A silicon bidirectional flow sensor for measuring respiratory flow

Silicon-Based Sensors for Biomedical Applications: A Review

The paper highlights some of the significant works done in the field of medical and biomedical sensing using silicon-based technology. The use of silicon sensors is one of the pivotal and prolonged techniques employed in a range of healthcare, industrial and environmental applications by virtue of its distinct advantages over other counterparts in Microelectromechanical systems (MEMS) technology. Among them, the sensors for biomedical applications are one of the most significant ones, which not only assist in improving the quality of human life but also help in the field of microfabrication by imparting knowledge about how to develop enhanced multifunctional sensing prototypes. The paper emphasises the use of silicon, in different forms, to fabricate electrodes and substrates for the sensors that are to be used for biomedical sensing. The electrical conductivity and the mechanical flexibility of silicon vary to a large extent depending on its use in developing prototypes. The article also explains some of the bottlenecks that need to be dealt with in the current scenario, along with some possible remedies. Finally, a brief market survey is given to estimate a probable increase in the usage of silicon in developing a variety of biomedical prototypes in the upcoming years.

Flow measurement in mechanical ventilation: a review

Accurate monitoring of flow rate and volume exchanges is essential to minimize ventilator-induced lung injury. Mechanical ventilators employ flowmeters to estimate the amount of gases delivered to patients and use the flow signal as a feedback to adjust the desired amount of gas to be delivered. Since flowmeters play a crucial role in this field, they are required to fulfill strict criteria in terms of dynamic and static characteristics. Therefore, mechanical ventilators are equipped with only the following kinds of flowmeters: linear pneumotachographs, fixed and variable orifice meters, hot wire anemometers, and ultrasonic flowmeters. This paper provides an overview of these sensors. Their working principles are described together with their relevant advantages and disadvantages. Furthermore, the most promising emerging approaches for flowmeters design (i.e., fiber optic technology and three dimensional micro-fabrication) are briefly reviewed showing their potential for this application.

A novel target-type low pressure drop bidirectional optoelectronic air flow sensor for infant artificial ventilation: measurement principle and static calibration

An optoelectronic target-type volumetric air flow-rate transducer for bidirectional measurements is presented. The sensor is composed of a T-shaped target and two nominally identical LED-photodiode couples which are operated in differential mode. The sensitive surfaces of the photodiodes are differentially shadowed by the deflection of the target, which in turn depends on the gas flow-rate. The principle of operation is described in mathematical terms and the design parameters have been optimized in order to obtain the highest sensitivity along with minimal pressure drop and reduced dimensions. The sensor is placed in a 20 mm diameter hose and was tested with air flow-rate in the typical temperature range of mechanical ventilation between 20 and 40 °C. The theoretical model was validated through experiments carried out in the volumetric flow range from -7.0 to +7.0 l min(-1). The nonlinear behavior allows sensitivities equal to 0.6 V l(-1) min for flow rates ranging from -2.0 to +2.0 l min(-1), equal to 2.0 V l(-1) min for flow rates ranging from -3.0 to -2.0 l min(-1) and from +2.0 to +3.0 l min(-1), up to 5.7 V l(-1) min at higher flow rates ranging from -7.0 to -3.0 l min(-1) and from +3.0 to +7.0 l min(-1). The linear range extends from 3.0 to 7.0 l min(-1) with constant sensitivity equal to 5.7 V l(-1) min. The sensor is able to detect a flow-rate equal to 1.0 l min(-1) with a sensitivity of about 400 mV l(-1) min. The differential nature of the output minimizes the influence of the LEDs' power supply variations and allows to obtain a repeatability in the order of 3% of full scale output. The small pressure drop produced by the sensor placed in-line the fluid stream, of about 2.4 Pa at 7 l min(-1), corresponds to a negligible fluid dynamic resistance lower than 0.34 Pa l(-1) min.