. China
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11
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Weirich PM, Winhold M, Schwalb CH, Huth M. In situ growth optimization in focused electron-beam induced deposition. Beilstein J Nanotechnol 2013; 4:919-26. [PMID: 24367761 PMCID: PMC3869208 DOI: 10.3762/bjnano.4.103] [Citation(s) in RCA: 4] [Impact Index Per Article: 0.4] [Reference Citation Analysis] [What about the content of this article? (0)] [Affiliation(s)] [Abstract] [Key Words] [Track Full Text] [Subscribe] [Scholar Register] [Received: 08/07/2013] [Accepted: 12/06/2013] [Indexed: 05/12/2023]
Abstract
We present the application of an evolutionary genetic algorithm for the in situ optimization of nanostructures that are prepared by focused electron-beam-induced deposition (FEBID). It allows us to tune the properties of the deposits towards the highest conductivity by using the time gradient of the measured in situ rate of change of conductance as the fitness parameter for the algorithm. The effectiveness of the procedure is presented for the precursor W(CO)6 as well as for post-treatment of Pt-C deposits, which were obtained by the dissociation of MeCpPt(Me)3. For W(CO)6-based structures an increase of conductivity by one order of magnitude can be achieved, whereas the effect for MeCpPt(Me)3 is largely suppressed. The presented technique can be applied to all beam-induced deposition processes and has great potential for a further optimization or tuning of parameters for nanostructures that are prepared by FEBID or related techniques.
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Affiliation(s)
- Paul M Weirich
- Physikalisches Institut, Goethe Universität, Max-von-Laue-Str. 1, 60438 Frankfurt am Main, Germany
| | - Marcel Winhold
- Physikalisches Institut, Goethe Universität, Max-von-Laue-Str. 1, 60438 Frankfurt am Main, Germany
| | - Christian H Schwalb
- Physikalisches Institut, Goethe Universität, Max-von-Laue-Str. 1, 60438 Frankfurt am Main, Germany
| | - Michael Huth
- Physikalisches Institut, Goethe Universität, Max-von-Laue-Str. 1, 60438 Frankfurt am Main, Germany
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12
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Huth M, Porrati F, Schwalb C, Winhold M, Sachser R, Dukic M, Adams J, Fantner G. Focused electron beam induced deposition: A perspective. Beilstein J Nanotechnol 2012; 3:597-619. [PMID: 23019557 PMCID: PMC3458607 DOI: 10.3762/bjnano.3.70] [Citation(s) in RCA: 109] [Impact Index Per Article: 9.1] [Reference Citation Analysis] [What about the content of this article? (0)] [Affiliation(s)] [Abstract] [Key Words] [Track Full Text] [Subscribe] [Scholar Register] [Received: 06/08/2012] [Accepted: 07/19/2012] [Indexed: 05/19/2023]
Abstract
BACKGROUND Focused electron beam induced deposition (FEBID) is a direct-writing technique with nanometer resolution, which has received strongly increasing attention within the last decade. In FEBID a precursor previously adsorbed on a substrate surface is dissociated in the focus of an electron beam. After 20 years of continuous development FEBID has reached a stage at which this technique is now particularly attractive for several areas in both, basic and applied research. The present topical review addresses selected examples that highlight this development in the areas of charge-transport regimes in nanogranular metals close to an insulator-to-metal transition, the use of these materials for strain- and magnetic-field sensing, and the prospect of extending FEBID to multicomponent systems, such as binary alloys and intermetallic compounds with cooperative ground states. RESULTS After a brief introduction to the technique, recent work concerning FEBID of Pt-Si alloys and (hard-magnetic) Co-Pt intermetallic compounds on the nanometer scale is reviewed. The growth process in the presence of two precursors, whose flux is independently controlled, is analyzed within a continuum model of FEBID that employs rate equations. Predictions are made for the tunability of the composition of the Co-Pt system by simply changing the dwell time of the electron beam during the writing process. The charge-transport regimes of nanogranular metals are reviewed next with a focus on recent theoretical advancements in the field. As a case study the transport properties of Pt-C nanogranular FEBID structures are discussed. It is shown that by means of a post-growth electron-irradiation treatment the electronic intergrain-coupling strength can be continuously tuned over a wide range. This provides unique access to the transport properties of this material close to the insulator-to-metal transition. In the last part of the review, recent developments in mechanical strain-sensing and the detection of small, inhomogeneous magnetic fields by employing nanogranular FEBID structures are highlighted. CONCLUSION FEBID has now reached a state of maturity that allows a shift of the focus towards the development of new application fields, be it in basic research or applied. This is shown for selected examples in the present review. At the same time, when seen from a broader perspective, FEBID still has to live up to the original idea of providing a tool for electron-controlled chemistry on the nanometer scale. This has to be understood in the sense that, by providing a suitable environment during the FEBID process, the outcome of the electron-induced reactions can be steered in a controlled way towards yielding the desired composition of the products. The development of a FEBID-specialized surface chemistry is mostly still in its infancy. Next to application development, it is this aspect that will likely be a guiding light for the future development of the field of focused electron beam induced deposition.
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Affiliation(s)
- Michael Huth
- Physikalisches Institut, Max-von-Laue-Str. 1, Goethe-Universität, 60438 Frankfurt am Main, Germany
| | - Fabrizio Porrati
- Physikalisches Institut, Max-von-Laue-Str. 1, Goethe-Universität, 60438 Frankfurt am Main, Germany
| | - Christian Schwalb
- Physikalisches Institut, Max-von-Laue-Str. 1, Goethe-Universität, 60438 Frankfurt am Main, Germany
| | - Marcel Winhold
- Physikalisches Institut, Max-von-Laue-Str. 1, Goethe-Universität, 60438 Frankfurt am Main, Germany
| | - Roland Sachser
- Physikalisches Institut, Max-von-Laue-Str. 1, Goethe-Universität, 60438 Frankfurt am Main, Germany
| | - Maja Dukic
- Institute of Bioengineering, EPFL, STI IBI-STI LBNI, BM 3109 (Bâtiment BM), Station 17, CH-1015 Lausanne, Switzerland
| | - Jonathan Adams
- Institute of Bioengineering, EPFL, STI IBI-STI LBNI, BM 3109 (Bâtiment BM), Station 17, CH-1015 Lausanne, Switzerland
| | - Georg Fantner
- Institute of Bioengineering, EPFL, STI IBI-STI LBNI, BM 3109 (Bâtiment BM), Station 17, CH-1015 Lausanne, Switzerland
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Schwalb CH, Grimm C, Baranowski M, Sachser R, Porrati F, Reith H, Das P, Müller J, Völklein F, Kaya A, Huth M. A tunable strain sensor using nanogranular metals. Sensors (Basel) 2010; 10:9847-56. [PMID: 22163443 DOI: 10.3390/s101109847] [Citation(s) in RCA: 92] [Impact Index Per Article: 6.6] [Reference Citation Analysis] [What about the content of this article? (0)] [Abstract] [Key Words] [Track Full Text] [Download PDF] [Figures] [Subscribe] [Scholar Register] [Received: 09/16/2010] [Revised: 10/12/2010] [Accepted: 10/13/2010] [Indexed: 12/04/2022]
Abstract
This paper introduces a new methodology for the fabrication of strain-sensor elements for MEMS and NEMS applications based on the tunneling effect in nano-granular metals. The strain-sensor elements are prepared by the maskless lithography technique of focused electron-beam-induced deposition (FEBID) employing the precursor trimethylmethylcyclopentadienyl platinum [MeCpPt(Me)3]. We use a cantilever-based deflection technique to determine the sensitivity (gauge factor) of the sensor element. We find that its sensitivity depends on the electrical conductivity and can be continuously tuned, either by the thickness of the deposit or by electron-beam irradiation leading to a distinct maximum in the sensitivity. This maximum finds a theoretical rationale in recent advances in the understanding of electronic charge transport in nano-granular metals.
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