Permanent reduction of dissipation in nanomechanical Si resonators by chemical surface protection

Ultrahigh-quality-factor micro- and nanomechanical resonators using dissipation dilution

Mechanical resonators are widely used in sensors, transducers and optomechanical systems, where mechanical dissipation sets the ultimate limit to performance. Over the past 15 years, the quality factors in strained mechanical resonators have increased by four orders of magnitude, surpassing the previous state of the art achieved in bulk crystalline resonators at room temperature and liquid helium temperatures. In this Review, we describe how these advances were made by leveraging 'dissipation dilution'-where dissipation is reduced through a combination of static tensile strain and geometric nonlinearity in dynamic strain. We then review the state of the art in strained nanomechanical resonators and discuss the potential for even higher quality factors in crystalline materials. Finally, we detail current and future applications of dissipation-diluted mechanical resonators.

Spatial Correlation between Fluctuating and Static Fields over Metal and Dielectric Substrates

We report spatially resolved measurements of static and fluctuating electric fields over conductive (Au) and nonconductive (SiO_{2}) surfaces. Using an ultrasensitive "nanoladder" cantilever probe to scan over these surfaces at distances of a few tens of nanometers, we record changes in the probe resonance frequency and damping that we associate with static and fluctuating fields, respectively. We find static and fluctuating fields to be spatially correlated. Furthermore, the fields are of similar magnitude for the two materials. We quantitatively describe the observed effects on the basis of trapped surface charges and dielectric fluctuations in an adsorbate layer. Our results are consistent with organic adsorbates significantly contributing to surface dissipation that affects nanomechanical sensors, trapped ions, superconducting resonators, and color centers in diamond.

Recent Advances in Single Crystal Diamond Device Fabrication for Photonics, Sensing and Nanomechanics

In the last two decades, the use of diamond as a material for applications in nanophotonics, optomechanics, quantum information, and sensors tremendously increased due to its outstanding mechanical properties, wide optical transparency, and biocompatibility. This has been possible owing to advances in methods for growth of high-quality single crystal diamond (SCD), nanofabrication methods and controlled incorporation of optically active point defects (e.g., nitrogen vacancy centers) in SCD. This paper reviews the recent advances in SCD nano-structuring methods for realization of micro- and nano-structures. Novel fabrication methods are discussed and the different nano-structures realized for a wide range of applications are summarized. Moreover, the methods for color center incorporation in SCD and surface treatment methods to enhance their properties are described. Challenges in the upscaling of SCD nano-structure fabrication, their commercial applications and future prospects are discussed.

Curved Structure of Si by Improving Etching Direction Controllability in Magnetically Guided Metal-Assisted Chemical Etching

Metal-assisted chemical etching (MACE) is widely used to fabricate micro-/nano-structured Si owing to its simplicity and cost-effectiveness. The technique of magnetically guided MACE, involving MACE with a tri-layer metal catalyst, was developed to improve etching speed as well as to adjust the etching direction using an external magnetic field. However, the controllability of the etching direction diminishes with an increase in the etching dimension, owing to the corrosion of Fe due to the etching solution; this impedes the wider application of this approach for the fabrication of complex micro Si structures. In this study, we modified a tri-layer metal catalyst (Au/Fe/Au), wherein the Fe layer was encapsulated to improve direction controllability; this improved controllability was achieved by protecting Fe against the corrosion caused by the etching solution. We demonstrated curved Si microgroove arrays via magnetically guided MACE with Fe encapsulated in the tri-layer catalyst. Furthermore, the curvature in the curved Si microarrays could be modulated via an external magnetic field, indicating that direction controllability could be maintained even for the magnetically guided MACE of bulk Si. The proposed fabrication method developed for producing curved Si microgroove arrays can be applied to electronic devices and micro-electromechanical systems.

Vapor-Phase Passivation of Chlorine-Terminated Ge(100) Using Self-Assembled Monolayers of Hexanethiol

Continued scaling of electronic devices shows the need to incorporate high mobility alternatives to silicon, the cornerstone of the semiconductor industry, into modern field effect transistor (FET) devices. Germanium is well-poised to serve as the channel material in FET devices as it boasts an electron and hole mobility more than twice and four times that of Si, respectively. However, its unstable native oxide makes its passivation a crucial step toward its potential integration into future FETs. The International Roadmap for Devices and Systems (IRDS) predicts continued aggressive scaling not only of the device size but also of the pitch in nanowire arrays. The development of a vapor-phase chemical passivation technique will be required to prevent the collapse of these structures that can occur because of the surface tension and capillary forces that are experienced when tight-pitched nanowire arrays are processed via liquid-phase chemistry. Reported here is a vapor-phase process using hexanethiol for the passivation of planar Ge(100) substrates. Results benchmarking it against its well-established liquid-phase equivalent are also presented. X-ray photoelectron spectroscopy was used to monitor the effectiveness of the developed vapor-phase protocol, where the presence of oxide was monitored at 0, 24, and 168 h. Water contact angle measurements compliment these results by demonstrating an increase in hydrophobicity of the passivated substrates. Atomic force microscopy monitored the surface topology before and after processing to ensure the process does not cause roughening of the surface, which is critical to demonstrate suitability for nanostructures. It is shown that the 200 min vapor-phase passivation procedure generates stable, passivated surfaces with less roughness than the liquid-phase counterpart.

Nanoladder Cantilevers Made from Diamond and Silicon

We present a "nanoladder" geometry that minimizes the mechanical dissipation of ultrasensitive cantilevers. A nanoladder cantilever consists of a lithographically patterned scaffold of rails and rungs with feature size ∼100 nm. Compared to a rectangular beam of the same dimensions, the mass and spring constant of a nanoladder are each reduced by roughly 2 orders of magnitude. We demonstrate a low force noise of 158_-42⁺⁶² zN and 190_-33⁺⁴² zN in a 1 Hz bandwidth for devices made from silicon and diamond, respectively, measured at temperatures between 100-150 mK. As opposed to bottom-up mechanical resonators like nanowires or nanotubes, nanoladder cantilevers can be batch-fabricated using standard lithography, which is a critical factor for applications in scanning force microscopy.

Efficient anchor loss suppression in coupled near-field optomechanical resonators

Elastic dissipation through radiation towards the substrate is a major loss channel in micro- and nanomechanical resonators. Engineering the coupling of these resonators with optical cavities further complicates and constrains the design of low-loss optomechanical devices. In this work we rely on the coherent cancellation of mechanical radiation to demonstrate material and surface absorption limited silicon near-field optomechanical resonators oscillating at tens of MHz. The effectiveness of our dissipation suppression scheme is investigated at room and cryogenic temperatures. While at room temperature we can reach a maximum quality factor of 7.61k (fQ-product of the order of 10¹¹ Hz), at 22 K the quality factor increases to 37k, resulting in a fQ-product of 2 × 10¹² Hz.

Fluorescence Sensing with Cellulose-Based Materials

Cellulose-based materials functionalized with fluorescence sensors are highly topical and are employed in many areas of functional materials, including the sensing of heavy-metal ions and anions as well as being widely used as chemical sensors and tools for environmental applications. In this Review, we cover recent progress in the development of cellulose-based fluorescence sensors as parts of membranes and nanoscale materials for the detection of biological analytes. We believe that this Review will be of interest to chemists, chemical engineers, and biochemists in the sensor community as well as researchers working with biological material systems.

The Mechanical Properties of Nanowires

Applications of nanowires into future generation nanodevices require a complete understanding of the mechanical properties of the nanowires. A great research effort has been made in the past two decades to understand the deformation physics and mechanical behaviors of nanowires, and to interpret the discrepancies between experimental measurements and theoretical predictions. This review focused on the characterization and understanding of the mechanical properties of nanowires, including elasticity, plasticity, anelasticity and strength. As the results from the previous literature in this area appear inconsistent, a critical evaluation of the characterization techniques and methodologies were presented. In particular, the size effects of nanowires on the mechanical properties and their deformation mechanisms were discussed.

Magnetometry of Individual Polycrystalline Ferromagnetic Nanowires

Ferromagnetic nanowires are finding use as untethered sensors and actuators for probing micro- and nanoscale biophysical phenomena, such as for localized sensing and application of forces and torques on biological samples, for tissue heating through magnetic hyperthermia, and for microrheology. Quantifying the magnetic properties of individual isolated nanowires is crucial for such applications. Dynamic cantilever magnetometry is used to measure the magnetic properties of individual sub-500 nm diameter polycrystalline nanowires of Ni and Ni₈₀ Co₂₀ fabricated by template-assisted electrochemical deposition. The values are compared with bulk, ensemble measurements when the nanowires are still embedded within their growth matrix. It is found that single-particle and ensemble measurements of nanowires yield significantly different results that reflect inter-nanowire interactions and chemical modifications of the sample during the release process from the growth matrix. The results highlight the importance of performing single-particle characterization for objects that will be used as individual magnetic nanoactuators or nanosensors in biomedical applications.

Surface Chemical Tuning of Phonon and Electron Transport in Free-Standing Silicon Nanowire Arrays

We report electronic and phononic transport measurements of monocrystalline batch-fabricated silicon nanowire (SiNW) arrays functionalized with different surface chemistries. We find that hydrogen-terminated SiNWs prepared by vapor HF etching of native-oxide-covered devices show increased electrical conductivity but decreased thermal conductivity. We used the kinetic Monte Carlo method to solve the Boltzmann transport equation and also numerically examine the effect of phonon boundary scattering. Surface transfer doping of the SiNWs by cobaltocene or decamethylcobaltocene drastically improves the electrical conductivity by 2 to 4 orders of magnitude without affecting the thermal conductivity. The results showcase surface chemical control of nanomaterials as a potent pathway that can complement device miniaturization efforts in the quest for more efficient thermoelectric materials and devices.

Ultrasensitive mechanical detection of magnetic moment using a commercial disk drive write head

Sensitive detection of weak magnetic moments is an essential capability in many areas of nanoscale science and technology, including nanomagnetism, quantum readout of spins and nanoscale magnetic resonance imaging. Here we show that the write head of a commercial hard drive may enable significant advances in nanoscale spin detection. By approaching a sharp diamond tip to within 5 nm from a write pole and measuring the induced diamagnetic moment with a nanomechanical force transducer, we demonstrate a spin sensitivity of 0.032 μB Hz(-1/2), equivalent to 21 proton magnetic moments. The high sensitivity is enabled in part by the pole's strong magnetic gradient of up to 28 × 10(6) T m(-1) and in part by the absence of non-contact friction due to the extremely flat writer surface. In addition, we demonstrate quantitative imaging of the pole field with ∼10 nm spatial resolution. We foresee diverse applications for write heads in experimental condensed matter physics, especially in spintronics, ultrafast spin manipulation and mesoscopic physics.

Exclusively Gas-Phase Passivation of Native Oxide-Free Silicon(100) and Silicon(111) Surfaces

Reactions in the gas phase are of primary technological importance for applications in nano- and microfabrication technology and in the semiconductor industry. We present exclusively gas-phase protocols to chemically passivate oxide-free Si(111) and Si(100) surfaces with short-chain alkynes. The resulting surfaces showed equal or better oxidation resistance than most existing liquid-phase-derived surfaces and rivaled the outstanding stability of a full-coverage Si(111)-propenyl surface.1,2 The most stable surface (Si(111)-ethenyl) grew one-fifth of a monolayer of oxide (0.04 nm) after 1 month of air exposure. We monitored the regrowth of oxides on passivated Si(111) and Si(100) surfaces by X-ray photoelectron spectroscopy (XPS) and observed a significant crystal-orientation dependence of initial rates when total oxide thickness was below approximately one monolayer (0.2 nm). This difference was correlated with the desorption kinetics of residual surface Si-F bonds formed during HF treatment. We discuss applications of the technology and suggest future directions for process optimization.

Single-Crystal Diamond Nanowire Tips for Ultrasensitive Force Microscopy

We report the fabrication, integration, and assessment of sharp diamond tips for ultrasensitive force microscopy experiments. Two types of tips, corresponding to the upper and lower halves of a diamond nanowire, were fabricated by top-down plasma etching from a single-crystalline substrate. The lower, surface-attached halves can be directly integrated into lithographically defined nanostructures, like cantilevers. The upper, detachable halves result in diamond nanowires with a tunable diameter (50-500 nm) and lengths of a few microns. Tip radii were around 10 nm and tip apex angles around 15°. We demonstrate the integration of diamond nanowires for use as scanning tips onto ultrasensitive pendulum-style silicon cantilevers. We find the noncontact friction and frequency jitter to be exceptionally low, with no degradation in the intrinsic mechanical quality factor (Q ≈ 130,000) down to tip-to-surface distances of about 10 nm. Our results are an encouraging step toward further improvement of the sensitivity and resolution of force-detected magnetic resonance imaging.