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Heo H, Shin Y, Son J, Ryu S, Cho K, Kim S. Gate-bias stability of triple-gated feedback field-effect transistors with silicon nanosheet channels. NANOTECHNOLOGY 2024; 35:275203. [PMID: 38579689 DOI: 10.1088/1361-6528/ad3b04] [Citation(s) in RCA: 0] [Impact Index Per Article: 0] [Reference Citation Analysis] [Abstract] [Key Words] [Track Full Text] [Subscribe] [Scholar Register] [Received: 12/29/2023] [Accepted: 04/05/2024] [Indexed: 04/07/2024]
Abstract
In this study, we investigate the gate-bias stability of triple-gated feedback field-effect transistors (FBFETs) with Si nanosheet channels. The subthreshold swing (SS) of FBFETs increases from 0.3 mV dec-1to 60 and 80 mV dec-1inp- andn-channel modes, respectively, when a positive bias stress (PBS) is applied for 1000 s. In contrast, the SS value does not change even after a negative bias stress (NBS) is applied for 1000 s. The difference in the switching characteristics under PBS and NBS is attributed to the ability of the interface traps to readily gain electrons from the inversion layer. The switching characteristics deteriorated by PBS are completely recovered after annealing at 300 °C for 10 min, and the characteristics remain stable even after PBS is applied again for 1000 s.
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Affiliation(s)
- Hyojoo Heo
- Department of Electrical Engineering, Korea University, 145 Anam-ro, Seongbuk-gu, Seoul 02841, Republic of Korea
| | - Yunwoo Shin
- Department of Electrical Engineering, Korea University, 145 Anam-ro, Seongbuk-gu, Seoul 02841, Republic of Korea
| | - Jaemin Son
- Department of Electrical Engineering, Korea University, 145 Anam-ro, Seongbuk-gu, Seoul 02841, Republic of Korea
| | - Seungho Ryu
- Department of Semiconductor System Engineering, Korea University, 145 Anam-ro, Seongbuk-gu, Seoul 02841, Republic of Korea
| | - Kyoungah Cho
- Department of Electrical Engineering, Korea University, 145 Anam-ro, Seongbuk-gu, Seoul 02841, Republic of Korea
| | - Sangsig Kim
- Department of Electrical Engineering, Korea University, 145 Anam-ro, Seongbuk-gu, Seoul 02841, Republic of Korea
- Department of Semiconductor System Engineering, Korea University, 145 Anam-ro, Seongbuk-gu, Seoul 02841, Republic of Korea
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Huang W, Wu J, Li W, Chen G, Chu C, Li C, Zhu Y, Yang H, Chao Y. Fabrication of Silicon Nanowires by Metal-Assisted Chemical Etching Combined with Micro-Vibration. MATERIALS (BASEL, SWITZERLAND) 2023; 16:5483. [PMID: 37570187 PMCID: PMC10420322 DOI: 10.3390/ma16155483] [Citation(s) in RCA: 1] [Impact Index Per Article: 0.5] [Reference Citation Analysis] [Abstract] [Key Words] [Track Full Text] [Download PDF] [Figures] [Subscribe] [Scholar Register] [Received: 06/30/2023] [Revised: 07/27/2023] [Accepted: 08/01/2023] [Indexed: 08/13/2023]
Abstract
In this work, we design a micro-vibration platform, which combined with the traditional metal-assisted chemical etching (MaCE) to etch silicon nanowires (SiNWs). The etching mechanism of SiNWs, including in the mass-transport (MT) and charge-transport (CT) processes, was explored through the characterization of SiNW's length as a function of MaCE combined with micro-vibration conditions, such as vibration amplitude and frequency. The scanning electron microscope (SEM) experimental results indicated that the etching rate would be continuously improved with an increase in amplitude and reached its maximum at 4 μm. Further increasing amplitude reduced the etching rate and affected the morphology of the SiNWs. Adjusting the vibration frequency would result in a maximum etching rate at a frequency of 20 Hz, and increasing the frequency will not help to improve the etching effects.
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Affiliation(s)
- Weiye Huang
- School of Mechanical Engineering, Hangzhou Dianzi University, Hangzhou 310018, China; (W.H.); (W.L.); (G.C.); (C.C.); (Y.Z.); (H.Y.)
| | - Junyi Wu
- Sanmen Sanyou Technology Inc., Taizhou 472000, China;
| | - Wenxin Li
- School of Mechanical Engineering, Hangzhou Dianzi University, Hangzhou 310018, China; (W.H.); (W.L.); (G.C.); (C.C.); (Y.Z.); (H.Y.)
| | - Guojin Chen
- School of Mechanical Engineering, Hangzhou Dianzi University, Hangzhou 310018, China; (W.H.); (W.L.); (G.C.); (C.C.); (Y.Z.); (H.Y.)
| | - Changyong Chu
- School of Mechanical Engineering, Hangzhou Dianzi University, Hangzhou 310018, China; (W.H.); (W.L.); (G.C.); (C.C.); (Y.Z.); (H.Y.)
| | - Chao Li
- School of Mechanical Engineering, Hangzhou Dianzi University, Hangzhou 310018, China; (W.H.); (W.L.); (G.C.); (C.C.); (Y.Z.); (H.Y.)
| | - Yucheng Zhu
- School of Mechanical Engineering, Hangzhou Dianzi University, Hangzhou 310018, China; (W.H.); (W.L.); (G.C.); (C.C.); (Y.Z.); (H.Y.)
| | - Hui Yang
- School of Mechanical Engineering, Hangzhou Dianzi University, Hangzhou 310018, China; (W.H.); (W.L.); (G.C.); (C.C.); (Y.Z.); (H.Y.)
| | - Yan Chao
- School of Mechanical Engineering, Hangzhou Dianzi University, Hangzhou 310018, China; (W.H.); (W.L.); (G.C.); (C.C.); (Y.Z.); (H.Y.)
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Gumprich A, Liedtke J, Beck S, Chirca I, Potočnik T, Alexander-Webber JA, Hofmann S, Tappertzhofen S. Buried graphene heterostructures for electrostatic doping of low-dimensional materials. NANOTECHNOLOGY 2023; 34:265203. [PMID: 36758234 DOI: 10.1088/1361-6528/acbaa2] [Citation(s) in RCA: 0] [Impact Index Per Article: 0] [Reference Citation Analysis] [Abstract] [Key Words] [Track Full Text] [Subscribe] [Scholar Register] [Received: 11/23/2022] [Accepted: 02/08/2023] [Indexed: 06/18/2023]
Abstract
The fabrication and characterization of steep slope transistor devices based on low-dimensional materials requires precise electrostatic doping profiles with steep spatial gradients in order to maintain maximum control over the channel. In this proof-of-concept study we present a versatile graphene heterostructure platform with three buried individually addressable gate electrodes. The platform is based on a vertical stack of embedded titanium and graphene separated by an intermediate oxide to provide an almost planar surface. We demonstrate the functionality and advantages of the platform by exploring transfer and output characteristics at different temperatures of carbon nanotube field-effect transistors with different electrostatic doping configurations. Furthermore, we back up the concept with finite element simulations to investigate the surface potential. The presented heterostructure is an ideal platform for analysis of electrostatic doping of low-dimensional materials for novel low-power transistor devices.
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Affiliation(s)
- A Gumprich
- Chair for Micro- and Nanoelectronics, Department of Electrical Engineering and Information Technology, TU Dortmund University, Martin-Schmeisser-Weg 4-6, D-44227, Dortmund, Germany
| | - J Liedtke
- Chair for Micro- and Nanoelectronics, Department of Electrical Engineering and Information Technology, TU Dortmund University, Martin-Schmeisser-Weg 4-6, D-44227, Dortmund, Germany
| | - S Beck
- Chair for Micro- and Nanoelectronics, Department of Electrical Engineering and Information Technology, TU Dortmund University, Martin-Schmeisser-Weg 4-6, D-44227, Dortmund, Germany
| | - I Chirca
- Department of Engineering, University of Cambridge, 9 JJ Thompson Avenue, Cambridge CB3 0FA, United Kingdom
| | - T Potočnik
- Department of Engineering, University of Cambridge, 9 JJ Thompson Avenue, Cambridge CB3 0FA, United Kingdom
| | - J A Alexander-Webber
- Department of Engineering, University of Cambridge, 9 JJ Thompson Avenue, Cambridge CB3 0FA, United Kingdom
| | - S Hofmann
- Department of Engineering, University of Cambridge, 9 JJ Thompson Avenue, Cambridge CB3 0FA, United Kingdom
| | - S Tappertzhofen
- Chair for Micro- and Nanoelectronics, Department of Electrical Engineering and Information Technology, TU Dortmund University, Martin-Schmeisser-Weg 4-6, D-44227, Dortmund, Germany
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