Performance of local electrodes in the local electrode atom probe

A Study of Parameters Affecting Atom Probe Tomography Specimen Survivability

Specimen survivability is a primary concern to those who utilize atom probe tomography (APT) for materials analysis. The state-of-the-art in understanding survivability might best be described as common-sense application of basic physics principles to describe failure mechanisms. For example, APT samples are placed under near-failure mechanical-stress conditions, so reduction in the force required to initiate field evaporation must provide for higher survivability-a common sense explanation of survivability. However, the interplay of various analytical conditions (or instrumentation) and how they influence survivability (e.g., decreasing the applied evaporation field improves survivability), and which factors have more impact than others has not been studied. In this paper, we report on the systematic analysis of a material composed of a silicon-dioxide layer surrounded on two sides by silicon. In total, 261 specimens were fabricated and analyzed under a variety of conditions to correlate statistically significant survivability trends with analysis conditions and other specimen characteristics. The primary result suggests that, while applied field/force plays an obvious role in survivability for this material, the applied field alone does not predict survivability trends for silicon/silicon-dioxide interfaces. The rate at which ions are extracted from the specimen (both in terms of ions-per-pulse and pulse-frequency) has similar importance.

Local electrode atom probe analysis of silicon nanowires grown with an aluminum catalyst

Local electrode atom probe (LEAP) tomography of Al-catalyzed silicon nanowires synthesized by the vapor–liquid–solid method is presented. The concentration of Al within the Al-catalyzed nanowire was found to be 2 × 10(20) cm(-3), which is higher than the expected solubility limit for Al in Si at the nanowire growth temperature of 550°C. Reconstructions of the Al contained within the nanowire indicate a denuded region adjacent to the Al catalyst/Si nanowire interface, while Al clusters are distributed throughout the rest of the silicon nanowire.

Design of a laser-assisted tomographic atom probe at Münster University

To benefit from the latest technical improvements in atom probe analysis, a new tomographic atom probe has been built at the University of Münster, Germany. The instrument utilizes a femtosecond laser system with a high repetition rate combined with the ability of using a micrometer-sized extraction electrode and a wide angle configuration. Since field evaporation is triggered by laser pulses instead of high-voltage pulses, the instrument offers the ability to expand the range of analyzed materials to poorly conducting or insulating materials such as oxides, glasses, ceramics, and polymeric materials. The article describes the design of the instrument and presents characterizing measurements on metals, semiconductors, and oxide ceramic.