Doping change in the Bi-2212 superconductor directly induced by a hard X-ray nanobeam

X-Ray Lithography for Nanofabrication: Is There a Future?

X-ray lithography has been first proposed almost 50 years ago, and the related LIGA process around 25 years ago. It is therefore a good time to make an analysis of the technique, with its pros and cons. In this perspective article, we describe X-ray lithography’s latest advancements. First, we report the improvement in the fabrication of the high aspect ratio and high-resolution micro/nanostructures. Then, we present the radiation-assisted synthesis and processing of novel materials for the next generation of functional devices. We finally draw our conclusion on the future prospects of the technique.

When x-rays alter the course of your experiments

The continuing increase in the brilliance of synchrotron radiation beamlines allows for many new and exciting experiments that were impossible before the present generation of synchrotron radiation sources came on line. However, the exposure to such intense beams also tests the limits of what samples can endure. Whilst the effects of radiation induced damage in a static experiment often can easily be recognized by changes in the diffraction or spectroscopy curves, the influence of radiation on chemical or physical processes, where one expects curves to change, is less often recognized and can be misinterpreted as a 'real' result instead of as a 'radiation influenced result'. This is especially a concern in time-resolved materials science experiments using techniques as powder diffraction, small angle scattering and x-ray absorption spectroscopy. Here, the effects of radiation (5-50 keV) on some time-resolved processes in different types of materials and in different physical states are discussed. We show that such effects are not limited to soft matter and biology but rather can be found across the whole spectrum of materials research, over a large range of radiation doses and is not limited to very high brilliance beamlines.

Understanding nanoscale structural distortions in Pb(Zr0.2Ti0.8)O3 by utilizing X-ray nanodiffraction and clustering algorithm analysis

Hard X-ray nanodiffraction provides a unique nondestructive technique to quantify local strain and structural inhomogeneities at nanometer length scales. However, sample mosaicity and phase separation can result in a complex diffraction pattern that can make it challenging to quantify nanoscale structural distortions. In this work, a k-means clustering algorithm was utilized to identify local maxima of intensity by partitioning diffraction data in a three-dimensional feature space of detector coordinates and intensity. This technique has been applied to X-ray nanodiffraction measurements of a patterned ferroelectric PbZr_0.2Ti_0.8O₃ sample. The analysis reveals the presence of two phases in the sample with different lattice parameters. A highly heterogeneous distribution of lattice parameters with a variation of 0.02 Å was also observed within one ferroelectric domain. This approach provides a nanoscale survey of subtle structural distortions as well as phase separation in ferroelectric domains in a patterned sample.

Time and space resolved modelling of the heating induced by synchrotron X-ray nanobeams

X-ray synchrotron sources, possessing high power density, nanometric spot size and short pulse duration, are extending their application frontiers up to the exploration of direct matter modification. In this field, the use of atomistic and continuum models is now becoming fundamental in the simulation of the photoinduced excitation states and eventually in the phase transition triggered by intense X-rays. In this work, the X-ray heating phenomenon is studied by coupling the Monte Carlo method (MC) with the Fourier heat equation, to first calculate the distribution of the energy absorbed by the systems and finally to predict the heating distribution and evolution. The results of the proposed model are also compared with those obtained removing the explicit definition of the energy distribution, as calculated by the MC. A good approximation of experimental thermal measurements produced irradiating a millimetric glass bead is found for both of the proposed models. A further step towards more complex systems is carried out, including in the models the different time patterns of the source, as determined by the filling modes of the synchrotron storage ring. The two models are applied in three prediction cases, in which the heating produced in Bi₂Sr₂CaCu₂O_8+δ microcrystals by means of nanopatterning experiments with intense hard X-ray nanobeams is calculated. It is demonstrated that the temperature evolution is strictly connected to the filling mode of the storage ring. By coupling the MC with the heat equation, X-ray pulses that are 48 ps long, possessing an instantaneous photon flux of ∼44 × 10¹³ photons s^-1, were found to be able to induce a maximum temperature increase of 42 K, after a time of 350 ps. Inversely, by ignoring the energy redistribution calculated with the MC, peaks temperatures up to hundreds of degrees higher were found. These results highlight the importance of the energy redistribution operated by primary and secondary electrons in the theoretical simulation of the X-ray heating effects.

Structural and functional modifications induced by X-ray nanopatterning in Bi-2212 single crystals

X-ray nanopatterning induces both mosaicity increase and oxygen depletion in the high-T_c superconductor Bi₂Sr₂CaCu₂O_8+δ.

Maskless X-Ray Writing of Electrical Devices on a Superconducting Oxide with Nanometer Resolution and Online Process Monitoring

X-ray nanofabrication has so far been usually limited to mask methods involving photoresist impression and subsequent etching. Herein we show that an innovative maskless X-ray nanopatterning approach allows writing electrical devices with nanometer feature size. In particular we fabricated a Josephson device on a Bi₂Sr₂CaCu₂O_8+δ (Bi-2212) superconducting oxide micro-crystal by drawing two single lines of only 50 nm in width using a 17.4 keV synchrotron nano-beam. A precise control of the fabrication process was achieved by monitoring in situ the variations of the device electrical resistance during X-ray irradiation, thus finely tuning the irradiation time to drive the material into a non-superconducting state only in the irradiated regions, without significantly perturbing the crystal structure. Time-dependent finite element model simulations show that a possible microscopic origin of this effect can be related to the instantaneous temperature increase induced by the intense synchrotron picosecond X-ray pulses. These results prove that a conceptually new patterning method for oxide electrical devices, based on the local change of electrical properties, is actually possible with potential advantages in terms of heat dissipation, chemical contamination, miniaturization and high aspect ratio of the devices.

Effect of Al and Ca co-doping, in the presence of Te, in superconducting YBCO whiskers growth

High-T_c superconducting cuprates (HTSC) such as YBa₂Cu₃O_7 - x (YBCO) are promising candidates for solid-state THz applications based on stacks of intrinsic Josephson junctions (IJJs) with atomic thickness. In view of future exploitation of IJJs, high-quality superconducting YBCO tape-like single crystals (whiskers) have been synthesized from Ca-Al-doped precursors in the presence of Te. The main aim of this paper is to determine the importance of the simultaneous use of Al, Te and Ca in promoting YBCO whiskers growth with good superconducting properties (T_c = 79-84 K). Further, single-crystal X-ray diffraction (SC-XRD) refinements of tetragonal YBCO whiskers (P4/mmm) are reported to fill the literature lack of YBCO structure investigations. All the as-grown whiskers have also been investigated by means of X-ray powder diffraction (XRPD), scanning electron microscopy (SEM) and energy dispersive X-ray spectroscopy (EDS). Our results demonstrate that the interplay of Ca, Te and Al elements is clearly necessary in order to obtain superconducting YBCO whiskers. The data obtained from SC-XRD analyses confirm the highly crystalline nature of the whiskers grown. Ca and Al enter the structure by replacing the Y and the octahedral coordinated Cu1 site, respectively, as in other similar orthorhombic compounds, while Te does not enter the structure of whiskers but its presence in the precursor is essential to the growth of the crystals.

Direct-Write X-ray Nanopatterning: A Proof of Concept Josephson Device on Bi2Sr2CaCu2O8+δ Superconducting Oxide

We describe the first use of a novel photoresist-free X-ray nanopatterning technique to fabricate an electronic device. We have produced a proof-of-concept device consisting of a few Josephson junctions by irradiating microcrystals of the Bi2Sr2CaCu2O8+δ (Bi-2212) superconducting oxide with a 17.6 keV synchrotron nanobeam. Fully functional devices have been obtained by locally turning the material into a nonsuperconducting state by means of hard X-ray exposure. Nano-XRD patterns reveal that the crystallinity is substantially preserved in the irradiated areas that there is no evidence of macroscopic crystal disruption. Indications are that O ions have been removed from the crystals, which could make this technique interesting also for other oxide materials. Direct-write X-ray nanopatterning represents a promising fabrication method exploiting material/material rather than vacuum/material interfaces, with the potential for nanometric resolution, improved mechanical stability, enhanced depth of patterning, and absence of chemical contamination with respect to traditional lithographic techniques.