Femtosecond laser written optofluidic sensor: Bragg Grating Waveguide evanescent probing of microfluidic channel

Influence of Annealing on Polymer Optical Fiber Bragg Grating Inscription, Stability and Sensing: A Review

This article reviews recent research progress on the annealing effects on polymer optical fibers (POFs), which are of great importance for inscription, stability and sensing applications of fiber Bragg gratings (FBGs) in POFs due to their unique properties related to polymer molecular chains. In this review, the principle of annealing to reduce frozen-in stress in POFs drawing and different annealing timings are firstly summarized. Then, the annealing methods for POFs are introduced under several different conditions (temperature, humidity, strain, stress and solution). Afterwards, the principle of FBGs and several inscription techniques are reported. Subsequently, the annealing effects on the properties of POFs and polymer optical fiber Bragg gratings (POFBGs) quality are discussed. Finally, the influence of annealing on POFBG sensitivity is summarized. Overall, this paper provides a comprehensive overview of annealing techniques and their impact on both POFs and POFBGs. We hope that it will highlight the important progress made in this field.

Flexible, fast, and benchmarked vectorial model for focused laser beams

In-bulk processing of materials by laser radiation has largely evolved over the last decades and still opens up new scientific and industrial potentials. The development of any in-bulk processing application relies on the knowledge of laser propagation and especially the volumetric field distribution near the focus. Many commercial programs can simulate this, but, to adapt them, or to develop new methods, one usually must create a specific software. Besides, most of the time people also need to measure the actual field distribution near the focus to evaluate their assumptions in the simulation. To easily get access to this knowledge, we present our high-precision field distribution measuring method and release our in-house software InFocus [https://github.com/QF06/InFocus], under the Creative Commons 4.0 license. Our measurements provide 300 nm longitudinal resolution and diffraction limited lateral resolution. The in-house software allows fast vectorial analysis of the focused volumetric field distribution in bulk. Simulations of the linear propagation of light under different conditions (focusing optics, wavelength, spatial shape, and propagation medium) are in excellent agreement with propagation imaging experiments. The aberrations provoked by the refractive index mismatch as well as those induced by the focusing optics are both taken into account. The results indicate that our proposed model is suitable for the precise evaluation of energy deposition.

Femtosecond laser inscription of waveguides and Bragg gratings in transparent cyclic olefin copolymers

We report on a femtosecond laser based fabrication technique that enables simultaneous single-step generation of optical waveguides and Bragg gratings inside bulk cyclic olefin copolymers. Due to the nonlinear absorption of focused and spatially modulated laser radiation with a wavelength of 514 nm and a pulse duration of 450 fs, a modification concluding a refractive index shift increase inside the substrate can be achieved. A sophisticated characterization of the generated waveguides by means of an elaborate cut-back method reveals a maximum attenuation of 3.2 dB/cm. Additionally, a Mach-Zehnder interferometer is used to examine the waveguide's refractive index profile. The integrated Bragg grating structures exhibit reflectivities up to 95 % and a spectral full width at half maximum of 288 pm, at a Bragg wavelength of 1582 nm, whereas the grating period can be deliberately chosen by adapting the fabrication parameters. Thus, due to its increased flexibility and the resulting dispensability of cost-intensive phase masks, this method constitutes an especially promising fabrication process for polymer Bragg gratings inside of bulk materials.

Femtosecond laser writing of near-surface waveguides for refractive-index sensing

Femtosecond laser writing of optical waveguides and components in glasses has been a remarkably growing research field during the last two decades. However, such laser- inscribed optical components were mostly written within the volume of the glass due to the unavoidable ablation that arises when the focal spot is approaching the glass surface. This has generally limited the interaction of light with the surrounding medium thus preventing sensing functionality. In this paper, we present the inscription of surface and near-surface silver based waveguides in a silver containing glass with no need for additional processing as it is the case for standard type I waveguides. In addition, an ultra-sensitive refractive index sensor in a 1 cm glass chip is obtained based on near-surface waveguides interacting with liquid droplets acting as top-layer on the glass surface. Remarkably, the device exhibits a novel double-wing feature that sharpens the response and enhances its sensitivity. Our results highlight the advantages of silver based waveguides paving the way towards further surface based sensors in fibers.

Spatially resolved cross-sectional refractive index profile of fs laser-written waveguides using a genetic algorithm

Laser-written waveguides in glass have many potential applications as photonic devices. However, there is little knowledge of the actual profile of the usually asymmetric refractive index (RI) change across the femtosecond (fs) laser-written waveguides. We show, here, a new nondestructive method to measure any symmetric or asymmetric two-dimensional RI profile of fs laser-written waveguides in transparent materials. The method is also suitable for the measurement of the RI profile of any other type of waveguide. A Mach-Zehnder interferometer is used to obtain the phase shift of light propagating transversely through the RI-modified region. A genetic algorithm is then used to determine the matching cross-sectional RI profile based on the known waveguide shape and dimensions. A validation of the method with the comparison to a RNF measurement of the industry-standard SMF-28 is presented, as well as a demonstration of its versatility with measurements on fs laser-written waveguides.

Femtosecond laser induced selective etching in fused silica: optimization of the inscription conditions with a high-repetition-rate laser source

Femtosecond laser induced selective etching (FLISE) of dielectric materials is a promising technique for fabricating various microfluidic devices. Here we experimentally studied the dependence of the selective etching speed in fused silica glass on laser pulse energy, repetition rate, and inscription speed using a 1030 nm femtosecond laser. The evolution of micromorphology of the laser inscribed lines was revealed with optical microscopy, scanning electron microscopy, as well as anisotropic diffraction of the optical gratings formed by these inscribed lines. A single pulse energy threshold is required to initiate the FLISE. Further, a laser repetition rate window between an upper threshold and a lower threshold was observed, which were limited by the thermal-induced disruption of the nanogratings and by the disconnection of successive pulses modified spots respectively. The synergetic influences of the above factors were evaluated by the exposure laser energy density, which shows a common threshold for different inscription conditions and demonstrates itself to be an excellent criterion for choosing appropriate parameters in FLISE. The formation of continuous nanogratings is confirmed to be the major mechanism of FLISE in fused silica. Our observations not only help one to understand the micro mechanism in FLISE of fused silica, but also are of great use for fabricating large-scale microfluidic circuits.

Micro-optics for microfluidic analytical applications

This critical review summarizes the developments in the integration of micro-optical elements with microfluidic platforms for facilitating detection and automation of bio-analytical applications.

Evolution of polarization dependent microstructures induced by high repetition rate femtosecond laser irradiation in glass

We report the observation of an anomalous polarization dependent process in an isotropic glass induced by long time stationary irradiation of a high repetition rate near-infrared femtosecond laser. Two distinctive types of polarization dependent microstructures were induced at different irradiation stages. At early stage (a few seconds), a dumbbell-shaped structure elongated perpendicularly to the laser polarization formed at the top of the modified region, which was later erased by further irradiation. At later stage (above 30 s), bubbles filled with O₂ formed by the irradiation, which were distributed along the laser polarization at a distance far beyond the radius of the laser beam. Based on a simple modeling of light reflection on boundaries, a thermal accumulation process was proposed to explain the formation and evolution of the dumbbell-shaped microstructure. The possible factors responsible for polarization dependent distribution of bubbles are discussed, which needs further systematic investigations. The results may be helpful in the development of femtosecond laser microprocessing for various applications.

Thermal poling of femtosecond laser-written waveguides in fused silica

Thermal poling of femtosecond laser written waveguides was investigated using second-harmonic microscopy under three approaches: (1) pre-poling and (2) post-poling in which fused silica substrates were poled before or after waveguide formation, respectively, and (3) double poling in which poling was applied both before and after laser writing. Effective nonlinear waveguide interaction strength was assessed relative to the mode profile and the assessments demonstrated an erasure effect of 81% in pre-poling and an ion migration blocking effect of 26% in post-poling. Double poling was found to recover the nonlinearity over the modal zone, overcoming prior difficulties with combining laser processing and thermal poling, opening up a future avenue for creating active devices through femtosecond laser writing of nonlinear optical circuits in fused silica.

Laser Scanning Holographic Lithography for Flexible 3D Fabrication of Multi-Scale Integrated Nano-structures and Optical Biosensors

Three-dimensional (3D) periodic nanostructures underpin a promising research direction on the frontiers of nanoscience and technology to generate advanced materials for exploiting novel photonic crystal (PC) and nanofluidic functionalities. However, formation of uniform and defect-free 3D periodic structures over large areas that can further integrate into multifunctional devices has remained a major challenge. Here, we introduce a laser scanning holographic method for 3D exposure in thick photoresist that combines the unique advantages of large area 3D holographic interference lithography (HIL) with the flexible patterning of laser direct writing to form both micro- and nano-structures in a single exposure step. Phase mask interference patterns accumulated over multiple overlapping scans are shown to stitch seamlessly and form uniform 3D nanostructure with beam size scaled to small 200 μm diameter. In this way, laser scanning is presented as a facile means to embed 3D PC structure within microfluidic channels for integration into an optofluidic lab-on-chip, demonstrating a new laser HIL writing approach for creating multi-scale integrated microsystems.

Non-contact sub-nanometer optical repositioning using femtosecond lasers

Optical components like resonator or waveguides often have stringent requirements in term of positioning accuracy during packaging. While this can be done routinely in a laboratory environment, permanently positioning and aligning optical elements with nanometer accuracy in a fully packaged device is a challenging endeavor. Here, we demonstrate the use of femtosecond laser-induced modifications in glass for the remote permanent fine-positioning of an optical element with sub-nanometer resolution.

Chemical-assisted femtosecond laser writing of lab-in-fibers

The lab-on-chip (LOC) platform has presented a powerful opportunity to improve functionalization, parallelization, and miniaturization on planar or multilevel geometries that has not been possible with fiber optic technology. A migration of such LOC devices into the optical fiber platform would therefore open the revolutionary prospect of creating novel lab-in-fiber (LIF) systems on the basis of an efficient optical transport highway for multifunctional sensing. For the LIF, the core optical waveguide inherently offers a facile means to interconnect numerous types of sensing elements along the optical fiber, presenting a radical opportunity for optimizing the packaging and densification of diverse components in convenient geometries beyond that available with conventional LOCs. In this paper, three-dimensional patterning inside the optical fiber by femtosecond laser writing, together with selective chemical etching, is presented as a powerful tool to form refractive index structures such as optical waveguides and gratings as well as to open buried microfluidic channels and optical resonators inside the flexible and robust glass fiber. In this approach, optically smooth surfaces (~12 nm rms) are introduced for the first time inside the fiber cladding that precisely conform to planar nanograting structures when formed by aberration-free focusing with an oil-immersion lens across the cylindrical fiber wall. This process has enabled optofluidic components to be precisely embedded within the fiber to be probed by either the single-mode fiber core waveguide or the laser-formed optical circuits. We establish cladding waveguides, X-couplers, fiber Bragg gratings, microholes, mirrors, optofluidic resonators, and microfluidic reservoirs that define the building blocks for facile interconnection of inline core-waveguide devices with cladding optofluidics. With these components, more advanced, integrated, and multiplexed fiber microsystems are presented demonstrating fluorescence detection, Fabry-Perot interferometric refractometry, and simultaneous sensing of refractive index, temperature, and bending strain. The flexible writing technique and multiplexed sensors described here open powerful prospects to migrate the benefits of LOCs into a more flexible and miniature LIF platform for highly functional and distributed sensing capabilities. The waveguide backbone of the LIF inherently provides an efficient exchange of information, combining sensing data that are attractive in telecom networks, smart catheters for medical procedures, compact sensors for security and defense, shape sensors, and low-cost health care products.

Femtosecond laser 3D micromachining: a powerful tool for the fabrication of microfluidic, optofluidic, and electrofluidic devices based on glass

Femtosecond lasers have unique characteristics of ultrashort pulse width and extremely high peak intensity; however, one of the most important features of femtosecond laser processing is that strong absorption can be induced only at the focus position inside transparent materials due to nonlinear multiphoton absorption. This exclusive feature makes it possible to directly fabricate three-dimensional (3D) microfluidic devices in glass microchips by two methods: 3D internal modification using direct femtosecond laser writing followed by chemical wet etching (femtosecond laser-assisted etching, FLAE) and direct ablation of glass in water (water-assisted femtosecond laser drilling, WAFLD). Direct femtosecond laser writing also enables the integration of micromechanical, microelectronic, and microoptical components into the 3D microfluidic devices without stacking or bonding substrates. This paper gives a comprehensive review on the state-of-the-art femtosecond laser 3D micromachining for the fabrication of microfluidic, optofluidic, and electrofluidic devices. A new strategy (hybrid femtosecond laser processing) is also presented, in which FLAE is combined with femtosecond laser two-photon polymerization to realize a new type of biochip termed the ship-in-a-bottle biochip.

Straightforward 3D hydrodynamic focusing in femtosecond laser fabricated microfluidic channels

We report on the use of femtosecond laser irradiation followed by chemical etching as a microfabrication tool for innovative microfluidic networks that implement hydrodynamic focusing. The capability of our microfabrication technology to interconnect microchannels in three dimensions was exploited to demonstrate 2D hydrodynamic focusing, either in the horizontal or in the vertical plane, and full 3D hydrodynamic focusing. In all cases only two inlets were required, one for the sample and one for the sheath flows. Fluidic characterization of all devices was provided. In addition, taking advantage of the possibility to write optical waveguides using the same technology, a monolithic cell counter based on 3D hydrodynamic focusing and integrated optical detection was validated. Counting rates up to 5000 cells s(-1) were achieved in this very compact device, where focusing and counting operations were implemented in less than 1 mm(3). Integration of this hydrodynamic focusing module into several devices fabricated by the same technology as optical cell stretchers and cell sorters is envisaged.

Laser-written photonic crystal optofluidics for electrochromatography and spectroscopy on a chip

Femtosecond laser processes were optimized for nonlinear interactions with various optical materials to develop a novel biophotonic lab-on-a-chip device that integrates laser-formed waveguides (WGs), microfluidic channels and photonic crystals (PCs). Such integration seeks the unique demonstration of dual PC functionalities: (1) efficient chromatographic separation and filtration of analytes through a porous PC embedded inside a microfluidic channel and (2) optofluidic spectroscopy through embedded WGs that probe PC stopband shifts as varying analyte concentrations flow and separate. The building blocks together with their integration were demonstrated, providing embedded porous PCs through which electrochromatography drove an accelerated mobile phase of analyte and an optical stopband was probed via integrated buried WGs. Together, these laboratory results underpin the promise of simultaneous chromatographic and spectroscopic capabilities in a single PC optofluidic device.

Fabrication and multifunction integration of microfluidic chips by femtosecond laser direct writing

In the pursuit of modern microfluidic chips with multifunction integration, micronanofabrication techniques play an increasingly important role. Despite the fact that conventional fabrication approaches such as lithography, imprinting and soft lithography have been widely used for the preparation of microfluidic chips, it is still challenging to achieve complex microfluidic chips with multifunction integration. Therefore, novel micronanofabrication approaches that could be used to achieve this end are highly desired. As a powerful 3D processing tool, femtosecond laser fabrication shows great potential to endow general microfluidic chips with multifunctional units. In this review, we briefly introduce the fundamental principles of femtosecond laser micronanofabrication. With the help of laser techniques, both the preparation and functionalization of advanced microfluidic chips are summarized. Finally, the current challenges and future perspective of this dynamic field are discussed based on our own opinion.

An investigation into dispersion upon switching between solvents within a microfluidic system using a chemically resistant integrated optical refractive index sensor

A planar Bragg grating device has been developed that is capable of detecting changes in the refractive index of a wide range of fluids including solvents, acids and bases. The integration of this high precision refractive index sensor within a chemically resistant microfluidic flow system has enabled the investigation of diverse fluid interactions. By cycling between different solvents, both miscible and immiscible, within the microfluidic system it is shown that the previous solvent determines the nature of the refractive index profile across the transition in composition. This solvent dispersion effect is investigated with particular attention to the methanol-water transition, where transients in refractive index are observed that are an order of magnitude larger in amplitude than the difference between the bulk fluids. The potential complications of such phenomenon are discussed together with an example of a device that exploits this effect for the unambiguous composition measurement of a binary solvent system.

Femtosecond laser processing for optofluidic fabrication

Femtosecond laser direct writing is a promising technique for fabricating optofluidic devices since it can modify the interior of glass in a spatially selective manner through multiphoton absorption. The chemical properties of laser-irradiated regions in glass are modified allowing them to be selectively etched by subsequent wet etching using aqueous solutions of etchants such as hydrofluoric (HF) acid. This technique can be used to directly form three-dimensional microfluidic systems. The two-step process can also be used to fabricate free-space optical components such as micromirrors and microlenses inside glass. In addition, femtosecond laser direct writing can alter the optical properties of a substrate to create a wide range of micro-optical components inside glass, including optical waveguides, Mach-Zehnder interferometers, and optical attenuators. The unique ability of femtosecond laser direct writing to simultaneously alter the chemical and optical properties of glass opens up a new avenue for fabricating a variety of optofluidic microchips for biological analysis. Optofluidic microchips fabricated using femtosecond lasers have been used to determine the functions of living microorganisms, determine the concentrations of liquid samples, detect and manipulate single cells, and rapidly screen algae populations. This paper presents a comprehensive review of optofluidic devices for biological analysis fabricated by femtosecond laser processing.

Fabrication of three-dimensional helical microchannels with arbitrary length and uniform diameter inside fused silica

We demonstrate an improved femtosecond laser irradiation followed by chemical etching process to create complex three-dimensional (3D) microchannels with arbitrary length and uniform diameter inside fused silica. A segmented chemical etching method of introducing extra access ports and a secondary power compensation is presented, which enables the fabrication of uniform 3D helical microchannels with length of 1.140 cm and aspect-ratio of 522. Based on this method, a micromixer which consists of a long helical microchannel and a y-tape microchannel was created inside the fused silica. We measured the mixing properties of the micromixer by injecting the phenolphthalein and NaOH solution through the two inlets of the y-tape microchannel. A rapid and efficient mixing was achieved in the 3D micromixer at a low Reynolds number.

Quantum dot enabled thermal imaging of optofluidic devices

Quantum dot thermal imaging has been used to analyse the chromatic dependence of laser-induced thermal effects inside optofluidic devices with monolithically integrated near-infrared waveguides. We demonstrate how microchannel optical local heating plays an important role, which cannot be disregarded within the context of on-chip optical cell manipulation. We also report on the thermal imaging of locally illuminated microchannels when filled with nano-heating particles such as carbon nanotubes.

Femtosecond laser-assisted etching of three-dimensional inverted-woodpile structures in fused silica

Three-dimensional inverted-woodpile (WP) structures were embedded in a microchannel by femtosecond laser direct-writing of fused silica followed by chemical etching with diluted hydrofluoric acid. We show the hole size is linearly dependent on laser-scanning depth for various pulse energies, permitting the control of laser exposures to facilitate close 5 µm periodic packing of uniform microcapillary arrays. Exposure compensation for depth-dependent etching rate and optical beam aberrations yielded stable and crack-free uniform inverted-WP structures. The direct formation of the inverted-WP structure together with microchannels in an all-fused silica substrate, offers chemical stability and inertness, and biocompatibility to be exploited as new microfluidic systems for chromatography and electro-osmotic pumps.

Time dynamics of burst-train filamentation assisted femtosecond laser machining in glasses

Bursts of femtosecond laser pulses with a repetition rate of f = 38.5MHz were created using a purpose-built optical resonator. Single Ti:Sapphire laser pulses, trapped inside a resonator and released into controllable burst profiles by computer generated trigger delays to a fast Pockels cell switch, drove filamentation-assisted laser machining of high aspect ratio holes deep into transparent glasses. The time dynamics of the hole formation and ablation plume physics on 2-ns to 400-ms time scales were examined in time-resolved side-view images recorded with an intensified-CCD camera during the laser machining process. Transient effects of photoluminescence and ablation plume emissions confirm the build-up of heat accumulation effects during the burst train, the formation of laser-generated filaments and plume-shielding effects inside the deeply etched vias. The small time interval between the pulses in the present burst train enabled a more gentle modification in the laser interaction volume that mitigated shock-induced microcracks compared with single pulses.

Microfabrication and applications of opto-microfluidic sensors

A review of research activities on opto-microfluidic sensors carried out by the research groups in Canada is presented. After a brief introduction of this exciting research field, detailed discussion is focused on different techniques for the fabrication of opto-microfluidic sensors, and various applications of these devices for bioanalysis, chemical detection, and optical measurement. Our current research on femtosecond laser microfabrication of optofluidic devices is introduced and some experimental results are elaborated. The research on opto-microfluidics provides highly sensitive opto-microfluidic sensors for practical applications with significant advantages of portability, efficiency, sensitivity, versatility, and low cost.

Optofluidic lab-on-a-chip for rapid algae population screening

The rapid identification of algae species is not only of practical importance when monitoring unwanted adverse effects such as eutrophication, but also when assessing the water quality of watersheds. Here, we demonstrate a lab-on-a-chip that functions as a compact robust tool for the fast screening, real-time monitoring, and initial classification of algae. The water-algae sample, flowing in a microfluidic channel, is side-illuminated by an integrated subsurface waveguide. The waveguide is curved to improve the device sensitivity. The changes in the transmitted optical signal are monitored using a quadrant-cell photo-detector. The signal-wavelets from the different quadrants are used to qualitatively distinguish different families of algae. The channel and waveguide are fabricated out of a monolithic fused-silica substrate using a femtosecond laser-writing process combined with chemical etching. This proof-of-concept device paves the way for more elaborate femtosecond laser-based optofluidic micro-instruments incorporating waveguide networks designed for the real-time field analysis of cells and microorganisms.

Label-free biological and chemical sensors

Highly sensitive, label-free biodetection methods have applications in both the fundamental research and healthcare diagnostics arenas. Therefore, the development of new transduction methods and the improvement of the existing methods will significantly impact these areas. A brief overview of the different types of biosensors and the critical parameters governing their performance will be given. Additionally, a more in-depth discussion of optical devices, surface functionalization methods to increase device specificity, and fluidic techniques to improve sample delivery will be reviewed.

Widely tunable electro-optic distributed Bragg reflector in liquid crystal waveguide

We propose and numerically investigate a versatile and easy-to-realize configuration for a guided-wave voltage-tunable distributed feedback grating based on reorientation in nematic liquid crystal and coplanar comb electrodes. The device has a wide tuning range exceeding 100 nm and covers C and L bands for wavelength division multiplexing.

Three-dimensional Mach-Zehnder interferometer in a microfluidic chip for spatially-resolved label-free detection

Ultrafast laser writing of waveguides in glasses is a very flexible and simple method for direct on-chip integration of photonic devices. In this work we present a monolithic optofluidic device in fused silica providing label-free and spatially-resolved sensing in a microfluidic channel. A Mach-Zehnder interferometer is inscribed with the sensing arm orthogonally crossing the microfluidic channel and the reference arm passing over it. The interferometer is integrated either with a microchannel fabricated by femtosecond laser technology or into a commercial lab-on-chip for capillary electrophoresis. The device layout, made possible by the unique three-dimensional capabilities of the technique, enables label-free sensing of samples flowing in the microchannel with spatial resolution of about 10 microm and limit of detection down to 10(-4) RIU.

Optofluidic chip for single cell trapping and stretching fabricated by a femtosecond laser

The authors present the design and optimization of an optofluidic monolithic chip, able to provide optical trapping and controlled stretching of single cells. The chip is fabricated in a fused silica glass substrate by femtosecond laser micromachining which can produce both optical waveguides and microfluidic channels with great accuracy. A new fabrication procedure adopted in this work allows the demonstration of microchannels with a square cross-section, thus guaranteeing an improved quality of the trapped cell images. Femtosecond laser micromachining emerges as a promising technique for the development of multifunctional integrated biophotonic devices that can be easily coupled to a microscope platform, thus enabling a complete characterization of the cells under test.

Femtosecond laser fabricated monolithic chip for optical trapping and stretching of single cells

We report on the fabrication by a femtosecond laser of an optofluidic device for optical trapping and stretching of single cells. Versatility and three-dimensional capabilities of this fabrication technology provide straightforward and extremely accurate alignment between the optical and fluidic components. Optical trapping and stretching of single red blood cells are demonstrated, thus proving the effectiveness of the proposed device as a monolithic optical stretcher. Our results pave the way for a new class of optofluidic devices for single cell analysis, in which, taking advantage of the flexibility of femtosecond laser micromachining, it is possible to further integrate sensing and sorting functions.