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For: Veneroni A, Omarini F, Masi M. Silicon carbide growth mechanisms from SiH4, SiHCl3 and nC3H8. Cryst Res Technol 2005. [DOI: 10.1002/crat.200410469] [Citation(s) in RCA: 21] [Impact Index Per Article: 1.1] [Reference Citation Analysis] [What about the content of this article? (0)] [Track Full Text] [Subscribe] [Scholar Register] [Indexed: 11/07/2022]
Number Cited by Other Article(s)
1
Shao K, Liu X, Zhang J. Thermal Decomposition Mechanism of Tetraethylsilane by Flash Pyrolysis Vacuum Ultraviolet Photoionization Mass Spectrometry and DFT Calculations: The Competition between β-Hydride Elimination and Bond Homolysis. J Phys Chem A 2023;127:3966-3975. [PMID: 37116096 DOI: 10.1021/acs.jpca.2c09081] [Citation(s) in RCA: 0] [Impact Index Per Article: 0] [Reference Citation Analysis] [What about the content of this article? (0)] [Affiliation(s)] [Abstract] [Track Full Text] [Journal Information] [Subscribe] [Scholar Register] [Indexed: 04/30/2023]
2
Joshi K, Maibam A, Krishnamurty S. Finite temperature behavior of carbon atom-doped silicon clusters: depressed thermal stabilities, coexisting isomers, reversible dynamical pathways and fragmentation channels. NEW J CHEM 2021. [DOI: 10.1039/d0nj04515b] [Citation(s) in RCA: 1] [Impact Index Per Article: 0.3] [Reference Citation Analysis] [What about the content of this article? (0)] [Affiliation(s)] [Abstract] [Track Full Text] [Journal Information] [Subscribe] [Scholar Register] [Indexed: 12/15/2022]
3
Guan K, Gao Y, Zeng Q, Luan X, Zhang Y, Cheng L, Wu J, Lu Z. Numerical modeling of SiC by low-pressure chemical vapor deposition from methyltrichlorosilane. Chin J Chem Eng 2020. [DOI: 10.1016/j.cjche.2020.03.035] [Citation(s) in RCA: 1] [Impact Index Per Article: 0.3] [Reference Citation Analysis] [What about the content of this article? (0)] [Track Full Text] [Journal Information] [Subscribe] [Scholar Register] [Indexed: 10/24/2022]
4
Reilly NJ, Changala PB, Baraban JH, Kokkin DL, Stanton JF, McCarthy MC. Communication: The ground electronic state of Si2C: Rovibrational level structure, quantum monodromy, and astrophysical implications. J Chem Phys 2015;142:231101. [DOI: 10.1063/1.4922651] [Citation(s) in RCA: 17] [Impact Index Per Article: 1.9] [Reference Citation Analysis] [What about the content of this article? (0)] [Affiliation(s)] [Track Full Text] [Journal Information] [Subscribe] [Scholar Register] [Indexed: 12/22/2022]  Open
5
Kalered E, Pedersen H, Janzén E, Ojamäe L. Adsorption and surface diffusion of silicon growth species in silicon carbide chemical vapour deposition processes studied by quantum-chemical computations. Theor Chem Acc 2013. [DOI: 10.1007/s00214-013-1403-3] [Citation(s) in RCA: 9] [Impact Index Per Article: 0.8] [Reference Citation Analysis] [What about the content of this article? (0)] [Track Full Text] [Journal Information] [Subscribe] [Scholar Register] [Indexed: 10/26/2022]
6
Pedersen H, Leone S, Kordina O, Henry A, Nishizawa SI, Koshka Y, Janzén E. Chloride-Based CVD Growth of Silicon Carbide for Electronic Applications. Chem Rev 2011;112:2434-53. [DOI: 10.1021/cr200257z] [Citation(s) in RCA: 81] [Impact Index Per Article: 6.2] [Reference Citation Analysis] [What about the content of this article? (0)] [Affiliation(s)] [Track Full Text] [Journal Information] [Subscribe] [Scholar Register] [Indexed: 11/28/2022]
7
Wang R, Ma R, Dudley M. Reduction of Chemical Reaction Mechanism for Halide-Assisted Silicon Carbide Epitaxial Film Deposition. Ind Eng Chem Res 2009. [DOI: 10.1021/ie8017093] [Citation(s) in RCA: 9] [Impact Index Per Article: 0.6] [Reference Citation Analysis] [What about the content of this article? (0)] [Affiliation(s)] [Track Full Text] [Journal Information] [Subscribe] [Scholar Register] [Indexed: 11/28/2022]
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