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Liu L, Xu Q, dos Anjos Cunha L, Xin H, Head-Gordon M, Qian J. Real-Space Pseudopotential Method for the Calculation of Third-Row Elements X-ray Photoelectron Spectroscopic Signatures. J Chem Theory Comput 2024; 20:6134-6143. [PMID: 38970155 PMCID: PMC11270745 DOI: 10.1021/acs.jctc.4c00535] [Citation(s) in RCA: 0] [Impact Index Per Article: 0] [Reference Citation Analysis] [Abstract] [Grants] [Track Full Text] [Journal Information] [Subscribe] [Scholar Register] [Received: 04/21/2024] [Revised: 06/18/2024] [Accepted: 06/20/2024] [Indexed: 07/08/2024]
Abstract
X-ray photoelectron spectroscopy (XPS) is a powerful characterization technique that unveils subtle chemical environment differences via core-electron binding energy (CEBE) analysis. We extend the development of real-space pseudopotential methods to calculating 1s, 2s, and 2p3/2 CEBEs of third-row elements (S, P, and Si) within the framework of Kohn-Sham density-functional theory (KS-DFT). The new approach systematically prevents variational collapse and simplifies core-excited orbital selection within dense energy level distributions. However, careful error cancellation analysis is required to achieve accuracy comparable to all-electron methods and experiments. Combined with real-space KS-DFT implementation, this development enables large-scale simulations with both Dirichlet boundary conditions and periodic boundary conditions.
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Affiliation(s)
- Liping Liu
- Department
of Chemical Engineering, Virginia Polytechnic
Institute and State University, Blacksburg, Virginia 24060, United States
| | - Qiang Xu
- Chemical
Sciences Division, Lawrence Berkeley National
Laboratory, Berkeley, California 94720, United States
| | - Leonardo dos Anjos Cunha
- Chemical
Sciences Division, Lawrence Berkeley National
Laboratory, Berkeley, California 94720, United States
- Department
of Chemistry, University of California,
Berkeley, Berkeley, California 94720, United States
| | - Hongliang Xin
- Department
of Chemical Engineering, Virginia Polytechnic
Institute and State University, Blacksburg, Virginia 24060, United States
| | - Martin Head-Gordon
- Chemical
Sciences Division, Lawrence Berkeley National
Laboratory, Berkeley, California 94720, United States
- Department
of Chemistry, University of California,
Berkeley, Berkeley, California 94720, United States
| | - Jin Qian
- Chemical
Sciences Division, Lawrence Berkeley National
Laboratory, Berkeley, California 94720, United States
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2
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Xu Q, Prendergast D, Qian J. Real-Space Pseudopotential Method for the Calculation of 1 s Core-Level Binding Energies. J Chem Theory Comput 2022; 18:5471-5478. [PMID: 36037254 PMCID: PMC9476661 DOI: 10.1021/acs.jctc.2c00474] [Citation(s) in RCA: 0] [Impact Index Per Article: 0] [Reference Citation Analysis] [Abstract] [Track Full Text] [Download PDF] [Figures] [Journal Information] [Subscribe] [Scholar Register] [Indexed: 11/28/2022]
Abstract
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We systematically studied a real-space pesudopotential
method for
the calculation of 1s core–electron binding
energies of second-row elements B, C, N, and O within the framework
of Kohn–Sham density functional theory (KS-DFT). With Dirichlet
boundary conditions, pseudopotential calculations can provide accurate
core–electron binding energies for molecular systems, when
compared with the results from all-electron calculations and experiments.
Furthermore, we report that with one simple additional nonself-consistent
calculation as a refinement step using a hybrid exchange-correlation
functional, we can generally improve the accuracy of binding energy
shifts, promising a strategy for improving accuracy at a much lower
computational cost. The specializations in the present approach, combined
with our efficient real-space KS-DFT implementation, provide key advantages
for calculating accurate core–electron binding energies of
large-scale systems.
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Affiliation(s)
- Qiang Xu
- Chemical Science Division, Lawrence Berkeley National Laboratory, Berkeley, California94720, United States
| | - David Prendergast
- Molecular Foundry, Lawrence Berkeley National Laboratory, Berkeley, California94720, United States
| | - Jin Qian
- Chemical Science Division, Lawrence Berkeley National Laboratory, Berkeley, California94720, United States
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3
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Rahpeima S, Dief EM, Ciampi S, Raston CL, Darwish N. Impermeable Graphene Oxide Protects Silicon from Oxidation. ACS APPLIED MATERIALS & INTERFACES 2021; 13:38799-38807. [PMID: 34342425 DOI: 10.1021/acsami.1c06495] [Citation(s) in RCA: 15] [Impact Index Per Article: 3.8] [Reference Citation Analysis] [Abstract] [Key Words] [Track Full Text] [Subscribe] [Scholar Register] [Indexed: 06/13/2023]
Abstract
The presence of a natural silicon oxide (SiOx) layer over the surface of silicon (Si) has been a roadblock for hybrid semiconductor and organic electronics technology. The presence of an insulating oxide layer is a limiting operational factor, which blocks charge transfer and therefore electrical signals for a range of applications. Etching the SiOx layer by fluoride solutions leaves a reactive Si-H surface that is only stable for few hours before it starts reoxidizing under ambient conditions. Controlled passivation of silicon is also of key importance for improving Si photovoltaic efficiency. Here, we show that a thin layer of graphene oxide (GOx) prevents Si surfaces from oxidation under ambient conditions for more than 30 days. In addition, we show that the protective GOx layer can be modified with molecules enabling a functional surface that allows for further chemical conjugation or connections with upper electrodes, while preserving the underneath Si in a nonoxidized form. The GOx layer can be switched electrochemically to reduced graphene oxide, allowing the development of a dynamic material for molecular electronics technologies. These findings demonstrate that 2D materials are alternatives to organic self-assembled monolayers that are typically used to protect and tune the properties of Si and open a realm of possibilities that combine Si and 2D materials technologies.
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Affiliation(s)
- Soraya Rahpeima
- School of Molecular and Life Sciences, Curtin Institute of Functional Molecules and Interfaces, Curtin University, Bentley, Perth, Western Australia 6102, Australia
- Flinders Institute for Nanoscale Science and Technology, College of Science and Engineering, Flinders University, Bedford Park, South Australia 5042, Australia
| | - Essam M Dief
- School of Molecular and Life Sciences, Curtin Institute of Functional Molecules and Interfaces, Curtin University, Bentley, Perth, Western Australia 6102, Australia
| | - Simone Ciampi
- School of Molecular and Life Sciences, Curtin Institute of Functional Molecules and Interfaces, Curtin University, Bentley, Perth, Western Australia 6102, Australia
| | - Colin L Raston
- Flinders Institute for Nanoscale Science and Technology, College of Science and Engineering, Flinders University, Bedford Park, South Australia 5042, Australia
| | - Nadim Darwish
- School of Molecular and Life Sciences, Curtin Institute of Functional Molecules and Interfaces, Curtin University, Bentley, Perth, Western Australia 6102, Australia
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4
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Zheng F, Pham HH, Wang LW. Effects of the c-Si/a-SiO 2 interfacial atomic structure on its band alignment: an ab initio study. Phys Chem Chem Phys 2017; 19:32617-32625. [PMID: 29192712 DOI: 10.1039/c7cp05879a] [Citation(s) in RCA: 11] [Impact Index Per Article: 1.4] [Reference Citation Analysis] [Abstract] [Track Full Text] [Journal Information] [Subscribe] [Scholar Register] [Indexed: 11/21/2022]
Abstract
The crystalline-Si/amorphous-SiO2 (c-Si/a-SiO2) interface is an important system used in many applications, ranging from transistors to solar cells. The transition region of the c-Si/a-SiO2 interface plays a critical role in determining the band alignment between the two regions. However, the question of how this interface band offset is affected by the transition region thickness and its local atomic arrangement is yet to be fully investigated. Here, by controlling the parameters of the classical Monte Carlo bond switching algorithm, we have generated the atomic structures of the interfaces with various thicknesses, as well as containing Si at different oxidation states. A hybrid functional method, as shown by our calculations to reproduce the GW and experimental results for bulk Si and SiO2, was used to calculate the electronic structure of the heterojunction. This allowed us to study the correlation between the interface band characterization and its atomic structures. We found that although the systems with different thicknesses showed quite different atomic structures near the transition region, the calculated band offset tended to be the same, unaffected by the details of the interfacial structure. Our band offset calculation agrees well with the experimental measurements. This robustness of the interfacial electronic structure to its interfacial atomic details could be another reason for the success of the c-Si/a-SiO2 interface in Si-based electronic applications. Nevertheless, when a reactive force field is used to generate the a-SiO2 and c-Si/a-SiO2 interfaces, the band offset significantly deviates from the experimental values by about 1 eV.
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Affiliation(s)
- Fan Zheng
- Joint Center for Artificial Photosynthesis and Materials Sciences Division, Lawrence Berkeley National Laboratory, Berkeley, California 94720, USA.
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Schenk AK, Rietwyk KJ, Tadich A, Stacey A, Ley L, Pakes CI. High resolution core level spectroscopy of hydrogen-terminated (1 0 0) diamond. JOURNAL OF PHYSICS. CONDENSED MATTER : AN INSTITUTE OF PHYSICS JOURNAL 2016; 28:305001. [PMID: 27299369 DOI: 10.1088/0953-8984/28/30/305001] [Citation(s) in RCA: 0] [Impact Index Per Article: 0] [Reference Citation Analysis] [Abstract] [Track Full Text] [Subscribe] [Scholar Register] [Indexed: 06/06/2023]
Abstract
Synchrotron-based photoelectron spectroscopy experiments are presented that address a long standing inconsistency in the treatment of the C1s core level of hydrogen terminated (1 0 0) diamond. Through a comparison of surface and bulk sensitive measurements we show that there is a surface related core level component to lower binding energy of the bulk diamond component; this component has a chemical shift of [Formula: see text] eV which has been attributed to carbon atoms which are part of the hydrogen termination. Additionally, our results indicate that the asymmetry of the hydrogen terminated (1 0 0) diamond C1s core level is an intrinsic aspect of the bulk diamond peak which we have attributed to sub-surface carbon layers.
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Affiliation(s)
- A K Schenk
- Department of Chemistry and Physics, La Trobe Institute for Molecular Sciences, La Trobe University, Victoria 3086, Australia
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6
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Density functional theory calculations of continuum lowering in strongly coupled plasmas. Nat Commun 2014; 5:3533. [DOI: 10.1038/ncomms4533] [Citation(s) in RCA: 83] [Impact Index Per Article: 7.5] [Reference Citation Analysis] [Track Full Text] [Journal Information] [Subscribe] [Scholar Register] [Received: 07/31/2013] [Accepted: 03/04/2014] [Indexed: 11/08/2022] Open
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Corsetti F, Mostofi AA. A first-principles study of As doping at a disordered Si-SiO2 interface. JOURNAL OF PHYSICS. CONDENSED MATTER : AN INSTITUTE OF PHYSICS JOURNAL 2014; 26:055002. [PMID: 24334566 DOI: 10.1088/0953-8984/26/5/055002] [Citation(s) in RCA: 0] [Impact Index Per Article: 0] [Reference Citation Analysis] [Abstract] [Track Full Text] [Subscribe] [Scholar Register] [Indexed: 06/03/2023]
Abstract
Understanding the interaction between dopants and semiconductor-oxide interfaces is an increasingly important concern in the drive to further miniaturize modern transistors. To this end, using a combination of first-principles density-functional theory and a continuous random network Monte Carlo method, we investigate electrically active arsenic donors at the interface between silicon and its oxide. Using a realistic model of the disordered interface, we find that a small percentage (on the order of ∼10%) of the atomic sites in the first few monolayers on the silicon side of the interface are energetically favourable for segregation, and that this is controlled by the local bonding and local strain of the defect centre. We also find that there is a long-range quantum confinement effect due to the interface, which results in an energy barrier for dopant segregation, but that this barrier is small in comparison to the effect of the local environment. Finally, we consider the extent to which the energetics of segregation can be controlled by the application of strain to the interface.
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Affiliation(s)
- Fabiano Corsetti
- CIC nanoGUNE, E-20018 Donostia-San Sebastián, Spain. Departments of Materials and Physics, and the Thomas Young Centre for Theory and Simulation of Materials, Imperial College London, London SW7 2AZ, UK
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8
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Komsa HP, Pasquarello A. Finite-size supercell correction for charged defects at surfaces and interfaces. PHYSICAL REVIEW LETTERS 2013; 110:095505. [PMID: 23496724 DOI: 10.1103/physrevlett.110.095505] [Citation(s) in RCA: 47] [Impact Index Per Article: 3.9] [Reference Citation Analysis] [Abstract] [Track Full Text] [Subscribe] [Scholar Register] [Received: 11/19/2012] [Revised: 01/18/2013] [Indexed: 05/14/2023]
Abstract
A finite-size supercell correction scheme is introduced for the formation energy of charged defects at surfaces and interfaces. The scheme combines classical electrostatics with the dielectric profile and the electrostatic potential extracted from the electronic-structure calculation. Spurious electrostatic interactions are removed while retaining the dielectric and quantum-mechanical features of the system of interest, which may have no interface (bulk), a single interface or surface, or two interfaces. A pertinent extrapolation scheme validates the proposed corrections. Applications to the charged Cl vacancy at the surface of NaCl and to the dangling bond at the Si(100) surface show that the corrected formation energies are largely independent of the supercell dimensions and of the size of the vacuum region.
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Affiliation(s)
- Hannu-Pekka Komsa
- Chaire de Simulation à l'Echelle Atomique (CSEA), Ecole Polytechnique Fédérale de Lausanne (EPFL), CH-1015 Lausanne, Switzerland
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9
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Quantifying through-space charge transfer dynamics in π-coupled molecular systems. Nat Commun 2013; 3:1086. [PMID: 23011140 DOI: 10.1038/ncomms2083] [Citation(s) in RCA: 67] [Impact Index Per Article: 5.6] [Reference Citation Analysis] [Abstract] [Track Full Text] [Journal Information] [Subscribe] [Scholar Register] [Received: 03/22/2012] [Accepted: 08/22/2012] [Indexed: 11/09/2022] Open
Abstract
Understanding the role of intermolecular interaction on through-space charge transfer characteristics in π-stacked molecular systems is central to the rational design of electronic materials. However, a quantitative study of charge transfer in such systems is often difficult because of poor control over molecular morphology. Here we use the core-hole clock implementation of resonant photoemission spectroscopy to study the femtosecond charge-transfer dynamics in cyclophanes, which consist of two precisely stacked π-systems held together by aliphatic chains. We study two systems, [2,2]paracyclophane (22PCP) and [4,4]paracyclophane (44PCP), with inter-ring separations of 3.0 and 4.0 Å, respectively. We find that charge transfer across the π-coupled system of 44PCP is 20 times slower than in 22PCP. We attribute this difference to the decreased inter-ring electronic coupling in 44PCP. These measurements illustrate the use of core-hole clock spectroscopy as a general tool for quantifying through-space coupling in π-stacked systems.
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10
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Hu CJ, Xie FY, He CS, He ZH. Interfacial interaction between ZnO thin film and polyimide substrate investigated by XPS and DFT calculation. SURF INTERFACE ANAL 2011. [DOI: 10.1002/sia.3803] [Citation(s) in RCA: 4] [Impact Index Per Article: 0.3] [Reference Citation Analysis] [Track Full Text] [Journal Information] [Subscribe] [Scholar Register] [Indexed: 01/20/2023]
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11
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Hydrophobic to hydrophilic transition of HF-treated Si surface during Langmuir–Blodgett film deposition. Chem Phys Lett 2010. [DOI: 10.1016/j.cplett.2010.10.004] [Citation(s) in RCA: 29] [Impact Index Per Article: 1.9] [Reference Citation Analysis] [Track Full Text] [Journal Information] [Subscribe] [Scholar Register] [Indexed: 11/21/2022]
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12
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De Padova P, Leandri C, Vizzini S, Quaresima C, Perfetti P, Olivieri B, Oughaddou H, Aufray B, Le Lay G. Burning match oxidation process of silicon nanowires screened at the atomic scale. NANO LETTERS 2008; 8:2299-2304. [PMID: 18624391 DOI: 10.1021/nl800994s] [Citation(s) in RCA: 9] [Impact Index Per Article: 0.5] [Reference Citation Analysis] [Abstract] [Track Full Text] [Subscribe] [Scholar Register] [Indexed: 05/26/2023]
Abstract
Silicon oxide nanowires hold great promise for functional nanoscale electronics. Here, we investigate the oxidation of straight, massively parallel, metallic Si nanowires. We show that the oxidation process starts at the Si NW terminations and develops like a burning match. While the spectroscopic signatures on the virgin, metallic part, are unaltered we identify four new oxidation states on the oxidized part, which show a gap opening, thus revealing the formation of a transverse internal nanojunction.
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13
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Aldegunde M, Seoane N, García-Loureiro AJ, Sushko PV, Shluger AL, Gavartin JL, Kalna K, Asenov A. Atomistic mesh generation for the simulation of nanoscale metal-oxide-semiconductor field-effect transistors. PHYSICAL REVIEW. E, STATISTICAL, NONLINEAR, AND SOFT MATTER PHYSICS 2008; 77:056702. [PMID: 18643190 DOI: 10.1103/physreve.77.056702] [Citation(s) in RCA: 0] [Impact Index Per Article: 0] [Reference Citation Analysis] [Abstract] [Track Full Text] [Subscribe] [Scholar Register] [Received: 11/23/2007] [Revised: 03/10/2008] [Indexed: 05/26/2023]
Abstract
We present a methodology for the finite-element discretization of nanoscaled semiconductor devices with atomic resolution. The meshing strategy is based on the use of patterns to decompose the unit cell of the underlying crystallographic structures producing unstructured tetrahedral meshes. The unit cells of the bulk semiconductors and, more importantly, of the interfaces between the substrate and the gate dielectric have been extracted from classical molecular dynamics and density functional theory simulations. A Monte Carlo approach has been then used to place the dopants in nodes of the crystal, replacing silicon atoms. The thus created "atomistic" meshes are used to simulate an ensemble of microscopically different double-gate Si metal-oxide-semiconductor field-effect transistors and the transition region at the Si/SiO_{2} interface. In addition, a methodology to approximate amorphous dielectrics is also presented.
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Affiliation(s)
- M Aldegunde
- Departamento de Electrónica y Computación, Universidad de Santiago de Compostela, 15782 Santiago de Compostela, Spain.
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15
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Jeurgens LPH, Reichel F, Frank S, Richter G, Mittemeijer EJ. On the development of long-range order in ultra-thin amorphous Al2O3 films upon their transformation into crystalline γ-Al2O3. SURF INTERFACE ANAL 2008. [DOI: 10.1002/sia.2688] [Citation(s) in RCA: 11] [Impact Index Per Article: 0.6] [Reference Citation Analysis] [Track Full Text] [Journal Information] [Subscribe] [Scholar Register] [Indexed: 11/07/2022]
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16
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Schillinger R, Sljivancanin Z, Hammer B, Greber T. Probing enantioselectivity with x-ray photoelectron spectroscopy and density functional theory. PHYSICAL REVIEW LETTERS 2007; 98:136102. [PMID: 17501218 DOI: 10.1103/physrevlett.98.136102] [Citation(s) in RCA: 39] [Impact Index Per Article: 2.2] [Reference Citation Analysis] [Abstract] [Track Full Text] [Subscribe] [Scholar Register] [Received: 09/12/2006] [Indexed: 05/15/2023]
Abstract
The enantioselectivity of gold is investigated by x-ray photoelectron spectroscopy (XPS) and density functional theory (DFT). Cysteine molecules on a chiral Au(17 11 9);{S} surface show enantiospecific core level binding energies in the amino and in the thiol group. The sign and order of magnitude of the XPS core level shifts is reproduced by DFT. Identical preparations of D- and L-cysteine layers lead to D-cysteine molecules in the pure NH2 form, while a small portion of L-cysteine molecules maintains a hydrogen rich amino group (NH3). This implies enantiospecific adsorption reaction pathways and is consistent with DFT that indicates an activated hydrogen abstraction reaction from the amino group, which is downhill for D-cysteine.
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Affiliation(s)
- R Schillinger
- Physik Institut Universität Zürich, Winterthurerstrasse 190, CH-8057 Zürich, Switzerland
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17
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Yazyev OV, Pasquarello A. Origin of fine structure in si photoelectron spectra at silicon surfaces and interfaces. PHYSICAL REVIEW LETTERS 2006; 96:157601. [PMID: 16712196 DOI: 10.1103/physrevlett.96.157601] [Citation(s) in RCA: 8] [Impact Index Per Article: 0.4] [Reference Citation Analysis] [Abstract] [Track Full Text] [Subscribe] [Scholar Register] [Received: 09/12/2005] [Indexed: 05/09/2023]
Abstract
Using a first-principles approach, we investigate the origin of the fine structure in Si 2p photoelectron spectra at the Si(100)-(2 x 1) surface and at the Si(100)-SiO2 interface. Calculated and measured shifts show very good agreement for both systems. By using maximally localized Wannier functions, we clearly identify the shifts resulting from the electronegativity of second-neighbor atoms. The other shifts are then found to be proportional to the average bond-length variation around the Si atom. Hence, in combination with accurate modeling, photoelectron spectroscopy can provide a direct measure of the strain field at the atomic scale.
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Affiliation(s)
- Oleg V Yazyev
- Ecole Polytechnique Fédérale de Lausanne (EPFL), Institute of Chemical Sciences and Engineering, CH-1015 Lausanne, Switzerland
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18
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Comparison of ultrathin SiO[sub 2]∕Si(100) and SiO[sub 2]∕Si(111) interfaces from soft x-ray photoelectron spectroscopy. ACTA ACUST UNITED AC 2006. [DOI: 10.1116/1.2218865] [Citation(s) in RCA: 6] [Impact Index Per Article: 0.3] [Reference Citation Analysis] [Track Full Text] [Journal Information] [Subscribe] [Scholar Register] [Indexed: 11/17/2022]
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19
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Bongiorno A, Pasquarello A. Comment on "Structural analysis of the SiO2/Si(100) interface by means of photoelectron diffraction". PHYSICAL REVIEW LETTERS 2005; 94:189601; discussion 189602. [PMID: 15904418 DOI: 10.1103/physrevlett.94.189601] [Citation(s) in RCA: 0] [Impact Index Per Article: 0] [Reference Citation Analysis] [Track Full Text] [Subscribe] [Scholar Register] [Received: 02/11/2005] [Indexed: 05/02/2023]
Affiliation(s)
- Angelo Bongiorno
- School of Physics, Georgia Institute of Technology, 837 State Street, Atlanta, GA 30332-0430, USA
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20
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Karadas F, Ertas G, Ozkaraoglu E, Suzer S. X-ray-induced production of gold nanoparticles on a SiO(2)/Si system and in a poly(methyl methacrylate) matrix. LANGMUIR : THE ACS JOURNAL OF SURFACES AND COLLOIDS 2005; 21:437-442. [PMID: 15620336 DOI: 10.1021/la0478604] [Citation(s) in RCA: 28] [Impact Index Per Article: 1.4] [Reference Citation Analysis] [Abstract] [Track Full Text] [Subscribe] [Scholar Register] [Indexed: 05/24/2023]
Abstract
Prolonged exposure to X-rays of HAuCl(4) deposited from an aqueous solution onto a SiO(2)/Si substrate or into a poly(methyl methacrylate) (PMMA) matrix induces reduction of the Au(3+) ions to Au(0) and subsequent nucleation to gold nanoclusters as recorded by X-ray photoelectron spectroscopy. The corresponding major oxidation product is determined as chlorine {HAuCl(4)(ads) + X-rays --> Au(ads) + (3/2)Cl(2)(ads) + HCl(ads)}, which is initially adsorbed onto the surface but eventually diffuses out of the system into the vacuum. The reduced gold atoms aggregate (three-dimensionally) into gold nanoclusters as evidenced by the variation in the binding energy during X-ray exposure, which starts as 1.3 eV but approaches a value that is 0.5 eV higher than that of the bulk gold. The disappearance of the oxidation product (Cl2p signal) and the growth of the nanoclusters (related to the measured binding energy difference between the Si2p of the oxide and Au4f of the reduced gold) exhibit first-order kinetics which is approximately 3 times slower than the reduction of Au(3+), indicating that both of the former processes are diffusion controlled. Similarly, gold ions incorporated into PMMA can also be reduced and aggregated to gold nanoclusters using 254 nm deep UV irradiation in air evidenced by UV-vis-NIR absorption spectrocopy.
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Affiliation(s)
- Ferdi Karadas
- Bilkent University, Department of Chemistry, 06800 Ankara, Turkey
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21
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Giustino F, Umari P, Pasquarello A. Dielectric discontinuity at interfaces in the atomic-scale limit: permittivity of ultrathin oxide films on silicon. PHYSICAL REVIEW LETTERS 2003; 91:267601. [PMID: 14754090 DOI: 10.1103/physrevlett.91.267601] [Citation(s) in RCA: 5] [Impact Index Per Article: 0.2] [Reference Citation Analysis] [Abstract] [Track Full Text] [Subscribe] [Scholar Register] [Received: 07/07/2003] [Indexed: 05/24/2023]
Abstract
Using a density-functional approach, we study the dielectric permittivity across interfaces at the atomic scale. Focusing on the static and high-frequency permittivities of SiO2 films on silicon, for oxide thicknesses from 12 A down to the atomic scale, we find a departure from bulk values in accord with experiment. A classical three-layer model accounts for the calculated permittivities and is supported by the microscopic polarization profile across the interface. The local screening varies on length scales corresponding to first-neighbor distances, indicating that the dielectric transition is governed by the chemical grading. Silicon-induced gap states are shown to play a minor role.
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Affiliation(s)
- Feliciano Giustino
- Institut de Théorie des Phénomènes Physiques (ITP), Ecole Polytechnique Fédérale de Lausanne (EPFL), CH-1015 Lausanne, Switzerland
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22
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Karadas F, Ertas G, Suzer S. Differential Charging in SiO2/Si System As Determined by XPS. J Phys Chem B 2003. [DOI: 10.1021/jp035498g] [Citation(s) in RCA: 55] [Impact Index Per Article: 2.5] [Reference Citation Analysis] [Track Full Text] [Journal Information] [Subscribe] [Scholar Register] [Indexed: 11/28/2022]
Affiliation(s)
- Ferdi Karadas
- Bilkent University, Chemistry Department, 06800 Ankara, Turkey
| | - Gulay Ertas
- Bilkent University, Chemistry Department, 06800 Ankara, Turkey
| | - Sefik Suzer
- Bilkent University, Chemistry Department, 06800 Ankara, Turkey
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23
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Champaneria R, Mack P, White R, Wolstenholme J. Non-destructive analysis of ultrathin dielectric films. SURF INTERFACE ANAL 2003. [DOI: 10.1002/sia.1619] [Citation(s) in RCA: 29] [Impact Index Per Article: 1.3] [Reference Citation Analysis] [Track Full Text] [Journal Information] [Subscribe] [Scholar Register] [Indexed: 11/09/2022]
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Bongiorno A, Pasquarello A, Hybertsen MS, Feldman LC. Transition structure at the Si(100)-SiO2 interface. PHYSICAL REVIEW LETTERS 2003; 90:186101. [PMID: 12786026 DOI: 10.1103/physrevlett.90.186101] [Citation(s) in RCA: 17] [Impact Index Per Article: 0.8] [Reference Citation Analysis] [Abstract] [Track Full Text] [Subscribe] [Scholar Register] [Received: 09/05/2002] [Indexed: 05/24/2023]
Abstract
We characterize the transition structure at the Si(100)-SiO2 interface by addressing the inverse ion-scattering problem. We achieve sensitivity to Si displacements at the interface by carrying out ion-scattering measurements in the channeling geometry for varying ion energies. To interpret our experimental results, we generate realistic atomic-scale models using a first-principles approach and carry out ion-scattering simulations based on classical interatomic potentials. Silicon displacements larger than 0.09 A are found to propagate for three layers into the Si substrate, ruling out a transition structure with regularly ordered O bridges, as recently proposed.
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Affiliation(s)
- Angelo Bongiorno
- Institut de Théorie des Phénomènes Physiques, Ecole Polytechnique Fédérale de Lausanne, CH-1015 Lausanne, Switzerland
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Affiliation(s)
- Burak Ulgut
- Department of Chemistry, Bilkent University, 06533 Ankara, Turkey
| | - Sefik Suzer
- Department of Chemistry, Bilkent University, 06533 Ankara, Turkey
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26
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Bonding and structure of ultrathin yttrium oxide films for Si field effect transistor gate dielectric applications. ACTA ACUST UNITED AC 2003. [DOI: 10.1116/1.1593647] [Citation(s) in RCA: 21] [Impact Index Per Article: 1.0] [Reference Citation Analysis] [Track Full Text] [Journal Information] [Subscribe] [Scholar Register] [Indexed: 11/17/2022]
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27
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Soft x-ray photoelectron spectroscopy of (HfO[sub 2])[sub x](SiO[sub 2])[sub 1−x] high-k gate-dielectric structures. ACTA ACUST UNITED AC 2003. [DOI: 10.1116/1.1589518] [Citation(s) in RCA: 29] [Impact Index Per Article: 1.3] [Reference Citation Analysis] [Track Full Text] [Journal Information] [Subscribe] [Scholar Register] [Indexed: 11/17/2022]
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Surh MP, Barbee TW, Yang LH. First principles molecular dynamics of dense plasmas. PHYSICAL REVIEW LETTERS 2001; 86:5958-5961. [PMID: 11415403 DOI: 10.1103/physrevlett.86.5958] [Citation(s) in RCA: 5] [Impact Index Per Article: 0.2] [Reference Citation Analysis] [Abstract] [Track Full Text] [Subscribe] [Scholar Register] [Received: 10/25/2000] [Indexed: 05/23/2023]
Abstract
Ab initio molecular dynamics calculations are performed for the equation of state of aluminum, spanning condensed matter and dense plasma regimes. Electronic exchange and correlation are included with either a zero- or finite-temperature local density approximation potential. Standard methods are extended to above the Fermi temperature by using final state pseudopotentials to describe thermally excited ion cores. The predicted Hugoniot equation of state agrees well with earlier plasma theories and with experiment for temperatures from 0 to 3 x 10(6) K.
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Affiliation(s)
- M P Surh
- Lawrence Livermore National Laboratory, University of California, Livermore, California 94551, USA
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30
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Stirling A, Pasquarello A, Charlier J, Car R. Dangling bond defects at Si-SiO2 interfaces: atomic structure of the P(b1) center. PHYSICAL REVIEW LETTERS 2000; 85:2773-2776. [PMID: 10991230 DOI: 10.1103/physrevlett.85.2773] [Citation(s) in RCA: 14] [Impact Index Per Article: 0.6] [Reference Citation Analysis] [Abstract] [Track Full Text] [Subscribe] [Scholar Register] [Received: 03/03/2000] [Indexed: 05/23/2023]
Abstract
Using a first-principles approach, we characterize dangling bond defects at Si-SiO2 interfaces by calculating hyperfine parameters for several relaxed structures. Interface models, in which defect Si atoms remain close to crystalline sites of the substrate upon relaxation, successfully describe P(b) and P(b0) defects at (111) and (100) interfaces, respectively. On the basis of calculated hyperfine parameters, we discard models of the P(b1) defect containing a first neighbor shell with an O atom or a strained bond. A novel model consisting of an asymmetrically oxidized dimer yields hyperfine parameters in excellent agreement with experiment and is proposed as the structure of the P(b1) center.
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Affiliation(s)
- A Stirling
- Institut Romand de Recherche Numerique en Physique des Materiaux (IRRMA), PPH-Ecublens, CH-1015 Lausanne, Switzerland and Institute of Isotope and Surface Chemistry, Budapest, P.O. Box 77, H-1525, Hungary
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31
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Neaton JB, Muller DA, Ashcroft NW. Electronic properties of the Si/SiO2 interface from first principles. PHYSICAL REVIEW LETTERS 2000; 85:1298-1301. [PMID: 10991536 DOI: 10.1103/physrevlett.85.1298] [Citation(s) in RCA: 19] [Impact Index Per Article: 0.8] [Reference Citation Analysis] [Abstract] [Track Full Text] [Subscribe] [Scholar Register] [Received: 11/23/1999] [Indexed: 05/23/2023]
Abstract
Unoccupied oxygen p-projected densities of states, calculated from first principles in a model Si/SiO(2) interface, are found to reproduce trends in recent atomic resolution electron energy-loss spectra [D. A. Muller et al., Nature (London) 399, 758 (1999)]. The shape of the unoccupied states and the magnitude of the local energy gap are explicitly related to the number of O second neighbors of a given oxygen atom. The calculated local energy gaps of the oxide become considerably smaller within 0.5 nm of the interface, suggesting that the electronic properties do not change abruptly at the interface.
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Affiliation(s)
- JB Neaton
- Cornell Center for Materials Research and Laboratory of Atomic and Solid State Physics, Cornell University, Ithaca, New York 14853-2501, USA
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32
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Raghavachari K, Eng J. New structural model for Si/SiO2 interfaces derived from spherosiloxane clusters: implications for Si 2p photoemission spectroscopy. PHYSICAL REVIEW LETTERS 2000; 84:935-938. [PMID: 11017409 DOI: 10.1103/physrevlett.84.935] [Citation(s) in RCA: 6] [Impact Index Per Article: 0.2] [Reference Citation Analysis] [Abstract] [Track Full Text] [Subscribe] [Scholar Register] [Received: 03/29/1999] [Indexed: 05/23/2023]
Abstract
In this Letter, we investigate the Si/SiO(2) interface structure formed by the chemisorption of H8Si8O12 and other spherosiloxane clusters on Si(100). Using transition state calculations, we clearly demonstrate that the clusters do not bond to the Si(100) surface via single vertex attachment as proposed previously, but rather attach via Si-O bond cleavage. This alternative cracked cluster geometry allows us to predict the photoemission features of spherosiloxane clusters on Si(100) without invoking second nearest neighbor effects.
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Affiliation(s)
- K Raghavachari
- Bell Laboratories, Lucent Technologies, Murray Hill, New Jersey 07974, USA
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Buczko R, Pennycook SJ, Pantelides ST. Bonding arrangements at the Si-SiO2 and SiC-SiO2 interfaces and a possible origin of their contrasting properties. PHYSICAL REVIEW LETTERS 2000; 84:943-946. [PMID: 11017411 DOI: 10.1103/physrevlett.84.943] [Citation(s) in RCA: 17] [Impact Index Per Article: 0.7] [Reference Citation Analysis] [Abstract] [Track Full Text] [Subscribe] [Scholar Register] [Received: 06/15/1999] [Indexed: 05/23/2023]
Abstract
We report ab initio calculations designed to explore the relative energetics of different interface bonding structures. We find that, for Si (001), abrupt (no suboxide layer) interfaces generally have lower energy because of the surface geometry and the softness of the Si-O-Si angle. However, two energetically degenerate phases are possible at the nominal interface layer, so that a mix of the two is the likely source of the observed suboxide and dangling bonds. In principle, these effects may be avoidable by low-temperature deposition. In contrast, the topology and geometry of SiC surfaces is not suitable for abrupt interfaces.
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Affiliation(s)
- R Buczko
- Solid State Division, Oak Ridge National Laboratory, Oak Ridge, Tennessee 37831 and and Department of Physics and Astronomy, Vanderbilt University, Nashville, Tennessee 37235, USA
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Muller DA, Sorsch T, Moccio S, Baumann FH, Evans-Lutterodt K, Timp G. The electronic structure at the atomic scale of ultrathin gate oxides. Nature 1999. [DOI: 10.1038/21602] [Citation(s) in RCA: 818] [Impact Index Per Article: 31.5] [Reference Citation Analysis] [Track Full Text] [Journal Information] [Subscribe] [Scholar Register] [Indexed: 11/09/2022]
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35
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Greeley JN, Banaszak Holl MM. Infrared Study of H(10)Si(10)O(15) Chemisorbed on a Si(100)-2x1 Surface. Inorg Chem 1998; 37:6014-6017. [PMID: 11670735 DOI: 10.1021/ic9803457] [Citation(s) in RCA: 9] [Impact Index Per Article: 0.3] [Reference Citation Analysis] [Abstract] [Track Full Text] [Journal Information] [Subscribe] [Scholar Register] [Indexed: 11/28/2022]
Abstract
Reflection-absorption infrared spectroscopy of the model interface derived from H(10)Si(10)O(15) on Si(100)-2x1 is presented. The spectra obtained are compared to the H(8)Si(8)O(12)-derived model interface and discussed in terms of the soft X-ray photoemission spectroscopy obtained for cluster-derived interfaces.
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Affiliation(s)
- J. N. Greeley
- Chemistry Department, The University of Michigan, Ann Arbor, Michigan 48109-1055
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36
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Interface structure between silicon and its oxide by first-principles molecular dynamics. Nature 1998. [DOI: 10.1038/23908] [Citation(s) in RCA: 214] [Impact Index Per Article: 7.9] [Reference Citation Analysis] [Track Full Text] [Journal Information] [Subscribe] [Scholar Register] [Indexed: 11/09/2022]
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37
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Greeley JN, Meeuwenberg LM, Banaszak Holl MM. Surface Infrared Studies of Silicon/Silicon Oxide Interfaces Derived from Hydridosilsesquioxane Clusters. J Am Chem Soc 1998. [DOI: 10.1021/ja980741o] [Citation(s) in RCA: 29] [Impact Index Per Article: 1.1] [Reference Citation Analysis] [Track Full Text] [Journal Information] [Subscribe] [Scholar Register] [Indexed: 11/29/2022]
Affiliation(s)
- J. N. Greeley
- Contribution from the Department of Chemistry, The University of Michigan, Ann Arbor, Michigan 48109-1055
| | - L. M. Meeuwenberg
- Contribution from the Department of Chemistry, The University of Michigan, Ann Arbor, Michigan 48109-1055
| | - M. M. Banaszak Holl
- Contribution from the Department of Chemistry, The University of Michigan, Ann Arbor, Michigan 48109-1055
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38
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Turner NH, Schreifels JA. Surface Analysis: X-ray Photoelectron Spectroscopy and Auger Electron Spectroscopy. Anal Chem 1998. [DOI: 10.1021/a19800139] [Citation(s) in RCA: 10] [Impact Index Per Article: 0.4] [Reference Citation Analysis] [Track Full Text] [Journal Information] [Subscribe] [Scholar Register] [Indexed: 11/30/2022]
Affiliation(s)
- Noel H. Turner
- Chemistry Division, Naval Research Laboratory, Washington, D.C. 20375-5342
| | - John A. Schreifels
- Department of Chemistry, George Mason University, Fairfax, Virginia 22030
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39
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Zhang KZ, Banaszak Holl MM, McFeely FR. Extra-atomic Relaxation and Core-Level Binding Energy Shifts at Silicon/Silicon Oxide Interfaces: Effects of Cluster Size on Physical Models. J Phys Chem B 1998. [DOI: 10.1021/jp973254o] [Citation(s) in RCA: 10] [Impact Index Per Article: 0.4] [Reference Citation Analysis] [Track Full Text] [Journal Information] [Subscribe] [Scholar Register] [Indexed: 11/29/2022]
Affiliation(s)
- K. Z. Zhang
- Chemistry Department, University of Michigan, Ann Arbor, Michigan 48109-1055
| | - M. M. Banaszak Holl
- Chemistry Department, University of Michigan, Ann Arbor, Michigan 48109-1055
| | - F. R. McFeely
- IBM T. J. Watson Research Center, P.O. Box 218, Yorktown Heights, New York 10598
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40
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Catellani A, Galli G, Gygi F. Reconstruction and Thermal Stability of the Cubic SiC (001) Surfaces. PHYSICAL REVIEW LETTERS 1996; 77:5090-5093. [PMID: 10062712 DOI: 10.1103/physrevlett.77.5090] [Citation(s) in RCA: 5] [Impact Index Per Article: 0.2] [Reference Citation Analysis] [Track Full Text] [Subscribe] [Scholar Register] [Indexed: 05/23/2023]
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41
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Zhang KZ, Bender JE, Lee S, McFeely FR. Si 2p core-level shifts at the Si(100)-SiO2 interface: An experimental study. PHYSICAL REVIEW. B, CONDENSED MATTER 1996; 54:7686-7689. [PMID: 9984436 DOI: 10.1103/physrevb.54.7686] [Citation(s) in RCA: 12] [Impact Index Per Article: 0.4] [Reference Citation Analysis] [Track Full Text] [Subscribe] [Scholar Register] [Indexed: 04/12/2023]
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42
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Pasquarello A, Hybertsen MS, Car R. Spherosiloxane H8Si8O12 clusters on Si(001): First-principles calculation of Si 2p core-level shifts. PHYSICAL REVIEW. B, CONDENSED MATTER 1996; 54:R2339-R2342. [PMID: 9986172 DOI: 10.1103/physrevb.54.r2339] [Citation(s) in RCA: 25] [Impact Index Per Article: 0.9] [Reference Citation Analysis] [Track Full Text] [Subscribe] [Scholar Register] [Indexed: 04/12/2023]
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