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Sharstniou A, Niauzorau S, Hardison AL, Puckett M, Krueger N, Ryckman JD, Azeredo B. Roughness Suppression in Electrochemical Nanoimprinting of Si for Applications in Silicon Photonics. ADVANCED MATERIALS (DEERFIELD BEACH, FLA.) 2022; 34:e2206608. [PMID: 36075876 DOI: 10.1002/adma.202206608] [Citation(s) in RCA: 0] [Impact Index Per Article: 0] [Reference Citation Analysis] [Abstract] [Key Words] [Track Full Text] [Subscribe] [Scholar Register] [Received: 07/20/2022] [Revised: 08/29/2022] [Indexed: 06/15/2023]
Abstract
Metal-assisted electrochemical nanoimprinting (Mac-Imprint) scales the fabrication of micro- and nanoscale 3D freeform geometries in silicon and holds the promise to enable novel chip-scale optics operating at the near-infrared spectrum. However, Mac-Imprint of silicon concomitantly generates mesoscale roughness (e.g., protrusion size ≈45 nm) creating prohibitive levels of light scattering. This arises from the requirement to coat stamps with nanoporous gold catalyst that, while sustaining etchant diffusion, imprints its pores (e.g., average diameter ≈42 nm) onto silicon. In this work, roughness is reduced to sub-10 nm levels, which is in par with plasma etching, by decreasing pore size of the catalyst via dealloying in far-from equilibrium conditions. At this level, single-digit nanometric details such as grain-boundary grooves of the catalyst are imprinted and attributed to the resolution limit of Mac-Imprint, which is argued to be twice the Debye length (i.e., 1.7 nm)-a finding that broadly applies to metal-assisted chemical etching. Last, Mac-Imprint is employed to produce single-mode rib-waveguides on pre-patterned silicon-on-insulator wafers with root-mean-square line-edge roughness less than 10 nm while providing depth uniformity (i.e., 42.9 ± 5.5 nm), and limited levels of silicon defect formation (e.g., Raman peak shift < 0.1 cm-1 ) and sidewall scattering.
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Affiliation(s)
- Aliaksandr Sharstniou
- Arizona State University, School of Manufacturing Systems and Networks, 6075 S. Innovation Way West, Mesa, AZ, 85212, USA
| | - Stanislau Niauzorau
- Arizona State University, School of Manufacturing Systems and Networks, 6075 S. Innovation Way West, Mesa, AZ, 85212, USA
| | - Anna L Hardison
- Clemson University, Holcombe Department of Electrical and Computer Engineering, 91 Technology Drive, Anderson, SC, 29625, USA
| | - Matthew Puckett
- Honeywell International, Aerospace Advanced Technology Advanced Sensors & Microsystems, 21111 N. 19th Avenue, Phoenix, AZ, 85027, USA
| | - Neil Krueger
- Honeywell International, Aerospace Advanced Technology Advanced Sensors & Microsystems, 12001 State Highway 55, Plymouth, MN, 55441, USA
| | - Judson D Ryckman
- Clemson University, Holcombe Department of Electrical and Computer Engineering, 91 Technology Drive, Anderson, SC, 29625, USA
| | - Bruno Azeredo
- Arizona State University, School of Manufacturing Systems and Networks, 6075 S. Innovation Way West, Mesa, AZ, 85212, USA
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Jian J, Liao J, Zhou M, Yao M, Chen Y, Liang X, Liu C, Tong Q. Enhanced Photoelectrochemical Water Splitting of Black Silicon Photoanode with pH‐Dependent Copper‐Bipyridine Catalysts. Chemistry 2022; 28:e202201520. [DOI: 10.1002/chem.202201520] [Citation(s) in RCA: 0] [Impact Index Per Article: 0] [Reference Citation Analysis] [Track Full Text] [Journal Information] [Subscribe] [Scholar Register] [Received: 05/17/2022] [Indexed: 11/12/2022]
Affiliation(s)
- Jing‐Xin Jian
- Department of Chemistry Key Laboratory for Preparation and Application of Ordered Structural Material of Guangdong Province and Guangdong Provincial Key Laboratory of Marine Disaster Prediction and Prevention Shantou University Shantou Guangdong 515063 P. R. China
| | - Jia‐Xin Liao
- Department of Chemistry Key Laboratory for Preparation and Application of Ordered Structural Material of Guangdong Province and Guangdong Provincial Key Laboratory of Marine Disaster Prediction and Prevention Shantou University Shantou Guangdong 515063 P. R. China
| | - Mu‐Han Zhou
- Department of Chemistry Key Laboratory for Preparation and Application of Ordered Structural Material of Guangdong Province and Guangdong Provincial Key Laboratory of Marine Disaster Prediction and Prevention Shantou University Shantou Guangdong 515063 P. R. China
| | - Ming‐Ming Yao
- Department of Chemistry Key Laboratory for Preparation and Application of Ordered Structural Material of Guangdong Province and Guangdong Provincial Key Laboratory of Marine Disaster Prediction and Prevention Shantou University Shantou Guangdong 515063 P. R. China
| | - Yi‐Jing Chen
- Department of Chemistry Key Laboratory for Preparation and Application of Ordered Structural Material of Guangdong Province and Guangdong Provincial Key Laboratory of Marine Disaster Prediction and Prevention Shantou University Shantou Guangdong 515063 P. R. China
| | - Xi‐Wen Liang
- Department of Chemistry Key Laboratory for Preparation and Application of Ordered Structural Material of Guangdong Province and Guangdong Provincial Key Laboratory of Marine Disaster Prediction and Prevention Shantou University Shantou Guangdong 515063 P. R. China
| | - Chao‐Ping Liu
- Department of Physics Shantou University Shantou Guangdong 515063 P. R. China
| | - Qing‐Xiao Tong
- Department of Chemistry Key Laboratory for Preparation and Application of Ordered Structural Material of Guangdong Province and Guangdong Provincial Key Laboratory of Marine Disaster Prediction and Prevention Shantou University Shantou Guangdong 515063 P. R. China
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Xu H, Han L, Su JJ, Tian ZQ, Zhan D. Spatially-separated and photo-enhanced semiconductor corrosion processes for high-efficient and contamination-free electrochemical nanoimprint lithography. Sci China Chem 2022. [DOI: 10.1007/s11426-021-1194-3] [Citation(s) in RCA: 1] [Impact Index Per Article: 0.5] [Reference Citation Analysis] [Track Full Text] [Journal Information] [Subscribe] [Scholar Register] [Indexed: 12/31/2022]
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Srivastava RP, Khang DY. Structuring of Si into Multiple Scales by Metal-Assisted Chemical Etching. ADVANCED MATERIALS (DEERFIELD BEACH, FLA.) 2021; 33:e2005932. [PMID: 34013605 DOI: 10.1002/adma.202005932] [Citation(s) in RCA: 12] [Impact Index Per Article: 4.0] [Reference Citation Analysis] [Abstract] [Key Words] [Track Full Text] [Subscribe] [Scholar Register] [Received: 08/31/2020] [Revised: 11/18/2020] [Indexed: 05/27/2023]
Abstract
Structuring Si, ranging from nanoscale to macroscale feature dimensions, is essential for many applications. Metal-assisted chemical etching (MaCE) has been developed as a simple, low-cost, and scalable method to produce structures across widely different dimensions. The process involves various parameters, such as catalyst, substrate doping type and level, crystallography, etchant formulation, and etch additives. Careful optimization of these parameters is the key to the successful fabrication of Si structures. In this review, recent additions to the MaCE process are presented after a brief introduction to the fundamental principles involved in MaCE. In particular, the bulk-scale structuring of Si by MaCE is summarized and critically discussed with application examples. Various approaches for effective mass transport schemes are introduced and discussed. Further, the fine control of etch directionality and uniformity, and the suppression of unwanted side etching are also discussed. Known application examples of Si macrostructures fabricated by MaCE, though limited thus far, are presented. There are significant opportunities for the application of macroscale Si structures in different fields, such as microfluidics, micro-total analysis systems, and microelectromechanical systems, etc. Thus more research is necessary on macroscale MaCE of Si and their applications.
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Affiliation(s)
- Ravi P Srivastava
- Soft Electronic Materials and Devices Laboratory, Department of Materials Science and Engineering, Yonsei University, Seoul, 03722, Korea
| | - Dahl-Young Khang
- Soft Electronic Materials and Devices Laboratory, Department of Materials Science and Engineering, Yonsei University, Seoul, 03722, Korea
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Kolasinski KW. Metal-Assisted Catalytic Etching (MACE) for Nanofabrication of Semiconductor Powders. MICROMACHINES 2021; 12:776. [PMID: 34209231 PMCID: PMC8304928 DOI: 10.3390/mi12070776] [Citation(s) in RCA: 1] [Impact Index Per Article: 0.3] [Reference Citation Analysis] [Abstract] [Key Words] [Grants] [Track Full Text] [Download PDF] [Figures] [Subscribe] [Scholar Register] [Received: 06/12/2021] [Revised: 06/28/2021] [Accepted: 06/29/2021] [Indexed: 12/31/2022]
Abstract
Electroless etching of semiconductors has been elevated to an advanced micromachining process by the addition of a structured metal catalyst. Patterning of the catalyst by lithographic techniques facilitated the patterning of crystalline and polycrystalline wafer substrates. Galvanic deposition of metals on semiconductors has a natural tendency to produce nanoparticles rather than flat uniform films. This characteristic makes possible the etching of wafers and particles with arbitrary shape and size. While it has been widely recognized that spontaneous deposition of metal nanoparticles can be used in connection with etching to porosify wafers, it is also possible to produced nanostructured powders. Metal-assisted catalytic etching (MACE) can be controlled to produce (1) etch track pores with shapes and sizes closely related to the shape and size of the metal nanoparticle, (2) hierarchically porosified substrates exhibiting combinations of large etch track pores and mesopores, and (3) nanowires with either solid or mesoporous cores. This review discussed the mechanisms of porosification, processing advances, and the properties of the etch product with special emphasis on the etching of silicon powders.
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Affiliation(s)
- Kurt W Kolasinski
- Department of Chemistry, West Chester University, West Chester, PA 19383, USA
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Pinna E, Le Gall S, Torralba E, Mula G, Cachet-Vivier C, Bastide S. Mesopore Formation and Silicon Surface Nanostructuration by Metal-Assisted Chemical Etching With Silver Nanoparticles. Front Chem 2020; 8:658. [PMID: 32850670 PMCID: PMC7416550 DOI: 10.3389/fchem.2020.00658] [Citation(s) in RCA: 9] [Impact Index Per Article: 2.3] [Reference Citation Analysis] [Abstract] [Key Words] [Track Full Text] [Download PDF] [Figures] [Journal Information] [Subscribe] [Scholar Register] [Received: 03/04/2020] [Accepted: 06/23/2020] [Indexed: 11/13/2022] Open
Abstract
This article presents a study on Metal-Assisted Chemical Etching (MACE) of silicon in HF-H2O2 using silver nanoparticles as catalysts. Our aim is a better understanding of the process to elaborate new 3D submicrometric surface structures useful for light management. We investigated MACE over the whole range of silicon doping, i.e., p++, p+, p, p-, n, n+, and n++. We discovered that, instead of the well-defined and straight mesopores obtained in p and n-type silicon, in p++ and n++ silicon MACE leads to the formation of cone-shaped macropores filled with porous silicon. We account for the transition between these two pore-formation regimes (straight and cone-shaped pores) by modeling (at equilibrium and under polarization) the Ag/Si/electrolyte (HF) system. The model simulates the system as two nanodiodes in series. We show that delocalized MACE is explained by a large tunnel current contribution for the p-Si/Ag and n-Si/HF diodes under reverse polarization, which increases with the doping level and when the size of the nanocontacts (Ag, HF) decreases. By analogy with the results obtained on heavily doped silicon, we finally present a method to form size-controlled cone-shaped macropores in p silicon with silver nanoparticles. This shape, instead of the usual straight mesopores, is obtained by applying an external anodic polarization during MACE. Two methods are shown to be effective for the control of the macropore cone angle: one by adjusting the potential applied during MACE, the other by changing the H2O2 concentration. Under appropriate etching conditions, the obtained macropores exhibit optical properties (reflectivity ~3 %) similar to that of black silicon.
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Affiliation(s)
- Elisa Pinna
- PoroSiLab, Dipartimento di Fisica, Università degli Studi di Cagliari, Monserrato, Italy
| | - Sylvain Le Gall
- Group of Electrical Engineering of Paris (GeePs), CNRS, Univ. Paris-Saclay, CentraleSupélec, Sorbonne Univ., Gif-sur-Yvette, France
| | | | - Guido Mula
- PoroSiLab, Dipartimento di Fisica, Università degli Studi di Cagliari, Monserrato, Italy
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