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Suarez-Castellanos IM, de Sallmard G, Vanstaevel G, Ganeau A, Bawiec C, Chapelon JY, Guillen N, Senegond N, N'Djin WA. Dynamic Ultrasound Focusing and Centimeter-Scale Ex Vivo Tissue Ablations With a CMUT Probe Developed for Endocavitary HIFU Therapies. IEEE TRANSACTIONS ON ULTRASONICS, FERROELECTRICS, AND FREQUENCY CONTROL 2023; 70:1470-1481. [PMID: 37540608 DOI: 10.1109/tuffc.2023.3301977] [Citation(s) in RCA: 0] [Impact Index Per Article: 0] [Reference Citation Analysis] [Abstract] [MESH Headings] [Track Full Text] [Subscribe] [Scholar Register] [Indexed: 08/06/2023]
Abstract
Thermal ablation of localized prostate tumors via endocavitary ultrasound-guided high-intensity focused ultrasound (USgHIFU) faces challenges that could be alleviated by better integration of dual modalities (imaging/therapy). Capacitive micromachined ultrasound transducers (CMUTs) may provide an alternative to existing piezoelectric technologies by exhibiting advanced integration capability through miniaturization, broad frequency bandwidth, and potential for high electroacoustic efficiency. An endocavitary dual-mode USgHIFU probe was built to investigate the potential of using CMUT technologies for transrectal prostate cancer ablative therapy. The USgHIFU probe included a planar 64-element annular high-intensity focused ultrasound (HIFU) CMUT array ( [Formula: see text] = 3 MHz) surrounding a 256-element linear imaging CMUT array. Acoustic characterization of the HIFU array included 3-D pressure field mapping and radiation force balance measurements. Ex vivo proof-of-concept experiments consisted in generating HIFU thermal ablations with the CMUT probe on porcine liver tissues. The planar CMUT probe enabled HIFU dynamic focusing (distance range: 32-72 mm) while providing acoustic surface intensities of 1 W/cm2 that allowed producing elementary ex vivo ablations in depth of liver tissue ( L ×W ≈ 10×5 mm). Combinations of dynamic focusing, along with probe rotation and translation produced larger thermal ablations ( L ×W ≈ 20×20 mm) by juxtaposing multiple elementary ablations, consistent with expected results obtained through numerical modeling. The technical feasibility of using a USgHIFU probe, fully developed using CMUTs for tissue ablation purposes, was demonstrated. The HIFU-CMUT array showed tissue ablation capabilities with volumes compatible with localized cancer targeting, thus providing assets for further development of focal therapies.
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Kook G, Jo Y, Oh C, Liang X, Kim J, Lee SM, Kim S, Choi JW, Lee HJ. Multifocal skull-compensated transcranial focused ultrasound system for neuromodulation applications based on acoustic holography. MICROSYSTEMS & NANOENGINEERING 2023; 9:45. [PMID: 37056421 PMCID: PMC10085992 DOI: 10.1038/s41378-023-00513-3] [Citation(s) in RCA: 8] [Impact Index Per Article: 4.0] [Reference Citation Analysis] [Abstract] [Key Words] [Grants] [Track Full Text] [Subscribe] [Scholar Register] [Received: 12/09/2022] [Revised: 01/20/2023] [Accepted: 02/14/2023] [Indexed: 06/05/2023]
Abstract
Transcranial focused ultrasound stimulation is a promising therapeutic modality for human brain disorders because of its noninvasiveness, long penetration depth, and versatile spatial control capability through beamforming and beam steering. However, the skull presents a major hurdle for successful applications of ultrasound stimulation. Specifically, skull-induced focal aberration limits the capability for accurate and versatile targeting of brain subregions. In addition, there lacks a fully functional preclinical neuromodulation system suitable to conduct behavioral studies. Here, we report a miniature ultrasound system for neuromodulation applications that is capable of highly accurate multiregion targeting based on acoustic holography. Our work includes the design and implementation of an acoustic lens for targeting brain regions with compensation for skull aberration through time-reversal recording and a phase conjugation mirror. Moreover, we utilize MEMS and 3D-printing technology to implement a 0.75-g lightweight neuromodulation system and present in vivo characterization of the packaged system in freely moving mice. This preclinical system is capable of accurately targeting the desired individual or multitude of brain regions, which will enable versatile and explorative behavior studies using ultrasound neuromodulation to facilitate widespread clinical adoption.
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Affiliation(s)
- Geon Kook
- School of Electrical Engineering, Korea Advanced Institute of Science and Technology, 291 Daehak-ro, Yuseong-gu, Daejeon, 34141 South Korea
| | - Yehhyun Jo
- School of Electrical Engineering, Korea Advanced Institute of Science and Technology, 291 Daehak-ro, Yuseong-gu, Daejeon, 34141 South Korea
| | - Chaerin Oh
- School of Electrical Engineering, Korea Advanced Institute of Science and Technology, 291 Daehak-ro, Yuseong-gu, Daejeon, 34141 South Korea
| | - Xiaojia Liang
- School of Electrical Engineering, Korea Advanced Institute of Science and Technology, 291 Daehak-ro, Yuseong-gu, Daejeon, 34141 South Korea
| | - Jaewon Kim
- School of Electrical Engineering, Korea Advanced Institute of Science and Technology, 291 Daehak-ro, Yuseong-gu, Daejeon, 34141 South Korea
| | - Sang-Mok Lee
- School of Electrical Engineering, Korea Advanced Institute of Science and Technology, 291 Daehak-ro, Yuseong-gu, Daejeon, 34141 South Korea
| | - Subeen Kim
- School of Electrical Engineering, Korea Advanced Institute of Science and Technology, 291 Daehak-ro, Yuseong-gu, Daejeon, 34141 South Korea
| | - Jung-Woo Choi
- School of Electrical Engineering, Korea Advanced Institute of Science and Technology, 291 Daehak-ro, Yuseong-gu, Daejeon, 34141 South Korea
| | - Hyunjoo Jenny Lee
- School of Electrical Engineering, Korea Advanced Institute of Science and Technology, 291 Daehak-ro, Yuseong-gu, Daejeon, 34141 South Korea
- KAIST Institute for NanoCentury (KINC), 291 Daehak-ro, Yuseong-gu, Daejeon, 34141 Republic of Korea
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Shanmugam P, Iglesias L, Michaud JF, Alquier D, Colin L, Dufour I, Certon D. Broad bandwidth air-coupled micromachined ultrasonic transducers for gas sensing. ULTRASONICS 2021; 114:106410. [PMID: 33761341 DOI: 10.1016/j.ultras.2021.106410] [Citation(s) in RCA: 1] [Impact Index Per Article: 0.3] [Reference Citation Analysis] [Abstract] [Key Words] [Track Full Text] [Subscribe] [Scholar Register] [Received: 09/02/2020] [Revised: 02/06/2021] [Accepted: 02/22/2021] [Indexed: 06/12/2023]
Abstract
The present work aims to develop ultra-wide bandwidth air-coupled capacitive micromachined ultrasonic transducers (CMUTs) for binary gas mixture analysis. The detection principle is based on time-of-flight (ToF) measurements, in order to monitor gas ultrasound velocity variations. To perform such measurements, CMUTs were especially designed to work out of resonance mode, like a microphone. The chosen membrane size is 32 × 32 µm2 and gap height is 250 nm. The resonance frequency and collapse voltage were found at 8 MHz and 58 V respectively. As mentioned, the CMUTs were exploited in quasi-static operating mode, in a very low frequency band, from 1 MHz to 1.5 MHz frequencies. The transducer impulse response was characterised, and a -6 dB relative fractional frequency bandwidth (FBW) higher than 100% was measured, enabling to use CMUT for the targeted application. Additionally, a measuring cell has been designed to hold the fabricated CMUT emitter and receiver prototypes facing each other. The volume inside the cell was kept lower than 3 mL and the surface of emitter/receiver was 1.6 × 8 mm2. To validate the general principle of the proposed technique, two binary gas mixtures of CO2/N2 and H2/N2, with varying concentrations, have been tested. The results are very promising with a measured limit of detection (LOD) of 0.3% for CO2 in N2 and 0.15% for H2 in N2.
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Affiliation(s)
- P Shanmugam
- GREMAN Laboratory UMR-CNRS 7347, University of Tours, 16 rue Pierre et Marie Curie, BP 7155, 37071 TOURS Cedex 2, France.
| | - L Iglesias
- IMS Laboratory UMR-CNRS 5218, University of Bordeaux, 351 cours de la libération, 33405 TALENCE Cedex, France.
| | - J F Michaud
- GREMAN Laboratory UMR-CNRS 7347, University of Tours, 16 rue Pierre et Marie Curie, BP 7155, 37071 TOURS Cedex 2, France.
| | - D Alquier
- GREMAN Laboratory UMR-CNRS 7347, University of Tours, 16 rue Pierre et Marie Curie, BP 7155, 37071 TOURS Cedex 2, France.
| | - L Colin
- GREMAN Laboratory UMR-CNRS 7347, University of Tours, 16 rue Pierre et Marie Curie, BP 7155, 37071 TOURS Cedex 2, France.
| | - I Dufour
- IMS Laboratory UMR-CNRS 5218, University of Bordeaux, 351 cours de la libération, 33405 TALENCE Cedex, France.
| | - D Certon
- GREMAN Laboratory UMR-CNRS 7347, University of Tours, 16 rue Pierre et Marie Curie, BP 7155, 37071 TOURS Cedex 2, France.
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Militello C, Rundo L, Vicari F, Agnello L, Borasi G, Vitabile S, Russo G. A Computational Study on Temperature Variations in MRgFUS Treatments Using PRF Thermometry Techniques and Optical Probes. J Imaging 2021; 7:63. [PMID: 34460513 PMCID: PMC8321332 DOI: 10.3390/jimaging7040063] [Citation(s) in RCA: 1] [Impact Index Per Article: 0.3] [Reference Citation Analysis] [Abstract] [Key Words] [Grants] [Track Full Text] [Download PDF] [Figures] [Journal Information] [Subscribe] [Scholar Register] [Received: 01/28/2021] [Revised: 03/16/2021] [Accepted: 03/23/2021] [Indexed: 12/18/2022] Open
Abstract
Structural and metabolic imaging are fundamental for diagnosis, treatment and follow-up in oncology. Beyond the well-established diagnostic imaging applications, ultrasounds are currently emerging in the clinical practice as a noninvasive technology for therapy. Indeed, the sound waves can be used to increase the temperature inside the target solid tumors, leading to apoptosis or necrosis of neoplastic tissues. The Magnetic resonance-guided focused ultrasound surgery (MRgFUS) technology represents a valid application of this ultrasound property, mainly used in oncology and neurology. In this paper; patient safety during MRgFUS treatments was investigated by a series of experiments in a tissue-mimicking phantom and performing ex vivo skin samples, to promptly identify unwanted temperature rises. The acquired MR images, used to evaluate the temperature in the treated areas, were analyzed to compare classical proton resonance frequency (PRF) shift techniques and referenceless thermometry methods to accurately assess the temperature variations. We exploited radial basis function (RBF) neural networks for referenceless thermometry and compared the results against interferometric optical fiber measurements. The experimental measurements were obtained using a set of interferometric optical fibers aimed at quantifying temperature variations directly in the sonication areas. The temperature increases during the treatment were not accurately detected by MRI-based referenceless thermometry methods, and more sensitive measurement systems, such as optical fibers, would be required. In-depth studies about these aspects are needed to monitor temperature and improve safety during MRgFUS treatments.
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Affiliation(s)
- Carmelo Militello
- Institute of Molecular Bioimaging and Physiology, Italian National Research Council (IBFM-CNR), Cefalu, 90015 Palermo, Italy;
| | - Leonardo Rundo
- Department of Radiology, University of Cambridge, Cambridge CB2 0QQ, UK;
- Cancer Research UK Cambridge Centre, Cambridge CB2 0RE, UK
| | - Fabrizio Vicari
- LAboratorio di Tecnologie Oncologiche (LATO), Cefalu, 90015 Palermo, Italy; (F.V.); (G.B.)
| | - Luca Agnello
- Department of Biomedicine, Neuroscience and Advanced Diagnostics (BiND), University of Palermo, 90127 Palermo, Italy; (L.A.); (S.V.)
| | - Giovanni Borasi
- LAboratorio di Tecnologie Oncologiche (LATO), Cefalu, 90015 Palermo, Italy; (F.V.); (G.B.)
| | - Salvatore Vitabile
- Department of Biomedicine, Neuroscience and Advanced Diagnostics (BiND), University of Palermo, 90127 Palermo, Italy; (L.A.); (S.V.)
| | - Giorgio Russo
- Institute of Molecular Bioimaging and Physiology, Italian National Research Council (IBFM-CNR), Cefalu, 90015 Palermo, Italy;
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Guo Q, Su X, Zhang X, Shao M, Yu H, Li D. A review on acoustic droplet ejection technology and system. SOFT MATTER 2021; 17:3010-3021. [PMID: 33710210 DOI: 10.1039/d0sm02193h] [Citation(s) in RCA: 13] [Impact Index Per Article: 3.3] [Reference Citation Analysis] [Abstract] [Track Full Text] [Subscribe] [Scholar Register] [Indexed: 06/12/2023]
Abstract
The pace of change in chemical and biological research enabled by improved detection systems demands fundamental liquid handling and sample preparation changes. The acoustic droplet ejection (ADE)-based liquid handling method has the advantages of improving precision and data reproducibility, reducing costs, hands-on time, and eliminating waste. ADE gradually replaced traditional aspiration-and-dispense liquid-handling robots in applications such as synthetic biology, genotyping, personalized medicine, and next-generation sequencing. This review emphatically introduces the setup of the ADE system and the critical technologies of each part, including acoustic droplet generation, optimized design of the source fluid wells, droplet coalescence, and power control. The advantages and disadvantages of these technologies are discussed, and the future development of acoustic droplet ejection technology is also predicted.
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Affiliation(s)
- Qing Guo
- State Key Laboratory of Precision Measurement Technology and Instruments, Tianjin University, Tianjin 300072, China.
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Dauba A, Goulas J, Colin L, Jourdain L, Larrat B, Gennisson JL, Certon D, Novell A. Evaluation of capacitive micromachined ultrasonic transducers for passive monitoring of microbubble-assisted ultrasound therapies. THE JOURNAL OF THE ACOUSTICAL SOCIETY OF AMERICA 2020; 148:2248. [PMID: 33138521 DOI: 10.1121/10.0002096] [Citation(s) in RCA: 1] [Impact Index Per Article: 0.2] [Reference Citation Analysis] [Abstract] [MESH Headings] [Track Full Text] [Subscribe] [Scholar Register] [Received: 04/11/2020] [Accepted: 09/11/2020] [Indexed: 06/11/2023]
Abstract
Passive cavitation detection can be performed to monitor microbubble activity during brain therapy. Microbubbles under ultrasound exposure generate a response characterized by multiple nonlinear emissions. Here, the wide bandwidth of capacitive micromachined ultrasonic transducers (CMUTs) was exploited to monitor the microbubble signature through a rat skull and a macaque skull. The intrinsic nonlinearity of the CMUTs was characterized in receive mode. Indeed, undesirable nonlinear components generated by the CMUTs must be minimized as they can mask the microbubble harmonic response. The microbubble signature at harmonic and ultra-harmonic components (0.5-6 MHz) was successfully extracted through a rat skull using moderate bias voltage.
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Affiliation(s)
- Ambre Dauba
- Université Paris-Saclay, CEA, CNRS, Inserm, BioMaps, Service Hospitalier Frédéric Joliot, Orsay, 91401, France
| | - Jordane Goulas
- Université Paris-Saclay, CEA, CNRS, Inserm, BioMaps, Service Hospitalier Frédéric Joliot, Orsay, 91401, France
| | - Laurent Colin
- GREMAN CNRS UMR 7347, Université François Rabelais, INSA Centre Val de Loire, Tours, France
| | - Laurène Jourdain
- Université Paris-Saclay, CEA, CNRS, Inserm, BioMaps, Service Hospitalier Frédéric Joliot, Orsay, 91401, France
| | - Benoit Larrat
- Université Paris-Saclay, CEA, CNRS, Baobab, NeuroSpin, Gif-sur-Yvette, 91191, France
| | - Jean-Luc Gennisson
- Université Paris-Saclay, CEA, CNRS, Inserm, BioMaps, Service Hospitalier Frédéric Joliot, Orsay, 91401, France
| | - Dominique Certon
- GREMAN CNRS UMR 7347, Université François Rabelais, INSA Centre Val de Loire, Tours, France
| | - Anthony Novell
- Université Paris-Saclay, CEA, CNRS, Inserm, BioMaps, Service Hospitalier Frédéric Joliot, Orsay, 91401, France
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7
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Noninvasive sub-organ ultrasound stimulation for targeted neuromodulation. Nat Commun 2019; 10:952. [PMID: 30862827 PMCID: PMC6414607 DOI: 10.1038/s41467-019-08750-9] [Citation(s) in RCA: 127] [Impact Index Per Article: 21.2] [Reference Citation Analysis] [Abstract] [Track Full Text] [Download PDF] [Figures] [Journal Information] [Subscribe] [Scholar Register] [Received: 06/26/2018] [Accepted: 01/22/2019] [Indexed: 12/20/2022] Open
Abstract
Tools for noninvasively modulating neural signaling in peripheral organs will advance the study of nerves and their effect on homeostasis and disease. Herein, we demonstrate a noninvasive method to modulate specific signaling pathways within organs using ultrasound (U/S). U/S is first applied to spleen to modulate the cholinergic anti-inflammatory pathway (CAP), and US stimulation is shown to reduce cytokine response to endotoxin to the same levels as implant-based vagus nerve stimulation (VNS). Next, hepatic U/S stimulation is shown to modulate pathways that regulate blood glucose and is as effective as VNS in suppressing the hyperglycemic effect of endotoxin exposure. This response to hepatic U/S is only found when targeting specific sub-organ locations known to contain glucose sensory neurons, and both molecular (i.e. neurotransmitter concentration and cFOS expression) and neuroimaging results indicate US induced signaling to metabolism-related hypothalamic sub-nuclei. These data demonstrate that U/S stimulation within organs provides a new method for site-selective neuromodulation to regulate specific physiological functions. Stimulation of peripheral nerve activity may be used to treat metabolic and inflammatory disorders, but current approaches need implanted devices. Here, the authors present a non-invasive approach, and show that ultrasound-mediated stimulation can be targeted to specific sub-organ locations in preclinical models and alter the response of metabolic and inflammatory neural pathways.
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8
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Bawiec C, N'Djin W, Bouchoux G, Sénégond N, Guillen N, Chapelon JY. Preliminary Investigation of a 64-element Capacitive Micromachined Ultrasound Transducer (CMUT) Annular Array Designed for High Intensity Focused Ultrasound (HIFU). Ing Rech Biomed 2018. [DOI: 10.1016/j.irbm.2018.09.001] [Citation(s) in RCA: 12] [Impact Index Per Article: 1.7] [Reference Citation Analysis] [Track Full Text] [Journal Information] [Subscribe] [Scholar Register] [Indexed: 01/05/2023]
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Heller J, Boulme A, Alquier D, Ngo S, Certon D. Performance Evaluation of CMUT-Based Ultrasonic Transformers for Galvanic Isolation. IEEE TRANSACTIONS ON ULTRASONICS, FERROELECTRICS, AND FREQUENCY CONTROL 2018; 65:617-629. [PMID: 29610091 DOI: 10.1109/tuffc.2018.2796303] [Citation(s) in RCA: 1] [Impact Index Per Article: 0.1] [Reference Citation Analysis] [Abstract] [Track Full Text] [Subscribe] [Scholar Register] [Indexed: 06/08/2023]
Abstract
This paper presents the development of a novel acoustic transformer with high galvanic isolation dedicated to power switch triggering. The transformer is based on two capacitive micromachined ultrasonic transducers layered on each side of a silicon substrate; one is the primary circuit, and the other is the secondary circuit. The thickness mode resonance of the substrate is leveraged to transmit the triggering signal. The fabrication and characterization of an initial prototype is presented in this paper. All experimental results are discussed, from the electrical impedance measurements to the power efficiency measurements, for different electrical load conditions. A comparison with a specifically developed finite-element method model is done. Simulations are finally used to identify the optimization rules of this initial prototype. It is shown that the power efficiency can be increased from 35% to 60%, and the transmitted power can be increased from 1.6 to 45 mW/Volt.
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Sun C, Jiang S, Liu Y. Numerical Study and Optimisation of a Novel Single-Element Dual-Frequency Ultrasound Transducer. SENSORS 2018; 18:s18030703. [PMID: 29495438 PMCID: PMC5877122 DOI: 10.3390/s18030703] [Citation(s) in RCA: 6] [Impact Index Per Article: 0.9] [Reference Citation Analysis] [Abstract] [Key Words] [Track Full Text] [Download PDF] [Figures] [Subscribe] [Scholar Register] [Received: 01/13/2018] [Revised: 02/16/2018] [Accepted: 02/23/2018] [Indexed: 11/16/2022]
Abstract
A dual-frequency ultrasound transducer (DFUT) is usually preferred for its numerous advantageous applications, especially in biomedical imaging and sensing. However, most of DFUTs are based on the combination of fundamental and harmonic operations, or integration of multiple different single-frequency ultrasound transducers, hindering perfect beam alignment and acoustic impedance matching. A novel single-element DFUT has been proposed in this paper. A small piezoelectric membrane is used as the high-frequency ultrasound transducer, which is stacked on a large non-piezoelectric elastic membrane with a groove used as the low-frequency capacitive ultrasound transducer. Such a capacitive-piezoelectric hybrid structure is theoretically analysed in details, based on the electrostatic attraction force and converse piezoelectric effect. Both the low and high resonance frequencies are independently derived, with a maximum deviation of less than 4% from the finite element simulations. Besides, a lumped-parameter equivalent circuit model of combining both the capacitive and piezoelectric ultrasound transducers was also described. Based on our dual-frequency structure design, a high-to-low frequency ratio of about 2 to more than 20 could be achieved, with easy and independent controllability of two frequencies, and the high-frequency operation shows at least an order-of-magnitude displacement sensitivity improvement compared with the conventional harmonic operations.
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Affiliation(s)
- Changhe Sun
- Key Laboratory of Optoelectronic Technology & Systems, Chongqing University, Ministry of Education, Chonqing 400044, China.
- Centre for Intelligent Sensing Technology, College of Optoelectronic Engineering, Chongqing University, Chongqing 400044, China.
| | - Senlin Jiang
- Key Laboratory of Optoelectronic Technology & Systems, Chongqing University, Ministry of Education, Chonqing 400044, China.
- Centre for Intelligent Sensing Technology, College of Optoelectronic Engineering, Chongqing University, Chongqing 400044, China.
| | - Yufei Liu
- Key Laboratory of Optoelectronic Technology & Systems, Chongqing University, Ministry of Education, Chonqing 400044, China.
- Centre for Intelligent Sensing Technology, College of Optoelectronic Engineering, Chongqing University, Chongqing 400044, China.
- Collaborative Innovation Center for Brain Science, Chongqing University, Chongqing 400044, China.
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Hynynen K, Jones RM. Image-guided ultrasound phased arrays are a disruptive technology for non-invasive therapy. Phys Med Biol 2016; 61:R206-48. [PMID: 27494561 PMCID: PMC5022373 DOI: 10.1088/0031-9155/61/17/r206] [Citation(s) in RCA: 75] [Impact Index Per Article: 8.3] [Reference Citation Analysis] [Abstract] [MESH Headings] [Grants] [Track Full Text] [Journal Information] [Subscribe] [Scholar Register] [Indexed: 12/31/2022]
Abstract
Focused ultrasound offers a non-invasive way of depositing acoustic energy deep into the body, which can be harnessed for a broad spectrum of therapeutic purposes, including tissue ablation, the targeting of therapeutic agents, and stem cell delivery. Phased array transducers enable electronic control over the beam geometry and direction, and can be tailored to provide optimal energy deposition patterns for a given therapeutic application. Their use in combination with modern medical imaging for therapy guidance allows precise targeting, online monitoring, and post-treatment evaluation of the ultrasound-mediated bioeffects. In the past there have been some technical obstacles hindering the construction of large aperture, high-power, densely-populated phased arrays and, as a result, they have not been fully exploited for therapy delivery to date. However, recent research has made the construction of such arrays feasible, and it is expected that their continued development will both greatly improve the safety and efficacy of existing ultrasound therapies as well as enable treatments that are not currently possible with existing technology. This review will summarize the basic principles, current statures, and future potential of image-guided ultrasound phased arrays for therapy.
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Affiliation(s)
- Kullervo Hynynen
- Physical Sciences Platform, Sunnybrook Research Institute, Toronto, Canada. Department of Medical Biophysics, University of Toronto, Toronto, Canada. Institute of Biomaterials and Biomedical Engineering, University of Toronto, Toronto, Canada
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Zhang W, Zhang H, Jin S, Zeng Z. An Analytical Model for CMUTs with Square Multilayer Membranes Using the Ritz Method. MICROMACHINES 2016; 7:mi7040055. [PMID: 30407428 PMCID: PMC6189930 DOI: 10.3390/mi7040055] [Citation(s) in RCA: 4] [Impact Index Per Article: 0.4] [Reference Citation Analysis] [Abstract] [Key Words] [Track Full Text] [Download PDF] [Figures] [Subscribe] [Scholar Register] [Received: 12/22/2015] [Revised: 03/21/2016] [Accepted: 03/22/2016] [Indexed: 11/16/2022]
Abstract
Capacitive micromachined ultrasonic transducer (CMUT) multilayer membrane plays an important role in the performance metrics including the transmitting efficiency and the receiving sensitivity. However, there are few studies of the multilayer membranes. Some analytical models simplify the multilayer membrane as monolayer, which results in inaccuracies. This paper presents a new analytical model for CMUTs with multilayer membranes, which can rapidly and accurately predict static deflection and response frequency of the multilayer membrane under external pressures. The derivation is based on the Ritz method and Hamilton’s principle. The mathematical relationships between the external pressure, static deflection, and response frequency are obtained. Relevant residual stress compensation method is derived. The model has been verified for three-layer and double-layer CMUT membranes by comparing its results with finite element method (FEM) simulations, experimental data, and other monolayer models that treat CMUTs as monolayer plates/membranes. For three-layer CMUT membranes, the relative errors are ranging from 0.71%–3.51% for the static deflection profiles, and 0.35%–4.96% for the response frequencies, respectively. For the double-layer CMUT membrane, the relative error with residual stress compensation is 4.14% for the central deflection, and −1.17% for the response frequencies, respectively. This proposed analytical model can serve as a reliable reference and an accurate tool for CMUT design and optimization.
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Affiliation(s)
- Wen Zhang
- State Key Laboratory of Precision Measurement Technology and Instrument, Tianjin University, Tianjin 300072, China.
| | - Hui Zhang
- State Key Laboratory of Precision Measurement Technology and Instrument, Tianjin University, Tianjin 300072, China.
| | - Shijiu Jin
- State Key Laboratory of Precision Measurement Technology and Instrument, Tianjin University, Tianjin 300072, China.
| | - Zhoumo Zeng
- State Key Laboratory of Precision Measurement Technology and Instrument, Tianjin University, Tianjin 300072, China.
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