Fabrication of thin-film micropolarizer arrays for visible imaging polarimetry

Disordered metasurface enabled single-shot full-Stokes polarization imaging leveraging weak dichroism

Polarization, one of the fundamental properties of light, is critical for certain imaging applications because it captures information from the scene that cannot directly be recorded by traditional intensity cameras. Currently, mainstream approaches for polarization imaging rely on strong dichroism of birefringent crystals or artificially fabricated structures that exhibit a high diattenuation typically exceeding 99%, which corresponds to a polarization extinction ratio (PER) >~100. This not only limits the transmission efficiency of light, but also makes them either offer narrow operational bandwidth or be non-responsive to the circular polarization. Here, we demonstrate a single-shot full-Stokes polarization camera incorporating a disordered metasurface array with weak dichroism. The diattenuation of the metasurface array is ~65%, which corresponds to a PER of ~2. Within the framework of compressed sensing, the proposed disordered metasurface array serves as an efficient sensing matrix. By incorporating a mask-aware reconstruction algorithm, the signal can be accurately recovered with a high probability. In our experiments, the proposed approach exhibits high-accuracy full-Stokes polarimetry and high-resolution real-time polarization imaging. Our demonstration highlights the potential of combining meta-optics with reconstruction algorithms as a promising approach for advanced imaging applications.

Pixelated Micropolarizer Array Based on Carbon Nanotube Films

A micropolarizer array (MPA) that can be integrated into a scientific camera is proposed as a real-time polarimeter that is capable of extracting the polarization parameters. The MPA is based on highly aligned carbon nanotube (CNT) films inspired by their typical anisotropy and selectivity for light propagation over a wide spectral range. The MPA contains a dual-tier CNT pixel plane with 0° and 45° orientations. The thickness of the dual-tier structure of the CNT-based MPA is limited to less than 2 μm with a pixel size of 7.45 μm × 7.45 μm. The degree of polarization of the CNT-MPA reached 93% at a 632 nm wavelength. The specific designs in structure and semiconductor fabrication procedures are described. Compared with customary MPAs, CNT-based MPA holds great potential in decreasing the cross-talk risk associated with lower film thickness and can be extended to a wide spectral range.

Investigation and optimization of polarization properties of self-assembled carbon nanotube films

Super-aligned carbon nanotubes (CNTs) film has strong anisotropy to light propagation. In order to better integrate the self-assembled CNTs into microelectromechanical system (MEMS) for polarization applications, some inherent impacts on polarization properties of CNT film were investigated. We described the polarization effects of the film thickness variation in detail, giving an optimum thickness range which is around 700-800 nm. The amorphous carbon content of CNT film was reduced by oxidation process where the transmittance increased by almost 4 folds. The alignment of CNT arrangement was optimized from 0.41 (Chebyshev orientation parameter) to 0.54 by manipulating the C₂H₄flow rate from 54 to 80 sccm. More specifically, a sample possessing a degree of polarization up to 99% and transmittance over 45% was obtained through proper regulations. The validated optimization makes the aligned CNT films more feasible and valuable for the integration of the CNT polarimeters with MEMS technology.

Mueller matrix imaging with a polarization camera: application to microscopy

In this work, we describe the design and implementation of a Mueller matrix imaging polarimeter that uses a polarization camera as a detector. This camera simultaneously measures the first three Stokes components, allowing for the top three rows of the Mueller matrix to be determined after only N = 4 measurements using a single rotating compensator, which is sufficient to fully characterize nondepolarizing samples. This setup provides the polarimetric analysis with micrometric resolution in about 3 seconds and can also perform live birefringence imaging at the camera frame rate by fixing the compensator at a static 45° angle. To further improve the conditioning of the setup, we also give the first experimental demonstration of an optimal elliptical retarder design.

Cascaded metamaterial polarizers for the visible region

Polarizers serve many application fields such as imaging, display technology, and telecommunications. Focusing on the visible spectral region, we provide the design and fabrication of compact high-efficiency resonant polarizers in the crystalline silicon-on-quartz material system. We experimentally verify the improved efficiency attained by a cascaded dual-module polarizer assembled with building blocks of elemental subwavelength grating structures. We obtain a measured extinction ratio (ER) of ∼3000 in a 2 mm thick stacked prototype device across a bandwidth of ∼110nm in the 570-680 nm spectral domain. The ridge width of the constituent nanograting is ∼84nm. Computed results show a high ER in spite of the lossy nature of crystalline silicon in the visible region, enabling cascaded metasurfaces while preserving high transmission.

Angular Light, Polarization and Stokes Parameters Information in a Hybrid Image Sensor with Division of Focal Plane

Targeting 3D image reconstruction and depth sensing, a desirable feature for complementary metal oxide semiconductor (CMOS) image sensors is the ability to detect local light incident angle and the light polarization. In the last years, advances in the CMOS technologies have enabled dedicated circuits to determine these parameters in an image sensor. However, due to the great number of pixels required in a cluster to enable such functionality, implementing such features in regular CMOS imagers is still not viable. The current state-of-the-art solutions require eight pixels in a cluster to detect local light intensity, incident angle and polarization. The technique to detect local incident angle is widely exploited in the literature, and the authors have shown in previous works that it is possible to perform the job with a cluster of only four pixels. In this work, the authors explore three novelties: a mean to determine three of four Stokes parameters, the new paradigm in polarization cluster-pixel design, and the extended ability to detect both the local light angle and intensity. The features of the proposed pixel cluster are demonstrated through simulation program with integrated circuit emphasis (SPICE) of the regular Quadrature Pixel Cluster and Polarization Pixel Cluster models, the results of which are compliant with experimental results presented in the literature.

Optimization study of metallic sub-wavelength gratings as the polarizer in infrared wavelengths

Despite the polarimetric detection in the infrared wavelengths of 8-10 µm being of great importance and broad applications, there has been limited addressing of the grating-based polarizers in this band. One of the main issues lies in the process incompatibility between the conventional nanofabrication technique and the II-VI materials such as HgCdTe, so that the direct integration of polarizers with sensors still remains a big challenge. This paper reports our recent work on optimizing the grating structures, materials, and nanofabrication processes for enhancing both the transmittance and the extinction ratio of polarizers on Si and/or ZnSe wafers, using numerical simulations for the grating design and electron beam lithography for the nanoscale pattern generation. By utilizing the finite-difference time-domain method, both the transmittance and the extinction ratio are maximized by optimizing the grating geometric dimensions and the duty cycle for two different grating materials of Al and Au for comparison. Based on the designed structures, nanofabrications of sub-wavelength gratings in both Al and Au are carried out, and the processes are compared for achieving high polarization performance. Optical characterizations of the fabricated polarizers demonstrate that both high transmittance and extinction ratio can be achieved in feasible parameters and the nano-process developed in this work.

Polarized ultraviolet emitters with Al wire-grid polarizers fabricated by solvent-assisted nanotransfer process

Polarized ultraviolet (UV) emitters are essential for various applications, such as photoalignment devices for liquid crystals, high-resolution imaging devices, highly sensitive sensors, and steppers. To increase the high polarization ratio (PR) of a UV emitter, the grating period should be decreased than that of the visible emitter. However, the fabrication of the short period grating directly on UV emitters is still limited. In this study, we demonstrate that 200, 100, and 50 nm period aluminum (Al)-based wire-grid polarizers (WGPs) can be fabricated directly on UV emitters by a solvent-assisted nanotransfer process. The UV emitter with a grating period of 100 nm shows a PR of 84%, and an electroluminescence efficiency that is 22.5% and 48% higher than those of UV emitters with 50 nm and 200 nm period WGPs, respectively, due to the increased photon extraction efficiency (PEE). The higher PEE is attributed to the optical cavity property of the Al metal reflector with low light loss and the surface plasmon effect of the Al grating layer.

Single step fabrication of nano scale optical devices using binary contact mask deep UV interference lithography

Interference Lithography (IL) is a powerful and inexpensive tool for large area precision nanoscale patterning of periodic structures. In this work we extend IL's capability to create features in arbitrary shapes and locations through the use of binary contact masks with wavefront division deep-UV interference lithography. Grating couplers for use in a streak measurement system and a focal plane division polarimeter are created to demonstrate the viability and versatility of the technique. Simultaneous fabrication of 90nm and 20μm features proves the potential of this process to simplify and streamline common fabrication processes in research and in industrial applications.

Anisotropy of Thin Foils Obtained from Microwave-Irradiated Poly(Vinyl Alcohol) Aqueous Solutions

In this paper, poly(vinyl alcohol) (PVA) foils of comparable thickness were obtained by using 10 wt % PVA aqueous solutions exposed to microwave (MW) radiations for different times. The main goal of this paper is to identify the effects of MW irradiation on the induced optical birefringence of PVA stretched foils, since it is known that the changes in the chemical and physical properties of polymers induced by radiations can influence the asymmetry of their molecular structures from which the birefringence of polymers derives. The efficiency of the MW oven was estimated, and the contribution of sensible and latent heat and heat loss to the absorbed energy was discussed. The effects of MW irradiation, in terms of absorbed energy, were evidenced by using FTIR spectra analysis, contact angle measurements, scanning electron microscopy (SEM) images, and induced optical birefringence. The dehydration (cross-linking) of PVA in aqueous solution and the dependence of the anisotropy on the absorbed MW energy, stretching ratio, and the type of hydrogen bonds formed are discussed in this study.

Cost-effective mid-infrared micropolarizer fabricated on common silicon by soft nanoimprint lithography

We fabricated a cost-effective mid-IR micropolarizer on a common Si substrate. To improve the transmittance of Si, we performed a double oxidation on the silicon substrate. The SiO₂-Si-SiO₂ structure improved the transmittance of Si from 54% to 63%-83%. Then, the mid-IR micropolarizer with multidirectional gratings was fabricated using a soft nanoimprint process followed by the thermal evaporation of Al. Experimental measurements showed a transverse magnetic transmittance in the range of 61%-80% at wavelengths of 4-5 μm, and the extinction ratio was greater than 19 dB.

Compressive spectral polarization imaging by a pixelized polarizer and colored patterned detector

A compressive spectral and polarization imager based on a pixelized polarizer and colored patterned detector is presented. The proposed imager captures several dispersed compressive projections with spectral and polarization coding. Stokes parameter images at several wavelengths are reconstructed directly from 2D projections. Employing a pixelized polarizer and colored patterned detector enables compressive sensing over spatial, spectral, and polarization domains, reducing the total number of measurements. Compressive sensing codes are specially designed to enhance the peak signal-to-noise ratio in the reconstructed images. Experiments validate the architecture and reconstruction algorithms.

Real-time phase measurement of optical vortices based on pixelated micropolarizer array

The special spiral phase structure of an optical vortex leads to an intriguing study in modern singular optics. This paper proposes a real-time phase measurement method of vortex beam based on pixelated micropolarizer array (PMA). Four phase-shifting fringe images can be obtained from a single interference image, thus the vortex beam phase can be obtained in real-time. The proposed method can achieve full-field phase measurement of the vortex beam with the advantages of lower computation and vibration resistance. In the experiments, the typical phases of vortex with different topological charges are loaded on a spatial light modulator (SLM) to generate diffraction vortex beam, and the phase distribution of vortex beam is obtained in real-time, which confirm the robustness of this method. This method is of great significance in promoting the study of optical vortices.

Spatial light modulator based color polarization imaging

We describe a compressive snapshot color polarization imager that encodes spatial, spectral, and polarization information using a liquid crystal modulator. We experimentally show that polarization imaging is compressible by multiplexing polarization states and present the reconstruction results. This compressive camera captures the spatial distribution of four polarizations and three color channels. It achieves <0.027° spatial resolution, 10(3) average extinction ratio, and >30 PSNR.

Nano-fabricated pixelated micropolarizer array for visible imaging polarimetry

Pixelated micropolarizer array (PMA) is a novel concept for real-time visible imaging polarimetry. A 320 × 240 aluminum PMA fabricated by electron beam lithography is described in this paper. The period, duty ratio, and depth of the grating are 140 nm, 0.5, and 100 nm, respectively. The units are standard square structures and the metal nanowires of the grating are collimating and uniformly thick. The extinction ratio of 75 and the maximum polarization transmittance of 78.8% demonstrate that the PMA is suitable for polarization imaging. When the PMA is applied to real-time polarization imaging, the degree of linear polarization image and the angle of linear polarization image are calculated from a single frame image. The polarized target object is highlighted from the unpolarized background, and the surface contour of the target object can be reflected by the polarization angle.

Infrared liquid crystal polymer micropolarizer

The ability to create arbitrary patterned linear and circular infrared (IR) liquid crystal polymer (LCP) polarizers is demonstrated. The operating wavelength of the thin-film polarizer ranges from 700 to 4200 nm. The linear micropolarizer is fabricated using IR dichroic dye as a guest in LCP host with feature size as small as 4 μm. The circular micropolarizer is fabricated using cholesteric LCPs with feature size as small as 6.2 μm.

Patterned dual-layer achromatic micro-quarter-wave-retarder array for active polarization imaging

In this paper, we present a liquid-crystal-polymer (LCP)-based dual-layer micro-quarter-wave-retarder (MQWR) array for active polarization image sensors. The proposed MQWRs, for the first time, enable the extraction of the incident light's circularly polarized components in the whole visible regime, which correspond to the fourth parameter of Stokes vector. Compared with the previous implementations, our proposed MQWRs feature high achromaticity, making their applications no longer limited to monochromatic illumination. In addition, the presented thin structure exhibits an overall thickness of 2.43μm, leading to greatly alleviated optical cross-talk between adjacent photo-sensing pixels. Moreover, the reported superior optical performance (e.g. minor transmittance, extinction ratio) validates our optical design and optimization of the proposed MQWRs. Furthermore, the demonstrated simple fabrication recipe offers a cost-effective solution for the monolithic integration between the proposed MQWR array and the commercial solid-state image sensors, which makes the multi-spectral full Stokes polarization imaging system on a single chip feasible.

Polarization sensitive camera by femtosecond laser nanostructuring

A polarization imaging device based on a femtosecond laser nanostructured birefringent array is demonstrated. The device enables instant measurement of the distribution of the Stokes vectors in the visible spectrum. Polarimetric measurements with radially and circularly polarized light distributions are demonstrated.

Coded aperture snapshot spectral polarization imaging

We describe a single-shot polarization spectral imager that combines two birefringent crystals with a binary coded aperture to encode the spatial, spectral and polarization data cube for compressive sampling on a two-dimensional (2D) detector array. We use a total variation prior to reconstruct the four-dimensional (4D) data cube from the single 2D measurement. The 4D data cube includes 1500×1240 pixels in the spatial domain, 19 wavelength channels between 400 and 680 nm and two Stokes parameters.

Imaging the polarization of a light field

We describe and analyze a method by which an optical polarization state is mapped to an image sensor. When placed in a Bayesian framework, the analysis allows a priori information about the polarization state to be introduced into the measurement. We show that when such a measurement is applied to a single photon, it eliminates exactly one fully polarized state, offering an important insight about the information gained from a single photon polarization measurement.

Polarization calibration with large apertures in full field of view for a full Stokes imaging polarimeter based on liquid-crystal variable retarders

Currently, polarization calibration for full Stokes imaging polarimeters is limited by the apertures of the retarders. In this paper, an improved polarization calibration with large apertures in full field of view for full Stokes imaging polarimeters based on liquid-crystal variable retarders is proposed and investigated theoretically and experimentally. The experimental precision of polarization calibration is 1.7% for linear polarization states and 8.8% for circular ones for an imaging polarimeter with a 100 mm aperture and 10° field of view. The feasibility for full Stokes polarization image is also confirmed in experiment for identifying objects due to degree of polarization and degree of circular polarization images.

Ultra-high extinction ratio micropolarizers using plasmonic lenses

The design of a new type of plasmonic ultra-high extinction ratio micropolarizing transmission filter is presented along with an experimental demonstration. A pair of dielectric coated metal gratings couple incident TM polarized light into surface plasmons, which are fed into a central metal-insulator-metal (MIM) waveguide, followed by transmission through a sub-wavelength aperture. Extinction ratios exceeding 10¹¹ are predicted by finite element simulation. Good absolute agreement for both the spectral and polarization response is obtained between measurement and simulations using measured geometric parameters. The filters can be easily fabricated and sized to match the pixel pitch of current focal plane arrays.

High-resolution thin "guest-host" micropolarizer arrays for visible imaging polarimetry

We report a micropolarizer array technology exploiting "guest-host" interactions in liquid crystals for visible imaging polarimetry. We demonstrate high resolution thin micropolarizer arrays with a 5 μm×5 μm pixel pitch and a thickness of 0.95 μm. With the "host" nematic liquid crystal molecules photo-aligned by sulfonic azo-dye SD1, we report averaged major principal transmittance, polarization efficiency and order parameter of 80.3%, 0.863 and 0.848, respectively across the 400 nm-700 nm visible spectrum range. The proposed fabrication technology completely removes the need for any selective etching during the fabrication/integration process of the micropolarizer array. Fully CMOS compatible, it is simple and cost-effective, requiring only spin-coating followed by a single ultraviolet-exposure through a "photoalignment master". This makes it well suited to low cost polarization imaging applications.

Liquid-crystal micropolarimeter array for full Stokes polarization imaging in visible spectrum

In this paper, we describe the design, modeling, fabrication, and optical characterization of the first micropolarimeter array enabling full Stokes polarization imaging in visible spectrum. The proposed micropolarimeter is fabricated by patterning a liquid-crystal (LC) layer on top of a visible-regime metal-wire-grid polarizer (MWGP) using ultraviolet sensitive sulfonic-dye-1 as the LC photoalignment material. This arrangement enables the formation of either micrometer-scale LC polarization rotators, neutral density filters or quarter wavelength retarders. These elements are in turn exploited to acquire all components of the Stokes vector, which describes all possible polarization states of light. Reported major principal transmittance of 75% and extinction ratio of 1100 demonstrate that the MWGP's superior optical characteristics are retained. The proposed liquidcrystal micropolarimeter array can be integrated on top of a complementary metal-oxide-semiconductor (CMOS) image sensor for real-time full Stokes polarization imaging.

High-resolution photoaligned liquid-crystal micropolarizer array for polarization imaging in visible spectrum

We report a superior high-resolution micropolarizer array fabrication technology that combines a linear polarizer with a micropatterned liquid-crystal (LC) cell. A 2 microm pitch is achieved by using UV light to define the orientation of the micropolarizer elements. Reported experimental results validate the concept of high-performance photoaligned LC micropolarizer arrays with major principal transmittance of approximately 80% and extinction ratio as high as approximately 3200(35 dB).

Compact and miniature snapshot imaging polarimeter

We present and demonstrate a compact and miniature snapshot imaging polarimeter camera; it is anticipated that such a camera can be scaled down to less than 1.5 cm. Two Savart plates are used at the pupil plane to generate multiple fringes to encode the full Stokes vector in a single image. A geometric ray model is developed to explain the system. The numerical simulation based on this model is presented. Finally, the validity of the device is demonstrated by showing experimental results.

Design and parallel fabrication of wire-grid polarization arrays for polarization-resolved imaging at 1.55 microm

Polarization-resolved imaging can provide information about the composition and topography of the environment that is invisible to the eye. We demonstrate a practical method to fabricate arrays of small, orthogonal wire-grid polarizers (WGPs) that can be matched to individual detector pixels, and we present design curves that relate the structure to the polarization extinction ratio obtained. The photonic area lithographically mapped (PALM) method uses multiple-exposure conventional and holographic lithography to create subwavelength patterns easily aligned to conventional mask features. WGPs with polarization extinction ratios of approximately 10 at a 1.55 microm wavelength were fabricated, and square centimeter areas of square micrometer size WGP arrays suitable for polarization-resolved imaging on glass were realized.

Fabrication of a dual-tier thin film micropolarization array

A thin film polarization filter has been patterned and etched using reactive ion etching (RIE) in order to create 8 by 8 microns square periodic structures. The micropolarization filters retain the original extinction ratios of the unpatterned thin film. The measured extinction ratios on the micropolarization filters are approximately 1000 in the blue and green visible spectrum and approximately 100 in the red spectrum. Various gas combinations for RIE have been explored in order to determine the right concentration mix of CF(4) and O(2) that gives optimum etching rate, in terms of speed and under-etching. Theoretical explanation for the optimum etching rate has also been presented. In addition, anisotropic etching with 1 microm under cutting of a 10 microm thick film has been achieved. Experimental results for the patterned structures under polarized light are presented. The array of micropolarizers will be deposited on top of a custom made CMOS imaging sensor in order to compute the first three Stokes parameters in real time.

Microarrays of silver nanowires embedded in anodic alumina membrane templates: size dependence of polarization characteristics

Polarization characteristics of microarrays of silver nanowires embedded in an anodic alumina membrane are theoretically investigated. The microarrays mainly transmit the p-polarized wave, whereas they strongly attenuate the s-polarized wave in the near- and mid-infrared spectral range. We show that the sizes (e.g., diameter, spacing, and ratio of diameter to spacing) of the nanowires strongly affect the optical losses for the polarized waves. It is predicted that large extinction ratios and small insertion losses can be simultaneously achieved by an appropriate choice of the ratio and the diameter. An optimized design of a nanowire grid polarizer at near- and mid-infrared wavelengths is presented.