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Verding P, Mary Joy R, Reenaers D, Kumar RS, Rouzbahani R, Jeunen E, Thomas S, Desta D, Boyen HG, Pobedinskas P, Haenen K, Deferme W. The Influence of UV-Ozone, O 2 Plasma, and CF 4 Plasma Treatment on the Droplet-Based Deposition of Diamond Nanoparticles. ACS APPLIED MATERIALS & INTERFACES 2024; 16:1719-1726. [PMID: 38154790 PMCID: PMC10789259 DOI: 10.1021/acsami.3c14014] [Citation(s) in RCA: 0] [Impact Index Per Article: 0] [Reference Citation Analysis] [Abstract] [Key Words] [Grants] [Track Full Text] [Subscribe] [Scholar Register] [Received: 09/19/2023] [Revised: 12/07/2023] [Accepted: 12/07/2023] [Indexed: 12/30/2023]
Abstract
Surface treatment is critical for homogeneous coating over a large area and high-resolution patterning of nanodiamond (ND) particles. To optimize the interaction between the surface of a substrate and the colloid of ND particles, it is essential to remove hydrocarbon contamination by surface treatment and to increase the surface energy of the substrate, hence improving the diamond film homogeneity upon its deposition. However, the impact of substrate surface treatment on the properties of coatings and patterns is not fully understood. This study explores the impact of UV-ozone, O2 plasma, and CF4 plasma treatments on the wetting properties of the fused silica glass substrate surface. We identify the optimal time interval between the treatment and subsequent ND coating/patterning processes, which were conducted using inkjet printing and ultrasonic spray coating techniques. Our results showed that UV-ozone and O2 plasma resulted in hydrophilic surfaces, while CF4 plasma treatment resulted in hydrophobic surfaces. We demonstrate the use of CF4 plasma treatment before inkjet printing to generate high-resolution patterns with dots as small as 30 μm in diameter. Ultrasonic spray coating showed homogeneous coatings after using UV-ozone and O2 plasma treatment. The findings of this study provide valuable insights into the hydrocarbon airborne contamination on cleaned surfaces over time even in clean-room environments and have a notable impact on the performance of liquid coatings and patterns. We highlight the importance of timing between the surface treatment and printing in achieving high resolution or homogeneity.
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Affiliation(s)
- Pieter Verding
- Institute
for Materials Research (IMO), Hasselt University, Wetenschapspark 1, 3590 Diepenbeek, Belgium
- IMEC
vzw, IMOMEC, Wetenschapspark
1, 3590 Diepenbeek, Belgium
| | - Rani Mary Joy
- Institute
for Materials Research (IMO), Hasselt University, Wetenschapspark 1, 3590 Diepenbeek, Belgium
- IMEC
vzw, IMOMEC, Wetenschapspark
1, 3590 Diepenbeek, Belgium
| | - Dieter Reenaers
- Institute
for Materials Research (IMO), Hasselt University, Wetenschapspark 1, 3590 Diepenbeek, Belgium
- IMEC
vzw, IMOMEC, Wetenschapspark
1, 3590 Diepenbeek, Belgium
| | - Rachith Shanivarasanthe
Nithyananda Kumar
- Institute
for Materials Research (IMO), Hasselt University, Wetenschapspark 1, 3590 Diepenbeek, Belgium
- IMEC
vzw, IMOMEC, Wetenschapspark
1, 3590 Diepenbeek, Belgium
| | - Rozita Rouzbahani
- Institute
for Materials Research (IMO), Hasselt University, Wetenschapspark 1, 3590 Diepenbeek, Belgium
- IMEC
vzw, IMOMEC, Wetenschapspark
1, 3590 Diepenbeek, Belgium
| | - Ewoud Jeunen
- Institute
for Materials Research (IMO), Hasselt University, Wetenschapspark 1, 3590 Diepenbeek, Belgium
| | - Seppe Thomas
- Institute
for Materials Research (IMO), Hasselt University, Wetenschapspark 1, 3590 Diepenbeek, Belgium
| | - Derese Desta
- Institute
for Materials Research (IMO), Hasselt University, Wetenschapspark 1, 3590 Diepenbeek, Belgium
- IMEC
vzw, IMOMEC, Wetenschapspark
1, 3590 Diepenbeek, Belgium
| | - Hans-Gerd Boyen
- Institute
for Materials Research (IMO), Hasselt University, Wetenschapspark 1, 3590 Diepenbeek, Belgium
- IMEC
vzw, IMOMEC, Wetenschapspark
1, 3590 Diepenbeek, Belgium
| | - Paulius Pobedinskas
- Institute
for Materials Research (IMO), Hasselt University, Wetenschapspark 1, 3590 Diepenbeek, Belgium
- IMEC
vzw, IMOMEC, Wetenschapspark
1, 3590 Diepenbeek, Belgium
| | - Ken Haenen
- Institute
for Materials Research (IMO), Hasselt University, Wetenschapspark 1, 3590 Diepenbeek, Belgium
- IMEC
vzw, IMOMEC, Wetenschapspark
1, 3590 Diepenbeek, Belgium
| | - Wim Deferme
- Institute
for Materials Research (IMO), Hasselt University, Wetenschapspark 1, 3590 Diepenbeek, Belgium
- IMEC
vzw, IMOMEC, Wetenschapspark
1, 3590 Diepenbeek, Belgium
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Pawłowska S, Gierowski J, Stonio B, Juchniewicz M, Ficek M, Kruczkowski M, Szczerska M. Implementation of SiN thin film in fiber-optic sensor working in telecommunication range of wavelengths. Sci Rep 2021; 11:22402. [PMID: 34789732 PMCID: PMC8599665 DOI: 10.1038/s41598-021-00195-9] [Citation(s) in RCA: 0] [Impact Index Per Article: 0] [Reference Citation Analysis] [Abstract] [Track Full Text] [Download PDF] [Figures] [Journal Information] [Subscribe] [Scholar Register] [Received: 08/11/2021] [Accepted: 10/07/2021] [Indexed: 11/09/2022] Open
Abstract
Mirrors are used in optical sensors and measurement setups. This creates a demand for mirrors made of new materials and having various properties tailored to specific applications. In this work, we propose silicon covered with a thin silicon nitride layer as a mirror for near-infrared measurements. SiN layer was deposited on a standard silicon wafer with a Low-Pressure Chemical Vapor Deposition furnace. Then, the created layer was investigated using ellipsometry and scanning electron microscope. Subsequently, the mirror was used as a reflecting surface in a Fabry–Perot fiber-optic interferometer. The mirror performance was investigated for wavelengths used in telecomunication (1310 nm and 1550 nm) and then compared with results obtained with the same measurement setup, with a silver mirror instead of silicon covered with SiN, as reference. Results showed that the proposed mirror can replace the silver one with satisfying results for investigated wavelengths.
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Affiliation(s)
- Sandra Pawłowska
- Department of Metrology and Optoelectronics, Faculty of Electronics, Telecommunications and Informatics, Gdansk University of Technology, 11/12 Narutowicza Street, 80-233, Gdansk, Poland.
| | - Jakub Gierowski
- Department of Metrology and Optoelectronics, Faculty of Electronics, Telecommunications and Informatics, Gdansk University of Technology, 11/12 Narutowicza Street, 80-233, Gdansk, Poland
| | - Bartłomiej Stonio
- Centre for Advanced Materials and Technologies CEZAMAT, Warsaw University of Technology, 19 Poleczki Street, 02-822, Warsaw, Poland
| | - Marcin Juchniewicz
- Centre for Advanced Materials and Technologies CEZAMAT, Warsaw University of Technology, 19 Poleczki Street, 02-822, Warsaw, Poland
| | - Mateusz Ficek
- Department of Metrology and Optoelectronics, Faculty of Electronics, Telecommunications and Informatics, Gdansk University of Technology, 11/12 Narutowicza Street, 80-233, Gdansk, Poland
| | - Michał Kruczkowski
- Department of Telecommunication, Informatics and Electronics, Bydgoszcz University of Science and Technology, al. Prof. Kaliskiego 7, 85-796, Bydgoszcz, Poland
| | - Małgorzata Szczerska
- Department of Metrology and Optoelectronics, Faculty of Electronics, Telecommunications and Informatics, Gdansk University of Technology, 11/12 Narutowicza Street, 80-233, Gdansk, Poland.
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Liao D, Ren L, Zhang F, Wang J, Xu Q. Kinematic model for material removal distribution and surface figure in full-aperture polishing. APPLIED OPTICS 2018; 57:588-593. [PMID: 29400720 DOI: 10.1364/ao.57.000588] [Citation(s) in RCA: 1] [Impact Index Per Article: 0.1] [Reference Citation Analysis] [Abstract] [Track Full Text] [Subscribe] [Scholar Register] [Received: 09/11/2017] [Accepted: 12/23/2017] [Indexed: 06/07/2023]
Abstract
Full-aperture polishing is a significant process for fabricating large ultra-precision optic flats. The surface figure is one of the key specifications required of the optic flats, which is determined by the material removal distribution during polishing. To date, the most frequently referred to equation, the Preston equation, only provides a solution for qualitative calculation of material removal of a single point on the optic surface. In this study, we present a kinematic model for deterministic calculation of the removal amount at every local optic position. The model is based on the sliding track of each local optic position on the lap, and it incorporates local pressure and most key kinematic parameters and considers the effect of the lap grooves. With this model, we analyzed the impacts of various kinematic parameters and groove features on the distribution of the removal amount in terms of sliding distance, assuming a uniform pressure distribution at the lap/optic interface. Several polishing experiments have been carried out in which the model is validated.
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