1
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Shere I, Malani A. Understanding the mechanism and kinetics of the formation and breaking of ring structures during silica polymerization: a computational study. Phys Chem Chem Phys 2022; 24:11151-11168. [PMID: 35475505 DOI: 10.1039/d1cp05774j] [Citation(s) in RCA: 0] [Impact Index Per Article: 0] [Reference Citation Analysis] [Abstract] [Track Full Text] [Journal Information] [Subscribe] [Scholar Register] [Indexed: 11/21/2022]
Abstract
Ring structures are ubiquitous in porous materials and play a crucial role in the functioning of these materials. Understanding the ring formation and breaking mechanism is essential for designing and controlling the porosity, framework density, channels, and cage formation in porous materials. The current work attempts to understand the formation, breaking, and survival of rings using a computational approach. We have used the reaction ensemble Monte Carlo simulation technique and studied silica polymerization starting from monomers to inter-connected large silica clusters in dilute and concentrated silica systems. We calculated various properties of representative smaller and bigger rings at different stages of polymerization. We found that smaller rings form in the initial polymerization stages and larger ring sizes appear at later stages. The smaller rings have a larger residence time than the bigger rings in the silica system, and the residence time changes with the polymerization stage. Both smaller and bigger rings have a shorter residence time in the dilute system than the concentrated silica system. As a result, ring formation and breaking kinetics are faster in the dilute silica system, which causes reorganization within the silica cluster leading to a dense cluster. A slow reorganization of rings in the concentrated silica system is observed, due to which clusters retain their random, branched configuration and porous region within the cluster. We also investigated a series of ring formation and breaking steps to understand the formation mechanism of isolated and grouped rings in the studied silica systems. We found that rings form and break by all possible reactions during ring-formation and cluster-aggregation stages. In contrast, only one reaction is dominant in the initial and aging stages of polymerization. The concentration of silica affects the formation of isolated rings, whereas the kinetics of a grouped ring is not significantly altered. Detailed insights into the reaction dynamics of rings at various stages of polymerization would be helpful in the rational design of porous silica polymorphs.
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Affiliation(s)
- Inderdip Shere
- Department of Chemical Engineering, Indian Institute of Technology Bombay, Mumbai 400076, India.
| | - Ateeque Malani
- Department of Chemical Engineering, Indian Institute of Technology Bombay, Mumbai 400076, India.
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2
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Zhou S, Antoja-Lleonart J, Ocelík V, Noheda B. Thin films of the [Formula: see text]-quartz [Formula: see text] solid solution. Sci Rep 2022; 12:2010. [PMID: 35132092 PMCID: PMC8821611 DOI: 10.1038/s41598-022-05595-z] [Citation(s) in RCA: 1] [Impact Index Per Article: 0.5] [Reference Citation Analysis] [Abstract] [Key Words] [Grants] [Track Full Text] [Download PDF] [Figures] [Journal Information] [Subscribe] [Scholar Register] [Received: 10/31/2021] [Accepted: 01/12/2022] [Indexed: 11/09/2022] Open
Abstract
[Formula: see text] with the [Formula: see text]-quartz structure is one of the most popular piezoelectrics. It is widely used in crystal oscillators, bulk acoustic wave (BAW) devices, surface acoustic wave (SAW) devices, and so on. [Formula: see text] can also be crystallized into the [Formula: see text]-quartz structure and it has better piezoelectric properties, with higher piezoelectric coefficient and electromechanical coupling coefficients, than [Formula: see text]. Experiments on bulk crystals and theoretical studies have shown that these properties can be tuned by varying the Si/Ge ratio in the [Formula: see text] solid solution. However, to the best of our knowledge, thin films of [Formula: see text] quartz have never been reported. Here we present the successful crystallization of [Formula: see text] thin films in the [Formula: see text]-quartz phase on quartz substrates ([Formula: see text]) with x up to 0.75. Generally, the films grow semi-epitaxially, with the same orientation as the substrates. Interestingly, the [Formula: see text] composition grows fully strained by the quartz substrates and this leads to the formation of circular quartz domains with an ordered Dauphiné twin structure. These studies represent a first step towards the optimization of piezoelectric quartz thin films for high frequency (> 5 GHz) applications.
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Affiliation(s)
- Silang Zhou
- Zernike Institute for Advanced Materials, University of Groningen, Nijenborgh 4, 9747AG Groningen, The Netherlands
| | - Jordi Antoja-Lleonart
- Zernike Institute for Advanced Materials, University of Groningen, Nijenborgh 4, 9747AG Groningen, The Netherlands
| | - Václav Ocelík
- Zernike Institute for Advanced Materials, University of Groningen, Nijenborgh 4, 9747AG Groningen, The Netherlands
| | - Beatriz Noheda
- Zernike Institute for Advanced Materials, University of Groningen, Nijenborgh 4, 9747AG Groningen, The Netherlands
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3
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El Alaoui F, Casuso I, Sanchez-Fuentes D, Arpin-Andre C, Rathar R, Baecker V, Castro A, Lorca T, Viaud J, Vassilopoulos S, Carretero-Genevrier A, Picas L. Structural organization and dynamics of FCHo2 docking on membranes. eLife 2022; 11:e73156. [PMID: 35044298 PMCID: PMC8798043 DOI: 10.7554/elife.73156] [Citation(s) in RCA: 2] [Impact Index Per Article: 1.0] [Reference Citation Analysis] [Abstract] [Key Words] [MESH Headings] [Grants] [Track Full Text] [Download PDF] [Figures] [Journal Information] [Subscribe] [Scholar Register] [Received: 08/19/2021] [Accepted: 01/18/2022] [Indexed: 11/24/2022] Open
Abstract
Clathrin-mediated endocytosis (CME) is a central trafficking pathway in eukaryotic cells regulated by phosphoinositides. The plasma membrane phosphatidylinositol-4,5-bisphosphate (PI(4,5)P2) plays an instrumental role in driving CME initiation. The F-BAR domain-only protein 1 and 2 complex (FCHo1/2) is among the early proteins that reach the plasma membrane, but the exact mechanisms triggering its recruitment remain elusive. Here, we show the molecular dynamics of FCHo2 self-assembly on membranes by combining minimal reconstituted in vitro and cellular systems. Our results indicate that PI(4,5)P2 domains assist FCHo2 docking at specific membrane regions, where it self-assembles into ring-like-shaped protein patches. We show that the binding of FCHo2 on cellular membranes promotes PI(4,5)P2 clustering at the boundary of cargo receptors and that this accumulation enhances clathrin assembly. Thus, our results provide a mechanistic framework that could explain the recruitment of early PI(4,5)P2-interacting proteins at endocytic sites.
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Affiliation(s)
- Fatima El Alaoui
- Institut de Recherche en Infectiologie de Montpellier (IRIM), CNRS UMR 9004, Université de MontpellierMontpellierFrance
| | | | - David Sanchez-Fuentes
- Institut d'Électronique et des Systèmes (IES), CNRS UMR 5214, Université de MontpellierMontpellierFrance
| | - Charlotte Arpin-Andre
- Institut de Recherche en Infectiologie de Montpellier (IRIM), CNRS UMR 9004, Université de MontpellierMontpellierFrance
| | - Raissa Rathar
- Institut d'Électronique et des Systèmes (IES), CNRS UMR 5214, Université de MontpellierMontpellierFrance
| | - Volker Baecker
- Montpellier Ressources Imagerie, BioCampus Montpellier, CNRS, INSERM, Université de MontpellierMontpellierFrance
| | - Anna Castro
- Centre de Biologie Cellulaire de Montpellier (CRBM), CNRS UMR UMR 5237, Université de MontpellierMontpellierFrance
| | - Thierry Lorca
- Centre de Biologie Cellulaire de Montpellier (CRBM), CNRS UMR UMR 5237, Université de MontpellierMontpellierFrance
| | - Julien Viaud
- INSERM UMR1297, Institute of Metabolic and Cardiovascular Diseases (I2MC), University of Toulouse, Paul Sabatier UniversityToulouseFrance
| | - Stéphane Vassilopoulos
- Sorbonne Université, INSERM, Institute of Myology, Centre of Research in Myology, UMRS 974ParisFrance
| | - Adrian Carretero-Genevrier
- Institut d'Électronique et des Systèmes (IES), CNRS UMR 5214, Université de MontpellierMontpellierFrance
| | - Laura Picas
- Institut de Recherche en Infectiologie de Montpellier (IRIM), CNRS UMR 9004, Université de MontpellierMontpellierFrance
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4
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Lermusiaux L, Mazel A, Carretero-Genevrier A, Sanchez C, Drisko GL. Metal-Induced Crystallization in Metal Oxides. Acc Chem Res 2022; 55:171-185. [PMID: 34979086 PMCID: PMC8772270 DOI: 10.1021/acs.accounts.1c00592] [Citation(s) in RCA: 8] [Impact Index Per Article: 4.0] [Reference Citation Analysis] [Abstract] [Grants] [Track Full Text] [Download PDF] [Figures] [Journal Information] [Subscribe] [Scholar Register] [Received: 09/23/2021] [Indexed: 11/28/2022]
Abstract
ConspectusThe properties of a material depend upon its physical characteristics, one of these being its crystalline state. Next generation solid-state technologies will integrate crystalline oxides into thermal sensitive processes and composite materials. Crystallization of amorphous phases of metal oxides in the solid state typically requires substantial energy input to induce the amorphous to crystalline phase transformation. In the case of silica, the transformation to α-quartz in a furnace occurs above 1300 °C and that of titania, above 400 °C. These calcination processes are costly in energy but also often degrade complex material architectures or compositions.Thus, low temperature crystallization techniques are required that preserve macro- and mesostructures and complex elemental composition (e.g., organic-, metal-, and semiconductor-metal oxide hybrids/composites). Some solution-based techniques exist to directly fabricate crystalline metal oxides. However, these are not always compatible with the specificities of the system or industrial constraints. A postsynthetic, solid-state approach that reduces crystallization temperature in metal oxides is metal-induced crystallization (MIC).MIC is the introduction of catalytic amounts of a cation, which can be an s-block, p-block, or d-block cation, that migrates through the solid metal oxide lattice. The cation is thought to temporarily break metal oxide bonds, allowing [MOx] polyhedra to rotate and reform bonds with neighboring [MOx] groups in a lower energy crystalline phase. Depending on the system, the cation can favor or defavor the formation of a particular crystalline phase, providing a means to tune the purity and crystalline phase ratios. An advantage of MIC is that, although the crystallization occurs in the solid state, the crystallization process can be accomplished for particle suspensions in liquid media. In this case, the energy required to induce the crystallization can come from, for example, a microwave or an ultrasound bath. The crystallization of particles in suspension avoids aggregation from particle-particle sintering. In the case of thin films, the energy for crystallization typically comes from a laser or calcination.MIC is only recently being used as a low temperature metal oxide crystallization technique, despite being widely used in the semiconductor industry. Here, the mechanism and previous studies in MIC are presented for titania, silica, and other oxides. The beauty of this technique is that it is extremely easy to employ: cations can be incorporated into the system postsynthetically and then are often expelled from the lattice upon phase conversion. We expect MIC to enrich materials for photochromic, optoelectronic, catalyst, biological, and other applications.
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Affiliation(s)
- Laurent Lermusiaux
- Univ.
Lyon, CNRS, École Normale Supérieure de Lyon, Laboratoire de Chimie, UMR 5182, 46 allée d’Italie, F-69007 Lyon, France
| | - Antoine Mazel
- CNRS,
Univ. Bordeaux, Bordeaux INP, ICMCB, UMR 5026, F-33600 Pessac, France
| | - Adrian Carretero-Genevrier
- Institut
d’Electronique et des Systèmes (IES), CNRS, Université de Montpellier, 860 Rue de Saint Priest, Montpellier 34095, France
| | - Clément Sanchez
- Laboratoire
Chimie de la Matière Condensée, UMR 7574, Sorbonne Université-Collège de France-CNRS, 4 Place Jussieu, 75005 Paris, France
| | - Glenna L. Drisko
- CNRS,
Univ. Bordeaux, Bordeaux INP, ICMCB, UMR 5026, F-33600 Pessac, France
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5
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Antoja-Lleonart J, Ocelík V, Zhou S, de Hond K, Koster G, Rijnders G, Noheda B. Growth and Crystallization of SiO 2/GeO 2 Thin Films on Si(100) Substrates. NANOMATERIALS (BASEL, SWITZERLAND) 2021; 11:1654. [PMID: 34201843 PMCID: PMC8305750 DOI: 10.3390/nano11071654] [Citation(s) in RCA: 2] [Impact Index Per Article: 0.7] [Reference Citation Analysis] [Abstract] [Key Words] [Grants] [Track Full Text] [Download PDF] [Figures] [Subscribe] [Scholar Register] [Received: 06/02/2021] [Revised: 06/16/2021] [Accepted: 06/21/2021] [Indexed: 11/17/2022]
Abstract
The growth of α-quartz-based piezoelectric thin films opens the door to higher-frequency electromechanical devices than those available through top-down approaches. We report on the growth of SiO2/GeO2 thin films by pulsed laser deposition and their subsequent crystallization. By introducing a devitrifying agent uniformly within the film, we are able to obtain the α-quartz phase in the form of platelets with lateral sizes above 100 μm at accessible temperatures. Films containing different amounts of devitrifying agent are investigated, and their crystallinity is ascertained with X-ray diffraction and electron back-scatter diffraction. Our work highlights the difficulty in crystallization when competing phases arise that have markedly different crystalline orientation.
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Affiliation(s)
- Jordi Antoja-Lleonart
- Nanostructures of Functional Oxides, Zernike Institute for Advanced Materials, University of Groningen, 9747 AG Groningen, The Netherlands; (J.A.-L.); (V.O.); (S.Z.)
| | - Václav Ocelík
- Nanostructures of Functional Oxides, Zernike Institute for Advanced Materials, University of Groningen, 9747 AG Groningen, The Netherlands; (J.A.-L.); (V.O.); (S.Z.)
| | - Silang Zhou
- Nanostructures of Functional Oxides, Zernike Institute for Advanced Materials, University of Groningen, 9747 AG Groningen, The Netherlands; (J.A.-L.); (V.O.); (S.Z.)
| | - Kit de Hond
- MESA+ Institute for Nanotechnology, University of Twente, P.O. Box 217, 7522 NH Enschede, The Netherlands; (K.d.H.); (G.K.); (G.R.)
| | - Gertjan Koster
- MESA+ Institute for Nanotechnology, University of Twente, P.O. Box 217, 7522 NH Enschede, The Netherlands; (K.d.H.); (G.K.); (G.R.)
| | - Guus Rijnders
- MESA+ Institute for Nanotechnology, University of Twente, P.O. Box 217, 7522 NH Enschede, The Netherlands; (K.d.H.); (G.K.); (G.R.)
| | - Beatriz Noheda
- Nanostructures of Functional Oxides, Zernike Institute for Advanced Materials, University of Groningen, 9747 AG Groningen, The Netherlands; (J.A.-L.); (V.O.); (S.Z.)
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6
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Gomez A, Vila-Fungueiriño JM, Jolly C, Garcia-Bermejo R, Oró-Solé J, Ferain E, Mestres N, Magén C, Gazquez J, Rodriguez-Carvajal J, Carretero-Genevrier A. Crystal engineering and ferroelectricity at the nanoscale in epitaxial 1D manganese oxide on silicon. NANOSCALE 2021; 13:9615-9625. [PMID: 33982736 DOI: 10.1039/d1nr00565k] [Citation(s) in RCA: 0] [Impact Index Per Article: 0] [Reference Citation Analysis] [Abstract] [Track Full Text] [Subscribe] [Scholar Register] [Indexed: 06/12/2023]
Abstract
Ferroelectric oxides have attracted much attention due to their wide range of applications, particularly in electronic devices such as nonvolatile memories and tunnel junctions. As a result, the monolithic integration of these materials into silicon technology and their nanostructuration to develop alternative cost-effective processes are among the central points in the current technology. In this work, we used a chemical route to obtain nanowire thin films of a novel Sr1+δMn8O16 (SMO) hollandite-type manganese oxide on silicon. Scanning transmission electron microscopy combined with crystallographic computing reveals a crystal structure comprising hollandite and pyrolusite units sharing the edges of their MnO6 octahedra, resulting in three types of tunnels arranged along the c axis, where the ordering of the Sr atoms produces natural symmetry breaking. The novel structure gives rise to ferroelectricity and piezoelectricity, as revealed by local direct piezoelectric force microscopy measurements, which confirmed the ferroelectric nature of the SMO nanowire thin films at room temperature and showed a piezoelectric coefficient d33 value of 22 ± 6 pC N-1. Moreover, we proved that flexible vertical SMO nanowires can be harvested providing an electrical output energy through the piezoelectric effect, showing excellent deformability and high interface recombination. This work indicates the possibility of engineering the integration of 1D manganese oxides on silicon, a step which precedes the production of microelectronic devices.
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Affiliation(s)
- Andrés Gomez
- Institut de Ciència de Materials de Barcelona ICMAB, Consejo Superior de Investigaciones Científicas CSIC, Campus UAB 08193 Bellaterra, Catalonia, Spain
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7
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Guyot M, Daurat C, Vuillet-A-Ciles V, Pontille L, Le Porcher B, Chiriac R, Toche F, Chassagneux F, Toury B, Bois L. Foam Silica Films Synthesized by Calcium Chloride-Assisted Emulsification. LANGMUIR : THE ACS JOURNAL OF SURFACES AND COLLOIDS 2021; 37:4540-4549. [PMID: 33830769 DOI: 10.1021/acs.langmuir.1c00083] [Citation(s) in RCA: 0] [Impact Index Per Article: 0] [Reference Citation Analysis] [Abstract] [Track Full Text] [Subscribe] [Scholar Register] [Indexed: 06/12/2023]
Abstract
The development of porous films with an accessible high specific surface area is important for designing new adsorbents, sensors, or catalyst supports. Here, we describe a simple method to prepare a silica foam coating using a calcium chloride-assisted evaporation-induced emulsification method. An alcoholic silica sol containing calcium chloride and a poly(ethylene oxide)-based polymer is deposited on a substrate by dipping. The evaporation of the alcohol induces a phase separation between the silica-rich phase and the calcium-rich one. The size of the droplets increases via a coalescence process until the gelation of the sol, which determines the final pore size between 100 nm and 3 μm. Thermal analysis and monitoring of droplet evaporation confirm that the departure of the solvent is delayed by the presence of calcium chloride in the sol. The influence of the nature of the polymer on the porosity is discussed. The use of a block copolymer such as the Pluronic F-127, which strongly stabilizes the emulsion, allows to reach a low pore size (400 nm), while on the contrary, we propose to use a short poly(ethylene glycol) (PEG) such as PEG-400, which weakly stabilizes it, leading to larger pores (2-3 μm). Furthermore, we show that the addition of a zirconium salt (ZrOCl2·8H2O) to the silica sol accelerates the condensation step of the silica and leads to the decrease in the pore size.
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Affiliation(s)
- Mélanie Guyot
- Université de Lyon, Université Claude Bernard Lyon 1, CNRS, Laboratoire des Multimatériaux et Interfaces, F-69622 Villeurbanne, France
| | - Céline Daurat
- Université de Lyon, Université Claude Bernard Lyon 1, CNRS, Laboratoire des Multimatériaux et Interfaces, F-69622 Villeurbanne, France
| | - Victor Vuillet-A-Ciles
- Université de Lyon, Université Claude Bernard Lyon 1, CNRS, Laboratoire des Multimatériaux et Interfaces, F-69622 Villeurbanne, France
| | - Laurie Pontille
- Université de Lyon, Université Claude Bernard Lyon 1, CNRS, Laboratoire des Multimatériaux et Interfaces, F-69622 Villeurbanne, France
| | - Bastien Le Porcher
- Université de Lyon, Université Claude Bernard Lyon 1, CNRS, Laboratoire des Multimatériaux et Interfaces, F-69622 Villeurbanne, France
| | - Rodica Chiriac
- Université de Lyon, Université Claude Bernard Lyon 1, CNRS, Laboratoire des Multimatériaux et Interfaces, F-69622 Villeurbanne, France
| | - François Toche
- Université de Lyon, Université Claude Bernard Lyon 1, CNRS, Laboratoire des Multimatériaux et Interfaces, F-69622 Villeurbanne, France
| | - Fernand Chassagneux
- Université de Lyon, Université Claude Bernard Lyon 1, CNRS, Laboratoire des Multimatériaux et Interfaces, F-69622 Villeurbanne, France
| | - Bérangère Toury
- Université de Lyon, Université Claude Bernard Lyon 1, CNRS, Laboratoire des Multimatériaux et Interfaces, F-69622 Villeurbanne, France
| | - Laurence Bois
- Université de Lyon, Université Claude Bernard Lyon 1, CNRS, Laboratoire des Multimatériaux et Interfaces, F-69622 Villeurbanne, France
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8
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Sansen T, Sanchez-Fuentes D, Rathar R, Colom-Diego A, El Alaoui F, Viaud J, Macchione M, de Rossi S, Matile S, Gaudin R, Bäcker V, Carretero-Genevrier A, Picas L. Mapping Cell Membrane Organization and Dynamics Using Soft Nanoimprint Lithography. ACS APPLIED MATERIALS & INTERFACES 2020; 12:29000-29012. [PMID: 32464046 DOI: 10.1021/acsami.0c05432] [Citation(s) in RCA: 1] [Impact Index Per Article: 0.3] [Reference Citation Analysis] [Abstract] [Key Words] [MESH Headings] [Track Full Text] [Subscribe] [Scholar Register] [Indexed: 06/11/2023]
Abstract
Membrane shape is a key feature of many cellular processes, including cell differentiation, division, migration, and trafficking. The development of nanostructured surfaces allowing for the in situ manipulation of membranes in living cells is crucial to understand these processes, but this requires complicated and limited-access technologies. Here, we investigate the self-organization of cellular membranes by using a customizable and benchtop method allowing one to engineer 1D SiO2 nanopillar arrays of defined sizes and shapes on high-performance glass compatible with advanced microscopies. As a result of this original combination, we provide a mapping of the morphology-induced modulation of the cell membrane mechanics, dynamics and steady-state organization of key protein complexes implicated in cellular trafficking and signal transduction.
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Affiliation(s)
- T Sansen
- Institut de Recherche en Infectiologie de Montpellier (IRIM), CNRS UMR 9004-Université de Montpellier, 34293 Montpellier, France
| | - D Sanchez-Fuentes
- Institut d'Électronique et des Systèmes (IES), CNRS UMR 5214-Université de Montpellier, 34097 Montpellier, France
| | - R Rathar
- Institut de Recherche en Infectiologie de Montpellier (IRIM), CNRS UMR 9004-Université de Montpellier, 34293 Montpellier, France
- Institut d'Électronique et des Systèmes (IES), CNRS UMR 5214-Université de Montpellier, 34097 Montpellier, France
| | - A Colom-Diego
- Biochemistry Department and School of Chemistry and Biochemistry and Swiss National Centre for Competence in Research in Chemical Biology, University of Geneva, CH-1211 Geneva, Switzerland
| | - F El Alaoui
- Institut de Recherche en Infectiologie de Montpellier (IRIM), CNRS UMR 9004-Université de Montpellier, 34293 Montpellier, France
| | - J Viaud
- Institute of Cardiovascular and Metabolic Diseases (I2MC-UMR1048), Inserm and Université Toulouse 3, Avenue Jean Poulhès BP84225, 31432 Cedex 04 Toulouse, France
| | - M Macchione
- School of Chemistry and Biochemistry and Swiss National Centre for Competence in Research in Chemical Biology, University of Geneva, CH-1211 Geneva, Switzerland
| | - S de Rossi
- MRI Imaging Facility, UMS BioCampus Montpellier, 34000 Montpellier, France
| | - S Matile
- School of Chemistry and Biochemistry and Swiss National Centre for Competence in Research in Chemical Biology, University of Geneva, CH-1211 Geneva, Switzerland
| | - R Gaudin
- Institut de Recherche en Infectiologie de Montpellier (IRIM), CNRS UMR 9004-Université de Montpellier, 34293 Montpellier, France
| | - V Bäcker
- MRI Imaging Facility, UMS BioCampus Montpellier, 34000 Montpellier, France
| | - A Carretero-Genevrier
- Institut d'Électronique et des Systèmes (IES), CNRS UMR 5214-Université de Montpellier, 34097 Montpellier, France
| | - L Picas
- Institut de Recherche en Infectiologie de Montpellier (IRIM), CNRS UMR 9004-Université de Montpellier, 34293 Montpellier, France
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9
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Liu W, Yin HM, Shi A, Sun WJ, Wu DW, Huang S, Zhao B, Xu JZ, Li ZM. Surface-Directed Self-Epitaxial Crystallization of Poly(ε-caprolactone) from Isotropic to Highly Orientated Lamellae. Macromolecules 2020. [DOI: 10.1021/acs.macromol.9b02336] [Citation(s) in RCA: 6] [Impact Index Per Article: 1.5] [Reference Citation Analysis] [Track Full Text] [Journal Information] [Subscribe] [Scholar Register] [Indexed: 02/08/2023]
Affiliation(s)
- Wei Liu
- College of Polymer Science and Engineering and State Key Laboratory of Polymer Materials Engineering, Sichuan University, Chengdu 610065, China
| | - Hua-Mo Yin
- College of Polymer Science and Engineering and State Key Laboratory of Polymer Materials Engineering, Sichuan University, Chengdu 610065, China
| | - Ai Shi
- College of Polymer Science and Engineering and State Key Laboratory of Polymer Materials Engineering, Sichuan University, Chengdu 610065, China
| | - Wen-Jing Sun
- College of Polymer Science and Engineering and State Key Laboratory of Polymer Materials Engineering, Sichuan University, Chengdu 610065, China
| | - Di-Wei Wu
- Department of Orthopaedic Surgery, West China Hospital, Sichuan University, Chengdu 610065, China
| | - Shishu Huang
- Department of Orthopaedic Surgery, West China Hospital, Sichuan University, Chengdu 610065, China
| | - Baisong Zhao
- Department of Anesthesiology, Guangzhou Women and Children’s Medical Center, Guangzhou 510623, China
| | - Jia-Zhuang Xu
- College of Polymer Science and Engineering and State Key Laboratory of Polymer Materials Engineering, Sichuan University, Chengdu 610065, China
| | - Zhong-Ming Li
- College of Polymer Science and Engineering and State Key Laboratory of Polymer Materials Engineering, Sichuan University, Chengdu 610065, China
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10
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Zhang Q, Sánchez-Fuentes D, Desgarceaux R, Escofet-Majoral P, Oró-Soler J, Gázquez J, Larrieu G, Charlot B, Gómez A, Gich M, Carretero-Genevrier A. Micro/Nanostructure Engineering of Epitaxial Piezoelectric α-Quartz Thin Films on Silicon. ACS APPLIED MATERIALS & INTERFACES 2020; 12:4732-4740. [PMID: 31880913 DOI: 10.1021/acsami.9b18555] [Citation(s) in RCA: 6] [Impact Index Per Article: 1.5] [Reference Citation Analysis] [Abstract] [Key Words] [Track Full Text] [Subscribe] [Scholar Register] [Indexed: 06/10/2023]
Abstract
The monolithic integration of sub-micron quartz structures on silicon substrates is a key issue for the future development of piezoelectric devices as prospective sensors with applications based on the operation in the high-frequency range. However, to date, it has not been possible to make existing quartz manufacturing methods compatible with integration on silicon and structuration by top-down lithographic techniques. Here, we report an unprecedented large-scale fabrication of ordered arrays of piezoelectric epitaxial quartz nanostructures on silicon substrates by the combination of soft-chemistry and three lithographic techniques: (i) laser interference lithography, (ii) soft nanoimprint lithography on Sr-doped SiO2 sol-gel thin films, and (iii) self-assembled SrCO3 nanoparticle reactive nanomasks. Epitaxial α-quartz nanopillars with different diameters (from 1 μm down to 50 nm) and heights (up to 2 μm) were obtained. This work demonstrates the complementarity of soft-chemistry and top-down lithographic techniques for the patterning of epitaxial quartz thin films on silicon while preserving its epitaxial crystallinity and piezoelectric properties. These results open up the opportunity to develop a cost-effective on-chip integration of nanostructured piezoelectric α-quartz MEMS with enhanced sensing properties of relevance in different fields of application.
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Affiliation(s)
- Qianzhe Zhang
- Institut d'Electronique et des Systemes (IES), CNRS , Université de Montpellier , 860 Rue de Saint Priest 34095 Montpellier , France
- Institut de Ciència de Materials de Barcelona ICMAB, Consejo Superior de Investigaciones Científicas CSIC, Campus UAB , 08193 Bellaterra , Catalonia , Spain
| | - David Sánchez-Fuentes
- Institut d'Electronique et des Systemes (IES), CNRS , Université de Montpellier , 860 Rue de Saint Priest 34095 Montpellier , France
| | - Rudy Desgarceaux
- Institut d'Electronique et des Systemes (IES), CNRS , Université de Montpellier , 860 Rue de Saint Priest 34095 Montpellier , France
| | - Pau Escofet-Majoral
- Institut d'Electronique et des Systemes (IES), CNRS , Université de Montpellier , 860 Rue de Saint Priest 34095 Montpellier , France
| | - Judith Oró-Soler
- Institut de Ciència de Materials de Barcelona ICMAB, Consejo Superior de Investigaciones Científicas CSIC, Campus UAB , 08193 Bellaterra , Catalonia , Spain
| | - Jaume Gázquez
- Institut de Ciència de Materials de Barcelona ICMAB, Consejo Superior de Investigaciones Científicas CSIC, Campus UAB , 08193 Bellaterra , Catalonia , Spain
| | - Guilhem Larrieu
- LAAS-CNRS , Université de Toulouse , CNRS, INP, 7 av. Colonel Roche , 31031 Toulouse , France
| | - Benoit Charlot
- Institut d'Electronique et des Systemes (IES), CNRS , Université de Montpellier , 860 Rue de Saint Priest 34095 Montpellier , France
| | - Andrés Gómez
- Institut de Ciència de Materials de Barcelona ICMAB, Consejo Superior de Investigaciones Científicas CSIC, Campus UAB , 08193 Bellaterra , Catalonia , Spain
| | - Martí Gich
- Institut de Ciència de Materials de Barcelona ICMAB, Consejo Superior de Investigaciones Científicas CSIC, Campus UAB , 08193 Bellaterra , Catalonia , Spain
| | - Adrián Carretero-Genevrier
- Institut d'Electronique et des Systemes (IES), CNRS , Université de Montpellier , 860 Rue de Saint Priest 34095 Montpellier , France
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