SU-8 Guiding Layer for Love Wave Devices

Love Wave Sensor with High Penetration Depth for Potential Application in Cell Monitoring

Love wave (L-SAW) sensors have been used to probe cell monolayers, but their application to detect changes beyond the focal adhesion points on cell monolayers, as viscosity changes on the cytoskeleton, has not been explored. In this work we present for the first time a Love wave sensor with tuned penetration depth and sensitivity to potentially detect mechanical changes beyond focal adhesion points of cell monolayers. We designed and fabricated a Love wave sensor operating at 30 MHz with sensitivity to detect viscous changes between 0.89 and 3.3 cP. The Love wave sensor was modeled using an acoustic transmission line model, whereas the response of interdigital transducers (IDTs) was modeled with the Campbell’s cross-field circuit model. Our design uses a substrate with a high electromechanical coupling coefficient (LiNbO₃ 36Y-X), and an 8-µm polymeric guiding layer (SU-8). The design aims to overcome the high insertion losses of viscous liquid environments, and the loss of sensitivity due to the low frequency. The fabricated sensor was tested in a fluidic chamber glued directly to the SU-8 guiding layer. Our experiments with liquids of viscosity similar to those expected in cell monolayers showed a measurable sensor response. In addition, experimentation with SaOs-2 cells within a culture medium showed measurable responses. These results can be of interest for the development of novel cell-based biosensors, and novel characterization tools for cell monolayers.

Simulation of a Love wave device with ZnO nanorods for high mass sensitivity

The paper presents 3D finite element simulation and analysis of Love wave resonator with different guiding layer materials and investigation of the coupled resonance effect with ZnO nanorods on the device surface. Analytical estimation of phase velocity and mass sensitivity of Love wave device with SiO₂, ZnO, gold, SU-8, and parylene-C as guiding layer materials is performed for comparative analysis. Simulations are carried out to study the variation in electromechanical coupling coefficient, displacement profile and frequency response of the Love wave resonator. SU-8 offers high mass sensitivity of 1044 m²/kg while gold layer provides maximum K² of 8.6%. In comparison to SiO₂ and ZnO, polymers exhibit sharp rise and fall in K² within a narrow range of normalized layer thickness (0.03-0.1). ZnO nanorods of varying height and surface nanorod density are designed over the Love wave resonator with SiO₂ as the waveguiding layer. In the presence of coupled resonance, the nanorods and substrate vibrate in unison causing an increase in average stress and mass sensitivity but leads to decrease in the electromechanical coupling coefficient of the device. Surface nanorod packing density of 25 μm^-2 offers high mass sensitivity of 1304 m²/kg that is 20 times greater in comparison to the mass sensitivity of a plain Love wave device.

Temperature effects on the propagation characteristics of Love waves along multi-guide layers of Sio2/Su-8 on St-90°X quartz

Theoretical calculations have been performed on the temperature effects on the propagation characteristics of Love waves in layered structures by solving the coupled electromechanical field equations, and the optimal design parameters were extracted for temperature stability improvement. Based on the theoretical analysis, excellent temperature coefficient of frequency (Tcf) of the fabricated Love wave devices with guide layers of SU-8/SiO₂ on ST-90°X quartz substrate is evaluated experimentally as only 2.16 ppm.

ST Quartz Acoustic Wave Sensors with Sectional Guiding Layers

We report the effect of removing a section of guiding layer from the propagation paths of ST-quartz Love wave sensors; this offers the ease of fabrication of a polymer guiding layer whilst retaining the native surface of the quartz which may then be used for the attachment of a sensitizing layer. Data is presented for the rigid and viscous loading, which indicates a small reduction in mass sensitivity compared to a Love wave device. Biosensing capabilities of these discontinuous 'sectional' guiding layer devices are demonstrated using protein adsorption from solution.

ST Quartz Acoustic Wave Sensors with Sectional Guiding Layers

We report the effect of removing a section of guiding layer from the propagation paths of ST-quartz Love wave sensors; this offers the ease of fabrication of a polymer guiding layer whilst retaining the native surface of the quartz which may then be used for the attachment of a sensitizing layer. Data is presented for the rigid and viscous loading, which indicates a small reduction in mass sensitivity compared to a Love wave device. Biosensing capabilities of these discontinuous 'sectional' guiding layer devices are demonstrated using protein adsorption from solution.