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For: Scott BA, Brodsky MH, Green DC, Plecenik RM, Simonyi EE, Serino R. Deposition and doping of a-Si:H from Si2H6 plasmas. ACTA ACUST UNITED AC 1981. [DOI: 10.1063/1.33027] [Citation(s) in RCA: 1] [Impact Index Per Article: 0.0] [Reference Citation Analysis] [What about the content of this article? (0)] [Track Full Text] [Journal Information] [Subscribe] [Scholar Register] [Indexed: 11/14/2022]
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