Laser-induced microexplosion confined in the bulk of a sapphire crystal: evidence of multimegabar pressures

High-efficiency non-ablative UV laser nano-scale processing of fused silica by stable filamentation

Over the last decades, three-dimensional micro-manufacturing of fused silica via near-infrared ultrafast laser exposure combined with an etching step has become an established technique for producing complex three-dimensional components. Here, we explore the effect of ultraviolet exposure on process efficiency. Specifically, we demonstrate that shorter wavelengths not only enable enhanced resolution but also yield higher etching selectivity, with an order of magnitude lower pulse energy and significantly higher repetition rates than current practice. This result is obtained using an exposure regime where the laser beam alternates between regimes of self-focusing and defocusing in a stable manner, forming a localized filament. Using this principle, we demonstrate the fabrication of self-organized nano-channels with diameters as small as 120 nm after etching, reaching extreme aspect ratios, exceeding 1500.

Photoluminescent Microbit Inscripion Inside Dielectric Crystals by Ultrashort Laser Pulses for Archival Applications

Inscription of embedded photoluminescent microbits inside micromechanically positioned bulk natural diamond, LiF and CaF₂ crystals was performed in sub-filamentation (geometrical focusing) regime by 525 nm 0.2 ps laser pulses focused by 0.65 NA micro-objective as a function of pulse energy, exposure and inter-layer separation. The resulting microbits were visualized by 3D-scanning confocal Raman/photoluminescence microscopy as conglomerates of photo-induced quasi-molecular color centers and tested regarding their spatial resolution and thermal stability via high-temperature annealing. Minimal lateral and longitudinal microbit separations, enabling their robust optical read-out through micromechanical positioning, were measured in the most promising crystalline material, LiF, as 1.5 and 13 microns, respectively, to be improved regarding information storage capacity by more elaborate focusing systems. These findings pave a way to novel optomechanical memory storage platforms, utilizing ultrashort-pulse laser inscription of photoluminescent microbits as carriers of archival memory.

Shockwave-based THz emission in air

THz emission in air under the irradiation of a pair of tightly-focused femtosecond laser pulses (800nm, 35fs) with nanosecond time delay and micro-meter spatial offsets is studied with polarization-sensitive THz time-domain spectroscopy and time-resolved imaging. The pre-pulse irradiation induces air-breakdown at its focus, which results in the expansion of shockwave front traveling outward. When the main pulse irradiates such shockwave front far from the pre-pulse focus with nanosecond delay, THz emission intensity was enhanced up to ∼13-times and its linear polarization was aligned along the line between the two focus positions of the pre- and the main pulses which is parallel to the expansion direction of the shockwave front. Asymmetric density profiles of the shockwave fronts prepared by the pre-pulse irradiation define the polarization of THz emission. Mechanisms are discussed from the viewpoint of electron diffusion in such asymmetric density profiles.

Microexplosions in bulk sapphire driven by simultaneously spatially and temporally focused femtosecond laser beams

We report experimental results on the formation of microvoids in bulk sapphire produced through the single-shot illumination of the sample by near-infrared, simultaneously spatially and temporally focused (SSTF) laser beams. Compared with the cases of tightly focused femtosecond Gaussian and flattop beams, the SSTFs produce internal microvoids with significantly larger volumes and without cracks between the interaction sites, which may be beneficial for applications in volumetric data storage and for the studies of exotic, super-dense elemental phases contained in the densified shells surrounding the microvoids.

Nanoscale morphology and thermal properties of low insertion loss fiber Bragg gratings produced using the phase mask technique and a single femtosecond laser pulse

Fiber Bragg gratings with a very low insertion loss are inscribed using the phase mask technique and a single infrared (800 nm) femtosecond laser pulse. The morphology of the resultant light-induced structural changes in the Ge-doped silica fiber (SMF-28) is analyzed using scanning electron microscopy. The electron microscopy images reveal that each Bragg grating period incorporates an elongated micropore embedded in a region of homogeneous material modification. The Bragg wavelength drift and reflectivity of fiber Bragg gratings produced with single pulses having the same energy but different duration (80 fs and 350 fs) are monitored for 1000 hours in the course of isothermal annealing at 1000°C. The annealing data demonstrate that both the isothermal Bragg wavelength drift and the decrease in the reflectivity of the fiber Bragg gratings under test are statistically slower for the 350 fs inscription pulses.

Hierarchical Multi-Scale Coupled Periodical Photonic and Plasmonic Nanopatterns Inscribed by Femtosecond Laser Pulses in Lithium Niobate

The ultrafast interaction of tightly focused femtosecond laser pulses with bulk dielectric media in direct laser writing (inscription) regimes is known to proceed via complex multi-scale light, plasma and material modification nanopatterns, which are challenging for exploration owing to their mesoscopic, transient and buried character. In this study, we report on the first experimental demonstration, analysis and modeling of hierarchical multi-period coupled longitudinal and transverse nanogratings in bulk lithium niobate inscribed in the focal region by 1030 nm, 300 fs laser pulses in the recently proposed sub-filamentary laser inscription regime. The longitudinal Bragg-like topography nanogratings, possessing the laser-intensity-dependent periods ≈ 400 nm, consist of transverse birefringent nanogratings, which are perpendicular to the laser polarization and exhibit much smaller periods ≈ 160 nm. Our analysis and modeling support the photonic origin of the longitudinal nanogratings, appearing as prompt electromagnetic and corresponding ionization standing waves in the pre-focal region due to interference of the incident and plasma-reflected laser pulse parts. The transverse nanogratings could be assigned to the nanoscale material modification by interfacial plasmons, excited and interfered in the resulting longitudinal array of the plasma sheets in the bulk dielectric material. Our experimental findings provide strong support for our previously proposed mechanism of such hierarchical laser nanopatterning in bulk dielectrics, giving important insights into its crucial parameters and opening the way for directional harnessing of this technology.

Ferroelectric Nanodomain Engineering in Bulk Lithium Niobate Crystals in Ultrashort-Pulse Laser Nanopatterning Regime

Ferroelectric nanodomains were formed in bulk lithium niobate single crystals near nanostructured microtracks laser-inscribed by 1030-nm 0.3-ps ultrashort laser pulses at variable pulse energies in sub- and weakly filamentary laser nanopatterning regimes. The microtracks and related nanodomains were characterized by optical, scanning probe and confocal second-harmonic generation microscopy methods. The nanoscale material sub-structure in the microtracks was visualized in the sample cross-sections by atomic force microscopy (AFM), appearing weakly birefringent in polarimetric microscope images. The piezoresponce force microscopy (PFM) revealed sub-100 nm ferroelectric domains formed in the vicinity of the embedded microtrack seeds, indicating a promising opportunity to arrange nanodomains in the bulk ferroelectric crystal in on-demand positions. These findings open a new modality in direct laser writing technology, which is related to nanoscale writing of ferroelectric nanodomains and prospective three-dimensional micro-electrooptical and nanophotonic devices in nonlinear-optical ferroelectrics.

Microparticles of High Entropy Alloys Made by Laser-Induced Forward Transfer

The controlled deposition of CoCrFeNiMo0.2 high-entropy alloy (HEA) microparticles was achieved by using laser-induced forward transfer (LIFT). Ultra-short laser pulses of 230 fs of 515 nm wavelength were tightly focused into ∼2.4 μm focal spots on the ∼50-nm thick plasma-sputtered films of CoCrFeNiMo0.2. The morphology of HEA microparticles can be controlled at different fluences. The HEA films were transferred onto glass substrates by magnetron sputtering in a vacuum (10-8 atm) from the thermal spray-coated substrates. The absorption coefficient of CoCrFeNiMo0.2α≈6×105 cm-1 was determined at 600-nm wavelength. The real and imaginary parts of the refractive index (n+iκ) of HEA were determined from reflectance and transmittance by using nanofilms.

Nanohydrodynamic Local Compaction and Nanoplasmonic Form-Birefringence Inscription by Ultrashort Laser Pulses in Nanoporous Fused Silica

The inscription regimes and formation mechanisms of form-birefringent microstructures inside nano-porous fused silica by tightly focused 1030- and 515-nm ultrashort laser pulses of variable energy levels and pulsewidths in the sub-filamentary regime were explored. Energy-dispersion X-ray micro-spectroscopy and 3D scanning confocal Raman micro-spectroscopy revealed the micro-tracks compacted by the multi-shot laser exposure with the nanopores hydrodynamically driven on a microscale to their periphery. Nearly homogeneous polarimetrically acquired subwavelength-scale form-birefringence (refractive index modulation ~10^-3) was simultaneously produced as birefringent nanogratings inside the microtracks of wavelength-, energy- and pulsewidth-dependent lengths, enabling the scaling of their total retardance for perspective phase-modulation nanophotonic applications. The observed form-birefringence was related to the hierarchical multi-scale structure of the microtracks, envisioned by cross-sectional atomic-force microscopy and numerical modeling.

Internal structuring of gallium arsenide using short laser pulses

Laser writing inside semiconductors attracts attention as a possible route for three-dimensional integration in advanced micro technologies. In this context, gallium arsenide (GaAs) is a material for which the best conditions for laser internal modification (LIM) have not been established yet. We address this question by using laser pulses at a fixed wavelength of 1550-nm. A large parameter space is investigated including the response to the applied pulse energy, pulse duration (from femtosecond to nanosecond) and the focusing conditions. We report that well-defined and reproducible internal modifications are achievable with tightly focused nanosecond pulses. The measured writing thresholds are systematically compared to those obtained in silicon (Si), a more extensively studied material. In comparison to Si, we also observe that GaAs is more prone to filamentation effects affecting the modification responses. The reported specific observations for LIM of GaAs should facilitate the future process developments for applications in electronics or photonics.

Large-Scale, High-Yield Laser Fabrication of Bright and Pure Single-Photon Emitters at Room Temperature in Hexagonal Boron Nitride

Single-photon emitters (SPEs) play an important role in many optical quantum technologies. However, an efficient large-scale approach to the generation of high-quality SPE arrays remains an elusive goal at room temperature. Here, we demonstrate a scalable method of generating SPE arrays in hexagonal boron nitride (hBN) with high yield, brightness, and purity using single-pulse irradiation by a femtosecond laser. Our use of a single pulse per defect pattern minimized heat-related damages and improved the purity of SPEs compared with the previous laser-based approaches. Under the optimized fabrication and post-treatment conditions, SPE arrays were successfully generated from the 3.0 μm defect patterns with 43% yield, the highest among the 2D-based top-down approaches. Importantly, we found that 100% of the bright defect patterns are SPEs with g²(0) < 0.5 under such conditions, with the lowest g²(0) = 0.06 ± 0.03. Our SPEs also exhibit the highest brightness with the saturation SPE rate at 7.15 million counts per second. We believe that our overall high-quality and large-scale approach will help a wide range of applications of SPEs in on-chip quantum technologies.

Research on Monocrystalline Silicon Micro-Nano Structures Irradiated by Femtosecond Laser

Femtosecond (fs) laser processing has received great attention for preparing novel micro-nano structures and functional materials. However, the induction mechanism of the micro-nano structures induced by fs lasers still needs to be explored. In this work, the laser-induced periodic surface structure (LIPSS) of monocrystalline silicon (Si) under fs laser irradiation is investigated. Three different layers named amorphous silicon (a-Si) layer, transition layer, and unaffected Si layer are observed after laser irradiation. The a-Si layer on the surface is generated by the resolidification of melting materials. The unaffected Si layer is not affected by laser irradiation and maintains the initial atomic structure. The transition layer consisting of a-Si and unaffected Si layers was observed under the irradiated subsurface. The phase transition mechanism of Si irradiated by fs laser is “amorphous transition”, with the absence of other crystal structures. A numerical model is established to describe the fs laser-Si interaction to characterize the electronic (lattice) dynamics of the LIPSS formation. The obtained results contribute to the understanding of fs laser processing of Si at the atomic scale as well as broaden the application prospects of fs laser for treating other semiconductor materials.

Highly uniform parallel scribing inside transparent materials with ultrafast lasers: from 2D to 3D

Micromachining uniform features inside transparent materials is of great importance. The generation of highly uniform parallel laser beams based on spatial light modulators is a valid way to realize it. A movable magnifying optical feedback approach is proposed. By using a flip mirror and adjusting a movable stage, magnified 3D information such as energy and the position of the split individual parallel laser beams could be obtained and fed back for optimization. Thanks to this setup, active adjustment of holographic algorithm parameters for the energy uniformity and accurate temporal distribution of the parallel laser beams becomes possible. The feasibility and effectiveness of the proposed method are then demonstrated by laser scribing inside silica glass. We pave a way for uniform 3D laser manipulation and subtle microfabrication.

High-quality rapid laser drilling of transparent hard materials

In this study, a hybrid method for high-quality rapid drilling of transparent hard materials which combines femtosecond laser (fs-laser) Bessel beam modifying materials and selective wet etching is presented. Using this method, micro-holes with no taper of different sizes (from 10 to 35 μm) and shapes (square, triangle, circular, and pentagram) are fabricated. Bessel beams of different lengths can be generated flexibly by loading different computer-generated holograms (CGHs) into the spatial light modulator (SLM) and the maximum length of light interacting with materials can reach 320 μm, leading to a reduction of the laser scanning time by two orders of magnitude. Moreover, a set of three-dimensional multi-layer submicron through-holes in crystal materials is also realized, with an aspect ratio of more than 1000 for each hole. These results indicate that this method has broad application potential in chip packaging, aviation manufacturing, single particle catalysis, and other fields.

Formation of nanochannels in sapphire with ultrashort Bessel pulses

We explore, both by numerical simulations and experimentally, the flexibility in controlling Bessel beam parameters by re-imaging it into transparent material with a demagnifying collimator for the formation of high-aspect ratio nanochannels. Analysis of nanochannels produced by in-house precision-made axicon with 275 fs pulses in sapphire reveals the intensity threshold of ∼7.2 × 10¹³ W/cm² required to create the cylindrical microexplosion. We estimate that the maximum applied pressure during the process was 1.5 TPa and that the resulting density of compressed sapphire in the nanochannel's shells are ∼1.19 ± 0.02 times higher than the pristine crystal, and higher than what was achieved before in spherical microexplosion with Gaussian pulses.

Index Modulation Embedded in Type I Waveguide Written by Femtosecond Laser in Fused Silica

Slit-shaped laser beams focused in bulk optical materials can realize embedded waveguides with circular cross sections consisting of positive index change type I traces. In these kinds of waveguide traces, a peculiar periodical refractive index modulation was observed in type I waveguides with two different femtosecond lasers. The direction of refractive index modulation can be controlled with the slit configuration, and its period can be controlled by mechanical perturbation of the stages and the scanning speed. We argue that platform perturbation and dynamical thermal transport processes during the scan are generating factors in the appearance of this modulation. The embedded microstructures in waveguides can provide spectrum modulation, which may have potential applications in optical sensing, filtering, and phase control.

Roadmap on Digital Holography-Based Quantitative Phase Imaging

Quantitative Phase Imaging (QPI) provides unique means for the imaging of biological or technical microstructures, merging beneficial features identified with microscopy, interferometry, holography, and numerical computations. This roadmap article reviews several digital holography-based QPI approaches developed by prominent research groups. It also briefly discusses the present and future perspectives of 2D and 3D QPI research based on digital holographic microscopy, holographic tomography, and their applications.

High Aspect Ratio Structuring of Glass with Ultrafast Bessel Beams

Controlling the formation of high aspect ratio void channels inside glass is important for applications like the high-speed dicing of glass. Here, we investigate void formation using ultrafast Bessel beams in the single shot illumination regime. We characterize the morphology of the damages as a function of pulse energy, pulse duration, and position of the beam inside fused silica, Corning Eagle XG, and Corning Gorilla glass. While a large set of parameters allow for void formation inside fused silica, the operating window is much more restricted for Eagle XG and Gorilla glass. The transient formation of a molten layer around voids enables us interpreting the evolution of the morphology with pulse energy and duration.

Determining femtosecond laser fluence for surface engineering of transparent conductive thin films by single shot irradiation

In recent years, there has been increasing interest in optoelectronic applications of transparent conductive oxide (TCO) thin-film-based materials and devices fabricated using patterning techniques. Meanwhile, femtosecond laser processing is a convenient method that further improves the performance of TCO-based functional devices and expands their application prospects. In this study, we proposed a simple and effective strategy to determine the fluences required for laser processing TCOs. We investigated the modification of an indium tin oxide (ITO) film induced by a femtosecond laser (45/150 fs, 800 nm) at different pulse fluences. The results reveal that the laser modification of ITO films is highly dependent on the irradiated pulse fluences. Several distinct types of final micro/nanostructures were observed and may be attributed to superficial amorphization, spallation ablation, stress-assisted delamination, boiling evaporation, and phase explosion. The final micro/nanostructures were studied in detail using optical microscopy, scanning electron microscopy, transmission electron microscopy and a surface profiler. At a lower fluence above the melting but below the ablation threshold, a laterally parabolic amorphous layer profiled with maximum thicknesses of several tens of nanometers was quantitatively attained. At a higher fluence, stress-assisted delamination and superheated liquid-induced micro-honeycomb structures emerged. Furthermore, the electron and lattice temperature evolutions were also obtained using a two-temperature model to prove the ablation mechanism and ascertain the micro/nanostructure formation principle. The predicted surface temperatures confirmed film amorphization without ablation below 0.23 J/cm². These results reveal the interaction mechanism between femtosecond laser pulse and ITO film including the competition between the free electron heating of intraband transition and the multiphoton absorption of the interband transition, which promotes the potential applications for femtosecond laser processing TCO films and other wide-band-gap semiconductors such as photodetectors, solar cells, UV-light-emitting diodes, and flat-panel displays.

Study of Micro/Nano Structuring and Mechanical Properties of KrF Excimer Laser Irradiated Al for Aerospace Industry and Surface Engineering Applications

Micro/nano structuring of KrF Excimer laser-irradiated Aluminum (Al) has been correlated with laser-produced structural and mechanical changes. The effect of non-reactive Argon (Ar) and reactive Oxygen (O₂) environments on the surface, structural and mechanical characteristics of nano-second pulsed laser-ablated Aluminum (Al) has been revealed. KrF Excimer laser with pulse duration 20 ns, central wavelength of 248 nm and repetition rate of was utilized for this purpose. Exposure of targets has been carried out for 0.86, 1, 1.13 and 1.27 J^·cm⁻² laser fluences in non-reactive (Ar) and reactive (O₂) ambient environments at a pressure of 100 torr. A variety of characteristics of the irradiated targets like the morphology of the surface, chemical composition, crystallinity and nano hardness were investigated by using Scanning Electron Microscopy (SEM), Atomic Force Microscopy (AFM), Energy Dispersive X-ray Spectroscopy (EDS), X-ray Diffractometer (XRD), Raman spectroscopy and Nanohardness tester techniques, respectively. The nature (reactive or non-reactive) and pressure of gas played an important role in modification of materials. In this study, a strong correlation is observed between the surface structuring, chemical composition, residual stress variation and the variation in hardness of Al surface after ablation in both ambient (Ar, O₂). In the case of reactive environment (O₂), the interplay among the deposition of laser energy and species of plasma of ambient gas enhances chemical reactivity, which causes the formation of oxides of aluminum (AlO, Al₂O₃) with high mechanical strength. That makes it useful in the field of process and aerospace industry as well as in surface engineering.

Damage Inside Borosilicate Glass by a Single Picosecond Laser Pulse

We investigate damage inside the bulk of borosilicate glass by a single shot of IR picosecond laser pulse both experimentally and numerically. In our experiments, bulk damage of borosilicate glass with aspect ratio of about 1:10 is generated. The shape and size of the damage site are shown to correspond to an electron cloud with density of about 1020 cm−3. The underlying mechanism of electron generation by multiphoton ionization and avalanche ionization is numerically investigated. The multiphoton ionization rate and avalanche ionization rate are determined by fitting experimental results. The relative role of multiphoton ionization and avalanche ionization are numerically studied and the percentage of electron contribution from each ionization channel is determined.

3D Manufacturing of Glass Microstructures Using Femtosecond Laser

The rapid expansion of femtosecond (fs) laser technology brought previously unavailable capabilities to laser material processing. One of the areas which benefited the most due to these advances was the 3D processing of transparent dielectrics, namely glasses and crystals. This review is dedicated to overviewing the significant advances in the field. First, the underlying physical mechanism of material interaction with ultrashort pulses is discussed, highlighting how it can be exploited for volumetric, high-precision 3D processing. Next, three distinct transparent material modification types are introduced, fundamental differences between them are explained, possible applications are highlighted. It is shown that, due to the flexibility of fs pulse fabrication, an array of structures can be produced, starting with nanophotonic elements like integrated waveguides and photonic crystals, ending with a cm-scale microfluidic system with micro-precision integrated elements. Possible limitations to each processing regime as well as how these could be overcome are discussed. Further directions for the field development are highlighted, taking into account how it could synergize with other fs-laser-based manufacturing techniques.

Vector scanning subtractive manufacturing technology for laser rapid fabrication

Herein, a vector scanning subtractive manufacturing technology is proposed to rapidly fabricate smooth micro-optical components, which is based on the vector scanning method and wet etching. Compared with the raster scanning method, the vector scanning method increases processing efficiency by nearly two orders and mitigates a buildup of stress around the laser processed region, avoiding the generation of cracks. The Letter demonstrates the fabrication of three-dimensional (3D) micro-structures with various sizes and morphologies. For example, micro-concave lenses with diameters of 20 µm to 140 µm, heights of 10 µm to 70 µm, and surface roughness of 29 nm are flexibly fabricated on sapphire by vector scanning subtractive manufacturing technology. The results indicate that the technology has broad prospects in the field of monolithic integrated 3D all-solid-state micro-optics.

Laser-induced cavities with a controllable shape in nanoporous glass

The formation of birefringent structures inside nanoporous glass by femtosecond laser pulses was investigated. The laser-modified region is shown to be a cavity whose shape depends on the number of pulses. The shape of the void cross section varied from circle to ellipse when increasing the number of pulses from one to three. A layer of non-porous dense glass was revealed around the cavity. The cross section of this layer is nearly circular, regardless of the cavity shape and number of pulses in the investigated range. The mechanism of elongated cavity formation based on aniostropic light scattering on the spherical cavity is proposed.

Multiscale electronic and thermomechanical dynamics in ultrafast nanoscale laser structuring of bulk fused silica

We describe the evolution of ultrafast-laser-excited bulk fused silica over the entire relaxation range in one-dimensional geometries fixed by non-diffractive beams. Irradiation drives local embedded modifications of the refractive index in the form of index increase in densified glass or in the form of nanoscale voids. A dual spectroscopic and imaging investigation procedure is proposed, coupling electronic excitation and thermodynamic relaxation. Specific sub-ps and ns plasma decay times are respectively correlated to these index-related electronic and thermomechanical transformations. For the void formation stages, based on time-resolved spectral imaging, we first observe a dense transient plasma phase that departs from the case of a rarefied gas, and we indicate achievable temperatures in the excited matter in the 4,000–5,500 K range, extending for tens of ns. High-resolution speckle-free microscopy is then used to image optical signatures associated to structural transformations until the evolution stops. Multiscale imaging indicates characteristic timescales for plasma decay, heat diffusion, and void cavitation, pointing out key mechanisms of material transformation on the nanoscale in a range of processing conditions. If glass densification is driven by sub-ps electronic decay, for nanoscale structuring we advocate the passage through a long-living dense ionized phase that decomposes on tens of ns, triggering cavitation.

Reconstructing of Embedded High-Aspect-Ratio Nano-Voids Generated by Ultrafast Laser Bessel Beams

Ultrafast non-diffractive Bessel laser beams provide strong light confinement and show robust advantages for fabricating high-aspect-ratio nanoscale structures inside transparent materials. They take the form of nanoscale voids with typical diameters well below the wavelength and aspect ratio of more than 1000. Delivering 3D morphologies of such nanoscale voids is an important issue to evaluate the result for fabrication. However, the characterization of such laser-induced structures is a difficult task. Here, an accurate and time-saving tomography-like methodology is proposed and adopted for reconstructing the morphology of high-aspect-ratio nano-holes. The technique allows an accurate assertion of laser parameters and position on nano-structured features. The reconstructed configuration reveals that nanoholes morphologies have a close relationship with energy distribution in the focal region. It suggests that the configuration of micro-explosion can be controlled by laser energy deposition in the process of laser-matter interaction down to the nanoscale.

Nonlinear increase, invisibility, and sign inversion of a localized fs-laser-induced refractive index change in crystals and glasses

Multiphoton absorption via ultrafast laser focusing is the only technology that allows a three-dimensional structural modification of transparent materials. However, the magnitude of the refractive index change is rather limited, preventing the technology from being a tool of choice for the manufacture of compact photonic integrated circuits. We propose to address this issue by employing a femtosecond-laser-induced electronic band-gap shift (FLIBGS), which has an exponential impact on the refractive index change for propagating wavelengths approaching the material electronic resonance, as predicted by the Kramers-Kronig relations. Supported by theoretical calculations, based on a modified Sellmeier equation, the Tauc law, and waveguide bend loss calculations, we experimentally show that several applications could take advantage of this phenomenon. First, we demonstrate waveguide bends down to a submillimeter radius, which is of great interest for higher-density integration of fs-laser-written quantum and photonic circuits. We also demonstrate that the refractive index contrast can be switched from negative to positive, allowing direct waveguide inscription in crystals. Finally, the effect of the FLIBGS can compensate for the fs-laser-induced negative refractive index change, resulting in a zero refractive index change at specific wavelengths, paving the way for new invisibility applications.

Optical damage thresholds of microstructures made by laser three-dimensional nanolithography: publisher's note

This publisher's note contains corrections to Opt. Lett.45, 13 (2020).OPLEDP0146-959210.1364/OL.45.000013.

Control of diameter and numerical aperture of microlens by a single ultra-short laser pulse

We demonstrate a versatile method for fast and flexible fabrication of either one or an array of microlenses. Multi-foci axial intensity distribution generated by a phase pattern displayed on a spatial light modulator irradiates silica, causing ablation and its internal modification. The following wet etching step defines the diameter r, while the radius of curvature R (hence, the focal length f) is maintained the same. As a result, the numerical aperture NA=r/f changes from 0.2 to 0.4 for the same pulse energy (but different number of multi-foci) during ablation. An isotropic wet etching of silica becomes highly anisotropic for the initial stages of etching following the irradiated pattern. Subsequent evolution of the shape is governed by an isotropic silica etch and forms a spherical lens. This method can be extended to other materials and geometries of micro-optical elements.

Towards Safer Primers: A Review

Primers are used to reliably initiate a secondary explosive in a wide range of industrial and defence applications. However, established primer technologies pose both direct and indirect risks to health and safety. This review analyses a new generation of primer materials and ignition control mechanisms that have been developed to address these risks in firearms. Electrically or optically initiated metal, oxide and semiconductor-based devices show promise as alternatives for heavy metal percussive primers. The prospects for wider use of low-cost, safe, reliable and non-toxic primers are discussed in view of these developments.

Laser-Inscribed Stress-Induced Birefringence of Sapphire

Birefringence of 3 × 10 - 3 is demonstrated inside cross-sectional regions of 100 μ m, inscribed by axially stretched Bessel-beam-like fs-laser pulses along the c-axis inside sapphire. A high birefringence and retardance of λ / 4 at mid-visible spectral range (green) can be achieved using stretched beams with axial extension of 30-40 μ m. Chosen conditions of laser-writing ensure that there are no formations of self-organized nano-gratings. This method can be adopted for creation of polarization optical elements and fabrication of spatially varying birefringent patterns for optical vortex generation.

Morphology of single picosecond pulse subsurface laser-induced modifications of sapphire and subsequent selective etching

The effect of 1030nm single picosecond pulsed laser-induced modification of the bulk of crystalline sapphire using a combined process of laser amorphization and selective wet chemical etching is studied. Pulse durations of more than 1 picosecond are not commonly used for this subsurface process. We examine the effect of 7 picosecond pulses on the morphology of the unetched, as well as etched, single pulse modifications, showing the variation of shape and size when varying the pulse energy and the depth of processing. In addition, a qualitative analysis of the material transformation after irradiation is provided as well as an analysis of cracking phenomena. Finally, a calculated laser intensity profile inside sapphire, using the Point Spread Function (PSF), is compared to the shape of the modifications. This comparison is employed to calculate the intensity threshold leading to amorphization, which equals 2.5⋅10¹⁴ ± 0.4⋅10¹⁴ W/cm².

Extreme Energy Density Confined Inside a Transparent Crystal: Status and Perspectives of Solid-Plasma-Solid Transformations

It was demonstrated during the past decade that an ultra-short intense laser pulse tightly-focused deep inside a transparent dielectric generates an energy density in excess of several MJ/cm3. Such an energy concentration with extremely high heating and fast quenching rates leads to unusual solid-plasma-solid transformation paths, overcoming kinetic barriers to the formation of previously unknown high-pressure material phases, which are preserved in the surrounding pristine crystal. These results were obtained with a pulse of a Gaussian shape in space and in time. Recently, it has been shown that the Bessel-shaped pulse could transform a much larger amount of material and allegedly create even higher energy density than what was achieved with the Gaussian beam (GB) pulses. Here, we present a succinct review of previous results and discuss the possible routes for achieving higher energy density employing the Bessel beam (BB) pulses and take advantage of their unique properties.

Interferometric analysis of sub-nanosecond laser-induced optical breakdown dynamics in the bulk of fused-silica glass

Dynamics of laser-induced optical breakdown in the bulk of fused-silica glass irradiated by a sub-nanosecond laser pulse at a wavelength of 790 nm with a fluence of 522 J/cm² was studied by the femtosecond time-resolved complex interferometry in Nomarski arrangement utilising a Fresnel bi-prism. Evolution of the plasma channel and the development of the free electron density were in focus of the investigation. The measured ultimate length of the plasma channel was equal to 30 μm and almost doubled the length estimated within the moving breakdown model. The history of the transient electron density distribution in the plasma was reconstructed from the phase shift maps using the inverse Abel transform and it revealed further deviation from this model. The core of the plasma channel exhibited at the last stages of the development a considerable level of the electron density up to 2.4×10²⁰ cm^-3. The signature of the pre-breakdown phase has been identified as radiation caused by ionization-released electrons interacting with ions and has been demonstrated in solids for the first time in this way. Origin of the discrepancy between the theoretical prediction of the moving breakdown model and the measured values of the channel length is discussed as well.

Spatio-temporal analysis of glass volume processing using ultrashort laser pulses

Ultrashort laser pulses allow for the in-volume processing of glass through non-linear absorption, resulting in permanent material changes and the generation of internal stress. Across the manifold potential applications of this technology, process optimization requires a detailed understanding of the laser-matter interaction. Of particular relevance are the deposition of energy inside the material and the subsequent relaxation processes. In this paper, we investigate the spatio-temporal evolution of free carriers, energy transfer, and the resulting permanent modifications in the volume of glass during and after exposure to femtosecond and picosecond pulses. For this purpose, we employ time-resolved microscopy in order to obtain shadowgraphic and interferometric images that allow relating the transient distributions to the refractive index change profile. Whereas the plasma generation time is given by the pulse duration, the thermal dynamics occur over several microseconds. Among the most notable features is the emergence of a pressure wave due to the sudden increase of temperature and pressure within the interaction volume. We show how the structure of the modifications, including material disruptions as well as local defects, can be directly influenced by a judicious choice of pulse duration, pulse energy, and focus geometry.

Effect of sodium oxide content on the formation of nanogratings in germanate glass by a femtosecond laser

We report on the formation and structural evolution of embedded self-organized, polarization-dependent nanogratings in sodium germanate glasses induced by an 800 nm, 1 kHz femtosecond laser. Optical birefringence dependent on the femtosecond laser polarization as well as the sodium oxide content is observed when the sample surface is perpendicular to the laser propagation direction. Scanning electron microscopy images of the written lines reveal the formation of periodic platelet or nanovoid arrays, which are aligned perpendicularly to the laser polarization direction after mechanical polishing. The influences of sodium oxide content on the morphology and period of the nanogratings are discussed.

Nanopore-mediated ultrashort laser-induced formation and erasure of volume nanogratings in glass

Ultrashort laser nanostructuring of glasses has attracted increasing interest over the last few decades due to numerous applications in three-dimensional nanofabrication, optical data storage, and development of nanofluidic and polarization-sensitive devices. The knowledge of the influence of laser parameters on the nanostructure formation/erasure is still lacking. In this work, laser-induced modifications and mechanisms of glass decomposition in fused silica are numerically investigated. Cavitation is shown to be the primary mechanism responsible for void formation at the center of the heat-affected zone. Multipulse accumulation processes providing higher local temperatures/pressures lead to the rapid formation of cavitation nanopores, lying in the origin of self-organized nanogratings. Femtosecond laser-interaction threshold conditions required for nanograting formation/erasure are defined in agreement with the available experimental findings. For this, a detailed multi-physical modeling is performed taking into account laser pulse propagation in nonlinear and dispersive media, electronic relaxation/excitation processes, electron-ion heat transfer and thermal diffusion. Based on the calculated temperatures, classical nucleation theory, viscoelastic energy conservation law and the Rayleigh-Plesset model, threshold conditions leading to nanopore formation, stability and growth are investigated as a function of laser energy, pulse duration and repetition rate. The performed numerical study not only contributes to a better fundamental understanding of ultrashort laser-induced modifications on the nanoscale but should also be helpful in defining the optimal laser parameters for nanostructuring or avoiding nanostructure organization and in developing techniques for nanograting rewriting.

Electrons dynamics control by shaping femtosecond laser pulses in micro/nanofabrication: modeling, method, measurement and application

During femtosecond laser fabrication, photons are mainly absorbed by electrons, and the subsequent energy transfer from electrons to ions is of picosecond order. Hence, lattice motion is negligible within the femtosecond pulse duration, whereas femtosecond photon-electron interactions dominate the entire fabrication process. Therefore, femtosecond laser fabrication must be improved by controlling localized transient electron dynamics, which poses a challenge for measuring and controlling at the electron level during fabrication processes. Pump-probe spectroscopy presents a viable solution, which can be used to observe electron dynamics during a chemical reaction. In fact, femtosecond pulse durations are shorter than many physical/chemical characteristic times, which permits manipulating, adjusting, or interfering with electron dynamics. Hence, we proposed to control localized transient electron dynamics by temporally or spatially shaping femtosecond pulses, and further to modify localized transient materials properties, and then to adjust material phase change, and eventually to implement a novel fabrication method. This review covers our progresses over the past decade regarding electrons dynamics control (EDC) by shaping femtosecond laser pulses in micro/nanomanufacturing: (1) Theoretical models were developed to prove EDC feasibility and reveal its mechanisms; (2) on the basis of the theoretical predictions, many experiments are conducted to validate our EDC-based femtosecond laser fabrication method. Seven examples are reported, which proves that the proposed method can significantly improve fabrication precision, quality, throughput and repeatability and effectively control micro/nanoscale structures; (3) a multiscale measurement system was proposed and developed to study the fundamentals of EDC from the femtosecond scale to the nanosecond scale and to the millisecond scale; and (4) As an example of practical applications, our method was employed to fabricate some key structures in one of the 16 Chinese National S&T Major Projects, for which electron dynamics were measured using our multiscale measurement system.

Single-shot ultrafast laser processing of high-aspect-ratio nanochannels using elliptical Bessel beams

Ultrafast lasers have revolutionized material processing, opening a wealth of new applications in many areas of science. A recent technology that allows the cleaving of transparent materials via non-ablative processes is based on focusing and translating a high-intensity laser beam within a material to induce a well-defined internal stress plane. This then enables material separation without debris generation. Here, we use a non-diffracting beam engineered to have a transverse elliptical spatial profile to generate high-aspect-ratio elliptical channels in glass of a dimension 350  nm×710  nm and subsequent cleaved surface uniformity at the sub-micron level.

Ultrafast laser-induced birefringence in various porosity silica glasses: from fused silica to aerogel

We compare a femtosecond laser induced modification in silica matrices with three different degrees of porosity. In single pulse regime, the decrease of substrate density from fused silica to high-silica porous glass and to silica aerogel glass results in tenfold increase of laser affected region with the formation of a symmetric cavity surrounded by the compressed silica shell with pearl like structures. In multi-pulse regime, if the cavity produced by the first pulse is relatively large, the subsequent pulses do not cause further modifications. If not, the transition from void to the anisotropic structure with the optical axis oriented parallel to the incident polarization is observed. The maximum retardance value achieved in porous glass is twofold higher than in fused silica, and tenfold greater than in aerogel. The polarization sensitive structuring in porous glass by two pulses of ultrafast laser irradiation is demonstrated, as well as no observable stress is generated at any conditions.

Near infrared spectro-interferometer using femtosecond laser written GLS embedded waveguides and nano-scatterers

Guided optics spectrometers can be essentially classified into two main families: based on Fourier transform or dispersion. In the first case, an interferogram generated inside an optical waveguide and containing the spectral information is sampled using spatially distributed nanodetectors. These scatter quasi-non-perturbingly light into the detector that is in contact with the waveguide, helping to reconstruct the stationary wave. A dedicated FFT processing is needed in order to recover the spectrum with high resolution but limited spectral range. Another way is to directly disperse the different wavelengths to different pixels, either introducing differential optical path in the same propagation plane (multiple Mach-Zehnder interferometers or Arrayed Waveguides Gratings), or using a periodic structure to perpendicularly extract the optical signal confined in a waveguide (photonic crystals or surface gratings), and by means of a relay optics, generate the spectrum on the Fourier plane of the lens, where the detector is placed. Following this second approach, we present a laser-fabricated high-resolution compact dispersive spectro-interferometer (R>2500, 30nm spectral range at λ = 1560nm), using four parallel waveguides that can provide up to three non-redundant interferometric combinations. The device is based on guided optics technology embedded in bulk optical glass. Ultrafast laser photoinscription with 3D laser index engineering in bulk chalcogenide Gallium Lanthanium Sulfide glass is utilized to fabricate large mode area waveguides in an evanescently-coupled hexagonal multicore array configuration, followed by subsequent realization of nanoscaled scattering centers via one dimensional nanovoids across the waveguide, written in a non-diffractive Bessel configuration. A simple relay optics, with limited optical aberrations, reimages the diffracted signal on the focal plane array, leading to a robust, easy to align instrument.

Optical characteristics of InGaN/GaN light-emitting diodes depending on wafer bowing controlled by laser-treated grid patterns

We evaluated the effects of grid patterns (GPs) realized on 2-inch sapphire substrates by simple laser treatment on the device characteristics of InGaN/GaN light-emitting diodes (LEDs). The degrees of wafer bowing for the LEDs with distances between the GPs of 1 (GP1-LED), 2 (GP2-LED), and 3 mm (GP3-LED) were 100.05, 100.43, and 101.59 µm, respectively, which are significantly improved compared to that (108.06 µm) of a conventional LED (C-LED) without GPs. Consequently, a blue-shift of the emission wavelength for the GP-LEDs was observed compared to the C-LED via alleviation of the quantum-confined stark effect. A comparative study of the fluorescence microscopy images of the C-LED and GP2-LED samples showed a significant reduction of threading dislocations as a result of the GPs. In the electroluminescence mapping results for the entire 2-inch region, the standard deviations of the emission wavelengths were 1.64, 1.49, and 2.55 nm for the GP1-LED, GP2-LED, and GP3-LED samples, respectively, which are smaller than that of the C-LED (2.66 nm). In addition, the average output power of the GP2-LED was 8.5% higher than that of the C-LED.

High aspect ratio micro-explosions in the bulk of sapphire generated by femtosecond Bessel beams

Femtosecond pulses provide an extreme degree of confinement of light matter-interactions in high-bandgap materials because of the nonlinear nature of ionization. It was recognized very early on that a highly focused single pulse of only nanojoule energy could generate spherical voids in fused silica and sapphire crystal as the nanometric scale plasma generated has energy sufficient to compress the material around it and to generate new material phases. But the volumes of the nanometric void and of the compressed material are extremely small. Here we use single femtosecond pulses shaped into high-angle Bessel beams at microjoule energy, allowing for the creation of very high 100:1 aspect ratio voids in sapphire crystal, which is one of the hardest materials, twice as dense as glass. The void volume is 2 orders of magnitude higher than those created with Gaussian beams. Femtosecond and picosecond illumination regimes yield qualitatively different damage morphologies. These results open novel perspectives for laser processing and new materials synthesis by laser-induced compression.

Void-nanograting transition by ultrashort laser pulse irradiation in silica glass

The structural evolution from void modification to self-assembled nanogratings in fused silica is observed for moderate (NA > 0.4) focusing conditions. Void formation, appears before the geometrical focus after the initial few pulses and after subsequent irradiation, nanogratings gradually occur at the top of the induced structures. Nonlinear Schrödinger equation based simulations are conducted to simulate the laser fluence, intensity and electron density in the regions of modification. Comparing the experiment with simulations, the voids form due to cavitation in the regions where electron density exceeds 10²⁰ cm^-3 but is below critical. In this scenario, the energy absorption is insufficient to reach the critical electron density that was once assumed to occur in the regime of void formation and nanogratings, shedding light on the potential formation mechanism of nanogratings.

Laser vaporization of cirrus-like ice particles with secondary ice multiplication

We investigate the interaction of ultrashort laser filaments with individual 90-μm ice particles, representative of cirrus particles. The ice particles fragment under laser illumination. By monitoring the evolution of the corresponding ice/vapor system at up to 140,000 frames per second over 30 ms, we conclude that a shockwave vaporization supersaturates the neighboring region relative to ice, allowing the nucleation and growth of new ice particles, supported by laser-induced plasma photochemistry. This process constitutes the first direct observation of filament-induced secondary ice multiplication, a process that strongly modifies the particle size distribution and, thus, the albedo of typical cirrus clouds.

Time-resolved shadowgraphs of transient plasma induced by spatiotemporally focused femtosecond laser pulses in fused silica glass

We report on experimental observations of formation and evolution of transient plasma produced in fused silica glass with spatiotemporally focused (STF) femtosecond laser pulses using a pump-probe shadow imaging technique. Surprisingly, the observation shows that the track of the plasma is significantly curved, which is attributed to an asymmetric density distribution of the transient plasma produced in the focal volume caused by the pulse front tilt of the STF laser field.

Photoluminescence from voids created by femtosecond-laser pulses inside cubic-BN

Photoluminescence (PL) from femtosecond-laser-modified regions inside cubic-boron nitride (c-BN) was measured under UV and visible light excitation. Bright PL at the red spectral range was observed, with a typical excited state lifetime of ∼4  ns. Sharp emission lines are consistent with PL of intrinsic vibronic defects linked to the nitrogen vacancy formation (via Frenkel pair) observed earlier in high-energy electron-irradiated and ion-implanted c-BN. These, formerly known as the radiation centers, RC1, RC2, and RC3, have been identified at the locus of the voids formed by a single femtosecond-laser pulse. The method is promising to engineer color centers in c-BN for photonic applications.

Femtosecond Laser Fabrication of Cavity Microball Lens (CMBL) inside a PMMA Substrate for Super-Wide Angle Imaging

Since microlenses have to date been fabricated primarily by surface manufacturing, they are highly susceptible to surface damage, and their microscale size makes it cumbersome to handle. Thus, cavity lenses are preferred, as they alleviate these difficulties associated with the surface-manufactured microlenses. Here, it is shown that a high repetition femtosecond laser can effectively fabricate cavity microball lenses (CMBLs) inside a polymethyl methacrylate slice. Optimal CMBL fabrication conditions are determined by examining the pertinent parameters, including the laser processing time, the average irradiation power, and the pulse repetition rates. In addition, a heat diffusion modeling is developed to better understand the formation of the spherical cavity and the slightly compressed affected zone surrounding the cavity. A micro-telescope consisting of a microscope objective and a CMBL demonstrates a super-wide field-of-view imaging capability. Finally, detailed optical characterizations of CMBLs are elaborated to account for the refractive index variations of the affected zone. The results presented in the current study demonstrate that a femtosecond laser-fabricated CMBL can be used for robust and super-wide viewing micro imaging applications.