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Duan B, Hai Z, Guo M, Zheng Y, Chen J, Bai J, Su Z, Liang R, Zhu H, Zhang Q, Xue C. A Large-Range and High-Sensitivity Fiber-Optic Fabry-Perot Pressure Sensor Based on a Membrane-Hole-Base Structure. MICROMACHINES 2024; 15:174. [PMID: 38398904 PMCID: PMC10892257 DOI: 10.3390/mi15020174] [Citation(s) in RCA: 0] [Impact Index Per Article: 0] [Reference Citation Analysis] [Abstract] [Key Words] [Grants] [Track Full Text] [Subscribe] [Scholar Register] [Received: 12/27/2023] [Revised: 01/18/2024] [Accepted: 01/22/2024] [Indexed: 02/25/2024]
Abstract
In the field of in situ measurement of high-temperature pressure, fiber-optic Fabry-Perot pressure sensors have been extensively studied and applied in recent years thanks to their compact size and excellent anti-interference and anti-shock capabilities. However, such sensors have high technological difficulty, limited pressure measurement range, and low sensitivity. This paper proposes a fiber-optic Fabry-Perot pressure sensor based on a membrane-hole-base structure. The sensitive core was fabricated by laser cutting technology and direct bonding technology of three-layer sapphire and develops a supporting large-cavity-length demodulation algorithm for the sensor's Fabry-Perot cavity. The sensor exhibits enhanced sensitivity, a simplified structure, convenient preparation procedures, as well as improved pressure resistance and anti-harsh environment capabilities, and has large-range pressure sensing capability of 0-10 MPa in the temperature range of 20-370 °C. The sensor sensitivity is 918.9 nm/MPa, the temperature coefficient is 0.0695 nm/(MPa∙°C), and the error over the full temperature range is better than 2.312%.
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Affiliation(s)
- Bowen Duan
- School of Aerospace Engineering, Xiamen University, Xiamen 361102, China; (B.D.); (M.G.); (Z.S.); (H.Z.); (Q.Z.)
| | - Zhenyin Hai
- School of Aerospace Engineering, Xiamen University, Xiamen 361102, China; (B.D.); (M.G.); (Z.S.); (H.Z.); (Q.Z.)
| | - Maocheng Guo
- School of Aerospace Engineering, Xiamen University, Xiamen 361102, China; (B.D.); (M.G.); (Z.S.); (H.Z.); (Q.Z.)
| | - Yongqiu Zheng
- Stale Key Laboratory of Dynamic Measurement Technology, North University of China, Taiyuan 030051, China; (Y.Z.); (J.C.); (J.B.); (R.L.)
| | - Jiamin Chen
- Stale Key Laboratory of Dynamic Measurement Technology, North University of China, Taiyuan 030051, China; (Y.Z.); (J.C.); (J.B.); (R.L.)
| | - Jiandong Bai
- Stale Key Laboratory of Dynamic Measurement Technology, North University of China, Taiyuan 030051, China; (Y.Z.); (J.C.); (J.B.); (R.L.)
| | - Zhixuan Su
- School of Aerospace Engineering, Xiamen University, Xiamen 361102, China; (B.D.); (M.G.); (Z.S.); (H.Z.); (Q.Z.)
| | - Rui Liang
- Stale Key Laboratory of Dynamic Measurement Technology, North University of China, Taiyuan 030051, China; (Y.Z.); (J.C.); (J.B.); (R.L.)
| | - Hongtian Zhu
- School of Aerospace Engineering, Xiamen University, Xiamen 361102, China; (B.D.); (M.G.); (Z.S.); (H.Z.); (Q.Z.)
| | - Qi Zhang
- School of Aerospace Engineering, Xiamen University, Xiamen 361102, China; (B.D.); (M.G.); (Z.S.); (H.Z.); (Q.Z.)
| | - Chenyang Xue
- School of Aerospace Engineering, Xiamen University, Xiamen 361102, China; (B.D.); (M.G.); (Z.S.); (H.Z.); (Q.Z.)
- Stale Key Laboratory of Dynamic Measurement Technology, North University of China, Taiyuan 030051, China; (Y.Z.); (J.C.); (J.B.); (R.L.)
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Chowdhury HR, Han M. Fiber Optic Temperature Sensor System Using Air-Filled Fabry-Pérot Cavity with Variable Pressure. SENSORS (BASEL, SWITZERLAND) 2023; 23:3302. [PMID: 36992012 PMCID: PMC10053490 DOI: 10.3390/s23063302] [Citation(s) in RCA: 0] [Impact Index Per Article: 0] [Reference Citation Analysis] [Abstract] [Key Words] [Track Full Text] [Figures] [Subscribe] [Scholar Register] [Received: 02/15/2023] [Revised: 03/08/2023] [Accepted: 03/17/2023] [Indexed: 06/19/2023]
Abstract
We report a high-resolution fiber optic temperature sensor system based on an air-filled Fabry-Pérot (FP) cavity, whose spectral fringes shift due to a precise pressure variation in the cavity. The absolute temperature can be deduced from the spectral shift and the pressure variation. For fabrication, a fused-silica tube is spliced with a single-mode fiber at one end and a side-hole fiber at the other to form the FP cavity. The pressure in the cavity can be changed by passing air through the side-hole fiber, causing the spectral shift. We analyzed the effect of sensor wavelength resolution and pressure fluctuation on the temperature measurement resolution. A computer-controlled pressure system and sensor interrogation system were developed with miniaturized instruments for the system operation. Experimental results show that the sensor had a high wavelength resolution (<0.2 pm) with minimal pressure fluctuation (~0.015 kPa), resulting in high-resolution (±0.32 ℃) temperature measurement. It shows good stability from the thermal cycle testing with the maximum testing temperature reaching 800 ℃.
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Yan Y, Wu Z, Cui J, Chen K, Tang Y, Yang N. Calibration Model Optimization for Strain Metrology of Equal Strength Beams Using Deflection Measurements. SENSORS (BASEL, SWITZERLAND) 2023; 23:3059. [PMID: 36991770 PMCID: PMC10056365 DOI: 10.3390/s23063059] [Citation(s) in RCA: 2] [Impact Index Per Article: 2.0] [Reference Citation Analysis] [Abstract] [Key Words] [Track Full Text] [Figures] [Subscribe] [Scholar Register] [Received: 01/22/2023] [Revised: 03/01/2023] [Accepted: 03/08/2023] [Indexed: 06/19/2023]
Abstract
Strain sensors, especially fiber Bragg grating (FBG) sensors, are of great importance in structural health monitoring, mechanical property analysis, and so on. Their metrological accuracy is typically evaluated by equal strength beams. The traditional strain calibration model using the equal strength beams was built based on an approximation method by small deformation theory. However, its measurement accuracy would be decreased while the beams are under the large deformation condition or under high temperature environments. For this reason, an optimized strain calibration model is developed for equal strength beams based on the deflection method. By combining the structural parameters of a specific equal strength beam and finite element analysis method, a correction coefficient is introduced into the traditional model, and an accurate application-oriented optimization formula is obtained for specific projects. The determination method of optimal deflection measurement position is also presented to further improve the strain calibration accuracy by error analysis of the deflection measurement system. Strain calibration experiments of the equal strength beam were carried out, and the error introduced by the calibration device can be reduced from 10 με to less than 1 με. Experimental results show that the optimized strain calibration model and the optimum deflection measurement position can be employed successfully under large deformation conditions, and the deformation measurement accuracy is improved greatly. This study is helpful to effectively establish metrological traceability for strain sensors and furthermore improve the measurement accuracy of strain sensors in practical engineering scenarious.
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Affiliation(s)
- Yonggang Yan
- School of Mechanical and Power Engineering, Henan Polytechnic University, Jiaozuo 454003, China
| | - Zhengxing Wu
- School of Mechanical and Power Engineering, Henan Polytechnic University, Jiaozuo 454003, China
- National Institute of Metrology, Beijing 100029, China
| | - Jianjun Cui
- National Institute of Metrology, Beijing 100029, China
- Metrology and Testing Institute of Tibet Autonomous Region, Lhasa 850000, China
| | - Kai Chen
- National Institute of Metrology, Beijing 100029, China
| | - Yanhong Tang
- Metrology and Testing Institute of Tibet Autonomous Region, Lhasa 850000, China
| | - Ning Yang
- Shaanxi Institute of Metrology Science, Xi’an 710100, China
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Li Y, Yu C, Lu P. An Optical Fiber Sensor for Axial Strain, Curvature, and Temperature Measurement Based on Single-Core Six-Hole Optical Fiber. SENSORS 2022; 22:s22041666. [PMID: 35214567 PMCID: PMC8877062 DOI: 10.3390/s22041666] [Citation(s) in RCA: 3] [Impact Index Per Article: 1.5] [Reference Citation Analysis] [Abstract] [Key Words] [Track Full Text] [Download PDF] [Figures] [Subscribe] [Scholar Register] [Received: 01/07/2022] [Revised: 02/09/2022] [Accepted: 02/12/2022] [Indexed: 02/04/2023]
Abstract
In this paper, the field distribution and effective refractive index of transmission modes in single-core six-hole optical fiber were researched by modeling and simulation experiments. Based on the simulation results, a new type of sensor for axial strain, curvature, and temperature applications measurement was designed and fabricated. The experimental results showed that the axial strain sensitivities at different dips were −0.97 pm/με and −1.05 pm/με in the range from 0 to 2000 με, and the temperature sensitivities were 35.17 pm/°C and 47.27 pm/°C in the range from 25 to 75 °C. In addition, the proposed sensor also detected the curvature change with sensitivities of 7.36 dB/m−1 and 20.08 dB/m−1 from −2.582 m−1 to −1.826 m−1, respectively. Finally, through theoretical analysis, it can be deduced that this has potential application in the field of simultaneous measurement of strain and temperature.
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Affiliation(s)
- Yujian Li
- The Department of Electronic and Information Engineering, The Hong Kong Polytechnic University, Hong Kong 999077, China;
| | - Changyuan Yu
- The Department of Electronic and Information Engineering, The Hong Kong Polytechnic University, Hong Kong 999077, China;
- Correspondence:
| | - Ping Lu
- National Engineering Laboratory for Next Generation Internet Access System, School of Optical and Electronic Information, Huazhong University of Science and Technology, Wuhan 430074, China;
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Yao Q, Guo X, Xie L, Sun L, Yu F, Zhao X. A Miniature Fabry-Pérot Fiber Interference Sensor Based on Polyvinyl Chloride Membrane for Acoustic Pressure Sensing in Mid-High-Frequency Band. MATERIALS 2021; 14:ma14247605. [PMID: 34947199 PMCID: PMC8706167 DOI: 10.3390/ma14247605] [Citation(s) in RCA: 0] [Impact Index Per Article: 0] [Reference Citation Analysis] [Abstract] [Key Words] [Track Full Text] [Download PDF] [Figures] [Subscribe] [Scholar Register] [Received: 11/13/2021] [Revised: 12/06/2021] [Accepted: 12/08/2021] [Indexed: 11/27/2022]
Abstract
In this paper, a Fabry–Pérot interference fiber sensor was fabricated by using a Polyvinyl chloride membrane (20 μm in thickness) attached at the end of a ferrule with an inner diameter of 1.1 mm. In consideration of the vibration response of the membrane, the feature of the first-order natural frequency of membrane was analyzed by COMSOL Multiphysics. The acoustic sensing performance of the Fabry–Pérot fiber interference sensor was studied in air. The results reveal that the sensor possessed good acoustic pressure sensitivity, in the order of 33.26 mV/Pa. In addition, the noise-limited minimum detectable pressure level was determined to be 58.9 μPa/Hz1/2 and the pressure-induced deflection obtained was 105 nm/Pa at the frequency of 1 kHz. The response of the sensor was approximately consistent with the reference sensor from 1 to 7 kHz. All these results support that the fabricated Fabry–Pérot fiber interference sensor may be applied for ultra-sensitive pressure sensing applications.
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Affiliation(s)
- Qingkai Yao
- Center for Optics Research and Engineering, State Key Laboratory of Crystal Materials, Shandong University, Jinan 250100, China; (Q.Y.); (X.G.); (L.X.); (L.S.)
| | - Xing Guo
- Center for Optics Research and Engineering, State Key Laboratory of Crystal Materials, Shandong University, Jinan 250100, China; (Q.Y.); (X.G.); (L.X.); (L.S.)
| | - Linfang Xie
- Center for Optics Research and Engineering, State Key Laboratory of Crystal Materials, Shandong University, Jinan 250100, China; (Q.Y.); (X.G.); (L.X.); (L.S.)
| | - Li Sun
- Center for Optics Research and Engineering, State Key Laboratory of Crystal Materials, Shandong University, Jinan 250100, China; (Q.Y.); (X.G.); (L.X.); (L.S.)
| | - Fapeng Yu
- Center for Optics Research and Engineering, State Key Laboratory of Crystal Materials, Shandong University, Jinan 250100, China; (Q.Y.); (X.G.); (L.X.); (L.S.)
- Shandong Original Crystal Technology Co., Ltd., Jinan 250100, China
- Correspondence: (F.Y.); (X.Z.)
| | - Xian Zhao
- Center for Optics Research and Engineering, State Key Laboratory of Crystal Materials, Shandong University, Jinan 250100, China; (Q.Y.); (X.G.); (L.X.); (L.S.)
- Correspondence: (F.Y.); (X.Z.)
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