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Su GY, You MC, Chuang KW, Wu MH, Hsieh CH, Lin CY, Yang CY, Anbalagan AK, Lee CH. Investigating Anisotropic Magnetoresistance in Epitaxially Strained CoFe Thin Films on a Flexible Mica. NANOMATERIALS (BASEL, SWITZERLAND) 2023; 13:3154. [PMID: 38133051 PMCID: PMC10745607 DOI: 10.3390/nano13243154] [Citation(s) in RCA: 0] [Impact Index Per Article: 0] [Reference Citation Analysis] [Abstract] [Key Words] [Grants] [Track Full Text] [Subscribe] [Scholar Register] [Received: 11/22/2023] [Revised: 12/14/2023] [Accepted: 12/14/2023] [Indexed: 12/23/2023]
Abstract
This study investigates the crystal structure, epitaxial relation, and magnetic properties in CoFe thin films deposited on a flexible mica substrate. The epitaxial growth of CoFe thin films was successfully achieved by DC magnetron sputtering, forming three CoFe(002) domains exhibiting four-fold symmetry on the mica substrate. A notable achievement of this work was the attainment of the highest anisotropic magnetoresistance (AMR) value reported to date on a flexible substrate. Additionally, it was observed that the magnetic characteristics of the CoFe films on the flexible mica substrate display reversibility upon strain release. More importantly, the AMR effect of epitaxial CoFe films on flexible mica shows lesser dependence on the crystalline orientation and remains the same under different bending states. These findings demonstrate the potential of utilizing CoFe films on flexible substrates to develop wearable magnetoresistance sensors with diverse applications.
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Affiliation(s)
- Guang-Yang Su
- Department of Engineering and System Science, National Tsing Hua University, Hsinchu 30013, Taiwan; (G.-Y.S.); (M.-C.Y.); (M.-H.W.)
| | - Min-Chang You
- Department of Engineering and System Science, National Tsing Hua University, Hsinchu 30013, Taiwan; (G.-Y.S.); (M.-C.Y.); (M.-H.W.)
| | - Kai-Wei Chuang
- Institute of Nuclear Engineering and Science, National Tsing Hua University, Hsinchu 30013, Taiwan;
| | - Ming-Hsuan Wu
- Department of Engineering and System Science, National Tsing Hua University, Hsinchu 30013, Taiwan; (G.-Y.S.); (M.-C.Y.); (M.-H.W.)
| | - Cheng-Hsun Hsieh
- Department of Materials Science and Engineering, National Yang Ming Chiao Tung University, Hsinchu 30013, Taiwan; (C.-H.H.); (C.-Y.Y.)
| | - Chun-Yen Lin
- National Synchrotron Radiation Research Center, Hsinchu 30076, Taiwan;
| | - Chao-Yao Yang
- Department of Materials Science and Engineering, National Yang Ming Chiao Tung University, Hsinchu 30013, Taiwan; (C.-H.H.); (C.-Y.Y.)
| | - Aswin kumar Anbalagan
- Department of Engineering and System Science, National Tsing Hua University, Hsinchu 30013, Taiwan; (G.-Y.S.); (M.-C.Y.); (M.-H.W.)
| | - Chih-Hao Lee
- Department of Engineering and System Science, National Tsing Hua University, Hsinchu 30013, Taiwan; (G.-Y.S.); (M.-C.Y.); (M.-H.W.)
- Institute of Nuclear Engineering and Science, National Tsing Hua University, Hsinchu 30013, Taiwan;
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Liu M, Wang Z, Meng Z, Sun X, Huang Y, Guo Y, Yang Z. Giant Magnetoimpedance Effect of Multilayered Thin Film Meanders Formed on Flexible Substrates. MICROMACHINES 2023; 14:mi14051002. [PMID: 37241625 DOI: 10.3390/mi14051002] [Citation(s) in RCA: 0] [Impact Index Per Article: 0] [Reference Citation Analysis] [Abstract] [Key Words] [Grants] [Track Full Text] [Subscribe] [Scholar Register] [Received: 03/27/2023] [Revised: 04/27/2023] [Accepted: 04/27/2023] [Indexed: 05/28/2023]
Abstract
The giant magnetoimpedance effect of multilayered thin films under stress has great application prospects in magnetic sensing, but related studies are rarely reported. Therefore, the giant magnetoimpedance effects in multilayered thin film meanders under different stresses were thoroughly investigated. Firstly, multilayered FeNi/Cu/FeNi thin film meanders with the same thickness were manufactured on polyimide (PI) and polyester (PET) substrates by DC magnetron sputtering and MEMS technology. The characterization of meanders was analyzed by SEM, AFM, XRD, and VSM. The results show that multilayered thin film meanders on flexible substrates also have the advantages of good density, high crystallinity, and excellent soft magnetic properties. Then, we observed the giant magnetoimpedance effect under tensile and compressive stresses. The results show that the application of longitudinal compressive stress increases the transverse anisotropy and enhances the GMI effect of multilayered thin film meanders, while the application of longitudinal tensile stress yields the opposite result. The results provide novel solutions for the fabrication of more stable and flexible giant magnetoimpedance sensors, as well as for the development of stress sensors.
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Affiliation(s)
- Mengyu Liu
- School of Electronic and Information Engineering/School of Integrated Circuits, Guangxi Normal University, Guilin 541004, China
- Key Laboratory of Integrated Circuits and Microsystems, Education Department of Guangxi Zhuang Autonomous Region, Guangxi Normal University, Guilin 541004, China
- Guangxi Key Laboratory of Brain-Inspired Computing and Intelligent Chips, School of Electronic and Information Engineering, Guangxi Normal University, Guilin 541004, China
| | - Zhenbao Wang
- School of Electronic and Information Engineering/School of Integrated Circuits, Guangxi Normal University, Guilin 541004, China
- Key Laboratory of Integrated Circuits and Microsystems, Education Department of Guangxi Zhuang Autonomous Region, Guangxi Normal University, Guilin 541004, China
- Guangxi Key Laboratory of Brain-Inspired Computing and Intelligent Chips, School of Electronic and Information Engineering, Guangxi Normal University, Guilin 541004, China
| | - Ziqin Meng
- School of Electronic and Information Engineering/School of Integrated Circuits, Guangxi Normal University, Guilin 541004, China
- Key Laboratory of Integrated Circuits and Microsystems, Education Department of Guangxi Zhuang Autonomous Region, Guangxi Normal University, Guilin 541004, China
- Guangxi Key Laboratory of Brain-Inspired Computing and Intelligent Chips, School of Electronic and Information Engineering, Guangxi Normal University, Guilin 541004, China
| | - Xuecheng Sun
- Microelectronic Research & Development Center, School of Mechatronics Engineering and Automation, Shanghai University, Shanghai 200444, China
| | - Yong Huang
- Xidian-Wuhu Research Institute, Wuhu 241000, China
| | - Yongbin Guo
- Key Laboratory of UWB & THz of Shandong Academy of Sciences, Institute of Automation, Qilu University of Technology, Jinan 250014, China
| | - Zhen Yang
- School of Electronic and Information Engineering/School of Integrated Circuits, Guangxi Normal University, Guilin 541004, China
- Key Laboratory of Integrated Circuits and Microsystems, Education Department of Guangxi Zhuang Autonomous Region, Guangxi Normal University, Guilin 541004, China
- Guangxi Key Laboratory of Brain-Inspired Computing and Intelligent Chips, School of Electronic and Information Engineering, Guangxi Normal University, Guilin 541004, China
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Magnetic properties of FeGa/Kapton for flexible electronics. Sci Rep 2022; 12:17503. [PMID: 36261483 PMCID: PMC9582224 DOI: 10.1038/s41598-022-21589-3] [Citation(s) in RCA: 0] [Impact Index Per Article: 0] [Reference Citation Analysis] [Abstract] [Track Full Text] [Download PDF] [Figures] [Journal Information] [Subscribe] [Scholar Register] [Received: 04/05/2022] [Accepted: 09/29/2022] [Indexed: 11/30/2022] Open
Abstract
Flexible materials have brought up a new era of application-based research in stretchable electronics and wearable devices in the last decade. Tuning of magnetic properties by changing the curvature of devices has significant impact in the new generation of sensor-based technologies. In this work, magnetostrictive FeGa thin films have been deposited on a flexible Kapton sheet to exploit the magneto-elastic coupling effect and modify the magnetic properties of the sample. The FeGa alloy has high magnetostriction constant and high tensile strength making its properties susceptible to external stress. Tensile or compressive strain generated by the convex or concave states influence the uniaxial magnetic anisotropy of the system. Low temperature measurements show a hard magnetic behavior and the presence of exchange-bias effect after field cooling to 2 K. The results obtained in this study prove essential for the development of flexible electronics.
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