The fabrication of diversiform nanostructure forests based on residue nanomasks synthesized by oxygen plasma removal of photoresist

Out-of-Plane Electronics on Flexible Substrates Using Inorganic Nanowires Grown on High-Aspect-Ratio Printed Gold Micropillars

Out-of-plane or 3D electronics on flexible substrates are an interesting direction that can enable novel solutions such as efficient bioelectricity generation and artificial retina. However, the development of devices with such architectures is limited by the lack of suitable fabrication techniques. Additive manufacturing (AM) can but often fail to provide high-resolution, sub-micrometer 3D architectures. Herein, the optimization of a drop-on-demand (DoD), high-resolution electrohydrodynamic (EHD)-based jet printing method for generating 3D gold (Au) micropillars is reported. Libraries of Au micropillar electrode arrays (MEAs) reaching a maximum height of 196 µm and a maximum aspect ratio of 52 are printed. Further, by combining AM with the hydrothermal growth method, a seedless synthesis of zinc oxide (ZnO) nanowires (NWs) on the printed Au MEAs is demonstrated. The developed hybrid approach leads to hierarchical light-sensitive NW-connected networks exhibiting favorable ultraviolet (UV) sensing as demonstrated via fabricating flexible photodetectors (PDs). The 3D PDs exhibit an excellent omnidirectional light-absorption ability and thus, maintain high photocurrents over wide light incidence angles (±90°). Lastly, the PDs are tested under both concave and convex bending at 40 mm, showing excellent mechanical flexibility.

A Self-Driven Microfluidic Chip for Ricin and Abrin Detection

Ricin and abrin are phytotoxins that can be easily used as biowarfare and bioterrorism agents. Therefore, developing a rapid detection method for both toxins is of great significance in the field of biosecurity. In this study, a novel nanoforest silicon microstructure was prepared by the micro-electro-mechanical systems (MEMS) technique; particularly, a novel microfluidic sensor chip with a capillary self-driven function and large surface area was designed. Through binding with the double antibodies sandwich immunoassay, the proposed sensor chip is confirmed to be a candidate for sensing the aforementioned toxins. Compared with conventional immunochromatographic test strips, the proposed sensor demonstrates significantly enhanced sensitivity (≤10 pg/mL for both toxins) and high specificity against the interference derived from juice or milk, while maintaining good linearity in the range of 10–6250 pg/mL. Owing to the silicon nanoforest microstructure and improved homogeneity of the color signal, short detection time (within 15 min) is evidenced for the sensor chip, which would be helpful for the rapid tracking of ricin and abrin for the field of biosecurity.

Design and Fabrication Challenges of a Highly Sensitive Thermoelectric-Based Hydrogen Gas Sensor

This paper presents a highly sensitive thermoelectric sensor for catalytic combustible gas detection. The sensor contains two low-stress (+176 MPa) membranes of a combination of stoichiometric and silicon-rich silicon nitride that makes them chemically and thermally stable. The complete fabrication process with details, especially the challenges and their solutions, is discussed elaborately. In addition, a comprehensive evaluation of design criteria and a comparative analysis of different sensor designs are performed with respect to the homogeneity of the temperature field on the membrane, power consumption, and thermal sensitivity. Evaluating the respective tradeoffs, the best design is selected. The selected sensor has a linear thermal characteristic with a sensitivity of 6.54 mV/K. Additionally, the temperature profile on the membrane is quite homogeneous (20% root mean standard deviation), which is important for the stability of the catalytic layer. Most importantly, the sensor with a ligand (p-Phenylenediamine (PDA))-linked platinum nanoparticles catalyst shows exceptionally high response to hydrogen gas, i.e., 752 mV at 2% concentration.

SF₆ Optimized O₂ Plasma Etching of Parylene C

Parylene C is a widely used polymer material in microfabrication because of its excellent properties such as chemical inertness, biocompatibility and flexibility. It has been commonly adopted as a structural material for a variety of microfluidics and bio-MEMS (micro-electro-mechanical system) applications. However, it is still difficult to achieve a controllable Parylene C pattern, especially on film thicker than a couple of micrometers. Here, we proposed an SF₆ optimized O₂ plasma etching (SOOE) of Parylene C, with titanium as the etching mask. Without the SF₆, noticeable nanoforest residuals were found on the O₂ plasma etched Parylene C film, which was supposed to arise from the micro-masking effect of the sputtered titanium metal mask. By introducing a 5-sccm SF₆ flow, the residuals were effectively removed during the O₂ plasma etching. This optimized etching strategy achieved a 10 μm-thick Parylene C etching with the feature size down to 2 μm. The advanced SOOE recipes will further facilitate the controllable fabrication of Parylene C microstructures for broader applications.

Flexible microelectrode array for retinal prosthesis

fMEA (flexible microelectrode array) is one of the key implantable components for neural stimulating and recording. For its specific implanted environment, it should be designed and fabricated to meet following requirements such as biocompatibility, high-resolution, flexible and low impedance to ensure safety and long-term effective stimulation. Here we proposed a high resolution (1025-channel) fMEA for artificial retina. The adhesion between its substrate polyimide (PI) and metal was enhanced by using plasma treatment. The stimulation spots were electroplated with Pt-gray, which significantly reduced the electrochemical impedance from 110 kμ to 16 kμ at 1 kHz, and also provided larger charge storage capacity up to 83.2 mC/cm². It shows a promising application for neural stimulation and recording.

State of the art of nanoforest structures and their applications

Forest-like nanostructures, their syntheses, properties, and applications are reviewed.

Top-down fabrication of vertical silicon nano-rings based on Poisson diffraction

Vertical Si nano-rings with a uniform thickness of about 100 nm have been fabricated by conventional optical photolithography with a low cost based on Poisson diffraction. Moreover, the roughness of the Si nano-rings can be effectively reduced by sacrificial oxidation. In order to increase the density of the nano-rings, coaxial twin Si nano-rings have been fabricated by the Poisson diffraction method combined with the spacer technique. The thickness of both the inner and outer Si nano-rings is about 60 nm, and the gap between the twin nano-rings is about 100 nm.

Plasma-assisted approaches in inorganic nanostructure fabrication

Plasma is a unique medium for chemical reactions and materials preparations, which also finds its application in the current tide of nanostructure fabrication. Although plasma-assisted approaches have been long used in thin-film deposition and the top-down scheme of micro-/nanofabrication, fabrication of zero- and one-dimensional inorganic nanostructures through the bottom-up scheme is a relatively new focus of plasma application. In this article, recent plasma-assisted techniques in inorganic zero- and one-dimensional nanostructure fabrication are reviewed, which includes four categories of plasma-assisted approaches: plasma-enhanced chemical vapor deposition, thermal plasma sintering with liquid/solid feeding, thermal plasma evaporation and condensation, and plasma treatment of solids. The special effects and the advantages of plasmas on nanostructure fabrication are illustrated with examples, emphasizing on the understandings and ideas for controlling the growth, structure, and properties during plasma-assisted fabrications. This Review provides insight into the utilization of the special properties of plasmas in nanostructure fabrication.