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Znati S, Wharwood J, Tezanos KG, Li X, Mohseni PK. Metal-assisted chemical etching beyond Si: applications to III-V compounds and wide-bandgap semiconductors. NANOSCALE 2024. [PMID: 38804075 DOI: 10.1039/d4nr00857j] [Citation(s) in RCA: 0] [Impact Index Per Article: 0] [Reference Citation Analysis] [Abstract] [Track Full Text] [Subscribe] [Scholar Register] [Indexed: 05/29/2024]
Abstract
Metal-assisted chemical etching (MacEtch) has emerged as a versatile technique for fabricating a variety of semiconductor nanostructures. Since early investigations in 2000, research in this field has provided a deeper understanding of the underlying mechanisms of catalytic etching processes and enabled high control over etching conditions for diverse applications. In this Review, we present an overview of recent developments in the application of MacEtch to nanomanufacturing and processing of III-V based semiconductor materials and other materials beyond Si. We highlight the key findings and developments in MacEtch as applied to GaAs, GaN, InP, GaP, InGaAs, AlGaAs, InGaN, InGaP, SiC, β-Ga2O3, and Ge material systems. We further review a series of active and passive devices enabled by MacEtch, including light-emitting diodes (LEDs), field-effect transistors (FETs), optical gratings, sensors, capacitors, photodiodes, and solar cells. By reviewing demonstrated control of morphology, optimization of etch conditions, and catalyst-material combinations, we aim to distill the current understanding of beyond-Si MacEtch mechanisms and to provide a bank of reference recipes to stimulate progress in the field.
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Affiliation(s)
- Sami Znati
- Microsystem Engineering, Rochester Institute of Technology, Rochester, NY 16423, USA.
- NanoPower Research Laboratories, Rochester Institute of Technology, Rochester, NY 14623, USA
| | - Juwon Wharwood
- NanoPower Research Laboratories, Rochester Institute of Technology, Rochester, NY 14623, USA
- Department of Electrical and Computer Engineering, Howard University, Washington, DC 20059, USA
| | - Kyle G Tezanos
- NanoPower Research Laboratories, Rochester Institute of Technology, Rochester, NY 14623, USA
- School of Materials Science and Chemistry, Rochester Institute of Technology, Rochester, NY 14623, USA
| | - Xiuling Li
- Department of Electrical and Computer Engineering, Microelectronics Research Center, The University of Texas at Austin, Austin, TX 78758, USA
| | - Parsian K Mohseni
- Microsystem Engineering, Rochester Institute of Technology, Rochester, NY 16423, USA.
- NanoPower Research Laboratories, Rochester Institute of Technology, Rochester, NY 14623, USA
- School of Materials Science and Chemistry, Rochester Institute of Technology, Rochester, NY 14623, USA
- Department of Electrical and Microelectronic Engineering, Rochester Institute of Technology, Rochester, NY 14623, USA
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2
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Chen J, Chen F, Wang X, Zhao Y, Wu Y, Cao Q, Jiang T, Li K, Li Y, Zhang J, Wu W, Che R. Room-Temperature Response Performance of Coupled Doped-Well Quantum Cascade Detectors with Array Structure. NANOMATERIALS (BASEL, SWITZERLAND) 2022; 13:110. [PMID: 36616020 PMCID: PMC9824534 DOI: 10.3390/nano13010110] [Citation(s) in RCA: 0] [Impact Index Per Article: 0] [Reference Citation Analysis] [Abstract] [Key Words] [Track Full Text] [Figures] [Subscribe] [Scholar Register] [Received: 11/19/2022] [Revised: 12/23/2022] [Accepted: 12/24/2022] [Indexed: 06/17/2023]
Abstract
Energy level interaction and electron concentration are crucial aspects that affect the response performance of quantum cascade detectors (QCDs). In this work, two different-structured array QCDs are prepared, and the detectivity reaches 109 cm·Hz1/2/W at room temperature. The overlap integral (OI) and oscillator strength (OS) between different energy levels under a series of applied biases are fitted and reveal the influence of energy level interaction on the response performance. The redistribution of electrons in the cascade structure at room temperatures is established. The coupled doped-well structure shows a higher electron concentration at room temperature, which represents a high absorption efficiency in the active region. Even better responsivity and detectivity are exhibited in the coupled doped-well QCD. These results offer a novel strategy to understand the mechanisms that affect response performance and expand the application range of QCDs for long-wave infrared (LWIR) detection.
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Affiliation(s)
- Jie Chen
- Laboratory of Advanced Materials, Shanghai Key Lab of Molecular Catalysis and Innovative Materials, Academy for Engineering & Technology, Fudan University, Shanghai 200438, China
- Laser Fusion Research Center, China Academy of Engineering Physics, Mianyang 621900, China
| | - Fengwei Chen
- Laser Fusion Research Center, China Academy of Engineering Physics, Mianyang 621900, China
| | - Xuemin Wang
- Laser Fusion Research Center, China Academy of Engineering Physics, Mianyang 621900, China
| | - Yunhao Zhao
- Laboratory of Advanced Materials, Shanghai Key Lab of Molecular Catalysis and Innovative Materials, Academy for Engineering & Technology, Fudan University, Shanghai 200438, China
| | - Yuyang Wu
- Laboratory of Advanced Materials, Shanghai Key Lab of Molecular Catalysis and Innovative Materials, Academy for Engineering & Technology, Fudan University, Shanghai 200438, China
| | - Qingchen Cao
- Laboratory of Advanced Materials, Shanghai Key Lab of Molecular Catalysis and Innovative Materials, Academy for Engineering & Technology, Fudan University, Shanghai 200438, China
| | - Tao Jiang
- Laser Fusion Research Center, China Academy of Engineering Physics, Mianyang 621900, China
| | - Keyu Li
- Laser Fusion Research Center, China Academy of Engineering Physics, Mianyang 621900, China
| | - Yang Li
- Laser Fusion Research Center, China Academy of Engineering Physics, Mianyang 621900, China
| | | | - Weidong Wu
- Laser Fusion Research Center, China Academy of Engineering Physics, Mianyang 621900, China
| | - Renchao Che
- Laboratory of Advanced Materials, Shanghai Key Lab of Molecular Catalysis and Innovative Materials, Academy for Engineering & Technology, Fudan University, Shanghai 200438, China
- Zhejiang Laboratory, Hangzhou 311100, China
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3
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Jiang M, Gong H, Xiao H, Singh CV, Liu Z, Qiao L, Zu X. Effects of temperature and energy on the radiation response of GaAs/AlAs and GaAs/AlGaAs superlattices. Radiat Phys Chem Oxf Engl 1993 2020. [DOI: 10.1016/j.radphyschem.2020.108983] [Citation(s) in RCA: 1] [Impact Index Per Article: 0.3] [Reference Citation Analysis] [Track Full Text] [Journal Information] [Subscribe] [Scholar Register] [Indexed: 11/28/2022]
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4
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Shen Y, Fang X, Ding X, Xiao H, Xiang X, Yang G, Jiang M, Zu X, Qiao L. Structural Features and Photoelectric Properties of Si-Doped GaAs under Gamma Irradiation. NANOMATERIALS 2020; 10:nano10020340. [PMID: 32079269 PMCID: PMC7075233 DOI: 10.3390/nano10020340] [Citation(s) in RCA: 3] [Impact Index Per Article: 0.8] [Reference Citation Analysis] [Abstract] [Key Words] [Track Full Text] [Download PDF] [Figures] [Subscribe] [Scholar Register] [Received: 01/16/2020] [Revised: 02/08/2020] [Accepted: 02/12/2020] [Indexed: 11/24/2022]
Abstract
GaAs has been demonstrated to be a promising material for manufacturing semiconductor light-emitting devices and integrated circuits. It has been widely used in the field of aerospace, due to its high electron mobility and wide band gap. In this study, the structural and photoelectric characteristics of Si-doped GaAs under different gamma irradiation doses (0, 0.1, 1 and 10 KGy) are investigated. Surface morphology studies show roughen of the surface with irradiation. Appearance of transverse-optical (TO) phonon mode and blueshift of TO peak reflect the presence of internal strain with irradiation. The average strain has been measured to be 0.009 by Raman spectroscopy, indicating that the irradiated zone still has a good crystallinity even at a dose of 10 KGy. Photoluminescence intensity is increased by about 60% under 10 KGy gamma irradiation due to the strain suppression of nonradiative recombination centers. Furthermore, the current of Si-doped GaAs is reduced at 3V bias with the increasing gamma dose. This study demonstrates that the Si-doped GaAs has good radiation resistance under gamma irradiation, and appropriate level of gamma irradiation can be used to enhance the luminescence property of Si-doped GaAs.
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Affiliation(s)
- Ye Shen
- School of Physics, University of Electronic Science and Technology of China, Chengdu 610054, China; (Y.S.); (M.J.); (X.Z.)
| | - Xuan Fang
- State Key Laboratory of High Power Semiconductor Lasers, School of Science, Changchun University of Science and Technology, Changchun 130022, China;
| | - Xiang Ding
- School of Physics, University of Electronic Science and Technology of China, Chengdu 610054, China; (Y.S.); (M.J.); (X.Z.)
| | - Haiyan Xiao
- School of Physics, University of Electronic Science and Technology of China, Chengdu 610054, China; (Y.S.); (M.J.); (X.Z.)
- Correspondence: (H.X.); (X.X.); Tel.: +86-28-8320-2130 (H.X.); +86-28-8320-2130 (X.X.)
| | - Xia Xiang
- School of Physics, University of Electronic Science and Technology of China, Chengdu 610054, China; (Y.S.); (M.J.); (X.Z.)
- Correspondence: (H.X.); (X.X.); Tel.: +86-28-8320-2130 (H.X.); +86-28-8320-2130 (X.X.)
| | - Guixia Yang
- Institute of Nuclear Physics and Chemistry, China Academy of Engineering Physics, Mianyang 621900, China;
| | - Ming Jiang
- School of Physics, University of Electronic Science and Technology of China, Chengdu 610054, China; (Y.S.); (M.J.); (X.Z.)
| | - Xiaotao Zu
- School of Physics, University of Electronic Science and Technology of China, Chengdu 610054, China; (Y.S.); (M.J.); (X.Z.)
| | - Liang Qiao
- School of Physics, University of Electronic Science and Technology of China, Chengdu 610054, China; (Y.S.); (M.J.); (X.Z.)
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Kaleta A, Kret S, Gas K, Kurowska B, Kryvyi SB, Rutkowski B, Szwacki NG, Sawicki M, Sadowski J. Enhanced Ferromagnetism in Cylindrically Confined MnAs Nanocrystals Embedded in Wurtzite GaAs Nanowire Shells. NANO LETTERS 2019; 19:7324-7333. [PMID: 31500416 DOI: 10.1021/acs.nanolett.9b02956] [Citation(s) in RCA: 2] [Impact Index Per Article: 0.4] [Reference Citation Analysis] [Abstract] [Key Words] [Track Full Text] [Subscribe] [Scholar Register] [Indexed: 06/10/2023]
Abstract
Nearly a 30% increase in the ferromagnetic phase transition temperature has been achieved in strained MnAs nanocrystals embedded in a wurtzite GaAs matrix. Wurtzite GaAs exerts tensile stress on hexagonal MnAs nanocrystals, preventing a hexagonal to orthorhombic structural phase transition, which in bulk MnAs is combined with the magnetic one. This effect results in a remarkable shift of the magneto-structural phase transition temperature from 313 K in the bulk MnAs to above 400 K in the tensely strained MnAs nanocrystals. This finding is corroborated by the state of the art transmission electron microscopy, sensitive magnetometry, and the first-principles calculations. The effect relies on defining a nanotube geometry of molecular beam epitaxy grown core-multishell wurtzite (Ga,In)As/(Ga,Al)As/(Ga,Mn)As/GaAs nanowires, where the MnAs nanocrystals are formed during the thermal-treatment-induced phase separation of wurtzite (Ga,Mn)As into the GaAs-MnAs granular system. Such a unique combination of two types of hexagonal lattices provides a possibility of attaining quasi-hydrostatic tensile strain in MnAs (impossible otherwise), leading to the substantial ferromagnetic phase transition temperature increase in this compound.
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Affiliation(s)
- Anna Kaleta
- Institute of Physics , Polish Academy of Sciences , Aleja Lotnikow 32/46 , PL-02-668 Warszawa , Poland
| | - Slawomir Kret
- Institute of Physics , Polish Academy of Sciences , Aleja Lotnikow 32/46 , PL-02-668 Warszawa , Poland
| | - Katarzyna Gas
- Institute of Physics , Polish Academy of Sciences , Aleja Lotnikow 32/46 , PL-02-668 Warszawa , Poland
| | - Boguslawa Kurowska
- Institute of Physics , Polish Academy of Sciences , Aleja Lotnikow 32/46 , PL-02-668 Warszawa , Poland
| | - Serhii B Kryvyi
- Institute of Physics , Polish Academy of Sciences , Aleja Lotnikow 32/46 , PL-02-668 Warszawa , Poland
| | - Bogdan Rutkowski
- Faculty of Metals Engineering and Industrial Computer Science , AGH University of Science and Technology , Aleja A. Mickiewicza 30 , 30-059 Kraków , Poland
| | - Nevill Gonzalez Szwacki
- Institute of Theoretical Physics, Faculty of Physics , University of Warsaw , Pasteura 5 , 02-093 Warszawa , Poland
| | - Maciej Sawicki
- Institute of Physics , Polish Academy of Sciences , Aleja Lotnikow 32/46 , PL-02-668 Warszawa , Poland
| | - Janusz Sadowski
- Institute of Physics , Polish Academy of Sciences , Aleja Lotnikow 32/46 , PL-02-668 Warszawa , Poland
- Department of Physics and Electrical Engineering , Linnaeus University , SE-391 82 Kalmar , Sweden
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6
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Miháliková I, Friák M, Jirásková Y, Holec D, Koutná N, Šob M. Impact of Nano-Scale Distribution of Atoms on Electronic and Magnetic Properties of Phases in Fe-Al Nanocomposites: An Ab Initio Study. NANOMATERIALS (BASEL, SWITZERLAND) 2018; 8:E1059. [PMID: 30558362 PMCID: PMC6316398 DOI: 10.3390/nano8121059] [Citation(s) in RCA: 11] [Impact Index Per Article: 1.8] [Reference Citation Analysis] [Abstract] [Key Words] [Grants] [Track Full Text] [Download PDF] [Figures] [Subscribe] [Scholar Register] [Received: 11/26/2018] [Revised: 12/12/2018] [Accepted: 12/13/2018] [Indexed: 11/17/2022]
Abstract
Quantum-mechanical calculations are applied to examine magnetic and electronic properties of phases appearing in binary Fe-Al-based nanocomposites. The calculations are carried out using the Vienna Ab-initio Simulation Package which implements density functional theory and generalized gradient approximation. The focus is on a disordered solid solution with 18.75 at. % Al in body-centered-cubic ferromagnetic iron, so-called α -phase, and an ordered intermetallic compound Fe 3 Al with the D0 3 structure. In order to reveal the impact of the actual atomic distribution in the disordered Fe-Al α -phase three different special quasi-random structures with or without the 1st and/or 2nd nearest-neighbor Al-Al pairs are used. According to our calculations, energy decreases when eliminating the 1st and 2nd nearest neighbor Al-Al pairs. On the other hand, the local magnetic moments of the Fe atoms decrease with Al concentration in the 1st coordination sphere and increase if the concentration of Al atoms increases in the 2nd one. Furthermore, when simulating Fe-Al/Fe 3 Al nanocomposites (superlattices), changes of local magnetic moments of the Fe atoms up to 0.5 μ B are predicted. These changes very sensitively depend on both the distribution of atoms and the crystallographic orientation of the interfaces.
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Affiliation(s)
- Ivana Miháliková
- Institute of Physics of Materials, Academy of Sciences of the Czech Republic, Žižkova 22, CZ-616 62 Brno, Czech Republic.
- Department of Condensed Matter Physics, Faculty of Science, Masaryk University, Kotlářská 2, CZ-611 37 Brno, Czech Republic.
| | - Martin Friák
- Institute of Physics of Materials, Academy of Sciences of the Czech Republic, Žižkova 22, CZ-616 62 Brno, Czech Republic.
| | - Yvonna Jirásková
- Institute of Physics of Materials, Academy of Sciences of the Czech Republic, Žižkova 22, CZ-616 62 Brno, Czech Republic.
| | - David Holec
- Department of Materials Science, Montanuniversität Leoben, Franz-Josef-Strasse 18, A-8700 Leoben, Austria.
| | - Nikola Koutná
- Department of Condensed Matter Physics, Faculty of Science, Masaryk University, Kotlářská 2, CZ-611 37 Brno, Czech Republic.
- Institute of Materials Science and Technology, TU Wien, Getreidemarkt 9, A-1060 Vienna, Austria.
| | - Mojmír Šob
- Department of Chemistry, Faculty of Science, Masaryk University, Kotlářská 2, CZ-611 37 Brno, Czech Republic.
- Institute of Physics of Materials, Academy of Sciences of the Czech Republic, Žižkova 22, CZ-616 62 Brno, Czech Republic.
- Central European Institute of Technology, CEITEC MU, Masaryk University, Kamenice 5, CZ-625 00 Brno, Czech Republic.
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7
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Friák M, Holec D, Šob M. Quantum-Mechanical Study of Nanocomposites with Low and Ultra-Low Interface Energies. NANOMATERIALS (BASEL, SWITZERLAND) 2018; 8:E1057. [PMID: 30558300 PMCID: PMC6316202 DOI: 10.3390/nano8121057] [Citation(s) in RCA: 12] [Impact Index Per Article: 2.0] [Reference Citation Analysis] [Abstract] [Key Words] [Grants] [Track Full Text] [Download PDF] [Figures] [Subscribe] [Scholar Register] [Received: 11/27/2018] [Revised: 12/08/2018] [Accepted: 12/12/2018] [Indexed: 11/17/2022]
Abstract
We applied first-principles electronic structure calculations to study structural, thermodynamic and elastic properties of nanocomposites exhibiting nearly perfect match of constituting phases. In particular, two combinations of transition-metal disilicides and one pair of magnetic phases containing the Fe and Al atoms with different atomic ordering were considered. Regarding the disilicides, nanocomposites MoSi 2 /WSi 2 with constituents crystallizing in the tetragonal C11 b structure and TaSi 2 /NbSi 2 with individual phases crystallizing in the hexagonal C40 structure were simulated. Constituents within each pair of materials exhibit very similar structural and elastic properties and for their nanocomposites we obtained ultra-low (nearly zero) interface energy (within the error bar of our calculations, i.e., about 0.005 J/m 2 ). The interface energy was found to be nearly independent on the width of individual constituents within the nanocomposites and/or crystallographic orientation of the interfaces. As far as the nanocomposites containing Fe and Al were concerned, we simulated coherent superlattices formed by an ordered Fe 3 Al intermetallic compound and a disordered Fe-Al phase with 18.75 at.% Al, the α -phase. Both phases were structurally and elastically quite similar but the disordered α -phase lacked a long-range periodicity. To determine the interface energy in these nanocomposites, we simulated seven different distributions of atoms in the α -phase interfacing the Fe 3 Al intermetallic compound. The resulting interface energies ranged from ultra low to low values, i.e., from 0.005 to 0.139 J/m 2 . The impact of atomic distribution on the elastic properties was found insignificant but local magnetic moments of the iron atoms depend sensitively on the type and distribution of surrounding atoms.
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Affiliation(s)
- Martin Friák
- Institute of Physics of Materials, Academy of Sciences of the Czech Republic, Žižkova 22, CZ-616 62 Brno, Czech Republic.
| | - David Holec
- Department of Materials Science, Montanuniversität Leoben, Franz-Josef-Strasse 18, A-8700 Leoben, Austria.
| | - Mojmír Šob
- Department of Chemistry, Faculty of Science, Masaryk University, Kotlářská 2, CZ-611 37 Brno, Czech Republic.
- Institute of Physics of Materials, Academy of Sciences of the Czech Republic, Žižkova 22, CZ-616 62 Brno, Czech Republic.
- Central European Institute of Technology, CEITEC MU, Masaryk University, Kamenice 5, CZ-625 00 Brno, Czech Republic.
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8
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Friák M, Kroupa P, Holec D, Šob M. An Ab Initio Study of Pressure-Induced Reversal of Elastically Stiff and Soft Directions in YN and ScN and Its Effect in Nanocomposites Containing These Nitrides. NANOMATERIALS (BASEL, SWITZERLAND) 2018; 8:E1049. [PMID: 30558137 PMCID: PMC6316261 DOI: 10.3390/nano8121049] [Citation(s) in RCA: 1] [Impact Index Per Article: 0.2] [Reference Citation Analysis] [Abstract] [Key Words] [Grants] [Track Full Text] [Download PDF] [Figures] [Subscribe] [Scholar Register] [Received: 11/22/2018] [Revised: 12/10/2018] [Accepted: 12/11/2018] [Indexed: 11/16/2022]
Abstract
Using quantum-mechanical calculations of second- and third-order elastic constants for YN and ScN with the rock-salt (B1) structure, we predict that these materials change the fundamental type of their elastic anisotropy by rather moderate hydrostatic pressures of a few GPa. In particular, YN with its zero-pressure elastic anisotropy characterized by the Zener anisotropy ratio A Z = 2 C 44 / ( C 11 - C 12 ) = 1.046 becomes elastically isotropic at the hydrostatic pressure of 1.2 GPa. The lowest values of the Young's modulus (so-called soft directions) change from 〈100〉 (in the zero-pressure state) to the 〈111〉 directions (for pressures above 1.2 GPa). It means that the crystallographic orientations of stiffest (also called hard) elastic response and those of the softest one are reversed when comparing the zero-pressure state with that for pressures above the critical level. Qualitatively, the same type of reversal is predicted for ScN with the zero-pressure value of the Zener anisotropy factor A Z = 1.117 and the critical pressure of about 6.5 GPa. Our predictions are based on both second-order and third-order elastic constants determined for the zero-pressure state but the anisotropy change is then verified by explicit calculations of the second-order elastic constants for compressed states. Both materials are semiconductors in the whole range of studied pressures. Our phonon calculations further reveal that the change in the type of the elastic anisotropy has only a minor impact on the vibrational properties. Our simulations of biaxially strained states of YN demonstrate that a similar change in the elastic anisotropy can be achieved also under stress conditions appearing, for example, in coherently co-existing nanocomposites such as superlattices. Finally, after selecting ScN and PdN (both in B1 rock-salt structure) as a pair of suitable candidate materials for such a superlattice (due to the similarity of their lattice parameters), our calculations of such a coherent nanocomposite results again in a reversed elastic anisotropy (compared with the zero-pressure state of ScN).
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Affiliation(s)
- Martin Friák
- Institute of Physics of Materials, Academy of Sciences of the Czech Republic, Žižkova 22, CZ-616 62 Brno, Czech Republic.
| | - Pavel Kroupa
- Institute of Physics of Materials, Academy of Sciences of the Czech Republic, Žižkova 22, CZ-616 62 Brno, Czech Republic.
- Department of Physics, Imperial College London, Prince Consort Road, London SW7 2BP, UK.
| | - David Holec
- Department of Materials Science, Montanuniversität Leoben, Franz-Josef-Strasse 18, A-8700 Leoben, Austria.
| | - Mojmír Šob
- Institute of Physics of Materials, Academy of Sciences of the Czech Republic, Žižkova 22, CZ-616 62 Brno, Czech Republic.
- Department of Chemistry, Faculty of Science, Masaryk University, Kotlářská 2, CZ-611 37 Brno, Czech Republic.
- Central European Institute of Technology, CEITEC MU, Masaryk University, Kamenice 5, CZ-625 00 Brno, Czech Republic.
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Jiang M, Xiao H, Peng S, Qiao L, Yang G, Liu Z, Zu X. First-Principles Study of Point Defects in GaAs/AlAs Superlattice: the Phase Stability and the Effects on the Band Structure and Carrier Mobility. NANOSCALE RESEARCH LETTERS 2018; 13:301. [PMID: 30259329 PMCID: PMC6158148 DOI: 10.1186/s11671-018-2719-7] [Citation(s) in RCA: 8] [Impact Index Per Article: 1.3] [Reference Citation Analysis] [Abstract] [Key Words] [Grants] [Track Full Text] [Figures] [Subscribe] [Scholar Register] [Received: 06/28/2018] [Accepted: 09/14/2018] [Indexed: 06/08/2023]
Abstract
Advanced semiconductor superlattices play important roles in critical future high-tech applications such as aerospace, high-energy physics, gravitational wave detection, astronomy, and nuclear related areas. Under such extreme conditions like high irradiative environments, these semiconductor superlattices tend to generate various defects that ultimately may result in the failure of the devices. However, in the superlattice like GaAs/AlAs, the phase stability and impact on the device performance of point defects are still not clear up to date. The present calculations show that in GaAs/AlAs superlattice, the antisite defects are energetically more favorable than vacancy and interstitial defects. The AsX (X = Al or Ga) and XAs defects always induce metallicity of GaAs/AlAs superlattice, and GaAl and AlGa antisite defects have slight effects on the electronic structure. For GaAs/AlAs superlattice with the interstitial or vacancy defects, significant reduction of band gap or induced metallicity is found. Further calculations show that the interstitial and vacancy defects reduce the electron mobility significantly, while the antisite defects have relatively smaller influences. The results advance the understanding of the radiation damage effects of the GaAs/AlAs superlattice, which thus provide guidance for designing highly stable and durable semiconductor superlattice based electronic and optoelectronics for extreme environment applications.
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Affiliation(s)
- Ming Jiang
- School of Physics, University of Electronic Science and Technology of China, Chengdu, 610054 China
| | - Haiyan Xiao
- School of Physics, University of Electronic Science and Technology of China, Chengdu, 610054 China
| | - Shuming Peng
- Institute of Nuclear Physics and Chemistry, Chinese Academy of Engineering Physics, Mianyang, 621900 China
| | - Liang Qiao
- School of Physics, University of Electronic Science and Technology of China, Chengdu, 610054 China
| | - Guixia Yang
- Institute of Nuclear Physics and Chemistry, Chinese Academy of Engineering Physics, Mianyang, 621900 China
| | - Zijiang Liu
- Department of Physics, Lanzhou City University, Lanzhou, 730070 China
| | - Xiaotao Zu
- School of Physics, University of Electronic Science and Technology of China, Chengdu, 610054 China
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10
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Liu QL, Zhao ZY, Yi JH, Zhang ZY. A High-Throughput Study of the Electronic Structure and Physical Properties of Short-Period (GaAs) m(AlAs) n (m, n ≤ 10) Superlattices Based on Density Functional Theory Calculations. NANOMATERIALS 2018; 8:nano8090709. [PMID: 30201917 PMCID: PMC6164511 DOI: 10.3390/nano8090709] [Citation(s) in RCA: 3] [Impact Index Per Article: 0.5] [Reference Citation Analysis] [Abstract] [Key Words] [Track Full Text] [Download PDF] [Figures] [Subscribe] [Scholar Register] [Received: 08/13/2018] [Revised: 09/05/2018] [Accepted: 09/06/2018] [Indexed: 11/28/2022]
Abstract
As important functional materials, the electronic structure and physical properties of (GaAs)m(AlAs)n superlattices (SLs) have been extensively studied. However, due to limitations of computational methods and computational resources, it is sometimes difficult to thoroughly understand how and why the modification of their structural parameters affects their electronic structure and physical properties. In this article, a high-throughput study based on density functional theory calculations has been carried out to obtain detailed information and to further provide the underlying intrinsic mechanisms. The band gap variations of (GaAs)m(AlAs)n superlattices have been systematically investigated and summarized. They are very consistent with the available reported experimental measurements. Furthermore, the direct-to-indirect-gap transition of (GaAs)m(AlAs)n superlattices has been predicted and explained. For certain thicknesses of the GaAs well (m), the band gap value of (GaAs)m(AlAs)n SLs exponentially increases (increasing n), while for certain thicknesses of the AlAs barrier (n), the band gap value of (GaAs)m(AlAs)n SLs exponentially decreases (increasing m). In both cases, the band gap values converge to certain values. Furthermore, owing to the energy eigenvalues at different k-points showing different variation trends, (GaAs)m(AlAs)n SLs transform from a Γ-Γ direct band gap to Γ-M indirect band gap when the AlAs barrier is thick enough. The intrinsic reason for these variations is that the contributions and positions of the electronic states of the GaAs well and the AlAs barrier change under altered thickness conditions. Moreover, we have found that the binding energy can be used as a detector to estimate the band gap value in the design of (GaAs)m(AlAs)n devices. Our findings are useful for the design of novel (GaAs)m(AlAs)n superlattices-based optoelectronic devices.
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Affiliation(s)
- Qing-Lu Liu
- Faculty of Materials Science and Engineering, Kunming University of Science and Technology, Kunming 650093, China.
| | - Zong-Yan Zhao
- Faculty of Materials Science and Engineering, Kunming University of Science and Technology, Kunming 650093, China.
| | - Jian-Hong Yi
- Faculty of Materials Science and Engineering, Kunming University of Science and Technology, Kunming 650093, China.
| | - Zi-Yang Zhang
- Key Laboratory of Nanodevices and Applications, Suzhou Institute of Nano-Tech and Nano-Bionics, Chinese Academy of Sciences, Suzhou 215123, China.
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Wilhelm TS, Wang Z, Baboli MA, Yan J, Preble SF, Mohseni PK. Ordered Al xGa 1- xAs Nanopillar Arrays via Inverse Metal-Assisted Chemical Etching. ACS APPLIED MATERIALS & INTERFACES 2018; 10:27488-27497. [PMID: 30079732 DOI: 10.1021/acsami.8b08228] [Citation(s) in RCA: 4] [Impact Index Per Article: 0.7] [Reference Citation Analysis] [Abstract] [Key Words] [MESH Headings] [Track Full Text] [Subscribe] [Scholar Register] [Indexed: 06/08/2023]
Abstract
The ternary III-V semiconductor compound, Al xGa1 -xAs, is an important material that serves a central role within a variety of nanoelectronic, optoelectronic, and photovoltaic devices. With all of its uses, the material itself poses a host of fabrication difficulties stemming from conventional top-down processing, including standard wet-chemical etching and reactive-ion etching (RIE). Metal-assisted chemical etching (MacEtch) techniques provide low-cost and benchtop methods that combine many of the advantages of RIE and wet-chemical etching, without being hindered by many of their disadvantages. Here, inverse-progression MacEtch (I-MacEtch) of Au-patterned Al xGa1 -xAs is demonstrated for the first time and is exploited for the generation of vertical and ordered nanopillar arrays. The etching solution employed here consists of citric acid (C6H8O7) and hydrogen peroxide (H2O2). The I-MacEtch evolution is tracked in time for Al xGa1 -xAs samples with compositions defined by x = 0.55, x = 0.60, and x = 0.70. The vertical and lateral etch rates (VER and LER, respectively) are shown to be tunable with Al fraction and temperature of the etching solution, based on modification of catalytically injected hole distributions. Control over the VER/LER ratio is demonstrated by tailoring etch conditions for single-step fabrication of ordered AlGaAs nanopillar arrays with predefined aspect ratios. Maximum VER and LER values of ∼40 nm/min and ∼105 nm/min, respectively, are measured for Al0.55Ga0.45As at a process temperature of 65 °C. The I-MacEtch nanofabrication methodology outlined in this study may be utilized for the processing of many devices, including high electron mobility transistors, distributed Bragg reflectors, lasers, light-emitting diodes, and multijunction solar cells containing AlGaAs components.
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Affiliation(s)
| | | | | | - Jian Yan
- Matrix Opto Co., Ltd., Suzhou 215614 , China
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