Mechanical-Resonance-Enhanced Thin-Film Magnetoelectric Heterostructures for Magnetometers, Mechanical Antennas, Tunable RF Inductors, and Filters

MagSonic: Hybrid Magnetic-Ultrasonic Wireless Interrogation of Millimeter-Scale Biomedical Implants With Magnetoelectric Transducer

Wireless interrogation (power and data transfer) of biomedical implants, miniaturized to millimeter (mm) dimensions, is critical for their chronic operation. Achieving simultaneous wireless power and data transfer at deep sites reliably within safety limits for closed-loop sensing/actuation functions of mm-sized implants is challenging. To enable this operation, a hybrid magnetic-ultrasonic interrogation approach (called MagSonic) is realized through a single magnetoelectric (ME) transducer at the implant that can generate and receive both magnetic field and ultrasound. The fabricated mm-sized bar-shaped ME transducer (5.2×2×1.6 mm3) operates at acoustic wave resonance, functioning at sub-MHz frequencies. For the first time, we demonstrate wireless power reception through one modality (magnetic field or ultrasound) and simultaneous uplink data transmission using the other. At 40 mm depth, the MagSonic link could achieve 100 kbps uplink data rate (bit error rate ≤ 10-5) using 190 pJ/bit transmitted energy and 8 mW delivered power in tissue. The robustness of the MagSonic interrogation link against power carrier interference and misalignments is also demonstrated.

Self-rectifying magnetoelectric metamaterials for remote neural stimulation and motor function restoration

Magnetoelectric materials convert magnetic fields into electric fields. These materials are often used in wireless electronic and biomedical applications. For example, magnetoelectrics could enable the remote stimulation of neural tissue, but the optimal resonance frequencies are typically too high to stimulate neural activity. Here we describe a self-rectifying magnetoelectric metamaterial for a precisely timed neural stimulation. This metamaterial relies on nonlinear charge transport across semiconductor layers that allow the material to generate a steady bias voltage in the presence of an alternating magnetic field. We generate arbitrary pulse sequences with time-averaged voltage biases in excess of 2 V. As a result, we can use magnetoelectric nonlinear metamaterials to wirelessly stimulate peripheral nerves to restore a sensory reflex in an anaesthetized rat model and restore signal propagation in a severed nerve with latencies of less than 5 ms. Overall, these results showing the rational design of magnetoelectric metamaterials support applications in advanced biotechnology and electronics.

High Isolation, Double-Clamped, Magnetoelectric Microelectromechanical Resonator Magnetometer

Magnetoelectric (ME)-based magnetometers have garnered much attention as they boast ultra-low-power systems with a small form factor and limit of detection in the tens of picotesla. The highly sensitive and low-power electric readout from the ME sensor makes them attractive for near DC and low-frequency AC magnetic fields as platforms for continuous magnetic signature monitoring. Among multiple configurations of the current ME magnetic sensors, most rely on exploiting the mechanically resonant characteristics of a released ME microelectromechanical system (MEMS) in a heterostructure device. Through optimizing the resonant device configuration, we design and fabricate a fixed-fixed resonant beam structure with high isolation compared to previous designs operating at ~800 nW of power comprised of piezoelectric aluminum nitride (AlN) and magnetostrictive (Co1-xFex)-based thin films that are less susceptible to vibration while providing similar characteristics to ME-MEMS cantilever devices. In this new design of double-clamped magnetoelectric MEMS resonators, we have also utilized thin films of a new iron-cobalt-hafnium alloy (Fe0.5Co0.5)0.92Hf0.08 that provides a low-stress, high magnetostrictive material with an amorphous crystalline structure and ultra-low magnetocrystalline anisotropy. Together, the improvements of this sensor design yield a magnetic field sensitivity of 125 Hz/mT when released in a compressive state. The overall detection limit of these sensors using an electric field drive and readout are presented, and noise sources are discussed. Based on these results, design parameters for future ME MEMS field sensors are discussed.

A Symmetrical Quartz-Based Magnetoelectric Sensor for Pico-Tesla Magnetic Field Detection

The magnetic sensor should acquire a high detection ability over a wide low-frequency (LF) band of 1–100 Hz for biomagnetic measurements due to the large LF noise. This work presents a magnetic sensor with a modulation coil based on the tri-layer symmetrical Metglas/Quartz/Metglas laminate for LF magnetic fields detection. The Metglas/Quartz/Metglas laminate was fabricated using a rectangle quartz plate with twenty Metglas foils epoxy glued symmetrically. Additionally, the coil can be used to generate modulation voltage. The limit of detection (LOD) of the fabricated symmetrical magnetoelectric (ME) sensor has been measured and optimized without DC bias via frequency modulation technique. Experimental results demonstrate that the proposed ME sensor can detect a small magnetic field of 11 pT at 1 Hz. Moreover, the Metglas thickness and the modulation voltage also have been optimized and the detection ability of the fabricated sensor has been enhanced with a lower LOD value of 2.7 pT at 1 Hz. This paper provides a symmetrical magnetoelectric sensor using piezoelectric quartz material for LF pico-Tesla magnetic field signals detection. Additionally, the symmetrical sensor without bias can provide a cost-effective and high-performance approach for LF magnetic field detection.

A very low frequency (VLF) antenna based on clamped bending-mode structure magnetoelectric laminates

As the development of wireless communication devices tends to be highly integrated, the miniaturization of very low frequency (VLF) antenna units has always been an unresolved issue. Here, a novel VLF mechanical communication antenna using magnetoelectric (ME) laminates with bending-mode structure is realized. ME laminates combines magnetostrictive Metglas amorphous ribbons and piezoelectric 0.7Pb(Mg_1/3Nb_2/3)O₃-0.3PbTiO₃single crystal plates. From the simulation, we confirmed that the ME laminates can reduce the resonance peak from 18 kHz to 7.5 kHz by bending-mode structure. Experiment results show the resonance frequency can be farther reduced to 6.3 kHz by clamping one end of the ME antenna. The ME laminate exhibits a giant converse ME coefficient of 6 Oe cm V^-1at 6.3 kHz. The magnetic flux density generated by the ME antenna has been tested along with distance ranging from 0 to 60 cm and it is estimated that a 1 fT flux could be detected around 100 m with an excitation power of 10 mW.

Strain Control of Magnetic Anisotropy in Yttrium Iron Garnet Films in a Composite Structure with Yttrium Aluminum Garnet Substrate

This report is on the nature of strain in thin films of yttrium iron garnet (YIG) on yttrium aluminum garnet (YAG) substrates due to film-substrate lattice mismatch and the resulting induced magnetic anisotropy. Films with thickness 55 nm to 380 nm were deposited on (100), (110), and (111) YAG substrates using pulsed laser deposition (PLD) techniques and characterized by structural and magnetic characterization techniques. The in-plane strain determined to be compressive using X-ray diffraction (XRD). It varied from −0.12% to −0.98% and increased in magnitude with increasing film thickness and was relatively large in films on (100) YAG. The out-of-plane strain was tensile and also increased with increasing film thickness. The estimated strain-induced magnetic anisotropy field, found from XRD data, was out of plane; its value increased with film thickness and ranged from 0.47 kOe to 3.96 kOe. Ferromagnetic resonance (FMR) measurements at 5 to 21 GHz also revealed the presence of a perpendicular magnetic anisotropy that decreased with increasing film thickness and its values were smaller than values obtained from XRD data. The PLD YIG films on YAG substrates exhibiting a perpendicular anisotropy field have the potential for use in self-biased sensors and high-frequency devices.

Resonant Magnetometer for Ultralow Magnetic Field Detection by Integrating Magnetoelastic Membrane on Film Bulk Acoustic Resonator

Here, we report on a composite nanomechanical resonant magnetometer with magnetoelastic thin film integrated on the surface of a film bulk acoustic resonator (FBAR). By exploiting the delta-E effect of magnetoelastic thin film and resonance characteristic in piezoelectric thin film, we theoretically and experimentally demonstrate the capability to realize ultrahigh resonance frequency and excellent magnetic field sensitivity in such composite configuration, thereby greatly improving the limit of detection of weak magnetic field. The proposed FBAR-based resonant magnetometer achieves maximum magnetic sensitivity of 137 kHz/Oe in a proof-of-concept device without structural optimization, corresponding to a noise equivalent power as low as 7 nT/Hz^1/2. Further study indicates that by optimizing the thicknesses of the magnetic sensitive layer and piezoelectric layer, an unprecedented sensitivity of 5 GHz/Oe with an exceptional limit of detection of weak magnetic field down to 190 [Formula: see text]/Hz^1/2 could be potentially achieved. Our work provides a forward new and exciting route toward ultralow magnetic field detection in civilian and military applications.

Design and Optimization of a BAW Magnetic Sensor Based on Magnetoelectric Coupling

Magnetic sensors actuated by bulk acoustic wave (BAW) have attracted extensive attention due to the fact of their high sensitivity, GHz-level high frequency, and small size. Different from previous studies, suppression of energy loss and improvement in energy conversion efficiency of the BAW magnetoelectric (ME) sensor were systematically considered during the device design in this work. Finite element analysis models of material (magnetic composite), structure (ME heterostructure), and device (BAW ME magnetic sensor) were established and analyzed in COMSOL software. Additionally, the magnetic composite was prepared by radio frequency magnetron sputtering, and its soft magnetism was characterized by magnetic hysteresis loop and surface roughness. The research results demonstrate that after inserting four layers of 5 nm Al2O3 films, a performance of 86.7% eddy current loss suppression rate, a less than 1.1% magnetostriction degradation rate, and better soft magnetism were achieved in 600 nm FeGaB. Furthermore, compared with other structures, the two-layer piezomagnetic/piezoelectric heterostructure had a better ME coupling performance. Eventually, the design of the BAW ME magnetic sensor was optimized by the resonance-enhanced ME coupling to match the resonance frequency between the magnetic composite and the BAW resonator. When a 54,500 A/m direct current bias magnetic field was applied, the sensor worked at the first-order resonance frequency and showed good performance. Its linearity was better than 1.30%, the sensitivity was as high as 2.33 μmV/A, and the measurement range covered 0–5000 A/m.

Modeling and Parallel Operation of Exchange-Biased Delta-E Effect Magnetometers for Sensor Arrays

Recently, Delta-E effect magnetic field sensors based on exchange-biased magnetic multilayers have shown the potential of detecting low-frequency and small-amplitude magnetic fields. Their design is compatible with microelectromechanical system technology, potentially small, and therefore, suitable for arrays with a large number N of sensor elements. In this study, we explore the prospects and limitations for improving the detection limit by averaging the output of N sensor elements operated in parallel with a single oscillator and a single amplifier to avoid additional electronics and keep the setup compact. Measurements are performed on a two-element array of exchange-biased sensor elements to validate a signal and noise model. With the model, we estimate requirements and tolerances for sensor elements using larger N. It is found that the intrinsic noise of the sensor elements can be considered uncorrelated, and the signal amplitude is improved if the resonance frequencies differ by less than approximately half the bandwidth of the resonators. Under these conditions, the averaging results in a maximum improvement in the detection limit by a factor of N. A maximum N≈200 exists, which depends on the read-out electronics and the sensor intrinsic noise. Overall, the results indicate that significant improvement in the limit of detection is possible, and a model is presented for optimizing the design of delta-E effect sensor arrays in the future.

Magnetoelectric Magnetic Field Sensors: A Review

One of the new materials that have recently attracted wide attention of researchers are magnetoelectric (ME) composites. Great interest in these materials is due to their properties associated with the transformation of electric polarization/magnetization under the influence of external magnetic/electric fields and the possibility of their use to create new devices. In the proposed review, ME magnetic field sensors based on the widely used structures Terfenol—PZT/PMN-PT, Metglas—PZT/PMN-PT, and Metglas—Lithium niobate, among others, are considered as the first applications of the ME effect in technology. Estimates of the parameters of ME sensors are given, and comparative characteristics of magnetic field sensors are presented. Taking into account the high sensitivity of ME magnetic field sensors, comparable to superconducting quantum interference devices (SQUIDs), we discuss the areas of their application.

Wearable wireless power systems for 'ME-BIT' magnetoelectric-powered bio implants

Objective.Compared to biomedical devices with implanted batteries, wirelessly powered technologies can be longer-lasting, less invasive, safer, and can be miniaturized to access difficult-to-reach areas of the body. Magnetic fields are an attractive wireless power transfer modality for such bioelectronic applications because they suffer negligible absorption and reflection in biological tissues. However, current solutions using magnetic fields for mm sized implants either operate at high frequencies (>500 kHz) or require high magnetic field strengths (>10  mT), which restricts the amount of power that can be transferred safely through tissue and limits the development of wearable power transmitter systems. Magnetoelectric (ME) materials have recently been shown to provide a wireless power solution for mm-sized neural stimulators. These ME transducers convert low magnitude (<1 mT) and low-frequency (∼300 kHz) magnetic fields into electric fields that can power custom integrated circuits or stimulate nearby tissue.Approach.Here we demonstrate a battery-powered wearable magnetic field generator that can power a miniaturized MagnetoElectric-powered Bio ImplanT 'ME-BIT' that functions as a neural stimulator. The wearable transmitter weighs less than 0.5  lbs and has an approximate battery life of 37 h.Main results.We demonstrate the ability to power a millimeter-sized prototype 'ME-BIT' at a distance of 4 cm with enough energy to electrically stimulate a rat sciatic nerve. We also find that the system performs well under translational misalignment and identify safe operating ranges according to the specific absorption rate limits set by the IEEE Std 95.1-2019.Significance.These results validate the feasibility of a wearable system that can power miniaturized ME implants that can be used for different neuromodulation applications.

Review of Magnetoelectric Sensors

Multiferroic magnetoelectric (ME) materials with the capability of coupling magnetization and electric polarization have been providing diverse routes towards functional devices and thus attracting ever-increasing attention. The typical device applications include sensors, energy harvesters, magnetoelectric random access memories, tunable microwave devices and ME antennas etc. Among those application scenarios, ME sensors are specifically focused in this review article. We begin with an introduction of materials development and then recent advances in ME sensors are overviewed. Engineering applications of ME sensors are followed and typical scenarios are presented. Finally, several remaining challenges and future directions from the perspective of sensor designs and real applications are included.

Exchange biased delta-E effect enables the detection of low frequency pT magnetic fields with simultaneous localization

Delta-E effect sensors are based on magnetoelectric resonators that detune in a magnetic field due to the delta-E effect of the magnetostrictive material. In recent years, such sensors have shown the potential to detect small amplitude and low-frequency magnetic fields. Yet, they all require external magnetic bias fields for optimal operation, which is highly detrimental to their application. Here, we solve this problem by combining the delta-E effect with exchange biased multilayers and operate the resonator in a low-loss torsion mode. It is comprehensively analyzed experimentally and theoretically using various kinds of models. Due to the exchange bias, no external magnetic bias fields are required, but still low detection limits down to [Formula: see text] at 25 Hz are achieved. The potential of this concept is demonstrated with a new operating scheme that permits simultaneous measurement and localization, which is especially desirable for typical biomedical inverse solution problems. The sensor is localized with a minimum spatial resolution of 1 cm while measuring a low-frequency magnetic test signal that can be well reconstructed. Overall, we demonstrate that this class of magnetic field sensors is a significant step towards first biomedical applications and compact large number sensor arrays.

Magnetic Proximity Sensor Based on Magnetoelectric Composites and Printed Coils

Magnetic sensors are mandatory in a broad range of applications nowadays, being the increasing interest on such sensors mainly driven by the growing demand of materials required by Industry 4.0 and the Internet of Things concept. Optimized power consumption, reliability, flexibility, versatility, lightweight and low-temperature fabrication are some of the technological requirements in which the scientific community is focusing efforts. Aiming to positively respond to those challenges, this work reports magnetic proximity sensors based on magnetoelectric (ME) polyvinylidene fluoride (PVDF)/Metglas composites and an excitation-printed coil. The proposed magnetic proximity sensor shows a maximum resonant ME coefficient (α) of 50.2 Vcm⁻¹ Oe⁻¹, an AC linear response (R² = 0.997) and a maximum voltage output of 362 mV, which suggests suitability for proximity-sensing applications in the areas of aerospace, automotive, positioning, machine safety, recreation and advertising panels, among others.

A Review of Thin-Film Magnetoelastic Materials for Magnetoelectric Applications

Since the revival of multiferroic laminates with giant magnetoelectric (ME) coefficients, a variety of multifunctional ME devices, such as sensor, inductor, filter, antenna etc. have been developed. Magnetoelastic materials, which couple the magnetization and strain together, have recently attracted ever-increasing attention due to their key roles in ME applications. This review starts with a brief introduction to the early research efforts in the field of multiferroic materials and moves to the recent work on magnetoelectric coupling and their applications based on both bulk and thin-film materials. This is followed by sections summarizing historical works and solving the challenges specific to the fabrication and characterization of magnetoelastic materials with large magnetostriction constants. After presenting the magnetostrictive thin films and their static and dynamic properties, we review micro-electromechanical systems (MEMS) and bulk devices utilizing ME effect. Finally, some open questions and future application directions where the community could head for magnetoelastic materials will be discussed.

Magnetic Measurement of Electrically Evoked Muscle Responses With Optically Pumped Magnetometers

OBJECTIVE

Electroneurography has been an essential method for assessing peripheral nerve disorders for decades. During this procedure, a nerve is briefly electrically excited, and nerve conduction properties are identified by indirect means from the behavior of the innervated muscle. The magnetic field of the resulting muscle response can also be recorded by novel, uncooled magnetometers, which have become very attractive for different medical applications over recent years. These highly sensitive magnetometers are called optically pumped magnetometers.

METHODS

We performed unaveraged and averaged magnetic signal detection of electrically evoked muscle responses using optically pumped magnetometers. We then discussed the suitability of this procedure for clinical applications in the context of diagnostic value and in direct comparison with the current electrical gold standard.

RESULTS

The magnetic detection of muscle responses is possible using optically pumped magnetometers. Our magnetic results (averaged and unaveraged) closely match those from electrical measurements.

CONCLUSION

Optically pumped magnetometers provide an alternative, contactless technology for electrode-based motor studies, but they are currently not ready for routine clinical use. This costly technology requires additional earth magnetic shielding because this is a prerequisite for proper operation. Currently, there are no diagnostic advantages over electrical measurements. Additionally, the required measurement setup and procedure are much more complicated.

SIGNIFICANCE

In contrast to already published proof-of-principle studies for magnetomyography, we report in detail the results of the magnetic measurements of electrically evoked muscle responses in a shielded environment by applying supramaximal stimulation and finally validate our findings with electroneurography data as a reference.

Enhanced Magnetoelectric Coupling in BaTiO3-BiFeO3 Multilayers-An Interface Effect

Combining various (multi-)ferroic materials into heterostructures is a promising route to enhance their inherent properties, such as the magnetoelectric coupling in BiFeO3 thin films. We have previously reported on the up-to-tenfold increase of the magnetoelectric voltage coefficient α ME in BaTiO3-BiFeO3 multilayers relative to BiFeO3 single layers. Unraveling the origin and mechanism of this enhanced effect is a prerequisite to designing new materials for the application of magnetoelectric devices. By careful variations in the multilayer design we now present an evaluation of the influences of the BaTiO3-BiFeO3 thickness ratio, oxygen pressure during deposition, and double layer thickness. Our findings suggest an interface driven effect at the core of the magnetoelectric coupling effect in our multilayers superimposed on the inherent magnetoelectric coupling of BiFeO3 thin films, which leads to a giant α ME coefficient of 480 V c m -1 Oe-1 for a 16 × (BaTiO3-BiFeO3) superlattice with a 4 . 8 nm double layer periodicity.

Frequency Dependency of the Delta-E Effect and the Sensitivity of Delta-E Effect Magnetic Field Sensors

In recent years the delta-E effect has been used for detecting low frequency and low amplitude magnetic fields. Delta-E effect sensors utilize a forced mechanical resonator that is detuned by the delta-E effect upon application of a magnetic field. Typical frequencies of operation are from several kHz to the upper MHz regime. Different models have been used to describe the delta-E effect in those devices, but the frequency dependency has mainly been neglected. With this work we present a simple description of the delta-E effect as a function of the differential magnetic susceptibility χ of the magnetic material. We derive an analytical expression for χ that permits describing the frequency dependency of the delta-E effect of the Young’s modulus and the magnetic sensitivity. Calculations are compared with measurements on soft-magnetic (Fe90Co10)78Si12B10 thin films. We show that the frequency of operation can have a strong influence on the delta-E effect and the magnetic sensitivity of delta-E effect sensors. Overall, the delta-E effect reduces with increasing frequency and results in a stiffening of the Young’s modulus above the ferromagnetic resonance frequency. The details depend on the Gilbert damping. Whereas for large Gilbert damping the sensitivity continuously decreases with frequency, typical damping values result in an amplification close to the ferromagnetic resonance frequency.