Quasi-periodic concave microlens array for liquid refractive index sensing fabricated by femtosecond laser assisted with chemical etching

Femtosecond laser multibeam parallel processing for variable focal-length optofluidic chips

Optofluidic chips are frequently utilized in applications such as biological observation, chemical detection, dynamic displays, imaging, holography, and sensing. Yet, developing continuously zoomable technology has been challenging in the production of optical devices. Using a spatial light modulator to shape a femtosecond laser to achieve multibeam parallel pulse punching, we propose an easy-to-fabricate, stable, and reliable tuning technique in this Letter. We then propose the addition of a liquid medium with a continuously variable refractive index to achieve controllable zooming without changing the position and morphology of the microlens. By pumping various concentrations of the liquid medium into the optofluidic chip, continuous tunability of the device was experimentally verified.

Laser-Induced Fabrication of Micro-Optics on Bioresorbable Calcium Phosphate Glass for Implantable Devices

In this study, a single-step nanosecond laser-induced generation of micro-optical features is demonstrated on an antibacterial bioresorbable Cu-doped calcium phosphate glass. The inverse Marangoni flow of the laser-generated melt is exploited for the fabrication of microlens arrays and diffraction gratings. The process is realized in a matter of few seconds and, by optimizing the laser parameters, micro-optical features with a smooth surface are obtained showing a good optical quality. The tunability of the microlens' dimensions is achieved by varying the laser power, allowing the obtaining of multi-focal microlenses that are of great interest for three-dimensional (3D) imaging. Furthermore, the microlens' shape can be tuned between hyperboloid and spherical. The fabricated microlenses exhibited good focusing and imaging performance and the variable focal lengths were measured experimentally, showing good agreement with the calculated values. The diffraction gratings obtained by this method showed the typical periodic pattern with a first-order efficiency of about 5.1%. Finally, the dissolution characteristics of the fabricated micropatterns were studied in a phosphate-buffered saline solution (PBS, pH = 7.4) demonstrating the bioresorbability of the micro-optical components. This study offers a new approach for the fabrication of micro-optics on bioresorbable glass, which could enable the manufacturing of new implantable optical sensing components for biomedical applications.

Large-Area and Rapid Fabrication of a Microlens Array on a Flexible Substrate for an Integral Imaging 3D Display

A curved integral imaging three-dimensional (3D) display attracts a lot of interest due to its enhanced 3D sense of immersion and wider viewing angle. In this paper, a microlens array (MLA) based on a flexible poly(ethylene terephthalate) (PET) substrate was achieved by a straightforward, rapid, and low-cost technique. The reactive ion etching (RIE) process treated PET/CYTOP covered with a flexible mask to generate a hydrophilic-hydrophobic patterned surface. The well-designed arrays of confined adhesive droplets with a controlled geometry on a hydrophilic-hydrophobic patterned surface were formed using the blade-coating method. A flexible MLA with a diameter of 820 μm, a size of 5.3 cm × 5.1 cm, and a radius of curvature of 25 cm was fabricated and combined with a curved two-dimensional (2D) monitor to realize a lateral viewing range of 6.4 cm at a viewing distance of 25 cm, which is 4 times larger than with flat integral imaging 3D display system. The flexible MLA has the advantages of a controllable lens profile and large pitch, and it can be manufactured on a large scale. In addition, it provides a large viewing angle for the reconstructed 3D image.

Subwavelength Quasi-Periodic Array for Infrared Antireflection

Infrared antireflection of a zinc sulfide (ZnS) surface is important to improve performance of infrared detector systems. In this paper, double-pulse femtosecond laser micro-machining is proposed to fabricate a subwavelength quasi-periodic array (SQA) on ZnS substrate for infrared antireflection. The SQA consisting of approximately 30 million holes within a 2 × 2 cm² area is uniformly formed in a short time. The double-pulse beam can effectively suppress the surface plasma shielding effect, resulting in obtaining a larger array depth. Further, the SQA depth is tunable by changing pulse energy and pulse delay, and can be used to readily regulate the infrared transmittance spectra as well as hydrophobicity. Additionally, the optical field intensity distributions of the SQA simulated by the rigorous coupled-wave analysis method indicate the modulation effect by the array depth. Finally, the infrared imaging quality captured through an infrared window embedded SQA is evaluated by a self-built infrared detection system.

Optimization mechanism and applications of ultrafast laser machining towards highly designable 3D micro/nano structuring

The optimization mechanism of ultrafast laser machining is introduced. The specific applications of laser processed 3D micro/nano structures in optical, electrochemical and biomedical fields are elaborated, and perspectives are presented.

Ultrashort pulsed laser backside ablation of fused silica

We report on the fabrication of rectangular microchannels with vertical sidewalls in fused silica by laser backside ablation. A 515 nm femtosecond laser is focused by an objective with a NA of 0.5 through the sample on the glass/air interface, allowing processing from the backside into the bulk material. Experimental investigations reveal a logarithmically increasing depth of the channels with an increasing number of scans, while keeping the focal position fixed. A certain number of scans has to be applied to generate rectangular shaped channels while their depth can be controlled by the applied fluence from 2.64 µm to 13.46 µm and a corresponding ablation roughness R_a between 0.20 µm and 0.33 µm. The channel width can be set directly via the number of parallel ablated lines demonstrated in a range from 10 µm to 50 µm. By adjusting the focal position after each scan the channel depth can be extended to 49.77 µm while maintaining a rectangular channel geometry. Finally, concentric rings are ablated to demonstrate the flexibility of the direct writing process.

3D Manufacturing of Glass Microstructures Using Femtosecond Laser

The rapid expansion of femtosecond (fs) laser technology brought previously unavailable capabilities to laser material processing. One of the areas which benefited the most due to these advances was the 3D processing of transparent dielectrics, namely glasses and crystals. This review is dedicated to overviewing the significant advances in the field. First, the underlying physical mechanism of material interaction with ultrashort pulses is discussed, highlighting how it can be exploited for volumetric, high-precision 3D processing. Next, three distinct transparent material modification types are introduced, fundamental differences between them are explained, possible applications are highlighted. It is shown that, due to the flexibility of fs pulse fabrication, an array of structures can be produced, starting with nanophotonic elements like integrated waveguides and photonic crystals, ending with a cm-scale microfluidic system with micro-precision integrated elements. Possible limitations to each processing regime as well as how these could be overcome are discussed. Further directions for the field development are highlighted, taking into account how it could synergize with other fs-laser-based manufacturing techniques.

Stimuli-Responsive Microarray Films for Real-Time Sensing of Surrounding Media, Temperature, and Solution Properties via Diffraction Patterns

Stimuli-responsive polymers have attracted increasing attention over the years due to their ability to alter physiochemical properties upon external stimuli. However, many stimuli-responsive polymer-based sensors require specialized and expensive equipment, which limits their applications. Here an inexpensive and portable sensing platform of novel microarray films made of stimuli-responsive polymers is introduced for the real-time sensing of various environmental changes. When illuminated by laser light, microarray films generate diffraction patterns that can reflect and magnify variations of the periodical microstructure induced by surrounding invisible parameters in real time. Stimuli-responsive polyelectrolyte complexes are structured into micropillar arrays to monitor the pH variation and the presence of calcium ions based on reversible swelling/shrinking behaviors of the polymers. A pH hysteretic effect of the selected polyelectrolyte pair is determined and explained. Furthermore, polycaprolactone microchamber arrays are fabricated and display a thermal-driven structural change, which is exploited for photonic threshold temperature detection. Experimentally observed diffraction patterns are additionally compared with rigorous coupled-wave analysis simulations that prove that induced diffraction pattern alterations are solely caused by geometrical microstructure changes. Microarray-based diffraction patterns are a novel sensing platform with versatile sensing capabilities that will likely pave the way for the use of microarray structures as photonic sensors.

Broadband and wide-angle antireflective subwavelength microstructures on zinc sulfide fabricated by femtosecond laser parallel multi-beam

The subwavelength microstructures (SWMS) on the surface of ZnS for antireflection in an infrared band have been theoretically designed and experimentally fabricated. The finite difference time domain (FDTD) simulation has been utilized to optimize geometry for obtaining high transmittance of SWMS. Then, during simulation for light field intensity distribution, the inner of SWMS emerges location and wavelength dependent light resonant region, which can be explained by Wood-Rayleigh (WR) law. Furthermore, according to refractive index gradient formation and light field coupling effect, the grating period and height are capable of regulating the band selection of antireflection and value of the transmittance, respectively. In addition, a rapid facile approach based on femtosecond laser parallel multi-beam has been proposed to experimentally realize the designed and optimal structures. The depth, period, and embedded nano-gratings of fabricated SWMS are tunable by controlling laser-processing parameters for antireflection in the wavelength of 8 μm-12 μm. Finally, the broadband and wide-angle antireflective SWMS on ZnS as well as robust mechanical strength and hydrophobicity have been achieved, expecting to be of great potential in an optoelectronic device application.