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Feldman N, Goeloe KMM, den Boef AJ, Amitonova LV, Koenderink AF. Nanometer Interlaced Displacement Metrology Using Diffractive Pancharatnam-Berry and Detour Phase Metasurfaces. ACS PHOTONICS 2024; 11:5229-5238. [PMID: 39712393 PMCID: PMC11660269 DOI: 10.1021/acsphotonics.4c01451] [Citation(s) in RCA: 0] [Impact Index Per Article: 0] [Reference Citation Analysis] [Abstract] [Key Words] [Grants] [Track Full Text] [Figures] [Subscribe] [Scholar Register] [Received: 08/01/2024] [Revised: 11/20/2024] [Accepted: 11/22/2024] [Indexed: 12/24/2024]
Abstract
Resolving structural misalignments on the nanoscale is of utmost importance in areas such as semiconductor device manufacturing. Metaphotonics provides a powerful toolbox to efficiently transduce information on the nanoscale into measurable far-field observables. In this work, we propose and demonstrate a novel interlaced displacement sensing platform based on diffractive anisotropic metasurfaces combined with polarimetric Fourier microscopy capable of resolving a few nanometer displacements within a device layer. We show that the sensing mechanism relies on an interplay of Pancharatnam-Berry and detour phase shifts and argue how nanoscale displacements are transduced into specific polarization signatures in the diffraction orders. We discuss efficient measurement protocols suitable for high-speed metrology applications and lay out optimization strategies for maximal sensing responsivity. Finally, we show that the proposed platform is capable of resolving arbitrary two-dimensional displacements on a device.
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Affiliation(s)
- Nick Feldman
- Department
of Information in Matter and Center for Nanophotonics, AMOLF, Science Park 104, 1098 XG Amsterdam, The Netherlands
- Advanced
Research Center for Nanolithography (ARCNL), Science Park 106, 1098 XG Amsterdam, The Netherlands
| | - Kian M. M. Goeloe
- Department
of Information in Matter and Center for Nanophotonics, AMOLF, Science Park 104, 1098 XG Amsterdam, The Netherlands
| | - Arie J. den Boef
- Advanced
Research Center for Nanolithography (ARCNL), Science Park 106, 1098 XG Amsterdam, The Netherlands
- Department
of Physics and Astronomy, and LaserLaB, Vrije Universiteit, 1081
HV Amsterdam, The
Netherlands
- ASML
Netherlands B.V., De Run 6501, 5504 DR Veldhoven, The Netherlands
| | - Lyubov V. Amitonova
- Advanced
Research Center for Nanolithography (ARCNL), Science Park 106, 1098 XG Amsterdam, The Netherlands
- Department
of Physics and Astronomy, and LaserLaB, Vrije Universiteit, 1081
HV Amsterdam, The
Netherlands
| | - A. Femius Koenderink
- Department
of Information in Matter and Center for Nanophotonics, AMOLF, Science Park 104, 1098 XG Amsterdam, The Netherlands
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2
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Vento V, Roelli P, Verlekar S, Galland C. Mode-Specific Coupling of Nanoparticle-on-Mirror Cavities with Cylindrical Vector Beams. NANO LETTERS 2023. [PMID: 37205630 DOI: 10.1021/acs.nanolett.3c00561] [Citation(s) in RCA: 0] [Impact Index Per Article: 0] [Reference Citation Analysis] [Abstract] [Key Words] [Track Full Text] [Subscribe] [Scholar Register] [Indexed: 05/21/2023]
Abstract
Nanocavities formed by ultrathin metallic gaps permit the reproducible engineering and enhancement of light-matter interaction, with mode volumes reaching the smallest values allowed by quantum mechanics. While the enhanced vacuum field in metallic nanogaps has been firmly evidenced, fewer experimental reports have examined the far-field to near-field input coupling under strongly focused laser beam. Here, we experimentally demonstrate selective excitation of nanocavity modes controlled by the polarization and frequency of the laser beam. We reveal mode selectivity by recording confocal maps of Raman scattering excited by cylindrical vector beams, which are compared to the known excitation near-field patterns. Our measurements reveal the transverse vs longitudinal polarization of the excited antenna mode and how the input coupling rate depends on laser wavelength. The method introduced here is easily applicable to other experimental scenarios, and our results help connect far-field with near-field parameters in quantitative models of nanocavity-enhanced phenomena.
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Affiliation(s)
- Valeria Vento
- Institute of Physics, École Polytechnique Fédérale de Lausanne (EPFL), CH-1015 Lausanne, Switzerland
| | - Philippe Roelli
- Nano-optics Group, CIC nanoGUNE, E-20018 Donostia-San Sebastián, Spain
| | - Sachin Verlekar
- Institute of Physics, École Polytechnique Fédérale de Lausanne (EPFL), CH-1015 Lausanne, Switzerland
| | - Christophe Galland
- Institute of Physics, École Polytechnique Fédérale de Lausanne (EPFL), CH-1015 Lausanne, Switzerland
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3
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Highly Unidirectional Radiation Enhancement Based on a Hybrid Multilayer Dimer. NANOMATERIALS 2022; 12:nano12040710. [PMID: 35215038 PMCID: PMC8875153 DOI: 10.3390/nano12040710] [Citation(s) in RCA: 0] [Impact Index Per Article: 0] [Reference Citation Analysis] [Abstract] [Key Words] [Track Full Text] [Download PDF] [Figures] [Subscribe] [Scholar Register] [Received: 01/18/2022] [Revised: 02/13/2022] [Accepted: 02/16/2022] [Indexed: 11/16/2022]
Abstract
Dimers made of plasmonic particles support strong field enhancements but suffer from large absorption losses, while low-loss dielectric dimers are limited by relatively weak optical confinement. Hybrid dimers could utilize the advantages of both worlds. Here, we propose a hybrid nanoantenna that contains a dimer of core-dual shell nanoparticles known as the metal-dielectric-metal (MDM) structure. We discovered that the hybrid dimer sustained unidirectional forward scattering, which resulted in a nearly ideal Kerker condition in the frequency close to the resonance peak of the dimer due to enhancing the amplitude of the induced high-order electric multiples in the gap and effectively superimposing them with magnetic ones, which respond to the excitation of the plane wave in the dielectric layer of the dimer. Furthermore, when an electric quantum emitter is coupled to the dimer, our study shows that the optimal hybrid dimer simultaneously possesses high radiation directivity and low-loss features, which illustrates a back-to-front ratio of radiation 53 times higher than that of the pure dielectric dimer and an average radiation efficiency 80% higher than that of the pure metallic dimer. In addition, the unique structures of the hybrid hexamer direct almost decrease 75% of the radiation beamwidth, hence heightening the directivity of the nanoantenna based on a hybrid dimer.
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Koenderink AF, Tsukanov R, Enderlein J, Izeddin I, Krachmalnicoff V. Super-resolution imaging: when biophysics meets nanophotonics. NANOPHOTONICS (BERLIN, GERMANY) 2022; 11:169-202. [PMID: 39633878 PMCID: PMC11501358 DOI: 10.1515/nanoph-2021-0551] [Citation(s) in RCA: 9] [Impact Index Per Article: 3.0] [Reference Citation Analysis] [Abstract] [Key Words] [Track Full Text] [Figures] [Subscribe] [Scholar Register] [Received: 09/24/2021] [Revised: 11/26/2021] [Accepted: 11/29/2021] [Indexed: 12/07/2024]
Abstract
Probing light-matter interaction at the nanometer scale is one of the most fascinating topics of modern optics. Its importance is underlined by the large span of fields in which such accurate knowledge of light-matter interaction is needed, namely nanophotonics, quantum electrodynamics, atomic physics, biosensing, quantum computing and many more. Increasing innovations in the field of microscopy in the last decade have pushed the ability of observing such phenomena across multiple length scales, from micrometers to nanometers. In bioimaging, the advent of super-resolution single-molecule localization microscopy (SMLM) has opened a completely new perspective for the study and understanding of molecular mechanisms, with unprecedented resolution, which take place inside the cell. Since then, the field of SMLM has been continuously improving, shifting from an initial drive for pushing technological limitations to the acquisition of new knowledge. Interestingly, such developments have become also of great interest for the study of light-matter interaction in nanostructured materials, either dielectric, metallic, or hybrid metallic-dielectric. The purpose of this review is to summarize the recent advances in the field of nanophotonics that have leveraged SMLM, and conversely to show how some concepts commonly used in nanophotonics can benefit the development of new microscopy techniques for biophysics. To this aim, we will first introduce the basic concepts of SMLM and the observables that can be measured. Then, we will link them with their corresponding physical quantities of interest in biophysics and nanophotonics and we will describe state-of-the-art experiments that apply SMLM to nanophotonics. The problem of localization artifacts due to the interaction of the fluorescent emitter with a resonant medium and possible solutions will be also discussed. Then, we will show how the interaction of fluorescent emitters with plasmonic structures can be successfully employed in biology for cell profiling and membrane organization studies. We present an outlook on emerging research directions enabled by the synergy of localization microscopy and nanophotonics.
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Affiliation(s)
- A. Femius Koenderink
- Center for Nanophotonics, AMOLF, Science Park 104, 1098 XGAmsterdam, The Netherlands
| | - Roman Tsukanov
- III. Institute of Physics – Biophysics, Georg August University, Friedrich-Hund-Platz 1,37077Göttingen, Germany
| | - Jörg Enderlein
- III. Institute of Physics – Biophysics, Georg August University, Friedrich-Hund-Platz 1,37077Göttingen, Germany
- Cluster of Excellence “Multiscale Bioimaging: from Molecular Machines to Networks of Excitable Cells” (MBExC), Georg August University, 37077Göttingen, Germany
| | - Ignacio Izeddin
- Institut Langevin - Ondes et Images, ESPCI Paris, Université PSL, CNRS, 1, rue Jussieu, 75005Paris, France
| | - Valentina Krachmalnicoff
- Institut Langevin - Ondes et Images, ESPCI Paris, Université PSL, CNRS, 1, rue Jussieu, 75005Paris, France
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Sterl F, Herkert E, Both S, Weiss T, Giessen H. Shaping the Color and Angular Appearance of Plasmonic Metasurfaces with Tailored Disorder. ACS NANO 2021; 15:10318-10327. [PMID: 34115488 DOI: 10.1021/acsnano.1c02538] [Citation(s) in RCA: 19] [Impact Index Per Article: 4.8] [Reference Citation Analysis] [Abstract] [Key Words] [Track Full Text] [Subscribe] [Scholar Register] [Indexed: 06/12/2023]
Abstract
The optical properties of plasmonic nanoparticle ensembles are determined not only by the particle shape and size but also by the nanoantenna arrangement. To investigate the influence of the spatial ordering on the far-field optical properties of nanoparticle ensembles, we introduce a disorder model that encompasses both "frozen-phonon" and correlated disorder. We present experimental as well as computational approaches to gain a better understanding of the impact of disorder. A designated Fourier microscopy setup allows us to record the real- and Fourier-space images of plasmonic metasurfaces as either RGB images or fully wavelength-resolved data sets. Furthermore, by treating the nanoparticles as dipoles, we calculate the electric field based on dipole-dipole interaction, extract the far-field response, and convert it to RGB images. Our results reveal how the different disorder parameters shape the optical far field and thus define the optical appearance of a disordered metasurface and show that the relatively simple dipole approximation is able to reproduce the far-field behavior accurately. These insights can be used for engineering metasurfaces with tailored disorder to produce a desired bidirectional reflectance distribution function.
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Affiliation(s)
- Florian Sterl
- 4th Physics Institute and Research Center SCoPE, University of Stuttgart, Pfaffenwaldring 57, 70569 Stuttgart, Germany
| | - Ediz Herkert
- 4th Physics Institute and Research Center SCoPE, University of Stuttgart, Pfaffenwaldring 57, 70569 Stuttgart, Germany
| | - Steffen Both
- 4th Physics Institute and Research Center SCoPE, University of Stuttgart, Pfaffenwaldring 57, 70569 Stuttgart, Germany
| | - Thomas Weiss
- 4th Physics Institute and Research Center SCoPE, University of Stuttgart, Pfaffenwaldring 57, 70569 Stuttgart, Germany
| | - Harald Giessen
- 4th Physics Institute and Research Center SCoPE, University of Stuttgart, Pfaffenwaldring 57, 70569 Stuttgart, Germany
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Schilder NJ, Wolterink TAW, Mennes C, Röhrich R, Femius Koenderink A. Phase-retrieval Fourier microscopy of partially temporally coherent nanoantenna radiation patterns. OPTICS EXPRESS 2020; 28:37844-37859. [PMID: 33379611 DOI: 10.1364/oe.410344] [Citation(s) in RCA: 0] [Impact Index Per Article: 0] [Reference Citation Analysis] [Abstract] [Track Full Text] [Subscribe] [Scholar Register] [Received: 09/17/2020] [Accepted: 11/18/2020] [Indexed: 06/12/2023]
Abstract
We report an experimental technique for determining phase-resolved radiation patterns of single nanoantennas by phase-retrieval defocused imaging. A key property of nanoantennas is their ability to imprint spatial coherence, for instance, on fluorescent sources. Yet, measuring emitted wavefronts in absence of a reference field is difficult. We realize a defocused back focal plane microscope to measure phase even for partially temporally coherent light and benchmark the method using plasmonic bullseye antenna scattering. We outline the limitations of defocused imaging which are set by spectral bandwidth and antenna mode structure. This work is a first step to resolve wavefronts from fluorescence controlled by nanoantennas.
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Polarization-Sensitive Digital Holographic Imaging for Characterization of Microscopic Samples: Recent Advances and Perspectives. APPLIED SCIENCES-BASEL 2020. [DOI: 10.3390/app10134520] [Citation(s) in RCA: 9] [Impact Index Per Article: 1.8] [Reference Citation Analysis] [Abstract] [Track Full Text] [Subscribe] [Scholar Register] [Indexed: 02/07/2023]
Abstract
Polarization-sensitive digital holographic imaging (PS-DHI) is a recent imaging technique based on interference among several polarized optical beams. PS-DHI allows simultaneous quantitative three-dimensional reconstruction and quantitative evaluation of polarization properties of a given sample with micrometer scale resolution. Since this technique is very fast and does not require labels/markers, it finds application in several fields, from biology to microelectronics and micro-photonics. In this paper, a comprehensive review of the state-of-the-art of PS-DHI techniques, the theoretical principles, and important applications are reported.
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8
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Schilder NJ, Agrawal H, Garnett EC, Polman A. Phase-Resolved Surface Plasmon Scattering Probed by Cathodoluminescence Holography. ACS PHOTONICS 2020; 7:1476-1482. [PMID: 32566698 PMCID: PMC7304075 DOI: 10.1021/acsphotonics.0c00209] [Citation(s) in RCA: 8] [Impact Index Per Article: 1.6] [Reference Citation Analysis] [Abstract] [Key Words] [Track Full Text] [Subscribe] [Scholar Register] [Received: 02/10/2020] [Indexed: 05/20/2023]
Abstract
High-energy (1-100 keV) electrons can coherently couple to plasmonic and dielectric nanostructures, creating cathodoluminescence (CL) of which the spectral features reveal details of the material's resonant modes at a deep-subwavelength spatial resolution. While CL provides fundamental insight in optical modes, detecting its phase has remained elusive. Here, we use Fourier-transform CL holography to determine the far-field phase distribution of fields scattered from plasmonic nanoholes, nanocubes, and helical nanoapertures and reconstruct the angle-resolved phase distributions. From the derived fields, we derive the relative strength and phase of induced scattering dipoles. Fourier-transform CL holography opens up a new world of coherent light scattering and surface wave studies with nanoscale spatial resolution.
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Affiliation(s)
- Nick J. Schilder
- Center for Nanophotonics, AMOLFScience Park 104, 1098XG Amsterdam, The Netherlands
| | - Harshal Agrawal
- Center for Nanophotonics, AMOLFScience Park 104, 1098XG Amsterdam, The Netherlands
| | - Erik C. Garnett
- Center for Nanophotonics, AMOLFScience Park 104, 1098XG Amsterdam, The Netherlands
| | - Albert Polman
- Center for Nanophotonics, AMOLFScience Park 104, 1098XG Amsterdam, The Netherlands
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Stella U, Grosjean T, De Leo N, Boarino L, Munzert P, Lakowicz JR, Descrovi E. Vortex Beam Generation by Spin-Orbit Interaction with Bloch Surface Waves. ACS PHOTONICS 2020; 7:774-783. [PMID: 33644254 PMCID: PMC7901667 DOI: 10.1021/acsphotonics.9b01625] [Citation(s) in RCA: 1] [Impact Index Per Article: 0.2] [Reference Citation Analysis] [Abstract] [Key Words] [Track Full Text] [Subscribe] [Scholar Register] [Received: 11/14/2019] [Indexed: 05/27/2023]
Abstract
Axis-symmetric grooves milled in metallic slabs have been demonstrated to promote the transfer of Orbital Angular Momentum (OAM) from far- to near-field and vice versa, thanks to spin-orbit coupling effects involving Surface Plasmons (SP). However, the high absorption losses and the polarization constraints, which are intrinsic in plasmonic structures, limit their effectiveness for applications in the visible spectrum, particularly if emitters located in close proximity to the metallic surface are concerned. Here, an alternative mechanism for vortex beam generation is presented, wherein a free-space radiation possessing OAM is obtained by diffraction of Bloch Surface Waves (BSWs) on a dielectric multilayer. A circularly polarized laser beam is tightly focused on the multilayer surface by means of an immersion optics, such that TE-polarized BSWs are launched radially from the focused spot. While propagating on the multilayer surface, BSWs exhibit a spiral-like wavefront due to the Spin-Orbit Interaction (SOI). A spiral grating surrounding the illumination area provides for the BSW diffraction out-of-plane and imparts an additional azimuthal geometric phase distribution defined by the topological charge of the spiral structure. At infinity, the constructive interference results into free-space beams with defined combinations of polarization and OAM satisfying the conservation of the Total Angular Momentum, based on the incident polarization handedness and the spiral grating topological charge. As an extension of this concept, chiral diffractive structures for BSWs can be used in combination with surface cavities hosting light sources therein.
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Affiliation(s)
- Ugo Stella
- Department of Applied Science and Technology (DISAT),
Politecnico di Torino, Corso Duca degli Abruzzi 24, Torino,
IT-10129, Italy
| | - Thierry Grosjean
- FEMTO-ST Institute, Université
Bourgogne Franche-Comté, UMR CNRS 6174 15B Avenue des Montboucons,
25030, Besançon, France
| | - Natascia De Leo
- Quantum Research Laboratories & Nanofacility
Piemonte, Advanced Materials Metrology and Life Science Division, Istituto
Nazionale di Ricerca Metrologica (INRiM), Strada delle Cacce 91, Torino,
IT-10135, Italy
| | - Luca Boarino
- Quantum Research Laboratories & Nanofacility
Piemonte, Advanced Materials Metrology and Life Science Division, Istituto
Nazionale di Ricerca Metrologica (INRiM), Strada delle Cacce 91, Torino,
IT-10135, Italy
| | - Peter Munzert
- Fraunhofer Institute for Applied Optics
and Precision Engineering IOF, Albert-Einstein-Str. 7, Jena DE-07745,
Germany
| | - Joseph R. Lakowicz
- Center for Fluorescence Spectroscopy, Department of
Biochemistry and Molecular Biology, University of Maryland School of
Medicine, Baltimore, Maryland 21201, United
States
| | - Emiliano Descrovi
- Department of Applied Science and Technology (DISAT),
Politecnico di Torino, Corso Duca degli Abruzzi 24, Torino,
IT-10129, Italy
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10
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One-piece polarizing interferometer for ultrafast spectroscopic polarimetry. Sci Rep 2019; 9:5978. [PMID: 30979962 PMCID: PMC6461686 DOI: 10.1038/s41598-019-42397-2] [Citation(s) in RCA: 7] [Impact Index Per Article: 1.2] [Reference Citation Analysis] [Abstract] [Track Full Text] [Download PDF] [Figures] [Journal Information] [Subscribe] [Scholar Register] [Received: 11/11/2018] [Accepted: 03/27/2019] [Indexed: 11/12/2022] Open
Abstract
This paper describes a new class of ultrafast dynamic spectro-polarimetry based on a specially designed one-piece polarizing interferometer. It provides spectral polarimetric parameters of an anisotropic object in milliseconds with high precision. The proposed ultrafast spectro-polarimetry has no moving parts and it is highly robust to external noises. The one-piece polarizing interferometric scheme enables the world fastest and simplest solution in spectroscopic polarimetry. The distinct simple concept on one-piece polarizing interferometer can extract spectroscopic polarimetric parameters Ψ(k) and Δ(k) precisely with a speed of over 200 Hz over the entire visible wavelength range with a spectral resolution of less than 1 nm. The proposed novel one-piece scheme will have a significant potential of a paradigm shift from lab to fab in polarization metrology.
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