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Zhang Y, Shen J, Li J, Wang H, Feng C, Zhang L, Sun L, Xu J, Liu M, Wang Y, Tian Y, Dong J, Su Y. High-speed electro-optic modulation in topological interface states of a one-dimensional lattice. LIGHT, SCIENCE & APPLICATIONS 2023; 12:206. [PMID: 37644006 PMCID: PMC10465510 DOI: 10.1038/s41377-023-01251-x] [Citation(s) in RCA: 0] [Impact Index Per Article: 0] [Reference Citation Analysis] [Abstract] [Key Words] [Grants] [Track Full Text] [Subscribe] [Scholar Register] [Received: 02/06/2023] [Revised: 07/14/2023] [Accepted: 08/03/2023] [Indexed: 08/31/2023]
Abstract
Electro-optic modulators are key components in data communication, microwave photonics, and quantum photonics. Modulation bandwidth, energy efficiency, and device dimension are crucial metrics of modulators. Here, we provide an important direction for the miniaturization of electro-optic modulators by reporting on ultracompact topological modulators. A topological interface state in a one-dimensional lattice is implemented on a thin-film lithium-niobate integrated platform. Due to the strong optical confinement of the interface state and the peaking enhancement of the electro-optic response, a topological cavity with a size of 1.6 × 140 μm2 enables a large modulation bandwidth of 104 GHz. The first topological modulator exhibits the most compact device size compared to reported LN modulators with bandwidths above 28 GHz, to the best of our knowledge. 100 Gb/s non-return-to-zero and 100 Gb/s four-level pulse amplitude modulation signals are generated. The switching energy is 5.4 fJ/bit, owing to the small electro-optic mode volume and low capacitance. The topological modulator accelerates the response time of topological photonic devices from the microsecond order to the picosecond order and provides an essential foundation for the implementation of large-scale lithium-niobate photonic integrated circuits.
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Affiliation(s)
- Yong Zhang
- State Key Laboratory of Advanced Optical Communication Systems and Networks, Department of Electronic Engineering, Shanghai Jiao Tong University, Shanghai, 200240, China.
| | - Jian Shen
- State Key Laboratory of Advanced Optical Communication Systems and Networks, Department of Electronic Engineering, Shanghai Jiao Tong University, Shanghai, 200240, China
| | - Jingchi Li
- State Key Laboratory of Advanced Optical Communication Systems and Networks, Department of Electronic Engineering, Shanghai Jiao Tong University, Shanghai, 200240, China
| | - Hongwei Wang
- State Key Laboratory of Advanced Optical Communication Systems and Networks, Department of Electronic Engineering, Shanghai Jiao Tong University, Shanghai, 200240, China
| | - Chenglong Feng
- State Key Laboratory of Advanced Optical Communication Systems and Networks, Department of Electronic Engineering, Shanghai Jiao Tong University, Shanghai, 200240, China
| | - Lei Zhang
- State Key Laboratory of Advanced Optical Communication Systems and Networks, Department of Electronic Engineering, Shanghai Jiao Tong University, Shanghai, 200240, China
| | - Lu Sun
- State Key Laboratory of Advanced Optical Communication Systems and Networks, Department of Electronic Engineering, Shanghai Jiao Tong University, Shanghai, 200240, China
| | - Jian Xu
- Center for Advanced Electronic Materials and Devices, Shanghai Jiao Tong University, Shanghai, 200240, China
| | - Ming Liu
- Center for Advanced Electronic Materials and Devices, Shanghai Jiao Tong University, Shanghai, 200240, China
| | - Ying Wang
- Center for Advanced Electronic Materials and Devices, Shanghai Jiao Tong University, Shanghai, 200240, China
| | - Yonghui Tian
- Institute of Microelectronics and Key Laboratory for Magnetism and Magnetic Materials of MOE, School of Physical Science and Technology, Lanzhou University, Lanzhou, 730000, Gansu, China
| | - Jianwen Dong
- State Key Laboratory of Optoelectronic Materials and Technologies & School of Physics, Sun Yat-sen University, Guangzhou, 510275, China
| | - Yikai Su
- State Key Laboratory of Advanced Optical Communication Systems and Networks, Department of Electronic Engineering, Shanghai Jiao Tong University, Shanghai, 200240, China.
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2
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Jia D, Zhang R, Yang C, Hao Z, Yu X, Gao F, Bo F, Zhang G, Xu J. Electrically tuned coupling of lithium niobate microresonators. OPTICS LETTERS 2023; 48:2744-2747. [PMID: 37186755 DOI: 10.1364/ol.488974] [Citation(s) in RCA: 0] [Impact Index Per Article: 0] [Reference Citation Analysis] [Abstract] [Track Full Text] [Subscribe] [Scholar Register] [Indexed: 05/17/2023]
Abstract
Microresonators coupled with integrated waveguides operate stably but usually lack tunability for an optimal coupling state. In this Letter, we demonstrate a racetrack resonator with an electrically modulated coupling on an X-cut lithium niobate (LN) platform by introducing a Mach-Zehnder interferometer (MZI) with two balanced directional couplers (DCs) to realize light exchange. This device provides a wide-range coupling regulation, from under-coupling and critical coupling to deep over-coupling. Importantly, it has a fixed resonance frequency when the DC splitting ratio is 3 dB. The measured optical responses of the resonator exhibit a high extinction ratio, exceeding 23 dB, and an effective half-wave voltage length Vπ·L of 0.77 V·cm, suitable for CMOS compatibility. Microresonators with tunable coupling and a stable resonance frequency are expected to find application in nonlinear optical devices on LN-integrated optical platforms.
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Shang Z, Wang G, Li J, Huang Q, Sun J, Cheng R, Zhang M, Yang J, Zhang Z, Yin J, Guo K, Yan P. Broadband phase shifter based on SiN-MoS 2 integrated racetrack resonator. OPTICS LETTERS 2023; 48:2768-2771. [PMID: 37186761 DOI: 10.1364/ol.490025] [Citation(s) in RCA: 0] [Impact Index Per Article: 0] [Reference Citation Analysis] [Abstract] [Track Full Text] [Subscribe] [Scholar Register] [Indexed: 05/17/2023]
Abstract
As the critical device of microwave photonics and optical communication, the low-loss and high-efficiency optical phase shifter has attracted intense attention in photonic integrated circuits. However, most of their applications are restricted to a particular band. Little is known about the characteristics of broadband. In this paper, an SiN-MoS2 integrated broadband racetrack phase shifter is demonstrated. The coupling region and the structure of the racetrack resonator are elaborately designed to improve the coupling efficiency at each resonance wavelength. The ionic liquid is introduced to form a capacitor structure. Then, the effective index of the hybrid waveguide can be efficiently tuned by adjusting the bias voltage. We achieve a phase shifter with a tunable range covering all the WDM bands and even up to 1900 nm. The highest phase tuning efficiency is measured to be 72.75 pm/V at 1860 nm, and the corresponding half-wave-voltage-length product is calculated as 0.0608 V·cm.
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4
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Perminov NS, Moiseev SA. Integrated Multiresonator Quantum Memory. ENTROPY (BASEL, SWITZERLAND) 2023; 25:e25040623. [PMID: 37190411 PMCID: PMC10138295 DOI: 10.3390/e25040623] [Citation(s) in RCA: 0] [Impact Index Per Article: 0] [Reference Citation Analysis] [Abstract] [Key Words] [Grants] [Track Full Text] [Subscribe] [Scholar Register] [Received: 02/27/2023] [Revised: 03/28/2023] [Accepted: 04/01/2023] [Indexed: 05/17/2023]
Abstract
We develop an integrated efficient multiresonator quantum memory scheme based on a system of three interacting resonators coupled through a common resonator to an external waveguide via switchable coupler. It is shown that high-precision parameter matching based on step-by-step optimization makes it possible to efficiently store the signal field and enables on-demand retrieval of the signal at specified time moments. Possible experimental implementations and practical applications of the proposed quantum memory scheme are discussed.
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Affiliation(s)
- Nikolay Sergeevich Perminov
- Kazan Quantum Center, Kazan National Research Technical University, n.a. A.N.Tupolev-KAI, 10 K. Marx, 420111 Kazan, Russia
- Zavoisky Physical-Technical Institute, Kazan Scientific Center of the Russian Academy of Sciences, 10/7 Sibirsky Tract, 420029 Kazan, Russia
| | - Sergey Andreevich Moiseev
- Kazan Quantum Center, Kazan National Research Technical University, n.a. A.N.Tupolev-KAI, 10 K. Marx, 420111 Kazan, Russia
- Zavoisky Physical-Technical Institute, Kazan Scientific Center of the Russian Academy of Sciences, 10/7 Sibirsky Tract, 420029 Kazan, Russia
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5
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Snigirev V, Riedhauser A, Lihachev G, Churaev M, Riemensberger J, Wang RN, Siddharth A, Huang G, Möhl C, Popoff Y, Drechsler U, Caimi D, Hönl S, Liu J, Seidler P, Kippenberg TJ. Ultrafast tunable lasers using lithium niobate integrated photonics. Nature 2023; 615:411-417. [PMID: 36922611 PMCID: PMC10017507 DOI: 10.1038/s41586-023-05724-2] [Citation(s) in RCA: 16] [Impact Index Per Article: 16.0] [Reference Citation Analysis] [Abstract] [Key Words] [Grants] [Track Full Text] [Journal Information] [Subscribe] [Scholar Register] [Received: 10/08/2021] [Accepted: 01/11/2023] [Indexed: 03/17/2023]
Abstract
Early works1 and recent advances in thin-film lithium niobate (LiNbO3) on insulator have enabled low-loss photonic integrated circuits2,3, modulators with improved half-wave voltage4,5, electro-optic frequency combs6 and on-chip electro-optic devices, with applications ranging from microwave photonics to microwave-to-optical quantum interfaces7. Although recent advances have demonstrated tunable integrated lasers based on LiNbO3 (refs. 8,9), the full potential of this platform to demonstrate frequency-agile, narrow-linewidth integrated lasers has not been achieved. Here we report such a laser with a fast tuning rate based on a hybrid silicon nitride (Si3N4)-LiNbO3 photonic platform and demonstrate its use for coherent laser ranging. Our platform is based on heterogeneous integration of ultralow-loss Si3N4 photonic integrated circuits with thin-film LiNbO3 through direct bonding at the wafer level, in contrast to previously demonstrated chiplet-level integration10, featuring low propagation loss of 8.5 decibels per metre, enabling narrow-linewidth lasing (intrinsic linewidth of 3 kilohertz) by self-injection locking to a laser diode. The hybrid mode of the resonator allows electro-optic laser frequency tuning at a speed of 12 × 1015 hertz per second with high linearity and low hysteresis while retaining the narrow linewidth. Using a hybrid integrated laser, we perform a proof-of-concept coherent optical ranging (FMCW LiDAR) experiment. Endowing Si3N4 photonic integrated circuits with LiNbO3 creates a platform that combines the individual advantages of thin-film LiNbO3 with those of Si3N4, which show precise lithographic control, mature manufacturing and ultralow loss11,12.
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Affiliation(s)
- Viacheslav Snigirev
- Institute of Physics, Swiss Federal Institute of Technology Lausanne (EPFL), Lausanne, Switzerland
- Center for Quantum Science and Engineering, EPFL, Lausanne, Switzerland
| | | | - Grigory Lihachev
- Institute of Physics, Swiss Federal Institute of Technology Lausanne (EPFL), Lausanne, Switzerland
- Center for Quantum Science and Engineering, EPFL, Lausanne, Switzerland
| | - Mikhail Churaev
- Institute of Physics, Swiss Federal Institute of Technology Lausanne (EPFL), Lausanne, Switzerland
- Center for Quantum Science and Engineering, EPFL, Lausanne, Switzerland
| | - Johann Riemensberger
- Institute of Physics, Swiss Federal Institute of Technology Lausanne (EPFL), Lausanne, Switzerland
- Center for Quantum Science and Engineering, EPFL, Lausanne, Switzerland
- Deep Light SA
| | - Rui Ning Wang
- Institute of Physics, Swiss Federal Institute of Technology Lausanne (EPFL), Lausanne, Switzerland
- Center for Quantum Science and Engineering, EPFL, Lausanne, Switzerland
| | - Anat Siddharth
- Institute of Physics, Swiss Federal Institute of Technology Lausanne (EPFL), Lausanne, Switzerland
- Center for Quantum Science and Engineering, EPFL, Lausanne, Switzerland
| | - Guanhao Huang
- Institute of Physics, Swiss Federal Institute of Technology Lausanne (EPFL), Lausanne, Switzerland
- Center for Quantum Science and Engineering, EPFL, Lausanne, Switzerland
| | - Charles Möhl
- IBM Research - Europe, Zurich, Ruschlikon, Switzerland
| | - Youri Popoff
- IBM Research - Europe, Zurich, Ruschlikon, Switzerland
- Integrated Systems Laboratory, Swiss Federal Institute of Technology Zurich (ETH Zürich), Zurich, Switzerland
| | - Ute Drechsler
- IBM Research - Europe, Zurich, Ruschlikon, Switzerland
| | - Daniele Caimi
- IBM Research - Europe, Zurich, Ruschlikon, Switzerland
| | - Simon Hönl
- IBM Research - Europe, Zurich, Ruschlikon, Switzerland
| | - Junqiu Liu
- Institute of Physics, Swiss Federal Institute of Technology Lausanne (EPFL), Lausanne, Switzerland
- Center for Quantum Science and Engineering, EPFL, Lausanne, Switzerland
| | - Paul Seidler
- IBM Research - Europe, Zurich, Ruschlikon, Switzerland.
| | - Tobias J Kippenberg
- Institute of Physics, Swiss Federal Institute of Technology Lausanne (EPFL), Lausanne, Switzerland.
- Center for Quantum Science and Engineering, EPFL, Lausanne, Switzerland.
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6
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Ma T, Tian Y, Su L, Wang H, Liu H, Wang F. Integratable electro-optic modulator based on a polymer-embedded silicon racetrack resonator with high electro-optic wavelength tuning. APPLIED OPTICS 2022; 61:7508-7514. [PMID: 36256056 DOI: 10.1364/ao.467799] [Citation(s) in RCA: 0] [Impact Index Per Article: 0] [Reference Citation Analysis] [Abstract] [Track Full Text] [Subscribe] [Scholar Register] [Received: 06/14/2022] [Accepted: 08/13/2022] [Indexed: 06/16/2023]
Abstract
Electro-optic (EO) modulators based on polymer-embedded silicon racetrack resonators (EOM-PSRR) are investigated. To obtain the single-mode propagation condition, the mode and transmission characteristics of the polymer-embedded silicon waveguide are simulated by the finite element method (FEM). By adding a static bias voltage, the EO modulation performances of EOM-PSRR embedded with lithium niobate (LiNbO3), EO polymer (AJ309), and hybrid EO polymer/TiO2 material (HEOT) are studied. The results show that the EOM-PSRR embedded with LiNbO3 achieves a high modulation depth (MD) of ∼27.6dB with a low EO wavelength tuning (λEO) of 10 pm/V. However, the EOM-PSRR embedded with HEOT has a high λEO of 100 pm/V but a low MD of ∼6.2dB with an extinction ratio of ∼5.2dB. The EOM-PSRR has potential application prospects in optical communication, optical signal processing, and optical network links. It can be produced as an optical frequency comb generator in a dense wavelength division multiplexing system, an EO frequency shifter for laser beams, an optical soliton former, and a photon time-delay device in a phased array radar.
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7
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A Review of Capabilities and Scope for Hybrid Integration Offered by Silicon-Nitride-Based Photonic Integrated Circuits. SENSORS 2022; 22:s22114227. [PMID: 35684846 PMCID: PMC9185365 DOI: 10.3390/s22114227] [Citation(s) in RCA: 1] [Impact Index Per Article: 0.5] [Reference Citation Analysis] [Abstract] [Key Words] [Track Full Text] [Download PDF] [Figures] [Subscribe] [Scholar Register] [Received: 04/27/2022] [Revised: 05/26/2022] [Accepted: 05/27/2022] [Indexed: 12/23/2022]
Abstract
In this review we present some of the recent advances in the field of silicon nitride photonic integrated circuits. The review focuses on the material deposition techniques currently available, illustrating the capabilities of each technique. The review then expands on the functionalisation of the platform to achieve nonlinear processing, optical modulation, nonvolatile optical memories and integration with III-V materials to obtain lasing or gain capabilities.
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8
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Xu M, Cai X. Advances in integrated ultra-wideband electro-optic modulators [Invited]. OPTICS EXPRESS 2022; 30:7253-7274. [PMID: 35299491 DOI: 10.1364/oe.449022] [Citation(s) in RCA: 2] [Impact Index Per Article: 1.0] [Reference Citation Analysis] [Abstract] [Track Full Text] [Subscribe] [Scholar Register] [Received: 11/21/2021] [Accepted: 01/29/2022] [Indexed: 06/14/2023]
Abstract
Increasing data traffic and bandwidth-hungry applications require electro-optic modulators with ultra-wide modulation bandwidth for cost-efficient optical networks. Thus far, integrated solutions have emerged to provide high bandwidth and low energy consumption in compact sizes. Here, we review the design guidelines and delicate structures for higher bandwidth, applying them to lumped-element and traveling-wave electrodes. Additionally, we focus on candidate material platforms with the potential for ultra-wideband optical systems. By comparing the superiority and mechanism limitations of different integrated modulators, we design a future roadmap based on the recent advances.
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9
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Zhao Z, Zhang Z, Li J, Shang Z, Wang G, Yin J, Chen H, Guo K, Yan P. MoS 2 hybrid integrated micro-ring resonator phase shifter based on a silicon nitride platform. OPTICS LETTERS 2022; 47:949-952. [PMID: 35167566 DOI: 10.1364/ol.447492] [Citation(s) in RCA: 1] [Impact Index Per Article: 0.5] [Reference Citation Analysis] [Abstract] [Track Full Text] [Subscribe] [Scholar Register] [Received: 11/04/2021] [Accepted: 01/09/2022] [Indexed: 06/14/2023]
Abstract
We demonstrate a low-power, compact micro-ring phase shifter based on hybrid integration with atomically thin two-dimensional layered materials, and experimentally establish a low-loss silicon nitride platform. Using a wet transfer method, a large-area few-layer MoS2 film is hybrid integrated with a micro-ring phase shifter, leading to a tuning efficiency of 5.8 pm V-1 at a center wavelength of 1545.294 nm and a half-wave-voltage-length product as low as 0.09 V cm. Our device is designed to provide a hybrid-integration-based active phase modulation scheme for integrated optical communication networks with large-cross-section silicon nitride waveguides.
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10
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Li Q, Ho CP, Tang H, Okano M, Ikeda K, Takagi S, Takenaka M. Si racetrack optical modulator based on the III-V/Si hybrid MOS capacitor. OPTICS EXPRESS 2021; 29:6824-6833. [PMID: 33726194 DOI: 10.1364/oe.418108] [Citation(s) in RCA: 1] [Impact Index Per Article: 0.3] [Reference Citation Analysis] [Abstract] [Track Full Text] [Subscribe] [Scholar Register] [Received: 12/22/2020] [Accepted: 02/11/2021] [Indexed: 06/12/2023]
Abstract
We have fabricated a Si racetrack optical modulator based on a III-V/Si hybrid metal-oxide-semiconductor (MOS) capacitor. The III-V/Si hybrid MOS optical phase shifter was integrated to a Si racetrack resonator with a coupling length of 200 µm and a coupling gap of 700 nm. The fabricated Si racetrack resonator demonstrated a small VπL of 0.059 Vcm. For 10-dB optical intensity modulation, the Si racetrack resonator showed a 60% smaller driving voltage than a Mach-Zehnder interferometer modulator with the same phase shifter, leading to a better balance between high energy efficiency and large modulation bandwidth.
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11
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Sun D, Zhang Y, Wang D, Song W, Liu X, Pang J, Geng D, Sang Y, Liu H. Microstructure and domain engineering of lithium niobate crystal films for integrated photonic applications. LIGHT, SCIENCE & APPLICATIONS 2020; 9:197. [PMID: 33303741 PMCID: PMC7729400 DOI: 10.1038/s41377-020-00434-0] [Citation(s) in RCA: 9] [Impact Index Per Article: 2.3] [Reference Citation Analysis] [Abstract] [Key Words] [Track Full Text] [Subscribe] [Scholar Register] [Received: 05/10/2020] [Revised: 11/08/2020] [Accepted: 11/12/2020] [Indexed: 05/20/2023]
Abstract
Recently, integrated photonics has attracted considerable interest owing to its wide application in optical communication and quantum technologies. Among the numerous photonic materials, lithium niobate film on insulator (LNOI) has become a promising photonic platform owing to its electro-optic and nonlinear optical properties along with ultralow-loss and high-confinement nanophotonic lithium niobate waveguides fabricated by the complementary metal-oxide-semiconductor (CMOS)-compatible microstructure engineering of LNOI. Furthermore, ferroelectric domain engineering in combination with nanophotonic waveguides on LNOI is gradually accelerating the development of integrated nonlinear photonics, which will play an important role in quantum technologies because of its ability to be integrated with the generation, processing, and auxiliary detection of the quantum states of light. Herein, we review the recent progress in CMOS-compatible microstructure engineering and domain engineering of LNOI for integrated lithium niobate photonics involving photonic modulation and nonlinear photonics. We believe that the great progress in integrated photonics on LNOI will lead to a new generation of techniques. Thus, there remains an urgent need for efficient methods for the preparation of LNOI that are suitable for large-scale and low-cost manufacturing of integrated photonic devices and systems.
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Affiliation(s)
- Dehui Sun
- Collaborative Innovation Center of Technology and Equipment for Biological Diagnosis and Therapy in Universities of Shandong, Institute for Advanced Interdisciplinary Research (iAIR), University of Jinan, Jinan, 250022, China.
| | - Yunwu Zhang
- Collaborative Innovation Center of Technology and Equipment for Biological Diagnosis and Therapy in Universities of Shandong, Institute for Advanced Interdisciplinary Research (iAIR), University of Jinan, Jinan, 250022, China
| | - Dongzhou Wang
- Jinan Institute of Quantum Technology, Jinan, 250101, China
| | - Wei Song
- CETC Deqing Huaying Electronics Co., Ltd., Huzhou, 313200, China
| | - Xiaoyan Liu
- Collaborative Innovation Center of Technology and Equipment for Biological Diagnosis and Therapy in Universities of Shandong, Institute for Advanced Interdisciplinary Research (iAIR), University of Jinan, Jinan, 250022, China
| | - Jinbo Pang
- Collaborative Innovation Center of Technology and Equipment for Biological Diagnosis and Therapy in Universities of Shandong, Institute for Advanced Interdisciplinary Research (iAIR), University of Jinan, Jinan, 250022, China
| | - Deqiang Geng
- Crystrong Photoelectric Technology Co., Ltd., Jinan, 250100, China
| | - Yuanhua Sang
- State Key Laboratory of Crystal Materials, Shandong University, Jinan, 250100, China
| | - Hong Liu
- Collaborative Innovation Center of Technology and Equipment for Biological Diagnosis and Therapy in Universities of Shandong, Institute for Advanced Interdisciplinary Research (iAIR), University of Jinan, Jinan, 250022, China.
- Jinan Institute of Quantum Technology, Jinan, 250101, China.
- State Key Laboratory of Crystal Materials, Shandong University, Jinan, 250100, China.
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12
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Liu Y, Huang X, Li Z, Kuang Y, Guan H, Wei Q, Fan Z, Li Z. TE/TM-pass polarizers based on lateral leakage in a thin film lithium niobate-silicon nitride hybrid platform. OPTICS LETTERS 2020; 45:4915-4918. [PMID: 32870889 DOI: 10.1364/ol.404197] [Citation(s) in RCA: 1] [Impact Index Per Article: 0.3] [Reference Citation Analysis] [Abstract] [Track Full Text] [Subscribe] [Scholar Register] [Received: 07/30/2020] [Accepted: 08/12/2020] [Indexed: 06/11/2023]
Abstract
TE/TM-pass polarizers based on the lithium niobate-silicon nitride hybrid platform are numerically proposed for the first time, to the best of our knowledge. By utilizing the lateral leakage of a shallowly etched rib waveguide, 1-mm-long TE/TM-pass polarizers with high extinction ratios of 28.72/24.03 dB are obtained. Because of the anisotropy of the lithium niobate, the lateral leakage of TE/TM polarization modes can occur along crystallographic z/y directions, respectively. Such TE/TM-pass polarizers can be integrated in the same wafer.
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13
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Ahmed ANR, Nelan S, Shi S, Yao P, Mercante A, Prather DW. Subvolt electro-optical modulator on thin-film lithium niobate and silicon nitride hybrid platform. OPTICS LETTERS 2020; 45:1112-1115. [PMID: 32108783 DOI: 10.1364/ol.381892] [Citation(s) in RCA: 7] [Impact Index Per Article: 1.8] [Reference Citation Analysis] [Abstract] [Track Full Text] [Subscribe] [Scholar Register] [Received: 10/30/2019] [Accepted: 01/15/2020] [Indexed: 06/10/2023]
Abstract
A low voltage operation electro-optic modulator is critical for applications ranging from optical communications to an analog photonic link. This paper reports a hybrid silicon nitride and lithium niobate electro-optic Mach-Zehnder modulator that employs 3 dB multimode interference couplers for splitting and combining light. The presented amplitude modulator with an interaction region length of 2.4 cm demonstrates a DC half-wave voltage of only 0.875 V, which corresponds to a modulation efficiency per unit length of 2.11 V cm. The power extinction ratio of the fabricated device is approximately 30 dB, and the on-chip optical loss is about 5.4 dB.
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