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Gao C, Wang Y, Fu S, Xia D, Han Y, Ma J, Xu H, Li B, Shen A, Liu Y. High-Performance Solar-Blind Ultraviolet Photodetectors Based on β-Ga 2O 3 Thin Films Grown on p-Si(111) Substrates with Improved Material Quality via an AlN Buffer Layer Introduced by Metal-Organic Chemical Vapor Deposition. ACS Appl Mater Interfaces 2023; 15:38612-38622. [PMID: 37531140 DOI: 10.1021/acsami.3c07876] [Citation(s) in RCA: 0] [Impact Index Per Article: 0] [Reference Citation Analysis] [What about the content of this article? (0)] [Affiliation(s)] [Abstract] [Key Words] [Track Full Text] [Subscribe] [Scholar Register] [Indexed: 08/03/2023]
Abstract
We have achieved significantly improved device performance in solar-blind deep-ultraviolet photodetectors fabricated from β-Ga2O3 thin films grown via metal-organic chemical vapor deposition (MOCVD) on p-Si(111) substrates by improving material quality through the use of an AlN buffer layer. High-structural-quality β-Ga2O3 films with a (-201) preferred orientation are obtained after the introduction of the AlN buffer. Under 3 V bias, the dark current reaches a minimum of 45 fA, and the photo-to-dark current ratio (PDCR) reaches 8.5 × 105 in the photodetector with the metal-semiconductor-metal (MSM) structure. The peak responsivity and detectivity are 38.8 A/W and 2.27 × 1015 cm·Hz1/2/W, respectively, which are 16.5 and 230 times that without the buffer layer. Additionally, benefiting from the introduction of the AlN layer, the photodetection performance of the β-Ga2O3/AlN/Si heterojunction is significantly improved. The PDCR, peak responsivity, and detectivity for the β-Ga2O3/AlN/p-Si photodetector at 5 V bias are 2.7 × 103, 11.84 A/W, and 8.31 × 1013 cm·Hz1/2/W, respectively. The improved structural quality of β-Ga2O3 is mainly attributed to the decreased in-plane lattice mismatch of 2.3% for β-Ga2O3(-201)/AlN(002) compared to that of 20.83% for β-Ga2O3(-201)/Si(111), as well as the elimination of the native amorphous SiOx surface layer on the Si substrate during the initial growth of oxide thin films.
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Affiliation(s)
- Chong Gao
- Key Laboratory of UV Light Emitting Materials and Technology, Ministry of Education, Northeast Normal University, Changchun 130024, China
| | - Yuefei Wang
- Key Laboratory of UV Light Emitting Materials and Technology, Ministry of Education, Northeast Normal University, Changchun 130024, China
| | - Shihao Fu
- Key Laboratory of UV Light Emitting Materials and Technology, Ministry of Education, Northeast Normal University, Changchun 130024, China
| | - Danyang Xia
- Key Laboratory of UV Light Emitting Materials and Technology, Ministry of Education, Northeast Normal University, Changchun 130024, China
| | - Yurui Han
- Key Laboratory of UV Light Emitting Materials and Technology, Ministry of Education, Northeast Normal University, Changchun 130024, China
| | - Jiangang Ma
- Key Laboratory of UV Light Emitting Materials and Technology, Ministry of Education, Northeast Normal University, Changchun 130024, China
| | - Haiyang Xu
- Key Laboratory of UV Light Emitting Materials and Technology, Ministry of Education, Northeast Normal University, Changchun 130024, China
| | - Bingsheng Li
- Key Laboratory of UV Light Emitting Materials and Technology, Ministry of Education, Northeast Normal University, Changchun 130024, China
| | - Aidong Shen
- Department of Electrical Engineering, The City College of New York, New York, New York 10031, United States
| | - Yichun Liu
- Key Laboratory of UV Light Emitting Materials and Technology, Ministry of Education, Northeast Normal University, Changchun 130024, China
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Ye L, Zhou S, Xiong Y, Tang J, Wang X, Li X, Pang D, Li H, Zhang H, Ye L, Cui Y, Li W. Self-powered Pt/a-Ga 2O 3/ITO vertical Schottky junction solar-blind photodetector with excellent detection performance. Opt Express 2023; 31:28200-28211. [PMID: 37710880 DOI: 10.1364/oe.494216] [Citation(s) in RCA: 0] [Impact Index Per Article: 0] [Reference Citation Analysis] [What about the content of this article? (0)] [Abstract] [Track Full Text] [Subscribe] [Scholar Register] [Received: 04/28/2023] [Accepted: 07/27/2023] [Indexed: 09/16/2023]
Abstract
Self-powered solar-blind photodetectors (PDs) are promising for military and civilian applications owing to convenient operation, easy preparation, and weak-light sensitivity. In the present study, the solar-blind deep-ultraviolet (DUV) photodetector based on amorphous Ga2O3 (a-Ga2O3) and with a simple vertical stack structure is proposed by applying the low-cost magnetron sputtering technology. By tuning the thickness of the amorphous Ga2O3 layer, the device exhibits excellent detection performance. Under 3 V reverse bias, the photodetector achieves a high responsivity of 671A/W, a high detectivity of 2.21 × 1015 Jones, and a fast response time of 27/11 ms. More extraordinary, with the help of the built-in electric field at the interface, the device achieves an excellent performance in detection when self-powered, with an ultrahigh responsivity of 3.69 A/W and a fast response time of 2.6/6.6 ms under 254 nm light illumination. These results demonstrate its superior performance to most of the self-powered Schottky junction UV photodetectors reported to date. Finally, the Pt/a-Ga2O3/ITO Schottky junction photodiode detector is verified as a good performer in imaging, indicating its applicability in such fields as artificial intelligence, machine vision, and solar-blind imaging.
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Ouyang T, Zhao X, Xun X, Gao F, Zhao B, Bi S, Li Q, Liao Q, Zhang Y. Boosting Charge Utilization in Self-Powered Photodetector for Real-Time High-Throughput Ultraviolet Communication. Adv Sci (Weinh) 2023; 10:e2301585. [PMID: 37271884 PMCID: PMC10427366 DOI: 10.1002/advs.202301585] [Citation(s) in RCA: 0] [Impact Index Per Article: 0] [Reference Citation Analysis] [What about the content of this article? (0)] [Affiliation(s)] [Abstract] [Key Words] [Grants] [Track Full Text] [Subscribe] [Scholar Register] [Received: 03/14/2023] [Revised: 05/01/2023] [Indexed: 06/06/2023]
Abstract
Ultraviolet (UV) communication is a cutting-edge technology in communication battlefields, and self-powered photodetectors as their optical receivers hold great potential. However, suboptimal charge utilization has largely limited the further performance enhancement of self-powered photodetectors for high-throughput communication application. Herein, a self-powered Ti3 C2 Tx -hybrid poly(3,4 ethylenedioxythiophene):poly-styrene sulfonate (PEDOT:PSS)/ZnO (TPZ) photodetector is designed, which aims to boost charge utilization for desirable applications. The device takes advantage of photothermal effect to intensify pyro-photoelectric effect as well as the increased conductivity of the PEDOT:PSS, which significantly facilitated charge separation, accelerated charge transport, and suppressed interface charge recombination. Consequently, the self-powered TPZ photodetector exhibits superior comprehensive performance with high responsivity of 12.3 mA W-1 and fast response time of 62.2 µs, together with outstanding reversible and stable cyclic operation. Furthermore, the TPZ photodetector has been successfully applied in an integrated UV communication system as the self-powered optical receiver capable of real-time high-throughput information transmission with ASCII code under 9600 baud rate. This work provides the design insight of highly performing self-powered photodetectors to achieve high-efficiency optical communication in the future.
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Affiliation(s)
- Tian Ouyang
- Academy for Advanced Interdisciplinary Science and TechnologyBeijing Advanced Innovation Center for Materials Genome EngineeringUniversity of Science and Technology BeijingBeijing100083P. R. China
- Beijing Key Laboratory for Advanced Energy Materials and TechnologiesSchool of Materials Science and EngineeringUniversity of Science and Technology BeijingBeijing100083P. R. China
| | - Xuan Zhao
- Academy for Advanced Interdisciplinary Science and TechnologyBeijing Advanced Innovation Center for Materials Genome EngineeringUniversity of Science and Technology BeijingBeijing100083P. R. China
- Beijing Key Laboratory for Advanced Energy Materials and TechnologiesSchool of Materials Science and EngineeringUniversity of Science and Technology BeijingBeijing100083P. R. China
| | - Xiaochen Xun
- Academy for Advanced Interdisciplinary Science and TechnologyBeijing Advanced Innovation Center for Materials Genome EngineeringUniversity of Science and Technology BeijingBeijing100083P. R. China
- Beijing Key Laboratory for Advanced Energy Materials and TechnologiesSchool of Materials Science and EngineeringUniversity of Science and Technology BeijingBeijing100083P. R. China
| | - Fangfang Gao
- Academy for Advanced Interdisciplinary Science and TechnologyBeijing Advanced Innovation Center for Materials Genome EngineeringUniversity of Science and Technology BeijingBeijing100083P. R. China
- Beijing Key Laboratory for Advanced Energy Materials and TechnologiesSchool of Materials Science and EngineeringUniversity of Science and Technology BeijingBeijing100083P. R. China
| | - Bin Zhao
- Academy for Advanced Interdisciplinary Science and TechnologyBeijing Advanced Innovation Center for Materials Genome EngineeringUniversity of Science and Technology BeijingBeijing100083P. R. China
- Beijing Key Laboratory for Advanced Energy Materials and TechnologiesSchool of Materials Science and EngineeringUniversity of Science and Technology BeijingBeijing100083P. R. China
| | - Shuxin Bi
- Academy for Advanced Interdisciplinary Science and TechnologyBeijing Advanced Innovation Center for Materials Genome EngineeringUniversity of Science and Technology BeijingBeijing100083P. R. China
- Beijing Key Laboratory for Advanced Energy Materials and TechnologiesSchool of Materials Science and EngineeringUniversity of Science and Technology BeijingBeijing100083P. R. China
| | - Qi Li
- Academy for Advanced Interdisciplinary Science and TechnologyBeijing Advanced Innovation Center for Materials Genome EngineeringUniversity of Science and Technology BeijingBeijing100083P. R. China
- Beijing Key Laboratory for Advanced Energy Materials and TechnologiesSchool of Materials Science and EngineeringUniversity of Science and Technology BeijingBeijing100083P. R. China
| | - Qingliang Liao
- Academy for Advanced Interdisciplinary Science and TechnologyBeijing Advanced Innovation Center for Materials Genome EngineeringUniversity of Science and Technology BeijingBeijing100083P. R. China
- Beijing Key Laboratory for Advanced Energy Materials and TechnologiesSchool of Materials Science and EngineeringUniversity of Science and Technology BeijingBeijing100083P. R. China
| | - Yue Zhang
- Academy for Advanced Interdisciplinary Science and TechnologyBeijing Advanced Innovation Center for Materials Genome EngineeringUniversity of Science and Technology BeijingBeijing100083P. R. China
- Beijing Key Laboratory for Advanced Energy Materials and TechnologiesSchool of Materials Science and EngineeringUniversity of Science and Technology BeijingBeijing100083P. R. China
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Han Y, Wang Y, Xia D, Fu S, Gao C, Ma J, Xu H, Li B, Shen A, Liu Y. Rapid Response Solar Blind Deep UV Photodetector with High Detectivity Based On Graphene:N/βGa 2 O 3 :N/GaN p-i-n Heterojunction Fabricated by a Reversed Substitution Growth Method. Small Methods 2023:e2300041. [PMID: 37096880 DOI: 10.1002/smtd.202300041] [Citation(s) in RCA: 0] [Impact Index Per Article: 0] [Reference Citation Analysis] [What about the content of this article? (0)] [Affiliation(s)] [Abstract] [Key Words] [Grants] [Track Full Text] [Subscribe] [Scholar Register] [Received: 01/09/2023] [Revised: 03/23/2023] [Indexed: 05/03/2023]
Abstract
This work reports a high-detectivity solar-blind deep ultraviolet photodetector with a fast response speed, based on a nitrogen-doped graphene/βGa2 O3 /GaN p-i-n heterojunction. The i layer of βGa2 O3 with a Fermi level lower than the central level of the forbidden band of 0.2 eV is obtained by reversed substitution growth with oxygen replacing nitrogen in the GaN matrix, indicating the majority carrier is hole. X-ray diffractometershows that the transformation of GaN into βGa2 O3 with (-201) preferred orientation at temperature above 900 °C in an oxygen ambient. The heterojunction shows enhanced self-powered solar blind detection ability with a response time of 3.2 µs (rise)/0.02 ms (delay) and a detectivity exceeding 1012 Jones. Under a reverse bias of -5 V, the photoresponsivity is 8.3 A W-1 with a high Ilight /Idark ratio of over 106 and a detectivity of ≈9 × 1014 Jones. The excellent performance of the device is attributed to 1) the continuous conduction band without a potential energy barrier, 2) the larger built-in potential in the heterojunction because of the downward shift of Fermi energy level in β-Ga2 O3 , and 3) an enhanced built-in electric field in the βGa2 O3 due to introducing p-type graphene with a high hole concentration of up to ≈1020 cm-3 .
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Affiliation(s)
- Yurui Han
- Key Laboratory of UV Light Emitting Materials and Technology, Ministry of Education, Northeast Normal University, Changchun, 130024, China
| | - Yuefei Wang
- Key Laboratory of UV Light Emitting Materials and Technology, Ministry of Education, Northeast Normal University, Changchun, 130024, China
| | - Danyang Xia
- Key Laboratory of UV Light Emitting Materials and Technology, Ministry of Education, Northeast Normal University, Changchun, 130024, China
| | - Shihao Fu
- Key Laboratory of UV Light Emitting Materials and Technology, Ministry of Education, Northeast Normal University, Changchun, 130024, China
| | - Chong Gao
- Key Laboratory of UV Light Emitting Materials and Technology, Ministry of Education, Northeast Normal University, Changchun, 130024, China
| | - Jiangang Ma
- Key Laboratory of UV Light Emitting Materials and Technology, Ministry of Education, Northeast Normal University, Changchun, 130024, China
| | - Haiyang Xu
- Key Laboratory of UV Light Emitting Materials and Technology, Ministry of Education, Northeast Normal University, Changchun, 130024, China
| | - Bingsheng Li
- Key Laboratory of UV Light Emitting Materials and Technology, Ministry of Education, Northeast Normal University, Changchun, 130024, China
| | - Aidong Shen
- Department of Electrical Engineering, The City College of New York, New York, NY, 10031, USA
| | - Yichun Liu
- Key Laboratory of UV Light Emitting Materials and Technology, Ministry of Education, Northeast Normal University, Changchun, 130024, China
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