Evaluation of wafer bonded CMUTs with rectangular membranes featuring high fill factor

Radiation Impedance of Rectangular CMUTs

Recently, capacitive micromachined ultrasound transducers (CMUTs) with long rectangular membranes have demonstrated performance advantages over conventional piezoelectric transducers; however, modeling these CMUT geometries has been limited to computationally burdensome numerical methods. Improved fast modeling methods, such as equivalent circuit models, could help achieve designs with even better performance. The primary obstacle in developing such methods is the lack of tractable methods for computing the radiation impedance of clamped rectangular radiators. This paper presents a method that approximates the velocity profile using a polynomial shape model to rapidly and accurately estimate radiation impedance. The validity of the approximate velocity profile and corresponding radiation impedance calculation was assessed using finite element simulations for a variety of membrane aspect ratios and bias voltages. Our method was evaluated for rectangular radiators with width:length ratios from 1:1 up to 1:25. At all aspect ratios, the radiation resistance was closely modeled. However, when calculating the radiation reactance, our initial approach was only accurate for low aspect ratios. This motivated us to consider an alternative shape model for high aspect ratios, which was more accurate when compared with FEM. To facilitate the development of future rectangular CMUTs, we provide a MATLAB script that quickly calculates radiation impedance using both methods.

Outperforming piezoelectric ultrasonics with high-reliability single-membrane CMUT array elements

It has long been hypothesized that capacitive micromachined ultrasound transducers (CMUTs) could potentially outperform piezoelectric technologies. However, challenges with dielectric charging, operational hysteresis, and transmit sensitivity have stood as obstacles to these performance outcomes. In this paper, we introduce key architectural features to enable high-reliability CMUTs with enhanced performance. Typically, a CMUT element in an array is designed with an ensemble of smaller membranes oscillating together to transmit or detect ultrasound waves. However, this approach can lead to unreliable behavior and suboptimal transmit performance if these smaller membranes oscillate out of phase or collapse at different voltages. In this work, we designed CMUT array elements composed of a single long rectangular membrane, with the aim of improving the output pressure and electromechanical efficiency. We compare the performance of three different modifications of this architecture: traditional contiguous dielectric, isolated isolation post (IIP), and insulated electrode-post (EP) CMUTs. EPs were designed to improve performance while also imparting robustness to charging and minimization of hysteresis. To fabricate these devices, a wafer-bonding process was developed with near-100% bonding yield. EP CMUT elements achieved electromechanical efficiency values as high as 0.95, higher than values reported with either piezoelectric transducers or previous CMUT architectures. Moreover, all investigated CMUT architectures exhibited transmit efficiency 2-3 times greater than published CMUT or piezoelectric transducer elements in the 1.5-2.0 MHz range. The EP and IIP CMUTs demonstrated considerable charging robustness, demonstrating minimal charging over 500,000 collapse-snap-back actuation cycles while also mitigating hysteresis. Our proposed approach offers significant promise for future ultrasonic applications.

Closed-Form Expressions on CMUTs With Layered Anisotropic Microplates Under Residual Stress and Pressure

Capacitive micromachined ultrasonic transducers (CMUTs) are promising in the emerging fields of personalized ultrasonic diagnostics, therapy, and noninvasive 3-D biometric. However, previous theories describing their mechanical behavior rarely consider multilayer and anisotropic material properties, resulting in limited application and significant analysis errors. This article proposes closed-form expressions for the static deflection, collapse voltage, and resonant frequency of circular-microplate-based CMUTs, which consider both the aforementioned properties as well as the effects of residual stress and hydrostatic pressure. These expressions are established by combining the classical laminated thin plate (CLTP) theory, Galerkin method, a partial expansion approach for electrostatic force, and an energy equivalent method. A parametric study based on finite-element method simulations shows that considering the material anisotropy can significantly improve analysis accuracy (~25 times higher than the theories neglecting the material anisotropy). These expressions maintain accuracy across almost the whole working voltage range (up to 96% of collapse voltages) and a wide dimension range (diameter-to-thickness ratios of 20-80 with gap-to-thickness ratios of ≤2). Furthermore, their utility in practical applications is well verified using numerical results based on more realistic boundary conditions and experimental results of CMUT chips. Finally, we demonstrate that the high accuracy of these expressions at thickness-comparable deflection results from the extended applicable deflection range of the CLTP theory when it is used for electrostatically actuated microplates.

A Novel Hexagonal Beam Steering Electrowetting Device for Solar Energy Concentration

Traditional tracking devices for solar energy applications have several disadvantages, such as bulky mechanical structure, large wind loads, and ease of misalignment. This study aims to design a flat, thin, and adaptive beam steering device to eliminate these drawbacks. A proof of concept device was fabricated to demonstrate this design. The novelty of the proof of concept device is the hexagonal structure of the electrowetting cell design. The hexagonal cell was dosed with two immiscible liquids with different refractive indices. The hypothesis of this design is that by deforming the liquid shape with the application of voltage, light can be steered and concentrated for solar energy applications. A maximum contact angle change of 44° was observed with the application of 26 V to one of the electrodes of the hexagonal cell. The device demonstrated a 4.5° change of laser beam path with only a 0.2 refractive index difference of the liquids. The 3D simulation model developed in this study shows that a tilted and flat interface can be achieved using higher dielectric constant dielectric materials. The device can facilitate the planer steering and concentration of sunlight for rooftop applications without moving mechanical parts.

Capacitive Micromachined Ultrasound Transducers for Interstitial High-Intensity Ultrasound Therapies

Capacitive micromachined ultrasound transducers (CMUTs) exhibit several potential advantages over conventional piezo technologies for use in therapeutic ultrasound (US) devices, including ease of miniaturization and integration with electronics, broad bandwidth (>several megahertz), and compatibility with magnetic resonance imaging (MRI). In this paper, the electroacoustic performance of CMUTs designed for interstitial high-intensity contact US (HICU) applications was evaluated and the feasibility of generating US-induced heating and thermal destruction of biological tissues was studied. One-dimensional CMUT linear arrays as well as a prism-shaped 2-D array composed of multiple 1-D linear arrays mounted on a cylindrical catheter were fabricated. The electromechanical and acoustic characteristics of the CMUTs were first studied at low intensity. Then, the acoustic output during continuous wave (CW) driving was studied while varying the bias voltage ( V_DC ) and driving voltage ( V_AC ). US heating was performed in tissue-mimicking gel phantoms under infrared (IR) or MR-thermometry monitoring. Acoustic intensities compatible with thermal ablation were obtained by driving the CMUTs in the collapse-snapback operation mode ( [Formula: see text]). Hysteresis in the acoustic output was observed with varying V_DC . IR- and MR-thermometry monitoring showed directional US-induced heating patterns in tissue-mimicking phantoms (frequency: 6-8 MHz and exposure time: 60-240 s) extending over 1.5-cm depth from the CMUT surface. Irreversible thermal damage was produced in turkey breast tissue samples ( [Formula: see text]). Multidirectional US-induced heating was also achieved in 3-D with the CMUT catheter. These studies demonstrate that CMUTs can be integrated into HICU devices and be used for heating and destruction of tissue under MR guidance.

Stroboscopic scanning white light interferometry at 2.7 MHz with 1.6 µm coherence length using a non-phosphor LED source

Stroboscopic scanning white light interferometry (SSWLI) allows precise three dimensional (3D) measurements of oscillating samples. Commercial SSWLI devices feature limited pulsing frequency. To address this issue we built a 400-620 nm wideband 150 mW light source whose 1.6 µm wide interferogram is without side peaks. The source combines a non-phosphor white LED with a cyan LED. We measured a calibration artifact with 10 nm precision and obtained 40 nm precision when measuring the 3D profile of a capacitive micromachined ultrasonic transducer membrane operating at 2.72 MHz. This source is compatible with solid state technology.

Deep-collapse operation of capacitive micromachined ultrasonic transducers

Capacitive micromachined ultrasonic transducers (CMUTs) have been introduced as a promising technology for ultrasound imaging and therapeutic ultrasound applications which require high transmitted pressures for increased penetration, high signal-to-noise ratio, and fast heating. However, output power limitation of CMUTs compared with piezoelectrics has been a major drawback. In this work, we show that the output pressure of CMUTs can be significantly increased by deep-collapse operation, which utilizes an electrical pulse excitation much higher than the collapse voltage. We extend the analyses made for CMUTs working in the conventional (uncollapsed) region to the collapsed region and experimentally verify the findings. The static deflection profile of a collapsed membrane is calculated by an analytical approach within 0.6% error when compared with static, electromechanical finite element method (FEM) simulations. The electrical and mechanical restoring forces acting on a collapsed membrane are calculated. It is demonstrated that the stored mechanical energy and the electrical energy increase nonlinearly with increasing pulse amplitude if the membrane has a full-coverage top electrode. Utilizing higher restoring and electrical forces in the deep-collapsed region, we measure 3.5 MPa peak-to-peak pressure centered at 6.8 MHz with a 106% fractional bandwidth at the surface of the transducer with a collapse voltage of 35 V, when the pulse amplitude is 160 V. The experimental results are verified using transient FEM simulations.

Capacitive micromachined ultrasonic transducers using commercial multi-user MUMPs process: capability and limitations

The objective of this work is to construct capacitive micromachined ultrasound transducers (cMUTs) using multi-user microelectromechanical systems (MEMS) processess (MUMPs) and to analyze the capability of this process relative to the customized processes commonly in use. The MUMPs process has the advantages of low cost and accessibility to general users since it is not necessary to have access to customized fabrication capability such as wafer-bonding and sacrificial release processes. While other researchers have reported fabricating cMUTs using the MUMPs process none has reported the limitations in the process that arise due to the use of standard design rules that place limitations on the material thicknesses, gap thicknesses, and materials that may be used. In this paper we explain these limitations, and analyze the capabilities using 1D modeling, Finite Element Analysis, and experimental devices. We show that one of the limitations is that collapse voltage and center frequency can not be controlled independently. However, center frequencies up to 9 MHz can be achieved with collapse voltages of less than 200 V making such devices suitable for medical and non-destructive evaluation imaging applications. Since the membrane and base electrodes are made of polysilicon, there is a larger series resistance than that resulting from processes that use metal electrodes. We show that the series resistance is not a significant problem. The conductive polysilicon can also destroy the cMUT if the top membrane is pulled in the bottom. As a solution we propose the application of an additional dielectric layer. Finally we demonstrate a device built with a novel beam construction that produces transmitted pressure pulse into air with 6% bandwidth and agrees reasonably well with the 1D model. We conclude that cMUTs made with MUMPs process have some limitations that are not present in customized processes. However, these limitations may be overcome with the proper design considerations that we have presented putting a low cost, highly accessible means of making cMUT devices into the hands of academic and industrial researchers.

Capacitive micromachined ultrasonic transducers for therapeutic ultrasound applications

Therapeutic ultrasound guided by MRI is a noninvasive treatment that potentially reduces mortality, lowers medical costs, and widens accessibility of treatments for patients. Recent developments in the design and fabrication of capacitive micromachined ultrasonic transducers (CMUTs) have made them competitive with piezoelectric transducers for use in therapeutic ultrasound applications. In this paper, we present the first designs and prototypes of an eight-element, concentric-ring, CMUT array to treat upper abdominal cancers. This array was simulated and designed to focus 30-50 mm into tissue, and ablate a 2- to 3-cm-diameter tumor within 1 h. Assuming a surface acoustic output pressure of 1 MPa peak-to-peak (8.5 W/cm (2)) at 2.5 MHz, we simulated an array that produced a focal intensity of 680 W/cm (2) when focusing to 35 mm. CMUT cells were then designed to meet these frequency and surface acoustic intensity specifications. These cell designs were fabricated as 2.5 mm x 2.5 mm test transducers and used to verify our models. The test transducers were shown to operate at 2.5 MHz with an output pressure of 1.4 MPa peak-to-peak (16.3 W/cm (2)). With this CMUT cell design, we fabricated a full eight-element array. Due to yield issues, we only developed electronics to focus the four center elements of the array. The beam profile of the measured array deviated from the simulated one because of the crosstalk effects; the beamwidth matched within 10% and sidelobes increased by two times, which caused the measured gain to be 16.6 compared to 27.4.