High frequency optoacoustic arrays using etalon detection

Parallel interrogation of the chalcogenide-based micro-ring sensor array for photoacoustic tomography

Photoacoustic tomography (PAT), also known as optoacoustic tomography, is an attractive imaging modality that provides optical contrast with acoustic resolutions. Recent progress in the applications of PAT largely relies on the development and employment of ultrasound sensor arrays with many elements. Although on-chip optical ultrasound sensors have been demonstrated with high sensitivity, large bandwidth, and small size, PAT with on-chip optical ultrasound sensor arrays is rarely reported. In this work, we demonstrate PAT with a chalcogenide-based micro-ring sensor array containing 15 elements, while each element supports a bandwidth of 175 MHz (-6 dB) and a noise-equivalent pressure of 2.2 mPaHz^-1/2. Moreover, by synthesizing a digital optical frequency comb (DOFC), we further develop an effective means of parallel interrogation to this sensor array. As a proof of concept, parallel interrogation with only one light source and one photoreceiver is demonstrated for PAT with this sensor array, providing images of fast-moving objects, leaf veins, and live zebrafish. The superior performance of the chalcogenide-based micro-ring sensor array and the effectiveness of the DOFC-enabled parallel interrogation offer great prospects for advancing applications in PAT.

Ultrasound detection via low-noise pulse interferometry using a free-space Fabry-Pérot

Coherence-restored pulse interferometry (CRPI) is a recently developed method for optical detection of ultrasound that achieves shot-noise-limited sensitivity and high dynamic range. In principle, the wideband source employed in CRPI may enable the interrogation of multiple detectors by using wavelength multiplexing. However, the noise-reduction scheme in CRPI has not been shown to be compatible with wideband operation. In this work, we introduce a new scheme for CRPI that relies on a free-space Fabry-Pérot filter for noise reduction and a pulse stretcher for reducing nonlinear effects. Using our scheme, we demonstrate that shot-noise-limited detection may be achieved for a spectral band of 80 nm and powers of up to 5 mW.

Looking at sound: optoacoustics with all-optical ultrasound detection

Originally developed for diagnostic ultrasound imaging, piezoelectric transducers are the most widespread technology employed in optoacoustic (photoacoustic) signal detection. However, the detection requirements of optoacoustic sensing and imaging differ from those of conventional ultrasonography and lead to specifications not sufficiently addressed by piezoelectric detectors. Consequently, interest has shifted to utilizing entirely optical methods for measuring optoacoustic waves. All-optical sound detectors yield a higher signal-to-noise ratio per unit area than piezoelectric detectors and feature wide detection bandwidths that may be more appropriate for optoacoustic applications, enabling several biomedical or industrial applications. Additionally, optical sensing of sound is less sensitive to electromagnetic noise, making it appropriate for a greater spectrum of environments. In this review, we categorize different methods of optical ultrasound detection and discuss key technology trends geared towards the development of all-optical optoacoustic systems. We also review application areas that are enabled by all-optical sound detectors, including interventional imaging, non-contact measurements, magnetoacoustics, and non-destructive testing.

Temporal evolution of low-coherence reflectrometry signals in photoacoustic remote sensing microscopy

Recently, a new noncontact reflection-mode imaging modality called photoacoustic remote sensing (PARS) microscopy was introduced providing optical absorption contrast. Unlike previous modalities, which rely on interferometric detection of a probe beam to measure surface oscillations, the PARS technique detects photoacoustic initial pressures induced by a pulsed laser at their origin by monitoring intensity modulations of a reflected probe beam. In this paper, a model describing the temporal evolution from a finite excitation pulse is developed with consideration given to the coherence length of the interrogation beam. Analytical models are compared with approximations, finite-difference time-domain (FDTD) simulations, and experiments with good agreement.

Air-coupled ultrasound detection using capillary-based optical ring resonators

We experimentally demonstrate and theoretically analyze high Q-factor (~107) capillary-based optical ring resonators for non-contact detection of air-coupled ultrasound. Noise equivalent pressures in air as low as 215 mPa/√Hz and 41 mPa/√Hz at 50 kHz and 800 kHz in air, respectively, are achieved. Furthermore, non-contact detection of air-coupled photoacoustic pulses optically generated from a 200 nm thick Chromium film is demonstrated. The interaction of an acoustic pulse and the mechanical mode of the ring resonator is also studied. Significant improvement in detection bandwidth is demonstrated by encapsulating the ring resonator in a damping medium. Our work will enable compact and sensitive ultrasound detection in many applications, such as air-coupled non-destructive ultrasound testing, photoacoustic imaging, and remote sensing. It will also provide a model system for fundamental study of the mechanical modes in the ring resonator.

Optically excited nanoscale ultrasonic transducers

In order to work at higher ultrasonic frequencies, for instance, to increase the resolution, it is necessary to fabricate smaller and higher frequency transducers. This paper presents an ultrasonic transducer capable of being made at a very small size and operated at GHz frequencies. The transducers are activated and read optically using pulsed lasers and without physical contact between the instrumentation and the transducer. This removes some of the practical impediments of traditional piezoelectric architectures (such as wiring) and allows the devices to be placed immediately on or within samples, reducing the significant effect of attenuation which is very strong at frequencies above 1 GHz. The transducers presented in this paper exploit simultaneous optical and mechanical resonances to couple the optical input into ultrasonic waves and vice versa. This paper discusses the mechanical and optical design of the devices at a modest scale (a few μm) and explores the scaling of the transducers toward the sub-micron scale. Results are presented that show how the transducers response changes depending on its local environment and how the resonant frequency shifts when the transducer is loaded by a printed protein sample.

Polymer waveguide Fabry-Perot resonator for high-frequency ultrasound detection

Piezoelectric technology is the backbone of most medical ultrasound imaging arrays; however, signal transduction efficiency severely deteriorates in scaling the technology to element size smaller than 0.1 mm, often required for high-frequency operation (>20 MHz). Optical sensing and generation of ultrasound has been proposed and studied as an alternative technology for implementing sub-millimeter size arrays with element size down to 10 μm. The application of thin polymer film Fabry-Perot resonators has been demonstrated for high-frequency ultrasound detection; however, their sensitivity is limited by light diffraction loss. Here, we introduce a new method to increase the sensitivity of an optical ultrasound receiver by utilizing a waveguide between the mirrors of the Fabry-Perot resonator. This approach eliminates diffraction loss from the cavity, and therefore the finesse is only limited by mirror loss and absorption. By applying this method, we have achieved noise equivalent pressure of 178 Pa over a bandwidth of 30 MHz or 0.03 Pa/Hz1/2, which is about 20-fold better than a similar device without a waveguide. The finesse of the tested Fabry-Perot resonator was around 200. This result is 5 times higher than the finesse measured in the same device outside the waveguide region.

Characterization of an improved polyimide-etalon all-optical transducer for high-resolution ultrasound imaging

All-optical transduction of ultrasound provides high-frequency (>20 MHz) operation in the absence of electrical noise and distortion that hinders small-scale piezoelectric probes. Although fabrication of an all-optical 2-D array suitable for in vivo imaging remains incomplete, a thin-film structure integrating a polyimide film with a Fabry-Perot (etalon) receiver has been shown to be a viable candidate. We present here incremental improvements in the performance of a polyimide-etalon transducer and demonstrate imaging with an array configuration alternative to our previous study. We first show that a gain of more than 30% in output pressure is achieved when increasing the thickness of a bare polyimide film from 3 to 15 μm. This motivated the choice of polyimide as the etalon medium--a configuration made possible by utilizing a dielectric mirror that transmits wavelengths used for generation of ultrasound (ultraviolet) and reflects those for detection (near infrared). The increased reflectivity of the dielectric mirror resulted in a 2-fold decrease in noise-equivalent pressure to 3.3 kPa over a bandwidth of 47.5 MHz (0.48 Pa/√Hz). The transmit/receive center frequency increased from 37 to 49 MHz with a -6-dB bandwidth of 126%, and a maximum pressure of 213 kPa was produced using a 43 μm UV spot. A 2 x 2 mm synthetic array of 957 transmitters centered on a 1 x 1 mm synthetic array of four receivers was used to image two wire targets. Offline reconstruction indicated lateral resolutions of 70 and 114 μm at depths of 2.4 and 5.8 mm, respectively, with an average axial resolution of 35 μm. Finally, we explore the challenges of imaging in this configuration, which provides the best opportunity for real-time performance pending further development.

Characterization of an improved polyimide-etalon all-optical transducer for high-resolution ultrasound imaging

All-optical transduction of ultrasound provides high-frequency (>20 MHz) operation in the absence of electrical noise and distortion that hinders small-scale piezoelectric probes. Although fabrication of an all-optical 2-D array suitable for in vivo imaging remains incomplete, a thin-film structure integrating a polyimide film with a Fabry-Perot (etalon) receiver has been shown to be a viable candidate. We present here incremental improvements in the performance of a polyimide-etalon transducer and demonstrate imaging with an array configuration alternative to our previous study. We first show that a gain of more than 30% in output pressure is achieved when increasing the thickness of a bare polyimide film from 3 to 15 μm. This motivated the choice of polyimide as the etalon medium--a configuration made possible by utilizing a dielectric mirror that transmits wavelengths used for generation of ultrasound (ultraviolet) and reflects those for detection (near infrared). The increased reflectivity of the dielectric mirror resulted in a 2-fold decrease in noise-equivalent pressure to 3.3 kPa over a bandwidth of 47.5 MHz (0.48 Pa/√Hz). The transmit/receive center frequency increased from 37 to 49 MHz with a -6-dB bandwidth of 126%, and a maximum pressure of 213 kPa was produced using a 43 μm UV spot. A 2 x 2 mm synthetic array of 957 transmitters centered on a 1 x 1 mm synthetic array of four receivers was used to image two wire targets. Offline reconstruction indicated lateral resolutions of 70 and 114 μm at depths of 2.4 and 5.8 mm, respectively, with an average axial resolution of 35 μm. Finally, we explore the challenges of imaging in this configuration, which provides the best opportunity for real-time performance pending further development.

High quality factor polymeric Fabry-Perot resonators utilizing a polymer waveguide

Optical resonators are used in a variety of applications ranging from sensors to lasers and signal routing in high volume communication networks. Achieving a high quality (Q) factor is necessary for higher sensitivity in sensing applications and for narrow linewidth light emission in most lasing applications. In this work, we propose a new approach to achieve a very high Q-factor in polymeric Fabry-Perot resonators by conquering light diffraction inside the optical cavity. This can be achieved by inducing a refractive index feature inside the optical cavity that simply creates a waveguide between the two mirrors. This approach eliminates diffraction loss from the cavity and therefore the Q-factor is only limited by mirror loss and absorption. To demonstrate this claim, a device has been fabricated consisting of two dielectric Bragg reflectors with a 100 μm layer of photosensitive polymer between them. The refractive index of this polymer can be modified utilizing standard photo-lithography processes. The measured finesse of the fabricated device was 692 and the Q-factor was 55000.

All-optical photoacoustic imaging system using fiber ultrasound probe and hollow optical fiber bundle

An all-optical 3D photoacoustic imaging probe that consists of an optical fiber probe for ultrasound detection and a bundle of hollow optical fibers for excitation of photoacoustic waves was developed. The fiber probe for ultrasound is based on a single-mode optical fiber with a thin polymer film attached to the output end surface that works as a Fabry Perot etalon. The input end of the hollow fiber bundle is aligned so that each fiber in the bundle is sequentially excited. A thin and flexible probe can be obtained because the probe system does not have a scanning mechanism at the distal end.

Optical micromachined ultrasound transducers (OMUT)--a new approach for high-frequency transducers

The sensitivity and reliability of piezoelectric ultrasound transducers severely degrade in applications requiring high frequency and small element size. Alternative technologies such as capacitive micromachined ultrasound transducers (CMUT) and optical sensing and generation of ultrasound have been proposed and studied for several decades. In this paper, we present a new type of device based on optical micromachined ultrasound transducer (OMUT) technology. OMUTs rely on microfabrication techniques to construct micrometerscale air cavities capped by an elastic membrane. A modified photoresist bonding process has been developed to facilitate the fabrication of these devices. We will describe the design, fabrication, and testing of prototype OMUT devices which implement a receive-only function. Future design modifications are proposed for incorporating complete transmit¿receive functionality in a single element.

Sensitivity enhancement of an open-cavity-based optoacoustic sensor

We present a new method for sensitive ultrasound detection using an open-cavity optoacoustic sensor. Our results have demonstrated significant enhancement of detection sensitivity when the open-cavity sensor is used in media with large isothermal compressibility. A near-linear relationship between detected optoacoustic signal strength and isothermal compressibility has been found.

Sensitivity improvement of micro-grating accelerometer based on differential detection method

A differential detection method (DDM) with a utility type and ease of realization for a micro-grating accelerometer is reported so as to reduce the common-mode noise and improve the sensitivity of the micro-grating accelerometer. The theoretical model is established, based on scalar diffraction theory for differential detection. According to the simulation and analysis of the DDM, the theoretical result shows that the sensitivity of the micro-grating accelerometer can be improved by at least a factor of 2. Based on the analysis, the detection circuit is designed with proper parameters and devices for the handheld experimental prototype, which is realized with our micro-grating acceleration sensor fabricated by inductively coupled plasma, lift-off, and anodic bonding of glass/silicon, etc. The prototype experiment is conducted with the turntable. Compared with the single-order detection method whose sensitivities are 6.797 V/g (zeroth order, 1 g=9.8 m/s²) and 7.767 V/g (first-order), the result of the DDM shows that the sensitivity of the micro-grating accelerometer is 18.61 V/g with an improvement of over two times. The overall signal-to-noise ratio improvement is 6.47 dB with the input of 0.86 g.

A polyimide-etalon thin film structure for all-optical high-frequency ultrasound transduction

In this work, we have designed, fabricated, and tested an all-optical ultrasound transducer by integrating a photoabsorptive polyimide thin film into a Fabry-Pérot (etalon) high-frequency receiver. A 5-ns UV pulse was used for thermoelastic ultrasound generation in the polyimide film, and the transmission had a maximum amplitude of 4.3 MPa centered at 27 MHz with a fractional bandwidth of 107%. The device attained a noise-equivalent pressure of 1.3 Pa/√Hz in receive-only mode. When used in pulse-echo mode, the -6-dB upper cutoff frequency of the transmit/receive response reached 47 MHz. Basic imaging capabilities were also investigated by scanning the near-infrared probe beam across the device to create a 2 × 2 mm synthetic aperture. The imaging of targets placed at depths of 1.8 and 5.2 mm yielded estimates of 71 and 145 μm, respectively, for the lateral resolution and 35 and 38 μm, respectively, for the axial resolution. Finally, a design concept for a forward-viewing intravascular imager is presented that entails the coupling of light to a rotating, linear array of optical fibers on top of which are deposited polyimide-etalon transducers. Such a design would allow for a flexible and compact high-resolution imager well-suited for intravascular applications, such as guidance of treatment in the case of chronic total occlusion.

All-optical scanhead for ultrasound and photoacoustic dual-modality imaging

We propose a new scanhead design for combined ultrasound (US)/photoacoustic (PA) imaging that can be applied to dual-modality microscopy and biomedical imaging. Both imaging modalities employ the optical generation and detection of acoustic waves. The scanhead consists of an optical fiber with an axicon tip for excitation, and a microring for acoustic detection. No conventional piezoelectric device is needed, and the cost of the design makes it suitable for one-time, disposable use. Furthermore, a single laser pulse is employed to generate both US and PA signals. A subband imaging method can be applied to the receiver to enhance the contrast between the US and PA signals. Phantom data demonstrate the feasibility of this approach.

An integrated optoacoustic transducer combining etalon and black PDMS structures

An integrated optoacoustic transducer combining etalon and black polydimethylsiloxane (PDMS) structures has been designed and developed. The device consists of an 11-μm-thick black PDMS film confined to a 2-mm-diameter circular region acting as an optoacoustic transmitter, surrounded by a 5.9-μm Fabry-Perot polymer etalon structure serving as an optoacoustic detector array. A pulsed laser is focused onto a 30-μm spot on the black PDMS film, defining the transmit element, while a CW laser probes a 20-μm spot on the etalon for ultrasound detection. Pulse-echo signals display center frequencies of above 30 MHz with bandwidths of at least 40 MHz. A theta-array is formed for 3-D ultrasound imaging by mechanically scanning the generation laser along a 1-D array and the detection laser around an annular array. Preliminary images with 3 metal wires as imaging targets are presented. Characterization of the device’s acoustical properties, as well as preliminary imaging results, suggest that all-optical ultrasound transducers are potential alternatives to piezoelectric techniques for high-frequency 2-D arrays enabling 3-D high-resolution ultrasound imaging.

Thin polymer etalon arrays for high-resolution photoacoustic imaging

Thin polymer etalons are demonstrated as high-frequency ultrasound sensors for three-dimensional (3-D) high-resolution photoacoustic imaging. The etalon, a Fabry-Perot optical resonator, consists of a thin polymer slab sandwiched between two gold layers. It is probed with a scanning continuous-wave (CW) laser for ultrasound array detection. Detection bandwidth of a 20-microm-diam array element exceeds 50 MHz, and the ultrasound sensitivity is comparable to polyvinylidene fluoride (PVDF) equivalents of similar size. In a typical photoacoustic imaging setup, a pulsed laser beam illuminates the imaging target, where optical energy is absorbed and acoustic waves are generated through the thermoelastic effect. An ultrasound detection array is formed by scanning the probing laser beam on the etalon surface in either a 1-D or a 2-D configuration, which produces 2-D or 3-D images, respectively. Axial and lateral resolutions have been demonstrated to be better than 20 microm. Detailed characterizations of the optical and acoustical properties of the etalon, as well as photoacoustic imaging results, suggest that thin polymer etalon arrays can be used as ultrasound detectors for 3-D high-resolution photoacoustic imaging applications.

High-resolution ultrasonic imaging using an etalon detector array

A photoacoustic imaging system was built and tested to demonstrate the feasibility of high-resolution low-noise ultrasonic imaging based on parallel detection using polymer etalons. Its capability of detecting ultrasound at different elements simultaneously in the optical end was verified by imaging three 49 mum beads. An average noise-equivalent pressure of 3.6 kPa over 50 MHz for 50 mum diameter detection elements in a two-dimensional array with a diameter of 1.35 mm and a detection bandwidth of 75 MHz at -3 dB was measured. These results demonstrate the potential of polymer etalons for high-frame-rate high-resolution three-dimensional photoacoustic and ultrasound pulse-echo imaging.

Characterization of a broadband all-optical ultrasound transducer-from optical and acoustical properties to imaging

A broadband all-optical ultrasound transducer has been designed, fabricated, and evaluated for high- frequency ultrasound imaging. The device consists of a 2-D gold nanostructure imprinted on top of a glass substrate, followed by a 3 microm PDMS layer and a 30 nm gold layer. A laser pulse at the resonance wavelength of the gold nanostructure is focused onto the surface for ultrasound generation, while the gold nanostructure, together with the 30 nm thick gold layer and the PDMS layer in between, forms an etalon for ultrasound detection, which uses a CW laser at a wavelength far from resonance as the probing beam. The center frequency of a pulse-echo signal recorded in the far field of the transducer is 40 MHz with -6 dB bandwidth of 57 MHz. The signal to noise ratio (SNR) from a 70 microm diameter transmit element combined with a 20 microm diameter receive element probing a near perfect reflector positioned 1.5 mm from the transducer surface is more than 10 dB and has the potential to be improved by at least another 40 dB. A high-frequency ultrasound array has been emulated using multiple measurements from the transducer while mechanically scanning an imaging target. Characterization of the device's optical and acoustical properties, as well as preliminary imaging results, strongly suggest that all-optical ultrasound transducers can be used to build high-frequency arrays for real-time high-resolution ultrasound imaging.

Low-noise wideband ultrasound detection using polymer microring resonators

Polymer microring resonators for low-noise, wideband ultrasound detection are presented. Using a nanoimprinting technique, we fabricated polymer microring resonators with a quality factor of 6000 resulting in high sensitivity to ultrasound. A noise-equivalent pressure of 0.23 kPa over 1-75 MHz and a detection bandwidth of over 90 MHz at -3 dB were measured. These results demonstrate the potential of polymer microring resonators for high-frequency ultrasound and photoacoustic imaging. For a typical photoacoustic imaging test case, the high sensitivity demonstrated in these devices would increase imaging depth by a factor of 3 compared to state-of-the-art polyvinylidene fluoride detectors.

High-frequency ultrasound sensors using polymer microring resonators

Polymer microring resonators are demonstrated as high-frequency, ultrasound detectors. An optical microring resonator consists of a ring waveguide closely coupled to a straight bus waveguide, serving as light input and output. Acoustic waves irradiating the ring induce strain, deforming the waveguide dimensions and changing the refractive index of the waveguide via the elasto-optic effect. These effects modify the effective refractive index of the guided mode inside the waveguide. The sharp wavelength dependence of the microring resonance can enhance the optical response to acoustic strain. Such polymer microring resonators are experimentally demonstrated in detecting broadband ultrasound pulses from a 50 MHz transducer. Measured frequency response shows that these devices have potential in high-frequency, ultrasound detection. Design guidelines for polymer microring resonators forming an ultrasound detector array are discussed.

Improvements in optical generation of high-frequency ultrasound

The thermoelastic effect in a black polydimethylsiloxane (PDMS) film is used to produce high-frequency, high-intensity ultrasound for applications in water and soft tissue. We show that the optoacoustic transduction efficiency is improved by about 10 dB by decreasing the thickness of the black PDMS film from 25 microm to 11 microm. The center frequency of the generated ultrasound is 60 MHz, with a -6 dB bandwidth of 80%. When a 5 ns laser pulse with energy of 50 microJ is delivered to a spot size of 25 microm, the acoustic pressure 10 mm away from the film surface is about 800 kPa. Furthermore, we demonstrate that the center frequency and bandwidth of the generated ultrasound is mainly determined by the temporal profile of the input optical pulse, and it has the potential to be easily improved to above 100 MHz.

Optoacoustic imaging of absorbing objects in a turbid medium: ultimate sensitivity and application to breast cancer diagnostics

One of the major medical applications of optoacoustic (OA) tomography is in the diagnostics of early-stage breast cancer. A numerical approach was developed to characterize the following parameters of an OA imaging system: resolution, maximum depth at which the tumor can be detected, and image contrast. The parameters of the 64-element focused array transducer were obtained. The results of numerical modeling were compared with known analytical solutions and further validated by phantom experiments. The OA images of a 3 mm piece of bovine liver immersed in diluted milk at various depths were obtained. Based on the results of modeling, a signal filtering algorithm for OA image contrast enhancement has been proposed.

Broadband ultrasound field mapping system using a wavelength tuned, optically scanned focused laser beam to address a Fabry Perot polymer film sensor

An optical system for rapidly mapping broad-band ultrasound fields with high spatial resolution has been developed. The transduction mechanism is based upon the detection of acoustically induced changes in the optical thickness of a thin polymer film acting as a Fabry Perot sensing interferometer (FPI). By using a PC-controlled galvanometer mirror to line-scan a focused laser beam over the surface of the FPI, and a wavelength-tuned phase bias control system to optimally set the FPI working point, a notional 1D ultrasound array was synthesized. This system enabled ultrasound fields to be mapped over an aperture of 40 mm, in 50-microm steps with an optically defined element size of 50 microm and an acquisition time of 50 ms per step. The sensor comprised a 38-microm polymer film FPI which was directly vacuum-deposited onto an impedance-matched polycarbonate backing stub. The -3 dB acoustic bandwidth of the sensor was 300 kHz to 28 MHz and the peak noise-equivalent-pressure was 10 kPa over a 20-MHz measurement bandwidth. To demonstrate the system, the outputs of various planar and focused pulsed ultrasound transducers with operating frequencies in the range 3.5 to 20 MHz were mapped. It is considered that this approach offers a practical and inexpensive alternative to piezoelectric-based arrays and scanning systems for rapid transducer field characterization and biomedical and industrial ultrasonic imaging applications.

Measurement of spatial cross sections of ultrasound pressure fields by optical scanning means

The measurement of spatial cross sections of ultrasound pressure fields is an essential element of exposimetry of ultrasonic medical equipment. An optical technique is presented that allows the two-dimensional (2-D) determination of ultrasound pressure using an optical multilayer hydrophone in which a laser beam with suitable wavelength is partially reflected from a dielectric optical multilayer system. By detecting the change in reflectivity of the multilayer coating induced by the incident ultrasound, the pressure time waveform can be determined. A 2-D data acquisition covering an area of at least 15 mm x 5 mm was realized by two complementary approaches. A serial detection scheme was set up by scanning the sensing point across the area of interest by a micromechanically engineered scanning mirror and acquiring pressure time waveforms sequentially and pointwise. This allows the measurement of repeating ultrasonic waveforms with a spatial resolution of better than 70 microm and a minimal detectable pressure of 50 kPa (bandwidth: 50 MHz) in a few seconds. In an alternative approach exploiting the parallel processing capabilities of a charge-coupled devices (CCD) camera chip, the probe was strobe-illuminated by a large-diameter collimated beam of a pulsed laser diode. The 2-D pressure distribution at a particular moment was derived from captured reflectivity distributions with a spatial resolution of 75 microm. By successive delaying of the laser pulse with respect to the ultrasound pulse, the complete 2-D pulse waveform was acquired with high spatial resolution. Measurement results on ultrasound fields from plane and focusing transducers are presented and compared to simulation results. Individual advantages and drawbacks of both approaches are discussed. A combined setup merging both detection schemes into a single device was developed and represents a milestone on the way toward constructing an optical ultrasound measuring camera.

Two-dimensional ultrasound receive array using an angle-tuned Fabry-Perot polymer film sensor for transducer field characterization and transmission ultrasound imaging

A 2-D optical ultrasound receive array has been investigated. The transduction mechanism is based upon the detection of acoustically induced changes in the optical thickness of a thin polymer film acting as a Fabry-Perot sensing interferometer (FPI). By illuminating the sensor with a large-area laser beam and mechanically scanning a photodiode across the reflected output beam, while using a novel angle-tuned phase bias control system to optimally set the FPI working point, a notional 2-D ultrasound array was synthesized. To demonstrate the concept, 1-D and 2-D ultrasound field distributions produced by planar 3.5-MHz and focused 5-MHz PZT ultrasound transducers were mapped. The system was also evaluated by performing transmission ultrasound imaging of a spatially calibrated target. The "array" aperture, defined by the dimensions of the incident optical field, was elliptical, of dimensions 16 x 12 mm and spatially sampled in steps of 0.1 mm or 0.2 mm. Element sizes, defined by the photodiode aperture, of 0.8, 0.4, and 0.2 mm were variously used for these experiments. Two types of sensor were evaluated. One was a discrete 75-microm-thick polyethylene terephthalate FPI bonded to a polymer backing stub which had a wideband peak noise-equivalent pressure of 6.5 kPa and an acoustic bandwidth 12 MHz. The other was a 40-microm Parylene film FPI which was directly vacuum-deposited onto a glass backing stub and had an NEP of 8 kPa and an acoustic bandwidth of 17.5 MHz. It is considered that this approach offers an alternative to piezoelectric ultrasound arrays for transducer field characterization, transmission medical and industrial ultrasound imaging, biomedical photoacoustic imaging, and ultrasonic nondestructive testing.

A grating-assisted resonant-cavity-enhanced optical displacement detection method for micromachined sensors

We present an integrated optical displacement sensing method for microscale sensors which is based on an asymmetric Fabry-Perot etalon structure with an embedded phase-sensitive diffraction grating. Analytical modeling of the structure shows that the etalon significantly improves the detection sensitivity as compared to a regular optical interferometer and the embedded diffraction grating enables integration of optoelectronics in a small volume. The efficacy of the method is experimentally validated on a surface micromachined diffraction-based opto-acoustic sensor fabricated on a quartz wafer. A 15 nm silver layer is used to form the bottom mirror of the etalon structure with a sensor membrane and embedded diffraction grating made of aluminum. Comparison of the results with and without the etalon shows an 8 dB increase in detection sensitivity with the etalon structure, which should be further enhanced with the use of low-loss dielectric mirrors.

Finite-element analysis of material and parameter effects in laser-based thermoelastic ultrasound generation

Laser-based, thermoelastic transduction methods have potential in very high frequency (>50 MHz), high-density two-dimensional (2-D) arrays for a variety of very high-resolution superficial imaging applications, including in vivo tissue sectioning. Previous studies of these transducers generally have been based on experimental measurements or theoretical analyses using various simplifying assumptions. These theoretical models are mostly 1-D and best matched to simple geometries with a minimum number of component materials. In this work, we use a new thermoelastic solver in a commercially available finite-element analysis (FEA) software package to analyze multidimensional effects in laser-based devices of arbitrary geometry with the potential for use with arbitrary material properties. The FEA approach was verified first against experimental data. Thereafter, we explored the impact of various design variables, including laser spot size and laser penetration depth.

Capacitive micromachined ultrasonic transducers with diffraction-based integrated optical displacement detection

Capacitive detection limits the performance of capacitive micromachined ultrasonic transducers (CMUTs) by providing poor sensitivity below megahertz frequencies and limiting acoustic power output by imposing constraints on the membrane-substrate gap height. In this paper, an integrated optical interferometric detection method for CMUTs, which provides high displacement sensitivity independent of operation frequency and device capacitance, is reported. The method also enables optoelectronics integration in a small volume and provides optoelectronic isolation between transmit and receive electronics. Implementation of the method involves fabricating CMUTs on transparent substrates and shaping the electrode under each individual CMUT membrane in the form of an optical diffraction grating. Each CMUT membrane thus forms a phase-sensitive optical diffraction grating structure that is used to measure membrane displacements down to 2 x 10(-4) A/square root(Hz) level in the dc to 2-MHz range. Test devices are fabricated on quartz substrates, and ultrasonic array imaging in air is performed using a single 4-mm square CMUT consisting of 19 x 19 array of membranes operating at 750 kHz.

Toward virtual biopsy through an all fiber optic ultrasonic miniaturized transducer: a proposal

The present generation of devices based on opto-acoustic and acousto-optic conversion lets us foresee the possibility of realizing complete miniaturized transmitting-receiving transducers, able to generate and detect wideband ultrasounds by laser light. In the present paper, a miniaturized ultrasonic transducer entirely based on fiber optic technology is proposed. Such a device springs from the conjunction between our research, which has produced a highly efficient fiber optic opto-acoustic source, with the results obtained by other researchers concerning the realization of an ultrasonic receiver based on optical interferometry. Making use of the thermo-elastic effect for ultrasound generation, a source of ultrasound can be obtained by coupling a fiber optic to pulsed laser, if a film capable of absorbing laser light is placed onto fiber end. Starting from these remarks, we propose an efficient opto-acoustic source, able to generate pressure pulses with amplitude of the order of 10(4) Pa and bandwidth extending up to 40 MHz and beyond by using graphite materials as absorbing film. This solution makes use of a low-power pulsed laser as optical source possible. An ultrasonic receiving element was realized placing a Fabry-Perot cavity over the tip of a fiber optic. The cavity thickness modulation induced by ultrasonic beam is detected by an interferometer optical technique. We have realized a prototype of a receiving device that exhibits a sensitivity comparable with that of piezoelectric devices (10-100 nV/Pa) and an almost flat bandwidth extending up to 20 MHz or more. The extreme miniaturization of the resulting ultrasonic transducer, together with its wide ultrasonic frequency bandwidth, is the first step toward ultrasonic tissue biopsy. In this paper, before discussing the problem of constructing a complete ultrasonic transducer composed by a transmitter and receiver, the results carried out in these fields during the last decade are reviewed.

Thermoelastic expansion vs. piezoelectricity for high-frequency, 2-D arrays

Optical generation using the thermoelastic effect has traditionally suffered from low conversion efficiency. We previously demonstrated increased efficiency of nearly 20 dB with an optical absorbing layer consisting of a mixture of polydimethylsiloxane (PDMS) and carbon black spin coated onto a glass microscope slide. In this paper we show that the radiated power from a black PDMS film is comparable to a 20 MHz piezoelectric two-dimensional (2-D) array element. Furthermore, we predict that a thermoelastic array element can produce similar acoustic power levels compared to ideal piezoelectric 2-D array elements at frequencies in the 100 MHz regime. We believe these results show that thermoelastic generation of ultrasound is a promising alternative to piezoelectricity for high-frequency, 2-D arrays.

Characterization of an optical multilayer hydrophone with constant frequency response in the range from 1 to 75 MHz

The performance of an optical multilayer hydrophone for ultrasound measurements is investigated both in theoretical terms and experimentally. The optical measurement system comprises a thin high-finesse dielectric interference filter structure that is deposited onto a plane glass plate. An incident acoustic pressure wave deforms the layer system, and the induced variation of the optical reflectance is determined. Applying the concept of an optical off-axis detection scheme offers good sensitivity and a simple and low-cost setup. A primary interferometric calibration technique is applied to experimentally determine the pressure-voltage transfer function in the range from 1 to 75 MHz. Within the measurement uncertainty a constant transfer factor is obtained for the whole frequency range. Measurements of broadband ultrasound pulses are influenced neither by acoustic resonances of the very thin sensing element nor by diffraction phenomena that are known to cause waveform distortions in small probe hydrophone measurements. High temporal and spatial resolution is combined with high durability of the probe, which is why the optical multilayer hydrophone is well suited for use as a reference for secondary hydrophone calibration.

Efficient laser-ultrasound generation by using heavily absorbing films as targets

An efficient all-fiber optic source is presented; it adopts absorbing films, deposed directly over the fiber tip, as targets. It is demonstrated that the use of absorbing films made of pure graphite, or graphite powder mixed with epoxy resin, has produced a conversion efficiency increase of two orders of magnitude with respect to metallic materials. It is observed that the conversion efficiency increases monotonically as thickness is reduced down to the material optical penetration depth. Moreover, the conversion efficiency rises with the concentration of graphite powder. Principal advantages of this kind of source are the ease of production and miniaturization, the excellent electromagnetic compatibility, wide ultrasonic bandwidth and, consequently, high spatial resolution. The ultrasonic bandwidth can be controlled by varying the laser pulse duration. The possibility of generating ultrasonic signals with high frequency and flat spectral distribution makes the proposed device suitable for biological tissue spectral characterization.