Invited review article: high-speed flexure-guided nanopositioning: mechanical design and control issues

Fractional order neural sliding mode control based on the FO-Hammerstein model of piezoelectric actuator

Piezoelectric actuators (PEA) are extensively utilized in high-precision micro-measurement and operation. However, owing to the rate-dependent nature of its hysteresis, its accuracy in certain applications would suffer significantly, and the system would become unstable. To address this issue, a new method for developing a feedback control system that can reduce the rate-dependent impacts of PEA on the positioning system is provided using PEA as the research object. This strategy is based on the fractional order Hammerstein model (FO-Hammerstein). For the fractional order model, a novel fractional order integral sliding mode surface is proposed here that can accurately delineate the dynamic characteristics of PEA. This sliding mode surface is composed of a fractional polynomial and an integral term, which can better minimize static errors and monitor reference signals, and it is built using a fractional neural sliding mode control (BP-FSMC) method. The control technique can be extensively utilized in various systems, such as FO-Hammerstein and those described by the fractional transfer function. The research introduces a neural network and an artificial bee colony algorithm (DeC-ABC) that are used to alter the system's parameters. The study's findings reveal that a system with high resilience can follow the signals from both composite and single input sources. Compared with the fractional order sliding mode control approach on the basis of extended state observer, the fractional order sliding mode control method based on single parameter adaptive law and the proportional integral sliding mode control method on the basis of feedforward compensation, this method has a quicker response time and lower tracking error.

A survey on the mechanical design for piezo-actuated compliant micro-positioning stages

This paper presents a comprehensive review of mechanical design and synthesis methods for piezo-actuated compliant micro-positioning stages, which play an important role in areas where high precision motion is required, including bio-robotics, precision manufacturing, automation, and aerospace. Unlike conventional rigid-link mechanisms, the motion of compliant mechanisms is realized by using flexible elements, whereby deformation requires no lubrication while achieving high movement accuracy without friction. As compliant mechanisms differ significantly from traditional rigid mechanisms, recent research has focused on investigating various technologies and approaches to address challenges in the flexure-based micro-positioning stage in the aspects of synthesis, analysis, material, fabrication, and actuation. In this paper, we reviewed the main concepts and key advances in the mechanical design of compliant piezo-actuated micro-positioning stages, with a particular focus on flexure design, kineto-static modeling, actuators, material selection, and functional mechanisms including amplification and self-guiding ones. We also identified the key issues and directions for the development trends of compliant micro-positioning stages.

Gas Adsorption Response of Piezoelectrically Driven Microcantilever Beam Gas Sensors: Analytical, Numerical, and Experimental Characterizations

This work presents an approach for the estimation of the adsorbed mass of 1,5-diaminopentane (cadaverine) on a functionalized piezoelectrically driven microcantilever (PD-MC) sensor, using a polynomial developed from the characterization of the resonance frequency response to the known added mass. This work supplements the previous studies we carried out on the development of an electronic nose for the measurement of cadaverine in meat and fish, as a determinant of its freshness. An analytical transverse vibration analysis of a chosen microcantilever beam with given dimensions and desired resonance frequency (>10 kHz) was conducted. Since the beam is considered stepped with both geometrical and material non-uniformity, a modal solution for stepped beams, extendable to clamped-free beams of any shape and structure, is derived and used for free and forced vibration analyses of the beam. The forced vibration analysis is then used for transformation to an equivalent electrical model, to address the fact that the microcantilever is both electronically actuated and read. An analytical resonance frequency response to the mass added is obtained by adding simulated masses to the free end of the beam. Experimental verification of the resonance frequency response is carried out, by applying known masses to the microcantilever while measuring the resonance frequency response using an impedance analyzer. The obtained response is then transformed into a resonance frequency to the added mass response polynomial using a polynomial fit. The resulting polynomial is then verified for performance using different masses of cantilever functionalization solution. The functionalized cantilever is then exposed to different concentrations of cadaverine while measuring the resonance frequency and mass of cadaverine adsorbed estimated using the previously obtained polynomial. The result is that there is the possibility of using this approach to estimate the mass of cadaverine gas adsorbed on a functionalized microcantilever, but the effectiveness of this approach is highly dependent on the known masses used for the development of the response polynomial model.

Review: Advanced Atomic Force Microscopy Modes for Biomedical Research

Visualization of biomedical samples in their native environments at the microscopic scale is crucial for studying fundamental principles and discovering biomedical systems with complex interaction. The study of dynamic biological processes requires a microscope system with multiple modalities, high spatial/temporal resolution, large imaging ranges, versatile imaging environments and ideally in-situ manipulation capabilities. Recent development of new Atomic Force Microscopy (AFM) capabilities has made it such a powerful tool for biological and biomedical research. This review introduces novel AFM functionalities including high-speed imaging for dynamic process visualization, mechanobiology with force spectroscopy, molecular species characterization, and AFM nano-manipulation. These capabilities enable many new possibilities for novel scientific research and allow scientists to observe and explore processes at the nanoscale like never before. Selected application examples from recent studies are provided to demonstrate the effectiveness of these AFM techniques.

Development of a Parallel Dual-Stage Compliant Nanopositioning System

This paper presents a novel parallel dual-stage compliant nanopositioning system (PDCNS), aimed at nanoscale positioning for microscale manipulation. In the developed PDCNS, the coarse stage actuated by the voice coil motor and the fine stage driven by the piezoelectric actuator are integrated in a parallel manner by a specially devised A-shaped compliant mechanism, which leads to many excellent performances, such as good resolution and large stroke and broadband. To enhance the closed-loop-positioning capability of the proposed PDCNS, a double-servo cooperative control (DSCC) strategy is specially constructed. The performance of the proposed PDCNS is evaluated by analytical model, finite element analysis, and experimental research. Results show that the first-order resonance frequency of the designed A-shaped compliant mechanism can reach 99.7 Hz. Combined with the designed DSCC, the developed PDCNS prototype is demonstrated to provide a stroke of 1.49 mm and a positioning resolution of ≤50 nm.

High accuracy tracking of ultrasonic motor based on PID operation of sliding surface plus inverse system compensation

Ultrasonic motor as a actuator of control system is widely used in the equipment driven for the precision manufacturing. In this brief, for the selection of the ultrasonic motor, an approximate time-domain mathematical model was established according to the physical mechanism of the ultrasonic motor. The parameters of the model were identified by using the least square method. Responses of the obtained model to the pulse width signal and the triangular wave signal are approximate consistent with those of the actual system respectively, which show the accuracy of the model. Then, the approach of PID operation of the sliding surface plus the inverse system compensation is proposed, the stability of the controlled system and the selection of the proposed approach parameters were discussed. The conventional PI control method with large gain and the proposed control approach were used to track the same signal. Then, the robustness of the proposed control method was tested, a 0.3 kg load was added to the system while keeping the two controller parameters and tracking signals unchanged, and the tracking effects of the two control methods were obtained. The results show that the proposed control approach has a superior performance compared to the conventional PI control approach.

Low-cost, open-source XYZ nanopositioner for high-precision analytical applications

Nanoscale positioning has numerous applications in both academia and industry. A growing number of applications require devices with long working distances and nanoscale resolutions. Friction-inertia piezoelectric positioners, which are based on the stick-slip mechanism, achieve both nanometer resolution and centimeter-scale travel. However, the requirements of complex preload mechanism, precision machining, and precise assembly increase the cost of conventional friction-inertia nanopositioners. Herein we present the design of an open-source XYZ-axis nanopositioning system. Utilizing a magnet-based stick-slip driving mechanism, the proposed XYZ nanopositioner provides several advantages, including sub-nanometer resolution, a payload capacity of up to 12 kg (horizontal), compact size, low cost, and easy assembly; furthermore, the system is adjustment-free. The performance tests validate the precision of the system in both scanning and stepping operation modes. Moreover, the resonant spectra affirm the rigidity and dynamic response of the mechanism. In addition, we demonstrate the practical applications of this nanopositioner in various measurement techniques, including scanning electron microscopy, vibrometry, and atomic force microscopy. Furthermore, we present 11 variations of the nanopositioner designs that are either compatible with ultra-high-vacuum systems and other existing systems, 3D printable, or hacking commercial linear slides.

Decoupled identification and compensation of nonlinear hysteresis cascading with linear dynamic in a moving magnet voice coil actuator

The moving magnet voice coil actuator (MMVCA) is a promising choice for the long stroke nanopositioning stage with the advantage of low moving mass. However, the hysteresis observed in MMVCA limits further improvement on tracking performance. The hysteresis is cascading with the linear dynamic of the positioning stage, which makes common hysteresis identification inapplicable. In this paper, the cause and influence of hysteresis in MMVCA are analyzed, which reveal that the magnetic hysteresis leads to a hysteresis of force and causes motion accuracy to degrade. A modified rate-dependent Prandtl-Ishlinskii (P-I) model is proposed to describe the hysteresis in MMVCA. The decoupled method is implemented to identify the parameters of the linear dynamic model and nonlinear hysteresis model. The experimental results validate the feasibility of the proposed P-I model. Based on the hysteresis compensation, the peak-to-peak tracking errors are reduced by 30% and the root-mean-square (rms) tracking errors are decreased by 41% on average for the trajectories with amplitudes from 1 to 3 mm and frequencies from 1 to 5 Hz.

Tunable Triple Plasmonically Induced Transparency in Triangular Cavities Coupled with an MDM Waveguide

In this paper, a side-coupled triangle cavity in a plasmonic waveguide structure is proposed and numerically analyzed by the finite-difference time-domain (FDTD) method and coupled mode theory (CMT). Triple plasmonically induced transparency (PIT) was achieved when an extra triangle was added into the structure, and the transmission characteristics were investigated. This novel structure has a maximal sensitivity of 933 nm/RIU when used as a sensor and a contrast ratio of 4 dB. Moreover, the tunability of PIT can be realized by filling the nematic liquid crystal (NLC) E7 into the triangles. The refractive index of E7 changes with the applied electric field. Given that E7 is also sensitive to temperature, this structure can be used as a temperature sensor with a sensitivity of 0.29 nm/°C. It is believed that this tunable structure with PIT may have potential applications in highly integrated optical circuits.

An ultrafast piezoelectric Z-scanner with a resonance frequency above 1.1 MHz for high-speed atomic force microscopy

The Z-scanner is the major component limiting the speed performance of all current high-speed atomic force microscopy systems. Here, we present an ultrafast piezoelectric Z-scanner with a resonance frequency above 1.1 MHz, achieving a record response time of ∼0.14 µs, approximately twice as fast as conventional piezoelectric-based Z-scanners. In the mechanical design, a small piezo-stack is supported at its bottom four vertices on a cone-like hollow, allowing the resonance frequency of the Z-scanner to remain as high as that of the piezo in free vibration. Its maximum displacement, ∼190 nm at 50 V, is large enough for imaging bio-molecules. For imaging bio-molecules in a buffer solution, the upper half of the Z-scanner is wrapped in a thin film resistant to water and chemicals, providing an excellent waterproof and mechanical durability without lowering the resonance frequency. We demonstrate that this Z-scanner can observe actin filaments, fragile biological polymers, for more than five times longer than the conventional Z-scanner at a tip velocity of 800 µm/s.

Design of a 3DOF XYZ Bi-Directional Motion Platform Based on Z-Shaped Flexure Hinges

This paper presents a design of a 3DOF XYZ bi-directional motion platform based on Z-shaped flexure hinges. In the presented platform, bridge-type mechanisms and Z-shaped flexure hinges are adopted to amplify its output displacement. Bi-direction motion along the X-axis and Y-axis follows the famous differential moving principle DMP, and the bi-directional motion along the Z-axis is realized by using the reverse arrangement of the Z-shaped flexure hinges along the X-axis and Y-axis. Statics analysis of the proposed platform is carried out by the energy method, compliance matrix method, and force balance principle. Meanwhile, the Lagrange method is used to analyze the dynamics of the platform. A series of simulations are conducted to demonstrate the effectiveness of the proposed design. The simulation results show that the average displacements of the platform in the XYZ-axis are ±125.58 μm, ±126.37 μm and ±568.45 μm, respectively.

Damping and tracking control of nanopositioning stages with double delayed position feedback

This paper presents a new damping control scheme for piezoelectric nanopositioning stages with double delayed position feedback (DDPF). The DDPF in the inner loop is proposed to suppress vibration of the nanopositioning stage, which leads to a double time-delay system. A new numerical differential method is proposed to determine the parameters of the DDPF with pole placement. Then, a high-gain proportional-integral (PI) controller is designed in the outer loop to achieve a low level of tracking errors, which includes the hysteresis nonlinearity, disturbance, and modeling uncertainties. Experimental tests with various control schemes are conducted on a piezoelectric nanopositioning stage to verify the effectiveness of the proposed method. Experimental results reveal that the control bandwidth of the system is improved from 79 Hz (with the PI controller), 416 Hz (with the conventional delayed position feedback based controller), and 422 Hz (with the recursive delayed position feedback based controller) to 483 Hz (with the proposed controller).

Development of a flexure-based nano-actuator for high-frequency high-resolution directional sensing with atomic force microscopy

Scanning probe microscopies typically rely on the high-precision positioning of a nanoscale probe in order to gain local information about the properties of a sample. At a given location, the probe is used to interrogate a minute region of the sample, often relying on dynamical sensing for improved accuracy. This is the case for most force-based measurements in atomic force microscopy (AFM) where sensing occurs with a tip oscillating vertically, typically in the kHz to MHz frequency regime. While this approach is ideal for many applications, restricting dynamical sensing to only one direction (vertical) can become a serious limitation when aiming to quantify the properties of inherently three-dimensional systems, such as a liquid near a wall. Here, we present the design, fabrication, and calibration of a miniature high-speed scanner able to apply controlled fast and directional in-plane vibrations with sub-nanometer precision. The scanner has a resonance frequency of ∼35 kHz and is used in conjunction with a traditional AFM to augment the measurement capabilities. We illustrate its capabilities at a solid-liquid interface where we use it to quantify the preferred lateral flow direction of the liquid around every sample location. The AFM can simultaneously acquire high-resolution images of the interface, which can be superimposed with the directional measurements. Examples of sub-nanometer measurements conducted with the new scanner are also presented.

Development of a 3-DOF Flexible Micro-Motion Platform Based on a New Compound Lever Amplification Mechanism

In this paper, a flexible micro-operation platform with three degrees of freedom, large stroke, and high precision is designed to meet the higher demands in the fields of biological engineering and medicine. The platform adopts a compound lever mechanism. The theoretical magnification of the mechanism is 9.627, the simulation magnification is 10.111, and the error is 5.02%. The platform uses a piezoelectric ceramic driver to increase the output stroke to obtain a larger movement space. The composite lever mechanism and new micro-operating platform are studied by theoretical calculation and finite element simulation. The results show that the new flexible micro-operating platform based on the composite lever mechanism has good motion decoupling and high precision.

Robust high-bandwidth control of nano-positioning stages with Kalman filter based extended state observer and H∞ control

The achievable performance of the piezo-actuated nano-positioning stages is severely limited by the intrinsic nonlinearities of the actuators, the lightly damped resonant mode of the flexure-hinge mechanism, and the external disturbances. To overcome all these limitations, this paper presents a novel robust dual-loop control scheme with a Kalman filter-based extended state observer and H_∞ control for nano-positioning stages to implement high-bandwidth tracking operations. In this scheme, the extended state observer (ESO) is first developed and assisted by the identified system model to estimate both the system states and total disturbances, where the estimated disturbance is compensated by the direct feedback. In particular, to further improve the estimation performance, the Kalman filter is thus incorporated into the ESO to optimize the observer gain. Then, the state-feedback-based inner-loop controller is designed via the pole-placement method to damp the resonant mode of nano-positioning stages. Finally, a H_∞ robust controller is adopted in the outer-loop to eliminate the influence resulting from the external disturbances, nonlinearities, and unmodeled dynamics on tracking operations. To validate the effectiveness of the proposed approach, comparative experiments are conducted on a piezo-actuated nano-positioning stage. Experimental results demonstrate that the proposed control scheme improves the control bandwidth of the system from 3.6 kHz (the stand-alone H_∞ controller) to 5.52 kHz, which is 93.5% of the first resonant frequency of the original system. Moreover, it shows excellent robustness against the variation of system dynamics due to the change in the mounted mass and the external disturbances.

Study on a Rapid Imaging Method for Scanning Ion Conductance Microscopy Using a Double-Barreled Theta Pipette

Scanning ion conductance microscopy (SICM) is a new noncontact, high-resolution scanning probe microscopy technique, which has become increasingly popular in recent years. The hopping mode-currently the most widely used scanning mode-can be used for imaging samples with complicated surface topographies. However, its slow scanning rate seriously restricts its broader application. This paper proposes a fast imaging control mode using a double-barreled theta pipette as the probe, which effectively increases the imaging rate. In this mode, sample surface height information is obtained when the double-barreled theta pipette approaches the sample in a two-step downward process. The ion current sum of two barrels and ion current of one barrel are used as feedback signals to approach the sample until the feedback signals decrease to the set threshold, respectively, thereby obtaining the height of the imaging point. First, this work used COMSOL to establish an SICM model and perform simulation analysis. The simulation results verified the proposed method's feasibility. Second, a scanning time mathematical model was established. The results revealed that the new method is superior to the traditional method in terms of imaging rate. Finally, experiments were performed on poly(dimethylsiloxane) (PDMS) samples using the two imaging modes described above. The results demonstrated that the new scanning mode could significantly improve the imaging rate of SICM without a loss in imaging quality and stability.

Design, Development and Implementation of the Position Estimator Algorithm for Harmonic Motion on the XY Flexural Mechanism for High Precision Positioning

This article presents a novel concept of the position estimator algorithm for voice coil actuators used in precision scanning applications. Here, a voice coil motor was used as an actuator and a sensor using the position estimator algorithm, which was derived from an electro-mechanical model of a voice coil motor. According to the proposed algorithm, the position of coil relative to the fixed magnet position depends on the current drawn, voltage across coil and motor constant of the voice coil motor. This eliminates the use of a sensor that is an integral part of all feedback control systems. Proposed position estimator was experimentally validated for the voice coil actuator in integration with electro-mechanical modeling of the flexural mechanism. The experimental setup consisted of the flexural mechanism, voice coil actuator, current and voltage monitoring circuitry and its interfacing with PC via a dSPACE DS1104 R&D microcontroller board. Theoretical and experimental results revealed successful implementation of the proposed novel algorithm in the feedback control system with positioning resolution of less than ±5 microns at the scanning speed of more than 5 mm/s. Further, proportional-integral-derivative (PID) control strategy was implemented along with developed algorithm to minimize the error. The position determined by the position estimator algorithm has an accuracy of 99.4% for single direction motion with the experimentally observed position at those instantaneous states.

Image reconstruction for sub-sampled atomic force microscopy images using deep neural networks

Undersampling is a simple but efficient way to increase the imaging rate of atomic force microscopy (AFM). One major challenge in this approach is that of accurate image reconstruction from a limited number of measurements. In this work, we present a deep neural network (DNN) approach to reconstruct μ-path sub-sampled AFM images. Our network consists of two sub-networks, namely a RED-net and a U-net, in series, and is trained end-to-end from random images masked according to μ-path sub-sampling patterns. Using both simulation and experiments, the DNN is shown to yield better image quality than three existing optimization-based methods for reconstruction: basis pursuit, a variant of total variation minimization, and inpainting.

Visual Servo Control System of a Piezoelectric2-Degree-of-Freedom Nano-Stepping Motor

A nano-stepping motor can translate or rotate when its piezoelectric element pair is electrically driven in-phase or anti-phase. It offers millimeter-level stroke, sub-micron-level stepping size, and sub-nanometer-level scanning resolution. This article proposes a visual servo system to control the nano-stepping motor, since its stepping size is not consistent due to changing contact friction, using a custom built microscopic instrument and image recognition software. Three kinds of trajectories-straight lines, circles, and pentagrams-are performed successfully. The smallest straightness and roundness ever tested are 0.291 µm and 2.380 µm. Experimental results show that the proposed controller can effectively compensate for the error and precisely navigate the rotor along a desired trajectory.

Interactive Manipulation of Nonconductive Microparticles in Scanning Electron Microscope by a Virtual Nano-hand Strategy

Micro/nano-manipulation is the fabrication of particular constructs on devices at the micro/nano-scale. Precise manipulation of microparticles is one of the key technological difficulties in manufacturing micro/nano-scale components. Based on scanning electron microscopy and nanomanipulator, this paper adopts a direct push method to operate randomly distributed microparticles into ordered structures. A two-probe interaction strategy is proposed to enable microparticle movements in all directions efficiently and avoid scratching the substrate surface. To overcome the uncertainties in micromanipulation, a virtual nano-hand strategy was also implemented: long-range advance of each microparticle is realized by multiple single-step pushes, whose trajectory is theoretically analyzed. The pushes are well programmed to imitate effects of a more powerful and determined hand. Experimental results show that the theoretical single-step motion trajectory is in line with actual operation, and the proposed strategy can ensure precise operation of the microparticles in all directions and improve reliability and effectiveness of operation.

Lights Out! Nano-Scale Topography Imaging of Sample Surface in Opaque Liquid Environments with Coated Active Cantilever Probes

Atomic force microscopy is a powerful topography imaging method used widely in nanoscale metrology and manipulation. A conventional Atomic Force Microscope (AFM) utilizes an optical lever system typically composed of a laser source, lenses and a four quadrant photodetector to amplify and measure the deflection of the cantilever probe. This optical method for deflection sensing limits the capability of AFM to obtaining images in transparent environments only. In addition, tapping mode imaging in liquid environments with transparent sample chamber can be difficult for laser-probe alignment due to multiple different refraction indices of materials. Spurious structure resonance can be excited from piezo actuator excitation. Photothermal actuation resolves the resonance confusion but makes optical setup more complicated. In this paper, we present the design and fabrication method of coated active scanning probes with piezoresistive deflection sensing, thermomechanical actuation and thin photoresist polymer surface coating. The newly developed probes are capable of conducting topography imaging in opaque liquids without the need of an optical system. The selected coating can withstand harsh chemical environments with high acidity (e.g., 35% sulfuric acid). The probes are operated in various opaque liquid environments with a custom designed AFM system to demonstrate the imaging performance. The development of coated active probes opens up possibilities for observing samples in their native environments.

Rosette-scan video-rate atomic force microscopy: Trajectory patterning and control design

We present an analysis and a systematic design methodology for a novel nonraster scan method based on a rosette pattern and demonstrate its application in video-rate atomic force microscopy. This pattern is traced when the lateral axes of a parallel kinematic scanner are commanded to follow a combination of two sinusoids with identical amplitudes and different frequencies. We design an internal-model-based controller to enhance the tracking performance of this pattern and implement the scheme on a microelectromechanical system scanner. The results reveal high-precision tracking of the rosette pattern in order to acquire time-lapsed atomic force microscope images at the rate of 10 frames/s.

High-speed atomic force microscope with a combined tip-sample scanning architecture

A high-speed atomic force microscope (HS-AFM) based on a tip-sample combined scanning architecture is presented. In this system, the X-scanner, which is separated from the AFM head, carries the sample and scans along the fast-axis. The Y and Z scanners integrated in the AFM head oscillate an ultrashort cantilever probe and scan in the other two dimensions. The optical beam deflection method is improved to enable the laser to track the probe over a wide scan range. A novel probe holder realizes easy exchange and alignment of the probe. Due to the separation of the X and Y scanners, both appear with better dynamic performance and carrying capacity. Experiments show that the HS-AFM established in this work can achieve a line rate of up to 100 Hz with the basic proportional-integral-derivative control algorithm and linear driving. The permissible sample size and mass can be as large as several centimeters and above 40 g.

Hierarchical spiral-scan trajectory for efficient scanning ion conductance microscopy

Scanning ion conductance microscopy (SICM) is an emerging technique for non-contact, high-resolution topography imaging, especially suitable for live cells investigation in a physiological environment. Despite its rapid development, the extended acquisition time issues of its typical hopping/backstep scanning mode still restrict its application for more fields. Herein, we propose a novel SICM scanning approach to effectively reduce the retract distance of existing hopping/backstep mode. In this approach, the SICM probe first gradually descends in the z-direction. Then by using Archimedes spiral trajectory, which has the advantage of higher angular velocity due to its continuous and smooth trajectory, the probe rapidly detects the highest point of the sample in the xy-plane in a layer-by-layer way. Further, the maximum height that decides the retrace distance of pipet in the detected region can be quickly achieved, avoiding a huge retrace distance usually adopted in the existing methods without any prior knowledge (sample height and steepness in the scanning region). Therefore, this new scanning method can greatly reduce the imaging time by minimizing the retrace height of each measurement point. Theoretical analysis is conducted to compare the imaging time of traditional and new method. And various factors in the new method that affect the imaging speed are analyzed. In addition, PDMS (polydimethylsiloxane) and biological samples (C2C12 cells) were imaged by SICM that was operated in the hopping mode, raster-based detecting and developed method with a single-barrel pipet, respectively. The experimental results suggest that the new method has a faster imaging speed than conventional scanning modes but does not sacrifice the imaging quality.

Fractional repetitive control of nanopositioning stages for tracking high-frequency periodic inputs with nonsynchronized sampling

The repetitive control (RC) has been employed for high-speed tracking control of nanopositioning stages due to its abilities of precisely tracking periodic trajectories and rejecting periodic disturbances. However, in digital implementation, the sampling frequency should be integer multiple of the tracking frequency of the desired periodic trajectory. Otherwise, the rounding error would result in a significant degradation of the tracking performance, especially for the case of high input frequencies. To mitigate this rounding effect, the fractional repetitive control (FRC) technique is introduced to control the nanopositioning stage so as to precisely track high-frequency periodic inputs without imposing constraints on the sampling frequency of the digital control system. The complete procedure of controller design and implementation is presented. The techniques to deal with the problems of non-minimum phase system and fractional delay points number are described in detail. The proposed FRC is plugged into the proportional-integral control, and implemented on a custom-built piezo-actuated nanopositioning stage. Validation experiments are conducted, and the results show that the tracking errors caused by the rounding effect in the traditional RC approach are almost completely eliminated, when tracking sinusoidal waveforms with frequencies from 1000 Hz to 1587.3 Hz under the sampling frequency of 50 kHz, where the fractional parts being rounded vary from 0 to 0.5.

Model reference adaptive damping control for a nanopositioning stage with load uncertainties

In this paper, a scheme of model reference adaptive integral resonant control (MRAIRC) is presented for adaptive precision motion control of a piezo-actuated nanopositioning platform. The major advantage of the proposed scheme lies in the adaptivity for dynamic changes resulting from load uncertainties. Existing standard integral resonant control (IRC) with constant controller gains is normally designed based on the identified system model under no external load. For the proposed MRAIRC, a standard IRC is first designed using an analytical approach, assuming that a second-order system model is obtained in advance. Afterwards, the designed closed-loop is utilized as a reference model for systems with model uncertainties. The adaptive laws of the controller gains are determined according to the well-known MIT rules. An offline trail-and-error operation is conducted for adaption gains' tuning. The stability of this adaptive control system is proved through Lyapunov stability analysis. Simulation and experimental studies demonstrate that the proposed MRAIRC is superior to the standard IRC in terms of the tracking errors for commonly used raster scanning signals at 5, 10, and 20 Hz with load variations of the platform ranging from 0 to 1000 g.

Tip wear and tip breakage in high-speed atomic force microscopes

Tip abrasion is a critical issue particularly for high-speed atomic force microscopy (AFM). In this paper, a quantitative investigation on the tip abrasion of diamond-like-carbon (DLC) coated tips in a high-speed metrological large range AFM device has been detailed. Wear tests are conducted on four different surfaces made of silicon, niobium, aluminum and steel. During the tests, different scanning speeds up to 1 mm/s and different vertical load forces up to approximately 33.2 nN are applied. Various tip characterization techniques such as scanning electron microscopy (SEM) and AFM tip characterizers have been jointly applied to measure the tip form change precisely. The experimental results show that tip form changes abruptly rather than progressively, particularly when structures with steep sidewalls were measured. This result indicates the increased tip breakage risk in high-speed AFM measurements. To understand the mechanism of tip breakage, tip-sample interaction is modelled, simulated and experimentally verified. The results indicate that the tip-sample interaction force increases dramatically in measurement scenarios of steep surfaces.

A high speed X-Y nanopositioner with integrated optical motion sensing

High speed in-plane (X-Y) nanopositioners are of central importance in scanning probe microscopy for performing fast imaging and manipulation. Reducing the size of the nanopositioning stage improves the response speed of the positioner but also introduces challenges in integration of conventional motion sensors. This paper presents the design and development of a novel high speed flexure-guided, piezo-electrically actuated nanopositioner with integrated optical beam deflection-based motion sensing. The sensing strategy eliminates spatial constraints even for small stages. A simple lumped-parameter model is proposed for the nanopositioner. Subsequently, the model is used to design and fabricate the nanopositioner. The measurement system is integrated with the nanopositioning stage and is employed to characterize the quasi-static and dynamic response of the stage. Finally, the in-plane motion measurements are employed to control the stage when it is commanded to track both slow- and fast-varying position signals. In both cases, the use of control is shown to significantly improve the tracking accuracy.

Design and Experimental Research of a Rotary Micro-Actuator Based on a Shearing Piezoelectric Stack

The working principle of a rotating micro-actuator based on a piezoelectric stack was theoretically analyzed and experimentally verified. The actuator is compact in structure, and the key component is the shearing piezoelectric stack. The piezoelectric stack is used to drive the micro-rotor via an electromechanical transition, which produces high-speed rotation of the micro-rotor. We first established the dynamic model of the micro-actuator and numerically analyzed the motion of this model. The step displacement output was observed by simulation, and the step increment is quite large. For experimental verification, we fabricated the piezoelectric micro-actuator with a size of 12 mm × 10 mm × 8 mm and mass of 4.12 g and conducted a series of experiments. The results show qualitative agreement with the theoretical results; the maximum output speed of the micro-actuator is 5.86 × 10 5 μ rad/s, and the motion resolution is 0.64 μ rad, which is greater than that of most traditional piezoelectric actuators. The proposed micro-actuator offers superior performance in driving of selected small objects, such as in micro-/nano-processing and cell operation.

Fabrication, Experiments, and Analysis of an LBM Additive-Manufactured Flexure Parallel Mechanism

Additive manufacturing technology has advantages for realizing complex monolithic structures, providing huge potential for developing advanced flexure mechanisms for precision manipulation. However, the characteristics of flexure hinges fabricated by laser beam melting (LBM) additive manufacturing (AM) are currently little known. In this paper, the fabrication and characterization of a flexure parallel mechanism through the LBM process are reported for the first time to demonstrate the development of this technique. The geometrical accuracy of the additive-manufactured flexure mechanism was evaluated by three-dimensional scanning. The stiffness characteristics of the flexure mechanism were investigated through finite element analysis and experimental tests. The effective hinge thickness was determined based on the parameters study of the flexure parallel mechanism. The presented results highlight the promising outlook of LBM flexure parts for developing novel nanomanipulation platforms, while additional attention is required for material properties and manufacturing errors.

A fast scanning ion conductance microscopy imaging method using compressive sensing and low-discrepancy sequences

A scanning ion conductance microscope (SICM) is a multifunctional, high-resolution imaging technique whose non-contact nature makes it very suitable for imaging of biological samples such as living cells in a physiological environment. However, a drawback of hopping/backstep mode of SICM is its relatively slow imaging speed, which seriously restricts the study on the dynamic process of biological samples. This paper presents a new undersampled scanning method based on Compressed Sensing (CS-based scanning mode) theory to solve extended acquisition time issues in the hopping/backstep mode. Compressive sensing can break through the limit of the Nyquist sampling theorem and sample the original sparse/compressible signal at a rate lower than the Nyquist frequency. In the CS-based scanning mode, three sampling patterns, including the random sampling pattern and two kinds of sampling patterns produced by low-discrepancy sequences, were employed as the measurement locations to obtain the undersampled data with different undersampling ratios. Also TVAL3 (Total Variation Augmented Lagrangian ALternating-direction ALgorithm) was then utilized as a reconstruction algorithm to reconstruct the undersampled data. Compared with the nonuniform sampling points of random patterns at a low undersampling ratio, low-discrepancy sequences can produce a more uniform distribution point. Three types of samples with different complexity of topography were scanned by SICM using the conventional hopping/backstep mode and CS-based undersampled scanning mode. The comparisons of the imaging speed and quality with two scanning modes illustrate that the CS-based scanning mode can effectively speed up SICM imaging speed while not sacrificing the image quality. Also low-discrepancy sampling patterns can achieve a better reconstruction performance than that of the random sampling pattern under the same undersampling ratio.

Modelling and Analysis of Characteristics of a Piezoelectric-Actuated Micro-/Nano Compliant Platform Using Bond Graph Approach

The piezoelectric-actuated flexure-based compliant platform is commonly adopted in many fields of micro and nanotechnology. In this paper, bond graph modeling, and kinematic and dynamic characteristics of a piezoelectric-actuated micro-/nano compliant platform system are investigated. During modeling, the bond graph model of the piezoelectric actuator (PZT) is derived by considering both the electrical domain and the mechanical domain. Considering the compliances of flexure hinges and elastic linkages, as well as the input ends, the bond graph model for the bridge-type displacement amplification mechanism in the compliant platform is established by combining pseudo-rigid-body (PRB) model theory and elastic beam theory. Based on the interactions between the PZT subsystem and compliant platform subsystem, the kinematic performance of the proposed compliant platform system is evaluated through both computer simulations and experimental tests. Furthermore, the frequency responses, dynamic responses and load capacity of the compliant platform system are studied. This paper explores a new modeling method for a piezoelectric-actuated compliant platform system, which can provide an effective solution when analyzing the micro-/nano system.

Two-degrees-of-freedom piezo-driven fast steering mirror with cross-axis decoupling capability

Because mechanical cross coupling between its axes would lead to degradation of the scanning precision of a piezo-driven fast steering mirror (PFSM), a two-degrees-of-freedom (2-DoF) PFSM with a cross-axis decoupling capability, in which 2-DoF flexure hinges are used, is proposed in this work. The overall structure of the proposed PFSM is first introduced and then both static and dynamic models are established analytically; in addition, the decoupling mechanism is described in detail and the low dynamic cross coupling ratios that occur between the two DoFs are shown. Because of the decoupling property of the PFSM, the 2-DoF motion is treated as a combination of two independent one-degree-of-freedom (1-DoF) motions and two independent proportional-integral-derivative controllers are thus used separately in the control of the two DoFs. Based on this control strategy, experiments involving both 1-DoF trajectory tracking and 2-DoF trajectory tracking are implemented. The test results show that the proposed PFSM can achieve the tilt range of ±7 mrad for both axes with the low coupling ratios that are less than 2% (-34 dB), and the bandwidths of both axes are higher than 810 Hz; in addition, the maximal tracking full scale range errors for 1-DoF trajectory tracking and 2-DoF trajectory tracking are less than 0.2% and 1%, respectively, where the larger error of 2-DoF trajectory tracking is mainly caused by the remaining cross coupling between axes.

Modeling and design of a two-axis elliptical notch flexure hinge

As an important part of the joule balance system, the two-axis elliptical notch flexure hinge (TENFH) which typically consists of two single-axis elliptical notch flexure hinges was studied. First, a 6 degrees of freedom (6-DOF) compliance model was established based on the coordinate transformation method. In addition, the maximum stress of the TENFH was derived. The compliance and maximum stress model was verified using finite element analysis simulation. To decouple the attitude of the suspended coil system and reduce the offset between the centroid of the suspended coil mechanism and the mass comparator in the joule balance system, a new mechanical structure of TENFH was designed based on the compliance model and stress model proposed in this paper. The maximum rotation range is up to 10°, and the axial load is more than 5 kg, which meets the requirements of the system. The compliance model was also verified by deformation experimentation with the designed TENFH.

Feature Tracking for High Speed AFM Imaging of Biopolymers

The scanning speed of atomic force microscopes continues to advance with some current commercial microscopes achieving on the order of one frame per second and at least one reaching 10 frames per second. Despite the success of these instruments, even higher frame rates are needed with scan ranges larger than are currently achievable. Moreover, there is a significant installed base of slower instruments that would benefit from algorithmic approaches to increasing their frame rate without requiring significant hardware modifications. In this paper, we present an experimental demonstration of high speed scanning on an existing, non-high speed instrument, through the use of a feedback-based, feature-tracking algorithm that reduces imaging time by focusing on features of interest to reduce the total imaging area. Experiments on both circular and square gratings, as well as silicon steps and DNA strands show a reduction in imaging time by a factor of 3-12 over raster scanning, depending on the parameters chosen.

Fast Specimen Boundary Tracking and Local Imaging with Scanning Probe Microscopy

An efficient and adaptive boundary tracking method is developed to confine area of interest for high-efficiency local scanning. By using a boundary point determination criterion, the scanning tip is steered with a sinusoidal waveform while estimating azimuth angle and radius ratio of each boundary point to accurately track the boundary of targets. A local scan region and path are subsequently planned based on the prior knowledge of boundary tracking to reduce the scan time. Boundary tracking and local scanning methods have great potential not only for fast dimension measurement but also for sample surface topography and physical characterization, with only scanning region of interest. The performance of the proposed methods was verified by using the alternate current mode scanning ion-conductance microscopy, tapping, and PeakForce modulation atomic force microscopy. Experimental results of single/multitarget boundary tracking and local scanning of target structures with complex boundaries demonstrate the flexibility and validity of the proposed method.

A high bandwidth three-axis out-of-plane motion measurement system based on optical beam deflection

Multi-axis measurement of motion is indispensable for characterization of dynamic systems and control of motion stages. This paper presents an optical beam deflection-based measurement system to simultaneously measure three-axis out-of-plane motion of both micro- and macro-scale targets. Novel strategies are proposed to calibrate the sensitivities of the measurement system. Subsequently the measurement system is experimentally realized and calibrated. The system is employed to characterize coupled linear and angular motion of a piezo-actuated stage. The measured motion is shown to be in agreement with theoretical expectation. Next, the high bandwidth of the measurement system has been showcased by utilizing it to measure coupled two-axis transient motion of a Radio Frequency Micro-Electro-Mechanical System switch with a rise time of about 60 μs. Finally, the ability of the system to measure out-of-plane angular motion about the second axis has been demonstrated by measuring the deformation of a micro-cantilever beam.

Development of a multistage compliant mechanism with new boundary constraint

This paper presents a piezo-actuated compliant mechanism with a new boundary constraint to provide concurrent large workspace and high dynamic frequency for precision positioning or other flexible manipulation applications. A two-stage rhombus-type displacement amplifier with the "sliding-sliding" boundary constraint is presented to maximize the dynamic frequency while retaining a large output displacement. The vibration mode is also improved by the designed boundary constraint. A theoretical kinematic model of the compliant mechanism is established to optimize the geometric parameters, and a prototype is fabricated with a compact dimension of 60 mm × 60 mm × 12 mm. The experimental testing shows that the maximum stroke is approximately 0.6 mm and the output stiffness is 1.1 N/μm with the fundamental frequency of larger than 2.2 kHz. Lastly, the excellent performance of the presented compliant mechanism is compared with several mechanisms in the previous literature. As a conclusion, the presented boundary constraint strategy provides a new way to balance the trade-off between the frequency response and the stroke range widely existed in compliant mechanisms.

Atomic force microscopy capable of vibration isolation with low-stiffness Z-axis actuation

For high-resolution imaging without bulky external vibration isolation, this paper presents an atomic force microscope (AFM) capable of vibration isolation with its internal Z-axis (vertical) actuators moving the AFM probe. Lorentz actuators (voice coil actuators) are used for the Z-axis actuation, and flexures guiding the motion are designed to have a low stiffness between the mover and the base. The low stiffness enables a large Z-axis actuation of more than 700 µm and mechanically isolates the probe from floor vibrations at high frequencies. To reject the residual vibrations, the probe tracks the sample by using a displacement sensor for feedback control. Unlike conventional AFMs, the Z-axis actuation attains a closed-loop control bandwidth that is 35 times higher than the first mechanical resonant frequency. The closed-loop AFM system has robustness against the flexures' nonlinearity and uses the first resonance for better sample tracking. For further improvement, feedforward control with a vibration sensor is combined, and the resulting system rejects 98.4% of vibrations by turning on the controllers. The AFM system is demonstrated by successful AFM imaging in a vibrational environment.

Imaging pulsed laser deposition oxide growth by in situ atomic force microscopy

To visualize the topography of thin oxide films during growth, thereby enabling to study its growth behavior quasi real-time, we have designed and integrated an atomic force microscope (AFM) in a pulsed laser deposition (PLD) vacuum setup. The AFM scanner and PLD target are integrated in a single support frame, combined with a fast sample transfer method, such that in situ microscopy can be utilized after subsequent deposition pulses. The in situ microscope can be operated from room temperature up to 700 °C and at (process) pressures ranging from the vacuum base pressure of 10^-6 mbar up to 1 mbar, typical PLD conditions for the growth of oxide films. The performance of this instrument is demonstrated by resolving unit cell height surface steps and surface topography under typical oxide PLD growth conditions.

Micro-motion detection of the 3-DOF precision positioning stage based on iterative optimized template matching

This study presents a method for micro-motion detection of the three-degrees-of-freedom (3-DOF; x, y, θ_z) precision positioning stage (PPS) based on iterative optimized template matching (IOTM). In this method, a micro-vision system (MVS) is constructed and employed to capture magnified images of the measured PPS's surface with high quality. In addition, an efficient and accurate IOTM algorithm, which includes a pyramid hierarchical matching step for generating the initial guess and an iterative searching step for 3-DOF fine matching, is proposed to detect the micro-motion of the 3-DOF PPS. The simulation results show that the locating accuracy of the translation component (TC) and rotation component of this algorithm can respectively reach 0.01 pixels and 0.01 deg when the image quality is high and the initial guess is close to the real location. Measurement tests of a nano-PPS verify that the proposed method is practical and effective for 3-DOF micro-motion detection and the absolute accuracy of the TC of the MVS can easily reach the nanometer level.

Recent Advances on In Situ SEM Mechanical and Electrical Characterization of Low-Dimensional Nanomaterials

In the past decades, in situ scanning electron microscopy (SEM) has become a powerful technique for the experimental study of low-dimensional (1D/2D) nanomaterials, since it can provide unprecedented details for individual nanostructures upon mechanical and electrical stimulus and thus uncover the fundamental deformation and failure mechanisms for their device applications. In this overview, we summarized recent developments on in situ SEM-based mechanical and electrical characterization techniques including tensile, compression, bending, and electrical property probing on individual nanostructures, as well as the state-of-the-art electromechanical coupling analysis. In addition, the advantages and disadvantages of in situ SEM tests were also discussed with some possible solutions to address the challenges. Furthermore, critical challenges were also discussed for the development and design of robust in situ SEM characterization platform with higher resolution and wider range of samples. These experimental efforts have offered in-depth understanding on the mechanical and electrical properties of low-dimensional nanomaterial components and given guidelines for their further structural and functional applications.

Existing methods for improving the accuracy of digital-to-analog converters

The performance of digital-to-analog converters is principally limited by errors in the output voltage levels. Such errors are known as element mismatch and are quantified by the integral non-linearity. Element mismatch limits the achievable accuracy and resolution in high-precision applications as it causes gain and offset errors, as well as harmonic distortion. In this article, five existing methods for mitigating the effects of element mismatch are compared: physical level calibration, dynamic element matching, noise-shaping with digital calibration, large periodic high-frequency dithering, and large stochastic high-pass dithering. These methods are suitable for improving accuracy when using digital-to-analog converters that use multiple discrete output levels to reconstruct time-varying signals. The methods improve linearity and therefore reduce harmonic distortion and can be retrofitted to existing systems with minor hardware variations. The performance of each method is compared theoretically and confirmed by simulations and experiments. Experimental results demonstrate that three of the five methods provide significant improvements in the resolution and accuracy when applied to a general-purpose digital-to-analog converter. As such, these methods can directly improve performance in a wide range of applications including nanopositioning, metrology, and optics.

High-bandwidth and flexible tracking control for precision motion with application to a piezo nanopositioner

For precision motion, high-bandwidth and flexible tracking are the two important issues for significant performance improvement. Iterative learning control (ILC) is an effective feedforward control method only for systems that operate strictly repetitively. Although projection ILC can track varying references, the performance is still limited by the fixed-bandwidth Q-filter, especially for triangular waves tracking commonly used in a piezo nanopositioner. In this paper, a wavelet transform-based linear time-varying (LTV) Q-filter design for projection ILC is proposed to compensate high-frequency errors and improve the ability to tracking varying references simultaneously. The LVT Q-filter is designed based on the modulus maximum of wavelet detail coefficients calculated by wavelet transform to determine the high-frequency locations of each iteration with the advantages of avoiding cross-terms and segmenting manually. The proposed approach was verified on a piezo nanopositioner. Experimental results indicate that the proposed approach can locate the high-frequency regions accurately and achieve the best performance under varying references compared with traditional frequency-domain and projection ILC with a fixed-bandwidth Q-filter, which validates that through implementing the LTV filter on projection ILC, high-bandwidth and flexible tracking can be achieved simultaneously by the proposed approach.

A Flexure-Guided Piezo Drill for Penetrating the Zona Pellucida of Mammalian Oocytes

Mammalian oocytes such as mouse oocytes have a highly elastic outer membrane, zona pellucida (ZP) that cannot be penetrated without significantly deforming the oocyte, even with a sharp micropipette. Piezo drill devices leverage lateral and axial vibration of the micropipette to accomplish ZP penetration with greatly reduced oocyte deformation. However, existing piezo drills all rely on a large lateral micropipette vibration amplitude ( 20 ) and a small axial vibration amplitude (0.1 ). The very large lateral vibration amplitude has been deemed to be necessary for ZP penetration although it also induces larger oocyte deformation and more oocyte damage. This paper reports on a new piezo drill device that uses a flexure guidance mechanism and a systematically designed pulse train with an appropriate base frequency. Both simulation and experimental results demonstrate that a small lateral vibration amplitude (e.g., 2 ) and an axial vibration amplitude as large as 1.2 were achieved. Besides achieving 100% effectiveness in the penetration of mouse oocytes (n = 45), the new piezo device during ZP penetration induced a small oocyte deformation of 3.4 versus larger than 10 using existing piezo drill devices.

A novel sensor for two-degree-of-freedom motion measurement of linear nanopositioning stage using knife edge displacement sensing technique

This paper presents a novel method for measuring two-degree-of-freedom (DOF) motion of flexure-based nanopositioning systems based on optical knife-edge sensing (OKES) technology, which utilizes the interference of two superimposed waves: a geometrical wave from the primary source of light and a boundary diffraction wave from the secondary source. This technique allows for two-DOF motion measurement of the linear and pitch motions of nanopositioning systems. Two capacitive sensors (CSs) are used for a baseline comparison with the proposed sensor by simultaneously measuring the motions of the nanopositioning system. The experimental results show that the proposed sensor closely agrees with the fundamental linear motion of the CS. However, the two-DOF OKES technology was shown to be approximately three times more sensitive to the pitch motion than the CS. The discrepancy in the two sensor outputs is discussed in terms of measuring principle, linearity, bandwidth, control effectiveness, and resolution.

Design and Experimental Research of a Novel Stick-Slip Type Piezoelectric Actuator

A linear piezoelectric actuator based on the stick-slip principle is presented and tested in this paper. With the help of changeable vertical preload force flexure hinge, the designed linear actuator can achieve both large travel stick-slip motion and high-resolution stepping displacement. The developed actuator mainly consists of a bridge-type flexure hinge mechanism, a compound parallelogram flexure hinge mechanism, and two piezoelectric stacks. The mechanical structure and motion principle of the linear actuator were illustrated, and the finite element method (FEM) is adopted. An optimal parametric study of the flexure hinge is performed by a finite element analysis-based response surface methodology. In order to investigate the actuator’s working performance, a prototype was manufactured and a series of experiments were carried out. The results indicate that the maximum motion speed is about 3.27 mm/s and the minimum stepping displacement is 0.29 μm. Finally, a vibration test was carried out to obtain the first natural frequency of the actuator, and an in situ observation was conducted to investigate actuator’s stick-slip working condition. The experimental results confirm the feasibility of the proposed actuator, and the motion speed and displacement are both improved compared with the traditional stick-slip motion actuator.

Piezoelectric Actuated Phase Shifter Based on External Laser Interferometer: Design, Control and Experimental Validation

To improve the phase-shifting accuracy, this paper presents a novel integrated framework for design, control and experimental validation of the piezoelectric actuated phase shifter with a trade-off between accuracy and cost. The piezoelectric actuators with built-in sensors are adopted to drive the double parallel four-bar linkage flexure hinge-based mechanisms. Three mechanisms form the tripod structure of the assembled phase shifter. Then, a semi-closed loop controller with inner feedback and outer feedforward loops via the external laser interferometer is developed for accurate positioning of the phase shifter. Finally, experiments related with travel range, step response, linearity and repeatability are carried out. The linearity error is 0.21% and the repeatability error of 10 μm displacement is 3 nm. The results clearly demonstrate the good performance of the developed phase shifter and the feasibility of the proposed integrated framework.