1
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Wu P, Cao X, Chu W, Chen Z, Yuan H, Wang R, Yao S, Juodkazis S, Zhang W. Fresnel zone plate sculptured out of diamond by femtosecond laser for harsh environments. OPTICS LETTERS 2023; 48:1379-1382. [PMID: 36946932 DOI: 10.1364/ol.482327] [Citation(s) in RCA: 0] [Impact Index Per Article: 0] [Reference Citation Analysis] [Abstract] [Track Full Text] [Subscribe] [Scholar Register] [Received: 11/29/2022] [Accepted: 02/03/2023] [Indexed: 06/18/2023]
Abstract
With the rapid development of micro-optical applications, there is an increasing demand for micro-optical elements that can be made with minimal processing steps. Current research focuses on practical functionalities of optical performance, lightweight, miniaturization, and easy integration. As an important planar diffractive optical element, the Fresnel zone plate (FZP) provides a compact solution for focusing and imaging. However, the fabrication of FZPs with high quality out of hard and brittle materials remains challenging. Here, we report on the fabrication of diamond FZP by femtosecond laser direct writing. FZPs with the same outer diameter and different focal lengths of 250-1000 µm were made via ablation. The fabricated FZPs possess well-defined geometry and excellent focusing and imaging ability in the visible spectral range. Arrays of FZPs with different focal lengths were made for potential applications in imaging, sensing, and integrated optical systems.
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2
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Ali A, Piatkowski P, Alnaser AS. Study on the Origin and Evolution of Femtosecond Laser-Induced Surface Structures: LIPSS, Quasi-Periodic Grooves, and Aperiodic Micro-Ridges. MATERIALS (BASEL, SWITZERLAND) 2023; 16:2184. [PMID: 36984064 PMCID: PMC10057636 DOI: 10.3390/ma16062184] [Citation(s) in RCA: 0] [Impact Index Per Article: 0] [Reference Citation Analysis] [Abstract] [Key Words] [Track Full Text] [Figures] [Subscribe] [Scholar Register] [Received: 12/24/2022] [Revised: 01/28/2023] [Accepted: 01/29/2023] [Indexed: 06/18/2023]
Abstract
We investigate the evolution mechanisms of the laser-induced periodic surface structures (LIPSS) and quasi-periodic grooves that are formed on the surface of monocrystalline silicon (mono-Si) when exposed to femtosecond laser radiation of different pulse duration, state of polarization, and fluence. The conditions required for producing LIPSS-free complex micro-ridge patterns are elaborated. The LIPSS evolution mechanism is explained in terms of scattering/interference-based phenomena. To establish the basis for our interpretation, single femtosecond pulses of different pulse durations are irradiated on mono-Si. The absence/appearance of LIPSS rudiments is explained in the context of spectral bandwidth and the associated effects on the intensity of the central wavelength. Shorter fs pulses of a wider bandwidth are employed to induce LIPSS-free micro-ridge patterns. It is demonstrated that the resultant micro-ridge patterns depend on the laser fluence distribution and can be manipulated through laser polarization. The curved morphology of LIPSS rudiments and the evolution mechanism of low- and high-spatial frequency LIPSS, i.e., LSFL and HSFL, are discussed. Finally, it is demonstrated that the consolidated quasi-periodic grooves result from HSFL welding together groups of LSFL. Although our findings are based on fs laser interaction with mono-Si, the results can also be applied to many other materials.
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Affiliation(s)
- Asghar Ali
- Department of Physics, American University of Sharjah, Sharjah P.O. Box 26666, United Arab Emirates
- Materials Science and Engineering Program, College of Arts and Sciences, American University of Sharjah, Sharjah P.O. Box 26666, United Arab Emirates
| | - Piotr Piatkowski
- Department of Physics, American University of Sharjah, Sharjah P.O. Box 26666, United Arab Emirates
- Materials Science and Engineering Program, College of Arts and Sciences, American University of Sharjah, Sharjah P.O. Box 26666, United Arab Emirates
| | - Ali S. Alnaser
- Department of Physics, American University of Sharjah, Sharjah P.O. Box 26666, United Arab Emirates
- Materials Science and Engineering Program, College of Arts and Sciences, American University of Sharjah, Sharjah P.O. Box 26666, United Arab Emirates
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3
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Orsini A, Barettin D, Pettinato S, Salvatori S, Polini R, Rossi MC, Bellucci A, Bolli E, Girolami M, Mastellone M, Orlando S, Serpente V, Valentini V, Trucchi DM. Frenkel-Poole Mechanism Unveils Black Diamond as Quasi-Epsilon-Near-Zero Surface. NANOMATERIALS (BASEL, SWITZERLAND) 2023; 13:240. [PMID: 36677993 PMCID: PMC9862978 DOI: 10.3390/nano13020240] [Citation(s) in RCA: 0] [Impact Index Per Article: 0] [Reference Citation Analysis] [Abstract] [Key Words] [Track Full Text] [Figures] [Subscribe] [Scholar Register] [Received: 12/16/2022] [Revised: 12/31/2022] [Accepted: 01/03/2023] [Indexed: 06/17/2023]
Abstract
A recent innovation in diamond technology has been the development of the "black diamond" (BD), a material with very high optical absorption generated by processing the diamond surface with a femtosecond laser. In this work, we investigate the optical behavior of the BD samples to prove a near to zero dielectric permittivity in the high electric field condition, where the Frenkel-Poole (FP) effect takes place. Zero-epsilon materials (ENZ), which represent a singularity in optical materials, are expected to lead to remarkable developments in the fields of integrated photonic devices and optical interconnections. Such a result opens the route to the development of BD-based, novel, functional photonic devices.
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Affiliation(s)
- Andrea Orsini
- Università degli Studi Niccolò Cusano, “ATHENA” European University, Via don Carlo Gnocchi, 3, 00166 Roma, Italy
| | - Daniele Barettin
- Università degli Studi Niccolò Cusano, “ATHENA” European University, Via don Carlo Gnocchi, 3, 00166 Roma, Italy
| | - Sara Pettinato
- Università degli Studi Niccolò Cusano, “ATHENA” European University, Via don Carlo Gnocchi, 3, 00166 Roma, Italy
- Istituto di Struttura della Materia, ISM-CNR, 00015 Monterotondo Stazione, Italy
| | - Stefano Salvatori
- Università degli Studi Niccolò Cusano, “ATHENA” European University, Via don Carlo Gnocchi, 3, 00166 Roma, Italy
- Istituto di Struttura della Materia, ISM-CNR, 00015 Monterotondo Stazione, Italy
| | - Riccardo Polini
- Istituto di Struttura della Materia, ISM-CNR, 00015 Monterotondo Stazione, Italy
- Dipartimento di Scienze e Tecnologie Chimiche, Università degli Studi di Roma “Tor Vergata”, Via della Ricerca Scientifica, 00133 Rome, Italy
| | - Maria Cristina Rossi
- Department of Electronic Engineering, Università degli Studi di Roma Tre, Via Vito Volterra 62—Ex Vasca Navale, 00154 Roma, Italy
| | - Alessandro Bellucci
- Istituto di Struttura della Materia, ISM-CNR, 00015 Monterotondo Stazione, Italy
| | - Eleonora Bolli
- Istituto di Struttura della Materia, ISM-CNR, 00015 Monterotondo Stazione, Italy
| | - Marco Girolami
- Istituto di Struttura della Materia, ISM-CNR, 00015 Monterotondo Stazione, Italy
| | - Matteo Mastellone
- Istituto di Struttura della Materia, ISM-CNR, 00015 Monterotondo Stazione, Italy
| | - Stefano Orlando
- Istituto di Struttura della Materia, ISM-CNR, 00015 Monterotondo Stazione, Italy
| | - Valerio Serpente
- Istituto di Struttura della Materia, ISM-CNR, 00015 Monterotondo Stazione, Italy
| | - Veronica Valentini
- Istituto di Struttura della Materia, ISM-CNR, 00015 Monterotondo Stazione, Italy
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4
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Kazemzadeh M, Martinez-Calderon M, Paek SY, Lowe M, Aguergaray C, Xu W, Chamley LW, Broderick NGR, Hisey CL. Classification of Preeclamptic Placental Extracellular Vesicles Using Femtosecond Laser Fabricated Nanoplasmonic Sensors. ACS Sens 2022; 7:1698-1711. [PMID: 35658424 DOI: 10.1021/acssensors.2c00378] [Citation(s) in RCA: 1] [Impact Index Per Article: 0.5] [Reference Citation Analysis] [Abstract] [Key Words] [Track Full Text] [Journal Information] [Subscribe] [Scholar Register] [Indexed: 12/18/2022]
Abstract
Placental extracellular vesicles (EVs) play an essential role in pregnancy by protecting and transporting diverse biomolecules that aid in fetomaternal communication. However, in preeclampsia, they have also been implicated in contributing to disease progression. Despite their potential clinical value, current technologies cannot provide a rapid and effective means of differentiating between healthy and diseased placental EVs. To address this, a fabrication process called laser-induced nanostructuring of SERS-active thin films (LINST) was developed to produce scalable nanoplasmonic substrates that provide exceptional Raman signal enhancement and allow the biochemical fingerprinting of EVs. After validating the performance of LINST substrates with chemical standards, placental EVs from tissue explant cultures were characterized, demonstrating that preeclamptic and normotensive placental EVs have classifiably distinct Raman spectra following the application of advanced machine learning algorithms. Given the abundance of placental EVs in maternal circulation, these findings encourage immediate exploration of surface-enhanced Raman spectroscopy (SERS) of EVs as a promising method for preeclampsia liquid biopsies, while this novel fabrication process will provide a versatile and scalable substrate for many other SERS applications.
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Affiliation(s)
- Mohammadrahim Kazemzadeh
- Department of Mechanical and Mechatronics Engineering, University of Auckland, Auckland 1010, New Zealand.,Dodd-Walls Centre for Photonic and Quantum Technologies, Dunedin 9054, New Zealand
| | | | - Song Y Paek
- Department of Obstetrics and Gynaecology, University of Auckland, Auckland 1023, New Zealand
| | - MoiMoi Lowe
- Department of Physics, University of Auckland, Auckland 1061, New Zealand
| | - Claude Aguergaray
- Dodd-Walls Centre for Photonic and Quantum Technologies, Dunedin 9054, New Zealand.,Department of Physics, University of Auckland, Auckland 1061, New Zealand
| | - Weiliang Xu
- Department of Mechanical and Mechatronics Engineering, University of Auckland, Auckland 1010, New Zealand.,Dodd-Walls Centre for Photonic and Quantum Technologies, Dunedin 9054, New Zealand
| | - Lawrence W Chamley
- Department of Obstetrics and Gynaecology, University of Auckland, Auckland 1023, New Zealand.,Hub for Extracellular Vesicle Investigations, University of Auckland, Auckland 1023, New Zealand
| | - Neil G R Broderick
- Dodd-Walls Centre for Photonic and Quantum Technologies, Dunedin 9054, New Zealand.,Department of Physics, University of Auckland, Auckland 1061, New Zealand
| | - Colin L Hisey
- Department of Obstetrics and Gynaecology, University of Auckland, Auckland 1023, New Zealand.,Hub for Extracellular Vesicle Investigations, University of Auckland, Auckland 1023, New Zealand.,Department of Biomedical Engineering, The Ohio State University, Columbus, Ohio 43210, United States
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5
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Trofimov PI, Bessonova IG, Lazarenko PI, Kirilenko DA, Bert NA, Kozyukhin SA, Sinev IS. Rewritable and Tunable Laser-Induced Optical Gratings in Phase-Change Material Films. ACS APPLIED MATERIALS & INTERFACES 2021; 13:32031-32036. [PMID: 34191479 DOI: 10.1021/acsami.1c08468] [Citation(s) in RCA: 7] [Impact Index Per Article: 2.3] [Reference Citation Analysis] [Abstract] [Key Words] [Track Full Text] [Subscribe] [Scholar Register] [Indexed: 06/13/2023]
Abstract
Laser-induced periodic surface structures (LIPSS) can be fabricated in virtually all types of solid materials and show great promise for efficient and scalable production of surface patterns with applications in various fields from photonics to engineering. While the majority of LIPSS manifest as modifications of the surface relief, in special cases, laser impact can also lead to periodic modulation of the material phase state. Here, we report on the fabrication of high-quality periodic structures in the films of phase-change material Ge2Sb2Te5 (GST). Due to considerable contrast of the refractive index of GST in its crystalline and amorphous states, the fabricated structures provide strong spatial modulation of the optical properties, which facilitates their applications. By changing the excitation laser wavelength, we observe the scaling of the grating period as well as transition between formation of different types of LIPSS. We optimize the laser exposure routine to achieve large-scale high-quality phase-change gratings with controllable period and demonstrate their reversible tunability through intermediate amorphization steps. Our results reveal the prospects of fast and rewritable fabrication of high-quality periodic structures for photonics and can serve as a guideline for further development of phase-change material-based optical elements.
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Affiliation(s)
- Pavel I Trofimov
- School of Physics and Engineering, ITMO University, 197101 St. Petersburg, Russia
| | - Irina G Bessonova
- School of Physics and Engineering, ITMO University, 197101 St. Petersburg, Russia
| | - Petr I Lazarenko
- National Research University of Electronic Technology, Zelenograd, 124498 Moscow, Russia
| | | | | | - Sergey A Kozyukhin
- Kurnakov Institute of General and Inorganic Chemistry of the Russian Academy of Sciences, 119991 Moscow, Russia
| | - Ivan S Sinev
- School of Physics and Engineering, ITMO University, 197101 St. Petersburg, Russia
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6
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Zyubin A, Kon I, Tcibulnikova A, Matveeva K, Khankaev A, Myslitskaya N, Lipnevich L, Demishkevich E, Medvedskaya P, Samusev I, Bryukhanov V, Demin M. Numerical FDTD-based simulations and Raman experiments of femtosecond LIPSS. OPTICS EXPRESS 2021; 29:4547-4558. [PMID: 33771030 DOI: 10.1364/oe.413460] [Citation(s) in RCA: 4] [Impact Index Per Article: 1.3] [Reference Citation Analysis] [Abstract] [Track Full Text] [Subscribe] [Scholar Register] [Received: 11/02/2020] [Accepted: 12/24/2020] [Indexed: 06/12/2023]
Abstract
The article describes the results of finite-difference time-domain (FDTD) mathematical modeling of electric field strength distribution near the gold laser-induced periodic surface structures (LIPSS). Both theoretical and experimental results have been described for two fabricated morphologies: round «hill-like» and grating structures. The structures were fabricated by using a femtosecond Yb-fiber laser with a wavelength of λ=1032 nm, pulse duration τ=280 fs, and repetition rate υ=25 kHz. Morphological properties of the surfaces have been investigated by means of scanning electron microscopy (SEM). The plasmonic activity was analyzed by means of the surface-enhanced Raman spectroscopy (SERS) technique. FDTD-calculated electric field values were converted into the electromagnetic field enhancement coefficient and the theoretical SERS intensity. The prospects of the theoretical approach for LIPSS to evaluate optimal field amplification and light scattering parameters has been shown. The presented approach could be applied as a basis for performing the methods of controlled synthesis for LIPPS.
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7
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Girolami M, Bellucci A, Mastellone M, Orlando S, Serpente V, Valentini V, Polini R, Sani E, De Caro T, Trucchi DM. Femtosecond-Laser Nanostructuring of Black Diamond Films under Different Gas Environments. MATERIALS (BASEL, SWITZERLAND) 2020; 13:E5761. [PMID: 33348641 PMCID: PMC7766203 DOI: 10.3390/ma13245761] [Citation(s) in RCA: 2] [Impact Index Per Article: 0.5] [Reference Citation Analysis] [Abstract] [Key Words] [Track Full Text] [Download PDF] [Figures] [Subscribe] [Scholar Register] [Received: 11/18/2020] [Revised: 12/09/2020] [Accepted: 12/15/2020] [Indexed: 01/15/2023]
Abstract
Irradiation of diamond with femtosecond (fs) laser pulses in ultra-high vacuum (UHV) conditions results in the formation of surface periodic nanostructures able to strongly interact with visible and infrared light. As a result, native transparent diamond turns into a completely different material, namely "black" diamond, with outstanding absorptance properties in the solar radiation wavelength range, which can be efficiently exploited in innovative solar energy converters. Of course, even if extremely effective, the use of UHV strongly complicates the fabrication process. In this work, in order to pave the way to an easier and more cost-effective manufacturing workflow of black diamond, we demonstrate that it is possible to ensure the same optical properties as those of UHV-fabricated films by performing an fs-laser nanostructuring at ambient conditions (i.e., room temperature and atmospheric pressure) under a constant He flow, as inferred from the combined use of scanning electron microscopy, Raman spectroscopy, and spectrophotometry analysis. Conversely, if the laser treatment is performed under a compressed air flow, or a N2 flow, the optical properties of black diamond films are not comparable to those of their UHV-fabricated counterparts.
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Affiliation(s)
- Marco Girolami
- DiaTHEMA Lab, Istituto di Struttura della Materia, Consiglio Nazionale delle Ricerche (ISM–CNR), Sede Secondaria di Montelibretti, Via Salaria km 29,300, Monterotondo Stazione, 00015 Roma, Italy; (A.B.); (M.M.); (V.S.); (V.V.); (D.M.T.)
| | - Alessandro Bellucci
- DiaTHEMA Lab, Istituto di Struttura della Materia, Consiglio Nazionale delle Ricerche (ISM–CNR), Sede Secondaria di Montelibretti, Via Salaria km 29,300, Monterotondo Stazione, 00015 Roma, Italy; (A.B.); (M.M.); (V.S.); (V.V.); (D.M.T.)
| | - Matteo Mastellone
- DiaTHEMA Lab, Istituto di Struttura della Materia, Consiglio Nazionale delle Ricerche (ISM–CNR), Sede Secondaria di Montelibretti, Via Salaria km 29,300, Monterotondo Stazione, 00015 Roma, Italy; (A.B.); (M.M.); (V.S.); (V.V.); (D.M.T.)
- Dipartimento di Scienze di Base ed Applicate per l’Ingegneria, Università di Roma “La Sapienza”, Piazzale Aldo Moro 5, 00185 Roma, Italy
| | - Stefano Orlando
- Istituto di Struttura della Materia, Consiglio Nazionale delle Ricerche (ISM–CNR), Sede Secondaria di Tito Scalo, Area Industriale–Contrada S. Loia, Tito Scalo, 85050 Potenza, Italy;
| | - Valerio Serpente
- DiaTHEMA Lab, Istituto di Struttura della Materia, Consiglio Nazionale delle Ricerche (ISM–CNR), Sede Secondaria di Montelibretti, Via Salaria km 29,300, Monterotondo Stazione, 00015 Roma, Italy; (A.B.); (M.M.); (V.S.); (V.V.); (D.M.T.)
| | - Veronica Valentini
- DiaTHEMA Lab, Istituto di Struttura della Materia, Consiglio Nazionale delle Ricerche (ISM–CNR), Sede Secondaria di Montelibretti, Via Salaria km 29,300, Monterotondo Stazione, 00015 Roma, Italy; (A.B.); (M.M.); (V.S.); (V.V.); (D.M.T.)
| | - Riccardo Polini
- Dipartimento di Scienze e Tecnologie Chimiche, Università di Roma “Tor Vergata”, Via della Ricerca Scientifica 1, 00133 Roma, Italy;
| | - Elisa Sani
- Istituto Nazionale di Ottica, Consiglio Nazionale delle Ricerche (INO–CNR), Largo E. Fermi, 50125 Firenze, Italy;
| | - Tilde De Caro
- Istituto per lo Studio dei Materiali Nanostrutturati, Consiglio Nazionale delle Ricerche (ISMN–CNR), Via Salaria km 29,300, Monterotondo Stazione, 00015 Roma, Italy;
| | - Daniele M. Trucchi
- DiaTHEMA Lab, Istituto di Struttura della Materia, Consiglio Nazionale delle Ricerche (ISM–CNR), Sede Secondaria di Montelibretti, Via Salaria km 29,300, Monterotondo Stazione, 00015 Roma, Italy; (A.B.); (M.M.); (V.S.); (V.V.); (D.M.T.)
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8
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Bonse J. Quo Vadis LIPSS?-Recent and Future Trends on Laser-Induced Periodic Surface Structures. NANOMATERIALS 2020; 10:nano10101950. [PMID: 33007873 PMCID: PMC7601024 DOI: 10.3390/nano10101950] [Citation(s) in RCA: 41] [Impact Index Per Article: 10.3] [Reference Citation Analysis] [Abstract] [Key Words] [Track Full Text] [Download PDF] [Figures] [Subscribe] [Scholar Register] [Received: 09/02/2020] [Revised: 09/24/2020] [Accepted: 09/29/2020] [Indexed: 02/06/2023]
Abstract
Nanotechnology and lasers are among the most successful and active fields of research and technology that have boomed during the past two decades. Many improvements are based on the controlled manufacturing of nanostructures that enable tailored material functionalization for a wide range of industrial applications, electronics, medicine, etc., and have already found entry into our daily life. One appealing approach for manufacturing such nanostructures in a flexible, robust, rapid, and contactless one-step process is based on the generation of laser-induced periodic surface structures (LIPSS). This Perspective article analyzes the footprint of the research area of LIPSS on the basis of a detailed literature search, provides a brief overview on its current trends, describes the European funding strategies within the Horizon 2020 programme, and outlines promising future directions.
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Affiliation(s)
- Jörn Bonse
- Bundesanstalt für Materialforschung und -prüfung (BAM), Unter den Eichen 87, D-12205 Berlin, Germany
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9
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Kontenis G, Gailevičius D, Jonušauskas L, Purlys V. Dynamic aberration correction via spatial light modulator (SLM) for femtosecond direct laser writing: towards spherical voxels. OPTICS EXPRESS 2020; 28:27850-27864. [PMID: 32988069 DOI: 10.1364/oe.397006] [Citation(s) in RCA: 5] [Impact Index Per Article: 1.3] [Reference Citation Analysis] [Abstract] [Track Full Text] [Subscribe] [Scholar Register] [Received: 05/06/2020] [Accepted: 07/13/2020] [Indexed: 06/11/2023]
Abstract
Optical aberrations are a type of optical defect of imaging systems that hinder femtosecond direct laser write machining by changing voxel size and aspect ratio in different sample depths. We present an approach of compensating such aberrations using a liquid crystal spatial light modulator (SLM). Two methods for correcting are explored. They are based on backward ray tracing and Zernike polynomials. Experiments with a long focal distance lens (F = 25 and 50 mm) and microscope objective (100x, 0.9 NA) have been conducted. Specifically, aberration-free structuring with voxels of a constant aspect ratio of 1-1.5 is carried out throughout a 1 mm thick sample. Results show potential in simplifying direct laser writing and enabling new architectures made possible by near-spherical voxels.
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Yang L, Wei J, Ma Z, Song P, Ma J, Zhao Y, Huang Z, Zhang M, Yang F, Wang X. The Fabrication of Micro/Nano Structures by Laser Machining. NANOMATERIALS (BASEL, SWITZERLAND) 2019; 9:E1789. [PMID: 31888222 PMCID: PMC6956144 DOI: 10.3390/nano9121789] [Citation(s) in RCA: 21] [Impact Index Per Article: 4.2] [Reference Citation Analysis] [Abstract] [Key Words] [Grants] [Track Full Text] [Download PDF] [Figures] [Subscribe] [Scholar Register] [Received: 11/11/2019] [Revised: 12/08/2019] [Accepted: 12/12/2019] [Indexed: 11/16/2022]
Abstract
Micro/nano structures have unique optical, electrical, magnetic, and thermal properties. Studies on the preparation of micro/nano structures are of considerable research value and broad development prospects. Several micro/nano structure preparation techniques have already been developed, such as photolithography, electron beam lithography, focused ion beam techniques, nanoimprint techniques. However, the available geometries directly implemented by those means are limited to the 2D mode. Laser machining, a new technology for micro/nano structural preparation, has received great attention in recent years for its wide application to almost all types of materials through a scalable, one-step method, and its unique 3D processing capabilities, high manufacturing resolution and high designability. In addition, micro/nano structures prepared by laser machining have a wide range of applications in photonics, Surface plasma resonance, optoelectronics, biochemical sensing, micro/nanofluidics, photofluidics, biomedical, and associated fields. In this paper, updated achievements of laser-assisted fabrication of micro/nano structures are reviewed and summarized. It focuses on the researchers' findings, and analyzes materials, morphology, possible applications and laser machining of micro/nano structures in detail. Seven kinds of materials are generalized, including metal, organics or polymers, semiconductors, glass, oxides, carbon materials, and piezoelectric materials. In the end, further prospects to the future of laser machining are proposed.
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Affiliation(s)
- Liangliang Yang
- Engineering Research Center for Semiconductor Integrated Technology, Institute of Semiconductors, Chinese Academy of Sciences, Beijing 100083, China; (L.Y.); (J.W.); (Z.M.); (P.S.); (J.M.); (Y.Z.); (Z.H.); (M.Z.); (F.Y.)
- College of Materials Science and Opto-Electronic Technology, University of Chinese Academy of Sciences, Beijing 100049, China
| | - Jiangtao Wei
- Engineering Research Center for Semiconductor Integrated Technology, Institute of Semiconductors, Chinese Academy of Sciences, Beijing 100083, China; (L.Y.); (J.W.); (Z.M.); (P.S.); (J.M.); (Y.Z.); (Z.H.); (M.Z.); (F.Y.)
- School of Electronic, Electrical and Communication Engineering, University of Chinese Academy of Sciences, Beijing 100190, China
| | - Zhe Ma
- Engineering Research Center for Semiconductor Integrated Technology, Institute of Semiconductors, Chinese Academy of Sciences, Beijing 100083, China; (L.Y.); (J.W.); (Z.M.); (P.S.); (J.M.); (Y.Z.); (Z.H.); (M.Z.); (F.Y.)
- College of Materials Science and Opto-Electronic Technology, University of Chinese Academy of Sciences, Beijing 100049, China
| | - Peishuai Song
- Engineering Research Center for Semiconductor Integrated Technology, Institute of Semiconductors, Chinese Academy of Sciences, Beijing 100083, China; (L.Y.); (J.W.); (Z.M.); (P.S.); (J.M.); (Y.Z.); (Z.H.); (M.Z.); (F.Y.)
- School of Electronic, Electrical and Communication Engineering, University of Chinese Academy of Sciences, Beijing 100190, China
| | - Jing Ma
- Engineering Research Center for Semiconductor Integrated Technology, Institute of Semiconductors, Chinese Academy of Sciences, Beijing 100083, China; (L.Y.); (J.W.); (Z.M.); (P.S.); (J.M.); (Y.Z.); (Z.H.); (M.Z.); (F.Y.)
- College of Materials Science and Opto-Electronic Technology, University of Chinese Academy of Sciences, Beijing 100049, China
| | - Yongqiang Zhao
- Engineering Research Center for Semiconductor Integrated Technology, Institute of Semiconductors, Chinese Academy of Sciences, Beijing 100083, China; (L.Y.); (J.W.); (Z.M.); (P.S.); (J.M.); (Y.Z.); (Z.H.); (M.Z.); (F.Y.)
- College of Materials Science and Opto-Electronic Technology, University of Chinese Academy of Sciences, Beijing 100049, China
| | - Zhen Huang
- Engineering Research Center for Semiconductor Integrated Technology, Institute of Semiconductors, Chinese Academy of Sciences, Beijing 100083, China; (L.Y.); (J.W.); (Z.M.); (P.S.); (J.M.); (Y.Z.); (Z.H.); (M.Z.); (F.Y.)
- College of Materials Science and Opto-Electronic Technology, University of Chinese Academy of Sciences, Beijing 100049, China
| | - Mingliang Zhang
- Engineering Research Center for Semiconductor Integrated Technology, Institute of Semiconductors, Chinese Academy of Sciences, Beijing 100083, China; (L.Y.); (J.W.); (Z.M.); (P.S.); (J.M.); (Y.Z.); (Z.H.); (M.Z.); (F.Y.)
- College of Materials Science and Opto-Electronic Technology, University of Chinese Academy of Sciences, Beijing 100049, China
| | - Fuhua Yang
- Engineering Research Center for Semiconductor Integrated Technology, Institute of Semiconductors, Chinese Academy of Sciences, Beijing 100083, China; (L.Y.); (J.W.); (Z.M.); (P.S.); (J.M.); (Y.Z.); (Z.H.); (M.Z.); (F.Y.)
- College of Materials Science and Opto-Electronic Technology, University of Chinese Academy of Sciences, Beijing 100049, China
- Beijing Academy of Quantum Information Science, Beijing 100193, China
- Beijing Engineering Research Center of Semiconductor Micro-Nano Integrated Technology, Beijing 100083, China
| | - Xiaodong Wang
- Engineering Research Center for Semiconductor Integrated Technology, Institute of Semiconductors, Chinese Academy of Sciences, Beijing 100083, China; (L.Y.); (J.W.); (Z.M.); (P.S.); (J.M.); (Y.Z.); (Z.H.); (M.Z.); (F.Y.)
- College of Materials Science and Opto-Electronic Technology, University of Chinese Academy of Sciences, Beijing 100049, China
- Beijing Academy of Quantum Information Science, Beijing 100193, China
- School of Microelectronics, University of Chinese Academy of Sciences, Beijing 100190, China
- Beijing Engineering Research Center of Semiconductor Micro-Nano Integrated Technology, Beijing 100083, China
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11
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Li MT, Liu M, Sun HB. Surface nanostructuring via femtosecond lasers. Phys Chem Chem Phys 2019; 21:24262-24268. [PMID: 31663561 DOI: 10.1039/c9cp05351d] [Citation(s) in RCA: 5] [Impact Index Per Article: 1.0] [Reference Citation Analysis] [Abstract] [Track Full Text] [Journal Information] [Subscribe] [Scholar Register] [Indexed: 11/21/2022]
Abstract
Periodical structures induced by pulsed lasers are a unique phenomenon when pulsed lasers irradiate on some material surfaces. These periodical structures with a subwavelength-scale period hold potential in integrated-optics and biomimetic micro-nanodevices for their direct shaping by laser pulses. However, the blurred nature of the laser-induced structuring hinders its further exploration in these application scopes. In this review, the plasmon-mediated structuring targeted on various materials, both organic and inorganic, will be discussed profoundly.
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Affiliation(s)
- Mu-Tian Li
- State Key Laboratory on Integrated Optoelectronics, College of Electronic Science and Engineering, Jilin University, Changchun, Jilin 130012, China
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12
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Fu Y, Soldera M, Wang W, Voisiat B, Lasagni AF. Picosecond Laser Interference Patterning of Periodical Micro-Architectures on Metallic Molds for Hot Embossing. MATERIALS 2019; 12:ma12203409. [PMID: 31635254 PMCID: PMC6829532 DOI: 10.3390/ma12203409] [Citation(s) in RCA: 13] [Impact Index Per Article: 2.6] [Reference Citation Analysis] [Abstract] [Key Words] [Track Full Text] [Download PDF] [Figures] [Subscribe] [Scholar Register] [Received: 09/05/2019] [Revised: 10/10/2019] [Accepted: 10/16/2019] [Indexed: 11/16/2022]
Abstract
In this work, it is demonstrated that direct laser interference patterning (DLIP) is a method capable of producing microtextured metallic molds for hot embossing processes. Three different metals (Cr, Ni, and Cu), relevant for the mold production used in nanoimprinting systems, are patterned by DLIP using a picosecond laser source emitting at a 532 nm wavelength. The results show that the quality and surface topography of the produced hole-like micropatterns are determined by the laser processing parameters, such as irradiated energy density and the number of pulses. Laser-induced periodic surface structures (LIPSS) are also observed on the treated surfaces, whose shapes, periodicities, and orientations are strongly dependent on the accumulated fluence. Finally, the three structured metals are used as embossing molds to imprint microlenses on polymethyl methacrylate (PMMA) foils using an electrohydraulic press. Topographical profiles demonstrate that the obtained structures are comparable to the masters showing a satisfactory reproduction of the texture. The polymeric microlens arrays that showed the best surface homogeneity and overall quality were those embossed with the Cr molds.
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Affiliation(s)
- Yangxi Fu
- Institut für Fertigungstechnik, Technische Universität Dresden, George-Bähr-Str. 3c, 01069 Dresden, Germany.
| | - Marcos Soldera
- Institut für Fertigungstechnik, Technische Universität Dresden, George-Bähr-Str. 3c, 01069 Dresden, Germany.
- PROBIEN-CONICET, Dto. de Electrotecnia, Universidad Nacional del Comahue, Buenos Aires 1400, Neuquén 8300, Argentina.
| | - Wei Wang
- Institut für Fertigungstechnik, Technische Universität Dresden, George-Bähr-Str. 3c, 01069 Dresden, Germany.
| | - Bogdan Voisiat
- Institut für Fertigungstechnik, Technische Universität Dresden, George-Bähr-Str. 3c, 01069 Dresden, Germany.
| | - Andrés Fabián Lasagni
- Institut für Fertigungstechnik, Technische Universität Dresden, George-Bähr-Str. 3c, 01069 Dresden, Germany.
- Fraunhofer-Institut für Werkstoff-und Strahltechnik IWS, Winterbergstr. 28, 01277 Dresden, Germany.
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13
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Kiss M, Graziosi T, Toros A, Scharf T, Santschi C, Martin OJF, Quack N. High-quality single crystal diamond diffraction gratings fabricated by crystallographic etching. OPTICS EXPRESS 2019; 27:30371-30379. [PMID: 31684285 DOI: 10.1364/oe.27.030371] [Citation(s) in RCA: 0] [Impact Index Per Article: 0] [Reference Citation Analysis] [Abstract] [Track Full Text] [Subscribe] [Scholar Register] [Received: 07/26/2019] [Accepted: 09/13/2019] [Indexed: 06/10/2023]
Abstract
We demonstrate a novel method for fabricating single crystal diamond diffraction gratings based on crystallographic etching that yields high-quality diffraction gratings from commercially available <100> diamond plates. Both V-groove and rectangular gratings were fabricated and characterised using scanning electron microscopy and atomic force microscopy, revealing angles of 57° and 87° depending on the crystal orientation, with mean roughness below Ra = 5 nm on the sidewalls. The gratings were also optically characterised, showing good agreement with simulated results. The fabrication method demonstrated in this contribution shows the way for manufacturing high-quality diamond diffractive components that surpass existing devices both in quality and manufacturability.
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