Focused particle beam-induced processing

Fragmentation of metal(II) bis(acetylacetonate) complexes induced by slow electrons

Nowadays, organometallic complexes receive particular attention because of their use in the design of pure nanoscale metal structures. In the present work, we present results obtained from a series of studies on the degradation of metal(II) bis(acetylacetonate)s induced by low-energy electrons. These slow particles induce the formation of the acetylacetonate anion, [acac]-, and the parent anion as the most dominant species at incident electron energies near 0 eV. They also fragment the organometallic compounds via various competitive reaction channels that occur at higher energies via dissociative electron attachment. The reported data may contribute to a better understanding of the physical chemistry underlying the electron-molecule interactions, which is crucial for potential applications of these molecular systems in the deposition of nanoscale structures.

Fast and Efficient Simulation of the FEBID Process with Thermal Effects

Focused electron-beam-induced deposition (FEBID) is a highly versatile direct-write approach with particular strengths in the 3D nanofabrication of functional materials. Despite its apparent similarity to other 3D printing approaches, non-local effects related to precursor depletion, electron scattering and sample heating during the 3D growth process complicate the shape-true transfer from a target 3D model to the actual deposit. Here, we describe an efficient and fast numerical approach to simulate the growth process, which allows for a systematic study of the influence of the most important growth parameters on the resulting shape of the 3D structures. The precursor parameter set derived in this work for the precursor Me₃PtCpMe enables a detailed replication of the experimentally fabricated nanostructure, taking beam-induced heating into account. The modular character of the simulation approach allows for additional future performance increases using parallelization or drawing on the use of graphics cards. Ultimately, beam-control pattern generation for 3D FEBID will profit from being routinely combined with this fast simulation approach for optimized shape transfer.

Interaction of Slow Electrons with Thermally Evaporated Manganese(II) Acetylacetonate Complexes

Complexes of metal acetylacetonate are used as general precursors for the synthesis of metal oxide nanomaterials. In the present work, we study the interaction of low-energy (<10 eV) electrons, produced abundantly as secondary electrons during the bombardment of the substrate by the primary particles, with thermally evaporated manganese(II) acetylacetonate complexes. We found that the acetylacetonate anion ([acac]^-) is the major anionic species produced, while the second most abundant is the parent anion [Mn(II)(acac)₂]^-. This observation differs from those reported from electron attachment to Cu(acac)₂, for which [Cu(II)(acac)₂]^- is the predominant anion [Kopyra et al. Phys. Chem. Chem. Phys. 2018, 20, 7746]. The experimental data are supported by theory to provide information on the physical-chemistry processes initiated by slow electrons to the organometallic precursor and to interpret the different behavior of Mn(acac)₂ compared to Cu(acac)₂.