High-resolution fabrication of nanopatterns by multistep iterative miniaturization of hot-embossed prestressed polymer films and constrained shrinking

Cost-effective fabrication of submicron-scale patterns enabled by microcontact printing with a pre-strained soft elastomeric stamp

While photolithography and e-beam lithography remain the predominant techniques for nanoscale patterning, their high costs and inherent complexity have limited their accessibility for certain applications. Recently, shrink lithography has emerged as a promising technique for reducing pattern dimensions through substrate contraction, offering a simpler and cost-effective alternative to existing methods. In this study, we propose a method combining microcontact printing with a pre-stretched soft elastomeric stamp to achieve scalable pattern reduction. We introduce the pre-stretching and releasing of the Ecoflex-based soft elastomeric stamp in microcontact printing processes, leveraging its excellent stretchability and elasticity. This approach allows for the reduction of the original pattern dimensions by up to 60%. Furthermore, by experimentally quantifying the shrinkage with respect to the applying strain, we characterize the degree of pattern reduction, which offers a promising alternative for fabricating sub-micron scale features, with potential applications in scalable nano-manufacturing.

Nanoimprinting and backside ultraviolet lithography for fabricating metal nanostructures with higher aspect ratio

This paper introduces an innovative approach to increasing the aspect ratio of metal nanostructures fabricated using nanoimprint lithography (NIL). Although conventional NIL and metal lift-off processes can fabricate metal nanostructures, the achievable aspect ratio is often limited by the inherent constraints of NIL. In this study, we demonstrate that for an ultraviolet (UV) transparent substrate, metal nanostructures patterned via NIL can serve as a photomask. A negative-tone photoresist (PR) layer was then deposited on top of the patterned metal nanostructures. By illuminating the substrate from the backside with UV light and subsequently developing the PR, PR structures complementary and self-aligned to the metal layer were obtained. This enabled a second round of metal deposition and lift-off, thereby increasing the height of the metal structures and enhancing the aspect ratio. Experimentally, we demonstrated that this method can improve the aspect ratio from less than 1.0 to as high as 2.1. This paper also addresses the further developments and potential applications of this technique.

Bi-Layer nanoimprinting lithography for metal-assisted chemical etching with application on silicon mold replication

This paper reports a new type of nanoimprinting method called Bi-layer nanoimprinting lithography (BL-NIL), which can work along with metal-assisted chemical etching (MaCE) for fabricating nanostructures on silicon. In contrast to conventional nanoimprinting techniques, BL-NIL adds an interposing layer between the imprinting resist layer and silicon substrate. After the standard imprinting process, dry etching was used to etch away the residual imprinting layer and part of the interposing layer. Finally, the remaining interposing layer was wet-etched using its remover. This innovative approach can ensure cleanliness at the metal/silicon interface after metal lift-off processes, and therefore guarantees the success of MaCE. By combining BL-NIL and MaCE, expensive silicon molds with sub-micrometer/nanometer-scale feature sizes can be easily replicated and preserved. This is important for the application of nanoimprinting technologies in industrial manufacturing.

Fabrication of Nanogroove Arrays on Acrylic Film Using Micro-Embossing Technique

The fabrication of nanostructures is of great importance in producing biomedical devices. Significantly, the nanostructure of the polymeric film has a significant impact on the physical and biophysical behavior of the biomolecules. This study presents an efficient nanofabrication method of nanogroove structures on an acrylic film by the micro-embossing process. In this method, a master mold was made from a thermos oxide silicon substrate using photolithography and etching techniques. An isotropic optical polymethyl methacrylate (PMMA) film is used in the experiment. The acrylic film is known for its excellent optical properties in products such as optical lenses, medical devices, and various general purpose engineering plastics. Then, the micro-embossing process was realized to fabricate nanogroove patterns on an acrylic film by using a micro-embossing machine. However, the morphology of the nanopatterns on an acrylic film was characterized by using an atomic force microscope to measure the dimensions of the nanogroove patterns. The impact of embossing temperature on the morphology of nanogroove patterns on acrylic film is experimentally investigated. The results show that when the embossing temperature is too small, the pattern is not fully formed, and slipping occurs in nanopatterns on the acrylic film. On the other hand, the effect of increasing the embossing temperature on the morphology of nanogrooves agrees with the master mold, and the crests between the nanogrooves form straight edges. It should be noted that the micro-embossing temperature also strongly influences the transferability of nanopatterns on an acrylic film. The technique has great potential for rapidly fabricating nanostructure patterns on acrylic film.

Multimodal MEMS vibration energy harvester with cascaded flexible and silicon beams for ultralow frequency response

Scavenged energy from ambient vibrations has become a promising energy supply for autonomous microsystems. However, restricted by device size, most MEMS vibration energy harvesters have much higher resonant frequencies than environmental vibrations, which reduces scavenged power and limits practical applicability. Herein, we propose a MEMS multimodal vibration energy harvester with specifically cascaded flexible PDMS and "zigzag" silicon beams to simultaneously lower the resonant frequency to the ultralow-frequency level and broaden the bandwidth. A two-stage architecture is designed, in which the primary subsystem consists of suspended PDMS beams characterized by a low Young's modulus, and the secondary system consists of zigzag silicon beams. We also propose a PDMS lift-off process to fabricate the suspended flexible beams and the compatible microfabrication method shows high yield and good repeatability. The fabricated MEMS energy harvester can operate at ultralow resonant frequencies of 3 and 23 Hz, with an NPD index of 1.73 μW/cm³/g² @ 3 Hz. The factors underlying output power degradation in the low-frequency range and potential enhancement strategies are discussed. This work offers new insights into achieving MEMS-scale energy harvesting with ultralow frequency response.

Surface roughness modulates EGFR signaling and stemness of triple-negative breast cancer cells

Introduction: Cancer stem cells (CSC), a major culprit of drug-resistant phenotypes and tumor relapse, represent less than 2 % of the bulk of TNBC cells, making them difficult to isolate, study, and thus, limiting our understanding of the pathogenesis of the disease. Current methods for CSC enrichment, such as 3D spheroid culture, genetic modification, and stem cell conditioning, are time consuming, expensive, and unsuitable for high-throughput assays. One way to address these limitations is to use topographical stimuli to enhance CSC populations in planar culture. Physical cues in the breast tumor microenvironment can influence cell behavior through changes in the mechanical properties of the extracellular matrix (ECM). In this study, we used topographical cues on polystyrene films to investigate their effect on the proteome and stemness of standard TNBC cell lines. Methods: The topographical polystyrene-based array was generated using razor printing and polishing methods. Proteome data were analyzed and enriched bioprocesses were identified using R software. Stemness was assessed measuring CD44, CD24 and ALDH markers using flow cytometry, immunofluorescence, detection assays, and further validated with mammosphere assay. EGF/EGFR expression and activity was evaluated using enzyme-linked immunosorbent assay (ELISA), immunofluorescence and antibody membrane array. A dose-response assay was performed to further investigate the effect of surface topography on the sensitivity of cells to the EGFR inhibitor. Results: Surface roughness enriched the CSC population and modulated epidermal growth factor receptor (EGFR) signaling activity in TNBC cells. Enhanced proliferation of MDA-MB-468 cells in roughness correlated with upregulation of the epidermal growth factor (EGF) ligand, which in turn corresponded with a 3-fold increase in the expression of EGFR and a 42% increase in its phosphorylation compared to standard smooth culture surfaces. The results also demonstrated that phenotypic changes associated with topographical (roughness) stimuli significantly decreased the drug sensitivity to the EGFR inhibitor gefitinib. In addition, the proportion of CD44+/CD24-/ALDH+ was enhanced on surface roughness in both MDA-MB-231 and MDA-MB-468 cell lines. We also demonstrated that YAP/TAZ activation decreased in a roughness-dependent manner, confirming the mechanosensing effect of the topographies on the oncogenic activity of the cells. Discussion: Overall, this study demonstrates the potential of surface roughness as a culture strategy to influence oncogenic activity in TNBC cells and enrich CSC populations in planar cultures. Such a culture strategy may benefit high-throughput screening studies seeking to identify compounds with broader tumor efficacy.