Origin of RHEED intensity oscillations during the growth of (Y,Dy)Ba2Cu3O7-x thin films

Recent advances in pulsed-laser deposition of complex oxides

Pulsed-laser deposition (PLD) is one of the most promising techniques for the formation of complex-oxide heterostructures, superlattices, and well controlled interfaces. The first part of this paper presents a review of several useful modifications of the process, including methods inspired by combinatorial approaches. We then discuss detailed growth kinetics results, which illustrate that 'true' layer-by-layer (LBL) growth can only be approached, not fully met, even though many characterization techniques reveal interfaces with unexpected sharpness. Time-resolved surface x-ray diffraction measurements show that crystallization and the majority of interlayer mass transport occur on timescales that are comparable to those of the plume/substrate interaction, providing direct experimental evidence that a growth regime exists in which non-thermal processes dominate PLD. This understanding shows how kinetic growth manipulation can bring PLD closer to ideal LBL than any other growth method available today.

Observed effects of a changing step-edge density on thin-film growth dynamics

We grew SrTiO(3) on SrTiO(3)(001) by pulsed laser deposition, while observing x-ray diffraction at the (00(1/2)) position. The drop DeltaI in the x-ray intensity following a laser pulse contains information about plume-surface interactions. Kinematic theory predicts DeltaI/I = -4sigma(1 - sigma), so that DeltaI /I depends only on the amount of deposited material sigma. In contrast, we observed experimentally that |DeltaI /I| < 4sigma(1 - sigma) and that DeltaI /I depends on the phase of x-ray growth oscillations. The combined results suggest a fast smoothing mechanism that depends on surface step-edge density.