A CMOS humidity sensor for passive RFID sensing applications

Wireless High Temperature Sensing Chipless Tag Based on a Diamond Ring Resonator

A passive wireless sensor is designed for real-time monitoring of a high temperature environment. The sensor is composed of a double diamond split rings resonant structure and an alumina ceramic substrate with a size of 23 × 23 × 0.5 mm³. The alumina ceramic substrate is selected as the temperature sensing material. The principle is that the permittivity of the alumina ceramic changes with the temperature and the resonant frequency of the sensor shifts accordingly. Its permittivity bridges the relation between the temperature and resonant frequency. Therefore, real time temperatures can be measured by monitoring the resonant frequency. The simulation results show that the designed sensor can monitor temperatures in the range 200~1000 °C corresponding to a resonant frequency of 6.79~6.49 GHz with shifting 300 MHz and a sensitivity of 0.375 MHz/°C, and demonstrate the quasi-linear relation between resonant frequency and temperature. The sensor has the advantages of wide temperature range, good sensitivity, low cost and small size, which gives it superiority in high temperature applications.

LTCC Flow Sensor with RFID Interface

The idea of battery-less flow sensors and their implementation in wireless measurement systems is presented in this research article. The authors take advantage of their latest achievements in the Low Temperature Co-fired Ceramic (LTCC) technology, RadioFrequency Identification (RFID) technique, and increasing availability of low power electronics in order to get rid of the need to use electrochemical cells in a power supply unit of the elaborated device. To reach this assumption, special care has to be put on the energy balance in such an autonomous sensor node. First of all, the new concept of an electromagnetic LTCC turbine transducer with a signal conditioner which only draws a current of around 15 µA, is proposed for measuring a flow rate of fluids. Next, the autonomy of the device is showed; measured data are gathered in a microcontroller memory and sent to a control unit via an RFID interface which enables both information exchange and power transfer. The energy harvested from the electromagnetic field is used to conduct a data transmission, but also its excess can be accumulated, so the proposed sensor operates as a semi-passive transponder. The total autonomy of the device is achieved by implementing a second harvester that continually gathers energy from the environmental electromagnetic field of common active radio systems (e.g., Global System for Mobile Communications (GSM), wireless network Wi-Fi).

An Ultra-Low-Power RFID/NFC Frontend IC Using 0.18 μm CMOS Technology for Passive Tag Applications

Battery-less passive sensor tags based on RFID or NFC technology have achieved much popularity in recent times. Passive tags are widely used for various applications like inventory control or in biotelemetry. In this paper, we present a new RFID/NFC frontend IC (integrated circuit) for 13.56 MHz passive tag applications. The design of the frontend IC is compatible with the standard ISO 15693/NFC 5. The paper discusses the analog design part in details with a brief overview of the digital interface and some of the critical measured parameters. A novel approach is adopted for the demodulator design, to demodulate the 10% ASK (amplitude shift keying) signal. The demodulator circuit consists of a comparator designed with a preset offset voltage. The comparator circuit design is discussed in detail. The power consumption of the bandgap reference circuit is used as the load for the envelope detection of the ASK modulated signal. The sub-threshold operation and low-supply-voltage are used extensively in the analog design—to keep the power consumption low. The IC was fabricated using 0.18 μ m CMOS technology in a die area of 1.5 mm × 1.5 mm and an effective area of 0.7 m m 2 . The minimum supply voltage desired is 1.2 V, for which the total power consumption is 107 μ W. The analog part of the design consumes only 36 μ W, which is low in comparison to other contemporary passive tags ICs. Eventually, a passive tag is developed using the frontend IC, a microcontroller, a temperature and a pressure sensor. A smart NFC device is used to readout the sensor data from the tag employing an Android-based application software. The measurement results demonstrate the full passive operational capability. The IC is suitable for low-power and low-cost industrial or biomedical battery-less sensor applications. A figure-of-merit (FOM) is proposed in this paper which is taken as a reference for comparison with other related state-of-the-art researches.

Fabrication and Characterization of Flexible and Miniaturized Humidity Sensors Using Screen-Printed TiO₂ Nanoparticles as Sensitive Layer

This paper describes the fabrication and the characterization of an original example of a miniaturized resistive-type humidity sensor, printed on flexible substrate in a large-scale manner. The fabrication process involves laser ablation for the design of interdigitated electrodes on PET (Poly-Ethylene Terephthalate) substrate and a screen-printing process for the deposition of the sensitive material, which is based on TiO₂ nanoparticles. The laser ablation process was carefully optimized to obtain micro-scale and well-resolved electrodes on PET substrate. A functional paste based on cellulose was prepared in order to allow the precise screen-printing of the TiO₂ nanoparticles as sensing material on the top of the electrodes. The current against voltage (I–V) characteristic of the sensor showed good linearity and potential for low-power operation. The results of a humidity-sensing investigation and mechanical testing showed that the fabricated miniaturized sensors have excellent mechanical stability, sensing characteristics, good repeatability, and relatively fast response/recovery times operating at room temperature.

A MEMS Interface IC With Low-Power and Wide-Range Frequency-to-Voltage Converter for Biomedical Applications

This paper presents an interface circuit for capacitive and inductive MEMS biosensors using an oscillator and a charge pump based frequency-to-voltage converter. Frequency modulation using a differential crossed coupled oscillator is adopted to sense capacitive and inductive changes. The frequency-to-voltage converter is designed with a negative feedback system and external controlling parameters to adjust the sensitivity, dynamic range, and nominal point for the measurement. The sensitivity of the frequency-to-voltage converter is from 13.28 to 35.96 mV/MHz depending on external voltage and charging current. The sensitivity ranges of the capacitive and inductive interface circuit are 17.08 to 54.4 mV/pF and 32.11 to 82.88 mV/mH, respectively. A capacitive MEMS based pH sensor is also connected with the interface circuit to measure the high acidic gastric acid throughout the digestive tract. The sensitivity for pH from 1 to 3 is 191.4 mV/pH with 550 μV(pp) noise. The readout circuit is designed and fabricated using the UMC 0.18 μm CMOS technology. It occupies an area of 0.18 mm (2) and consumes 11.8 mW.

A Novel RFID-Based Sensing Method for Low-Cost Bolt Loosening Monitoring

In coal mines, bolt loosening in the cage guide is affected by the harsh environmental factors and cage hoist vibration, leading to significant threats to work safety. It is crucial, to this effect, to successfully detect the status of multipoint bolts of guide structures. This paper proposes a system to monitor bolt status in harsh environments established based on the RFID technique. A proof-of-concept model was demonstrated consisting of a bolt gearing system, passive UHF RFID tags, a reader, and monitoring software. A tinfoil metal film is fixed on the retaining plate and an RFID tag bonded to a large gear, with the bolt to be detected fixed in the center of a smaller gear. The radio-frequency signal cannot be received by the reader if the tag is completely obscured by the tinfoil, and if the bolt is loose, the tag’s antenna is exposed when the gear revolves. A radio-frequency signal that carries corresponding bolt’s information is transmitted by the RFID tag to the RFID reader due to coil coupling, identifying loose bolt location and reporting them in the software. Confirmatory test results revealed that the system indeed successfully detects bolt loosening and comparative test results (based on a reed switch multipoint bolt loosening monitor system) provided valuable information regarding the strengths and weaknesses of the proposed system.

Design of a Humidity Sensor Tag for Passive Wireless Applications

This paper presents a wireless humidity sensor tag for low-cost and low-power applications. The proposed humidity sensor tag, based on radio frequency identification (RFID) technology, was fabricated in a standard 0.18 μm complementary metal oxide semiconductor (CMOS) process. The top metal layer was deposited to form the interdigitated electrodes, which were then filled with polyimide as the humidity sensing layer. A two-stage rectifier adopts a dynamic bias-voltage generator to boost the effective gate-source voltage of the switches in differential-drive architecture, resulting in a flat power conversion efficiency curve. The capacitive sensor interface, based on phase-locked loop (PLL) theory, employs a simple architecture and can work with 0.5 V supply voltage. The measurement results show that humidity sensor tag achieves excellent linearity, hysteresis and stability performance. The total power-dissipation of the sensor tag is 2.5 μW, resulting in a maximum operating distance of 23 m under 4 W of radiation power of the RFID reader.

Fabrication and Characterization of a CMOS-MEMS Humidity Sensor

This paper reports on the fabrication and characterization of a Complementary Metal Oxide Semiconductor-Microelectromechanical System (CMOS-MEMS) device with embedded microheater operated at relatively elevated temperatures (40 °C to 80 °C) for the purpose of relative humidity measurement. The sensing principle is based on the change in amplitude of the device due to adsorption or desorption of humidity on the active material layer of titanium dioxide (TiO2) nanoparticles deposited on the moving plate, which results in changes in the mass of the device. The sensor has been designed and fabricated through a standard 0.35 µm CMOS process technology and post-CMOS micromachining technique has been successfully implemented to release the MEMS structures. The sensor is operated in the dynamic mode using electrothermal actuation and the output signal measured using a piezoresistive (PZR) sensor connected in a Wheatstone bridge circuit. The output voltage of the humidity sensor increases from 0.585 mV to 30.580 mV as the humidity increases from 35% RH to 95% RH. The output voltage is found to be linear from 0.585 mV to 3.250 mV as the humidity increased from 35% RH to 60% RH, with sensitivity of 0.107 mV/% RH; and again linear from 3.250 mV to 30.580 mV as the humidity level increases from 60% RH to 95% RH, with higher sensitivity of 0.781 mV/% RH. On the other hand, the sensitivity of the humidity sensor increases linearly from 0.102 mV/% RH to 0.501 mV/% RH with increase in the temperature from 40 °C to 80 °C and a maximum hysteresis of 0.87% RH is found at a relative humidity of 80%. The sensitivity is also frequency dependent, increasing from 0.500 mV/% RH at 2 Hz to reach a maximum value of 1.634 mV/% RH at a frequency of 12 Hz, then decreasing to 1.110 mV/% RH at a frequency of 20 Hz. Finally, the CMOS-MEMS humidity sensor showed comparable response, recovery, and repeatability of measurements in three cycles as compared to a standard sensor that directly measures humidity in % RH.

Design of an Embedded CMOS Temperature Sensor for Passive RFID Tag Chips

This paper presents an ultra-low embedded power temperature sensor for passive RFID tags. The temperature sensor converts the temperature variation to a PTAT current, which is then transformed into a temperature-controlled frequency. A phase locked loop (PLL)-based sensor interface is employed to directly convert this temperature-controlled frequency into a corresponding digital output without an external reference clock. The fabricated sensor occupies an area of 0.021 mm² using the TSMC 0.18 1P6M mixed-signal CMOS process. Measurement results of the embedded sensor within the tag system shows a 92 nW power dissipation under 1.0 V supply voltage at room temperature, with a sensing resolution of 0.15 °C/LSB and a sensing accuracy of −0.7/0.6 °C from −30 °C to 70 °C after 1-point calibration at 30 °C.