Acoustic loss mechanisms in leaky SAW resonators on lithium tantalate

Improvement of YX42° Cut LiTaO3 SAW Filters with Optical Proximity Effect Correction Method

Due to the influence of the optical proximity effect (OPE), it is easy for a pattern of photoresistance to be inconsistent with a design pattern, thus damaging the performance of a SAW resonator. To solve this problem, this paper proposes an optimization method for SAW filters based on optical proximity correction (OPC). This method can avoid the tip discharge problem of SAW filters by suppressing the problem of rounding and shrinking of dummy electrode and electrode tail caused by OPE. This method increases the quality factor (Q) of the SAW resonator and thus decreases the insertion loss of the SAW filter. The filter increases the bandwidth by 1.8 MHz at -1.5 dB after applying the OPC method. Additionally, it improves the stability of the filter under high power conditions.

Trends and Applications of Surface and Bulk Acoustic Wave Devices: A Review

The past few decades have witnessed the ultra-fast development of wireless telecommunication systems, such as mobile communication, global positioning, and data transmission systems. In these applications, radio frequency (RF) acoustic devices, such as bulk acoustic waves (BAW) and surface acoustic waves (SAW) devices, play an important role. As the integration technology of BAW and SAW devices is becoming more mature day by day, their application in the physical and biochemical sensing and actuating fields has also gradually expanded. This has led to a profusion of associated literature, and this article particularly aims to help young professionals and students obtain a comprehensive overview of such acoustic technologies. In this perspective, we report and discuss the key basic principles of SAW and BAW devices and their typical geometries and electrical characterization methodology. Regarding BAW devices, we give particular attention to film bulk acoustic resonators (FBARs), due to their advantages in terms of high frequency operation and integrability. Examples illustrating their application as RF filters, physical sensors and actuators, and biochemical sensors are presented. We then discuss recent promising studies that pave the way for the exploitation of these elastic wave devices for new applications that fit into current challenges, especially in quantum acoustics (single-electron probe/control and coherent coupling between magnons and phonons) or in other fields.

Towards single-chip radiofrequency signal processing via acoustoelectric electron-phonon interactions

The addition of active, nonlinear, and nonreciprocal functionalities to passive piezoelectric acoustic wave technologies could enable all-acoustic and therefore ultra-compact radiofrequency signal processors. Toward this goal, we present a heterogeneously integrated acoustoelectric material platform consisting of a 50 nm indium gallium arsenide epitaxial semiconductor film in direct contact with a 41° YX lithium niobate piezoelectric substrate. We then demonstrate three of the main components of an all-acoustic radiofrequency signal processor: passive delay line filters, amplifiers, and circulators. Heterogeneous integration allows for simultaneous, independent optimization of the piezoelectric-acoustic and electronic properties, leading to the highest performing surface acoustic wave amplifiers ever developed in terms of gain per unit length and DC power dissipation, as well as the first-ever demonstrated acoustoelectric circulator with an isolation of 46 dB with a pulsed DC bias. Finally, we describe how the remaining components of an all-acoustic radiofrequency signal processor are an extension of this work.

Three-dimensional numerical simulation and experimental investigation of boundary-driven streaming in surface acoustic wave microfluidics

Acoustic streaming has been widely used in microfluidics to manipulate various micro-/nano-objects. In this work, acoustic streaming activated by interdigital transducers (IDT) immersed in highly viscous oil is studied numerically and experimentally. In particular, we developed a modeling strategy termed the "slip velocity method" that enables a 3D simulation of surface acoustic wave microfluidics in a large domain (4 × 4 × 2 mm3) and at a high frequency (23.9 MHz). The experimental and numerical results both show that on top of the oil, all the acoustic streamlines converge at two horizontal stagnation points above the two symmetric sides of the IDT. At these two stagnation points, water droplets floating on the oil can be trapped. Based on these characteristics of the acoustic streaming field, we designed a surface acoustic wave microfluidic device with an integrated IDT array fabricated on a 128°YX LiNbO3 substrate to perform programmable, contactless droplet manipulation. By activating IDTs accordingly, the water droplets on the oil can be moved to the corresponding traps. With its excellent capability for manipulating droplets in a highly programmable, controllable manner, our surface acoustic wave microfluidic devices are valuable for on-chip contactless sample handling and chemical reactions.

Measurement and FEM/BEM simulation of transverse effects in SAW resonators on lithium tantalate

It is well known that transverse effects contribute significantly to the loss of SAW resonators on lithium tantalate. In particular, for frequencies above resonance, the surface wave is not guided inside the transducer and radiates into the busbars. In addition, because bulk modes can also be excited, scalar models are not sufficient to accurately predict transverse effects. It is also known that the layout of a SAW resonator (electrode gaps and dummy electrodes) has a strong impact on the transverse effects. In this paper, a periodic FEM/BEM model is presented and is used to simulate the transverse effects for various SAW resonator layouts. Test devices matching those simulated are fabricated and measured; the measured results are compared with the simulated results and show good agreement. By analyzing the dispersion curves produced from the FEM/BEM model in the different regions of the device, several frequency bands corresponding to different transverse behaviors are identified. These results are consistent with the elastic displacements, also computed by the FEM/BEM model. It is further shown that guided conditions in the gap between the transducer and the busbar occur for a frequency range above resonance. This result is in agreement with measurements showing that resonators with smaller gaps exhibit smaller spurious responses in their admittance.

A SAW resonator with two-dimensional reflectors

It is known that a part of the loss of leaky SAW resonators is due to radiation of acoustic energy in the bus-bars. Many researchers are working on so-called phononic crystals. A 2-D grating of very strong reflectors allows these devices to fully reflect, for a given frequency band, any incoming wave. A new device based on the superposition of a regular SAW resonator and a 2-D periodic grating of reflectors is proposed. Several arrangements and geometries of the reflectors were studied and compared experimentally on 48 degrees rotated Y-cut lithium tantalate. In particular, a very narrow aperture (7.5 lambda) resonator was manufactured in the 900 MHz range. Because of its small size, this resonator has a resonance Q of only 575 when using the standard technology, whereas a resonance Q of 1100 was obtained for the new device without degradation of the other characteristics. Because of the narrow aperture, the admittance of the standard resonator showed a very strong parasitic above the resonance frequency, whereas this effect is drastically reduced for the new device. These results demonstrate the feasibility of the new approach.

Analysis and suppression of side radiation in leaky SAW resonators

This paper discusses side acoustic radiation in leaky surface acoustic wave (LSAW) resonators on rotated Y-cut lithium tantalite substrates. The mechanism behind side radiation, which causes a large insertion loss, is analyzed by using the scalar potential theory. This analysis reveals that side radiation occurs when the guiding condition is not satisfied, and the LSAW most strongly radiates at the frequency in which the LSAW velocities in the grating and busbar regions approximately correspond to each other. Based on these results, we propose a "narrow finger structure," which satisfies the guiding condition and drastically suppresses the side radiation. Experiments show that the resonance Q of the proposed structure drastically improves to over 1000 by suppressing the side radiation, which is three times higher than for a conventional structure. Applying the proposed resonators to the ladder-type SAW filters, ultra-low-loss and steep cut-off characteristics are achieved in the range of 800 MHz and 1.9 GHz.

Side radiation of Rayleigh waves from synchronous SAW resonators

Surface acoustic wave (SAW) resonators on lithium tantalate (LiTaO3) and lithium niobate (LiNbO3) are investigated. The amplitude of the acoustic fields in the resonators are measured using a scanning laser interferometer. The amplitude profiles of the surface vibrations reveal the presence of distinct acoustic beams radiated from the transducer region of the SAW resonators and propagating with low attenuation. We suggest that this radiation is generated by the charges accumulating at the tips of the finger electrodes. The periodic system of sources, namely oscillating charges at the fingertips, generates Rayleigh-wave beams in the perpendicular and oblique directions. Green's function theory is used to calculate the coupling strength and slowness of the Rayleigh waves on 42 degrees Y-cut LiTaO3 and Y-cut LiNbO3 substrates as a function of the propagation direction. Furthermore, the propagation angles of the Rayleigh-wave beams as a function of frequency are calculated. The computed angles are compared with the measured ones for both the LiTaO3 and LiNbO3 substrates.

A P-matrix-based model for the analysis of SAW transversely coupled resonator filters, including guided modes and a continuum of radiated waves

When designing transversely coupled resonator filters, unexpected spurii are often observed on the high-frequency side of the transfer function. These spurii cannot be described using only the classical waveguide model. Discrete transverse modes inside the grating can be identified if one assumes that the modes have exponential decay outside the grating: however, a continuum of solutions exist in the case of propagating waves outside the grating. A large part of the source excitation may be coupled to these radiated waves. To include this phenomena in the model, a decomposition on the above mentioned continuum was performed. We describe our P-matrix-based model for transversely coupled structures. This model takes into account all guided modes and the continuum. It allows the use of an arbitrary number of acoustical layers and electrical ports. A comparison of the measured and simulated frequency responses is presented for different filters and different metallization thickness showing an excellent agreement.

Surface acoustic wave impedance element ISM duplexer: modeling and optical analysis

Surface acoustic wave (SAW) impedance element antenna duplexers provide compact, high performance, front-end components apt for industrial fabrication. We describe investigations on the design and modeling of a compact ISM antenna duplexer fabricated on a 36 degrees YX-cut LiTaO3 substrate based on SAW impedance elements. In particular, we have performed 3-D modeling of the inductive and capacitive electromagnetic couplings caused by the package parasitics for the duplexer. The use of a 1:3 IDT structure for the reduction of the passband width is discussed. The frequency response of the duplexer is predicted with the help of circuit simulation; the modeling is refined by optimization of the model parameters to improve the fit between the measured and simulated responses. We also report scanning optical imaging of the acoustic field within the resonator structures with the help of laser interferometry; this provides insight into the loss mechanisms beyond that attainable in mere electric measurements.