A Scalable and Low Stress Post-CMOS Processing Technique for Implantable Microsensors

A method for efficient, rapid, and minimally invasive implantation of individual non-functional motes with penetrating subcellular-diameter carbon fiber electrodes into rat cortex

Objective

Distributed arrays of wireless neural interfacing chips with 1-2 channels each, known as "neural dust", could enhance brain machine interfaces (BMIs) by removing the wired connection through the scalp and increasing biocompatibility with their submillimeter size. Although several approaches for neural dust have emerged, a procedure for implanting them in batches that builds upon the safety and performance of currently used electrodes remains to be demonstrated.

Approach

Here, we demonstrate the feasibility of implanting batches of wireless motes that rest on the cortical surface with carbon fiber electrodes of subcellular diameter (6.8-8.4 μm) that penetrate to a target brain depth of 1 mm without insertion aids. To simulate their implantation, we assembled more than 230 mechanically equivalent motes and affixed them to insertion tools with polyethylene glycol (PEG), a quickly dissolvable and biocompatible material. Then, we implanted mote grids of multiple configurations into rat cortex in vivo and evaluated insertion success and their arrangement on the brain surface using photos and videos captured during their implantation.

Main Results

When placing motes onto the insertion device, we found that they aggregated in molten PEG such that the array pitch was only 5% wider than the dimensions of the mote bases themselves (240 × 240 μm). Overall, we found that motes with this arrangement could be inserted into rat cortex with a high success rate, as 171/186 (92%) motes in 4×4 (N=4) and 5×5 (N=5) square grid configurations were successfully inserted using the insertion device alone. After implantation, measurements of how much motes tilted (22±9°, X̄±S) and had been displaced relative to their original positions were smaller than those measured for devices implanted inside the brain in the literature.

Significance

Collectively, these data establish the viability of safely implementing motes with ultrasmall electrodes and epicortically-situated chips for use in future BMIs.

Fabrication of Microelectrodes on Microchip Sidewalls for Injectable Biomedical Devices

Implantable Medical Devices (IMDs) leveraging advanced CMOS technology promise to revolutionize neural network modulation and brain activity monitoring through miniaturized, battery-free designs. Conventional miniaturization efforts face challenges due to the reliance on off-chip components and complex assembly that increase the implant's volume and reduce reliability. Our research introduces a novel integration technique by fabricating microelectrodes on the sidewalls of encapsulated CMOS chips, significantly reducing the size of the implant. Central to our approach is the employment of a plasma-focused ion beam (PFIB), enabling precise and efficient electrode fabrication.

A Wearable Real-Time System for Simultaneous Wireless Power and Data Transmission to Cortical Visual Prosthesis

Wireless, miniaturised and distributed neural interfaces are emerging neurotechnologies. Although extensive research efforts contribute to their technological advancement, the need for real-time systems enabling simultaneous wireless information and power transfer toward distributed neural implants remains crucial. Here we present a complete wearable system including a software for real-time image capturing, processing and digital data transfer; an hardware for high radiofrequency generation and modulation via amplitude shift keying; and a 3-coil inductive link adapt to operate with multiple miniaturised receivers. The system operates in real-time with a maximum frame rate of 20 Hz, reconstructing each frame with a matrix of 32 × 32 pixels. The device generates a carrier frequency of 433.92 MHz. It transmits the highest power of 32 dBm with a data rate of 6 Mbps and a variable modulation index as low as 8 %, thus potentially enabling wireless communication with 1024 miniaturised and distributed intracortical microstimulators. The system is primarily conceived as an external wearable device for distributed cortical visual prosthesis covering a visual field of 20 °. At the same time, it is modular and versatile, being suitable for multiple applications requiring simultaneous wireless information and power transfer to large-scale neural interfaces.

Fabrication and Characterization of Photovoltaic Microgenerators Using the Complementary Metal Oxide Semiconductor Process

This study develops a photovoltaic microgenerator based on the complementary metal oxide semiconductor (CMOS) process. The photovoltaic microgenerator converts the absorbed light energy into electrical energy using the photovoltaic effect. The material for the photovoltaic microgenerator is silicon, and its structure consists of patterned p-n junctions. The design of the photovoltaic microgenerator utilizes a grid-like shape, forming a large-area p-n junction with a patterned p-doping and N-well structure to enhance the photocurrent and improve the device's performance. The photovoltaic microgenerator is fabricated employing the CMOS process with post-processing step. Post-processing is applied to enhance the microgenerator's light absorption and energy-conversion efficiency. This involves using wet etching with buffered-oxide etch (BOE) to remove the silicon dioxide layer above the p-n junctions, allowing direct illumination of the p-n junctions. The area of the photovoltaic microgenerator is 0.79 mm2. The experimental results show that under an illumination intensity of 1000 W/m2, the photovoltaic microgenerator exhibits an open-circuit voltage of 0.53 V, a short-circuit current of 233 µA, a maximum output power of 99 µW, a fill factor of 0.8, and an energy-conversion efficiency of 12.5%.

Fabrication and Assembly Techniques for Sub-mm Battery-Free Epicortical Implants

Over the past three decades, we have seen significant advances in the field of wireless implantable medical devices (IMDs) that can interact with the nervous system. To further improve the stability, safety, and distribution of these interfaces, a new class of implantable devices is being developed: single-channel, sub-mm scale, and wireless microelectronic devices. In this research, we describe a new and simple technique for fabricating and assembling a sub-mm, wirelessly powered stimulating implant. The implant consists of an ASIC measuring 900 × 450 × 80 µm³, two PEDOT-coated microelectrodes, an SMD inductor, and a SU-8 coating. The microelectrodes and SMD are directly mounted onto the ASIC. The ultra-small device is powered using electromagnetic (EM) waves in the near-field using a two-coil inductive link and demonstrates a maximum achievable power transfer efficiency (PTE) of 0.17% in the air with a coil separation of 0.5 cm. In vivo experiments conducted on an anesthetized rat verified the efficiency of stimulation.

New Era of Electroceuticals: Clinically Driven Smart Implantable Electronic Devices Moving towards Precision Therapy

In the name of electroceuticals, bioelectronic devices have transformed and become essential for dealing with all physiological responses. This significant advancement is attributable to its interdisciplinary nature from engineering and sciences and also the progress in micro and nanotechnologies. Undoubtedly, in the future, bioelectronics would lead in such a way that diagnosing and treating patients' diseases is more efficient. In this context, we have reviewed the current advancement of implantable medical electronics (electroceuticals) with their immense potential advantages. Specifically, the article discusses pacemakers, neural stimulation, artificial retinae, and vagus nerve stimulation, their micro/nanoscale features, and material aspects as value addition. Over the past years, most researchers have only focused on the electroceuticals metamorphically transforming from a concept to a device stage to positively impact the therapeutic outcomes. Herein, the article discusses the smart implants' development challenges and opportunities, electromagnetic field effects, and their potential consequences, which will be useful for developing a reliable and qualified smart electroceutical implant for targeted clinical use. Finally, this review article highlights the importance of wirelessly supplying the necessary power and wirelessly triggering functional electronic circuits with ultra-low power consumption and multi-functional advantages such as monitoring and treating the disease in real-time.

Implantable brain machine interfaces: first-in-human studies, technology challenges and trends

Implantable brain machine interfaces (BMIs) are now on a trajectory to go mainstream, wherein what was once considered last resort will progressively become elective at earlier stages in disease treatment. First-in-human successes have demonstrated the ability to decode highly dexterous motor skills such as handwriting, and speech from human cortical activity. These have been used for cursor and prosthesis control, direct-to-text communication and speech synthesis. Along with these breakthrough studies, technology advancements have enabled the observation of more channels of neural activity through new concepts for centralised/distributed implant architectures. This is complemented by research in flexible substrates, packaging, surgical workflows and data processing. New regulatory guidance and funding has galvanised the field. This culmination of resource, efforts and capability is now attracting significant investment for BMI commercialisation. This paper reviews recent developments and describes the paradigm shift in BMI development that is leading to new innovations, insights and BMI translation.

Wireless Addressable Cortical Microstimulators Powered by Near-Infrared Harvesting

Ensembles of autonomous, spatially distributed wireless stimulators can offer a versatile approach to patterned microstimulation of biological circuits such as the cortex. Here, we demonstrate the concept of a distributed, untethered, and addressable microstimulator, integrating an ultraminiaturized ASIC with a custom-designed GaAs photovoltaic (PV) microscale energy harvester, dubbed as an "optical neurograin (ONG)". An on-board Manchester-encoded near-infrared downlink delivers incident IR power and provides a synchronous clock across an ensemble of microdevices, triggering stimulus events by remote command. Each ONG has a unique device address and, when an incoming downlink bit sequence matches with this device identification (ID), the implant delivers a charge-balanced current stimulus to the target cortex. Present devices use 7-bit metal fuses fabricated during the CMOS process for their device ID, laser-scribed in post-processing, allowing in principle for a stimulator network of up to 128 nodes. We have characterized small ensembles of ONGs and shown a proof of concept of the system both on benchtop and in vivo rat rodent model.

Design and Application of MEMS-Based Hall Sensor Array for Magnetic Field Mapping

A magnetic field measurement system based on an array of Hall sensors is proposed. The sensors are fabricated using conventional microelectromechanical systems (MEMS) techniques and consist of a P-type silicon substrate, a silicon dioxide isolation layer, a phosphide-doped cross-shaped detection zone, and gold signal leads. When placed within a magnetic field, the interaction between the local magnetic field produced by the working current and the external magnetic field generates a measurable Hall voltage from which the strength of the external magnetic field is then derived. Four Hall sensors are fabricated incorporating cross-shaped detection zones with an identical aspect ratio (2.625) but different sizes (S, M, L, and XL). For a given working current, the sensitivities and response times of the four devices are found to be almost the same. However, the offset voltage increases with the increasing size of the detection zone. A 3 × 3 array of sensors is assembled into a 3D-printed frame and used to determine the magnetic field distributions of a single magnet and a group of three magnets, respectively. The results show that the constructed 2D magnetic field contour maps accurately reproduce both the locations of the individual magnets and the distributions of the magnetic fields around them.